Film sheet joining apparatus and film sheet joining method

文档序号:1551981 发布日期:2020-01-21 浏览:11次 中文

阅读说明:本技术 薄膜的片接设备及片接方法 (Film sheet joining apparatus and film sheet joining method ) 是由 林彥钦 王铭 于 2019-07-12 设计创作,主要内容包括:本发明公开了薄膜的片接设备及片接方法,片接设备包括机台、薄膜传送装置、保护膜传送装置和贴合装置,薄膜传送装置活动安装在机台,其设置有若干个相互独立的第一负压区,薄膜放置在第一负压区表面;保护膜传送装置安装在机台;贴合装置安装在机台,保护膜初始端穿过并伸出贴合装置,第一负压区在靠近贴合装置的位置和远离贴合装置的位置之间移动;第一负压区移动至靠近贴合装置的位置时保护膜传送装置带动保护膜向前移动进而带动薄膜贴合在保护膜上。当其中一第一负压区产生破口或者损坏时,不影响其他的第一负压区的负压吸附,使得薄膜仍然被负压吸附住,进一步保证了薄膜与保护膜贴合的平整性,提高了薄膜贴合的合格率。(The invention discloses film splicing equipment and a film splicing method, wherein the film splicing equipment comprises a machine table, a film conveying device, a protective film conveying device and a laminating device, wherein the film conveying device is movably arranged on the machine table and is provided with a plurality of mutually independent first negative pressure areas, and a film is placed on the surface of the first negative pressure areas; the protective film conveying device is arranged on the machine table; the laminating device is arranged on the machine table, the initial end of the protective film penetrates through and extends out of the laminating device, and the first negative pressure area moves between a position close to the laminating device and a position far away from the laminating device; when the first negative pressure area moves to a position close to the laminating device, the protective film conveying device drives the protective film to move forwards so as to drive the film to be laminated on the protective film. When one of the first negative pressure regions is broken or damaged, negative pressure adsorption of other first negative pressure regions is not influenced, so that the film is still adsorbed by negative pressure, the smoothness of the film and the protective film is further ensured, and the qualified rate of film lamination is improved.)

1. Film piece connects equipment, its characterized in that: it includes:

a machine platform;

the film conveying device is movably arranged on the machine table and is provided with a plurality of mutually independent first negative pressure areas, and the film is placed on the surface of the first negative pressure areas;

the protective film conveying device is used for conveying the protective film and is arranged on the machine table;

the laminating device is arranged on the machine table, the initial end of the protective film penetrates through and extends out of the laminating device, and the first negative pressure area moves between a position close to the laminating device and a position far away from the laminating device;

when the first negative pressure area moves to a position close to the laminating device, the protective film conveying device drives the protective film to move forwards so as to drive the film to be laminated on the protective film.

2. The apparatus for splicing films according to claim 1, wherein: the first negative pressure regions are provided in at least two and arranged side by side at intervals along the film advancing direction.

3. The apparatus for splicing films according to claim 1, wherein: the film conveying device is provided with a yielding piece capable of yielding the first negative pressure area, the yielding piece moves between the position where the surface of the yielding piece is flush with the surface of the first negative pressure area and the position where the yielding piece is staggered with the first negative pressure area, and the film is placed above the first negative pressure area and the yielding piece.

4. The film splicing apparatus according to claim 3, wherein: the let position piece is provided with a second negative pressure area.

5. The apparatus for splicing films according to claim 1, wherein: the film splicing device further comprises a signal sensor and a controller, the signal sensor is installed at the rear end of the machine table and close to the first negative pressure area at the rearmost end, the signal sensor is in signal connection with the controller, and the controller is connected with the film conveying device and the protective film conveying device.

6. The apparatus for splicing films according to claim 5, wherein: when the tail end of the film passes through the rear end of the rearmost first negative pressure area, the signal sensor generates a signal and sends the signal to the controller, the controller gradually closes the negative pressure of the first negative pressure areas from back to front according to the signal, and when the negative pressure of the first negative pressure area closest to the laminating device is closed, the controller controls the protective film conveying device to convey the protective film forwards for a set distance D.

7. The apparatus for splicing films according to claim 6, wherein: the controller turns off the first negative pressure region negative pressure when the film end moves by the width of the first negative pressure region.

8. The apparatus for splicing films according to claim 1, wherein: the protective film conveying device comprises an unreeling shaft and an unreeling motor in transmission connection with the unreeling shaft, and the protective film is hung on the unreeling shaft.

9. The apparatus for splicing films according to claim 8, wherein: the protective film conveying device further comprises a tension adjusting mechanism, the tension adjusting mechanism comprises a balance wheel and a swinging shaft, the balance wheel is connected with the swinging shaft through a swinging rod, and the initial end of the protective film sequentially bypasses the swinging wheel and the swinging shaft and then penetrates through the laminating device.

10. The apparatus for splicing films according to claim 1, wherein: laminating device includes an at least a set of laminating roller, and every group laminating roller includes the laminating roller of two arrangements from top to bottom, and the protection film is located between two laminating rollers.

11. The film sheet-joining method is characterized in that: the method comprises the following steps:

step 10, initially, the first negative pressure region is positioned far away from the laminating device, the film is placed on the surface of the first negative pressure region, the protective film is placed on the protective film conveying device, and the initial end of the protective film penetrates through and extends out of the laminating device;

step 20, starting the film conveying device, moving the first negative pressure region to a position close to the laminating device, driving the protective film to move forwards by the action of the protective film conveying device so as to drive the film to be laminated on the protective film, and sequentially passing the tail end of the film through a plurality of first negative pressure regions;

step 30, after the film is attached to the protective film, the first negative pressure region is recovered to a position far away from the attaching device;

and step 40, placing a new film on the surface of the first negative pressure area again, and repeating the steps 20 and 30.

12. A method of film splicing according to claim 11, wherein: in step 20, when the tail end of the film passes through the rear end of the first negative pressure area at the rearmost end, the signal sensor generates a signal and sends the signal to the controller, the controller gradually closes the negative pressures of the plurality of first negative pressure areas from back to front according to the signal, when the negative pressure of the first negative pressure area closest to the laminating device is closed, the controller controls the protective film conveying device to convey the protective film forward for a set distance D, and then the protective film conveying device stops waiting.

13. A method of film splicing according to claim 11, wherein: in step 10, initially, the surface of the abdicating piece is flush with the surface of the first negative pressure area, and the front end surface and the rear end surface of the film are respectively placed on the surface of the abdicating piece and the surface of the first negative pressure area; in step 20, when the film conveying device is started, the abdicating member moves downward to a position staggered with the first negative pressure region to abdicate the movement of the first negative pressure region, and the first negative pressure region moves to a position close to the laminating device, so that the front end of the film can be closer to or contact with the laminating device.

Technical Field

The invention relates to a piece-connecting device and a piece-connecting method of a film, in particular to a piece-connecting device and a piece-connecting method of a film with a nano silver circuit.

Background

When the existing film, especially the film with a nano-silver circuit, is attached to a protective film, the film needs to be vacuum-absorbed first to avoid the phenomenon of uneven tilting or bending when the film is attached to the protective film. However, in the existing equipment, the same negative pressure cavity is used for vacuum adsorption of the film, and when any one part of the negative pressure cavity is broken, the vacuum adsorption of the whole film is failed, and the condition still causes the unevenness or bending of the film and the protective film.

Moreover, the films of different models need to be attached by different models of equipment, and cannot be attached on the same equipment, so that huge equipment cost and manpower and material resources are wasted.

Disclosure of Invention

The invention provides a piece-connecting device and a piece-connecting method of a film, which overcome the defects of the background technology. One of the technical schemes adopted by the invention for solving the technical problems is as follows:

a film splicing apparatus comprising:

a machine platform;

the film conveying device is movably arranged on the machine table and is provided with a plurality of mutually independent first negative pressure areas, and the film is placed on the surface of the first negative pressure areas;

the protective film conveying device is used for conveying the protective film and is arranged on the machine table;

the laminating device is arranged on the machine table, the initial end of the protective film penetrates through and extends out of the laminating device, and the first negative pressure area moves between a position close to the laminating device and a position far away from the laminating device;

when the first negative pressure area moves to a position close to the laminating device, the protective film conveying device drives the protective film to move forwards so as to drive the film to be laminated on the protective film.

In a preferred embodiment: the first negative pressure regions are provided in at least two and arranged side by side at intervals along the film advancing direction.

In a preferred embodiment: the film conveying device is provided with a yielding piece capable of yielding the first negative pressure area, the yielding piece moves between the position where the surface of the yielding piece is flush with the surface of the first negative pressure area and the position where the yielding piece is staggered with the first negative pressure area, and the film is placed above the first negative pressure area and the yielding piece.

In a preferred embodiment: the let position piece is provided with a second negative pressure area.

In a preferred embodiment: the film splicing device further comprises a signal sensor and a controller, the signal sensor is installed at the rear end of the machine table and close to the first negative pressure area at the rearmost end, the signal sensor is in signal connection with the controller, and the controller is connected with the film conveying device and the protective film conveying device.

In a preferred embodiment: when the tail end of the film passes through the rear end of the rearmost first negative pressure region, the signal sensor generates a signal and sends the signal to the controller, the controller gradually closes the plurality of first negative pressure regions from back to front according to the signal, and when the negative pressure of the first negative pressure region closest to the laminating device is closed, the controller controls the protective film conveying device to convey the protective film forward for a set distance D.

In a preferred embodiment: the controller turns off the first negative pressure region negative pressure when the film end moves by the width of the first negative pressure region.

In a preferred embodiment: the protective film conveying device comprises an unreeling shaft and an unreeling motor in transmission connection with the unreeling shaft, and the protective film is hung on the unreeling shaft.

In a preferred embodiment: the protective film conveying device further comprises a tension adjusting mechanism, the tension adjusting mechanism comprises a balance wheel and a swinging shaft, the balance wheel is connected with the swinging shaft through a swinging rod, and the initial end of the protective film sequentially bypasses the swinging wheel and the swinging shaft and then penetrates through the laminating device.

In a preferred embodiment: laminating device includes an at least a set of laminating roller, and every group laminating roller includes the laminating roller of two arrangements from top to bottom, and the protection film is located between two laminating rollers.

The second technical scheme adopted by the invention for solving the technical problems is as follows:

a method of film splicing comprising:

step 10, initially, the first negative pressure region is positioned far away from the laminating device, the film is placed on the surface of the first negative pressure region, the protective film is placed on the protective film conveying device, and the initial end of the protective film penetrates through and extends out of the laminating device;

step 20, starting the film conveying device, moving the first negative pressure region to a position close to the laminating device, driving the protective film to move forwards by the action of the protective film conveying device so as to drive the film to be laminated on the protective film, and sequentially passing the tail end of the film through a plurality of first negative pressure regions;

step 30, after the film is attached to the protective film, the first negative pressure region is recovered to a position far away from the attaching device;

and step 40, placing a new film on the surface of the first negative pressure area again, and repeating the steps 20 and 30.

In a preferred embodiment: in step 20, when the tail end of the film passes through the rear end of the first negative pressure area at the rearmost end, the signal sensor generates a signal and sends the signal to the controller, the controller gradually closes the plurality of first negative pressure areas from back to front according to the signal, when the negative pressure of the first negative pressure area closest to the laminating device is closed, the controller controls the protective film conveying device to convey the protective film forward for a set distance D, and then the protective film conveying device stops waiting.

In a preferred embodiment: in step 10, initially, the surface of the abdicating piece is flush with the surface of the first negative pressure area, and the front end surface and the rear end surface of the film are respectively placed on the surface of the abdicating piece and the surface of the first negative pressure area; in step 20, when the film conveying device is started, the abdicating member moves downward to a position staggered with the first negative pressure region to abdicate the movement of the first negative pressure region, and the first negative pressure region moves to a position close to the laminating device, so that the front end of the film can be closer to or contact with the laminating device.

Compared with the background technology, the technical scheme has the following advantages:

1. the film conveying device is provided with a plurality of mutually independent first negative pressure areas, the film is placed on the surface of the first negative pressure areas, each first negative pressure area carries out negative pressure adsorption on the film, and when the tail end of the film leaves the front end of the foremost first negative pressure area, the film is completely or almost completely attached to the protective film, so that the smoothness of the attachment of the film and the protective film can be ensured; when one of the first negative pressure regions is broken or damaged, negative pressure adsorption of other first negative pressure regions is not influenced, so that the film is still adsorbed by negative pressure, the smoothness of the film and the protective film is further ensured, and the qualified rate of film lamination is improved.

2. The film conveying device is provided with a yielding piece, the yielding piece moves between the position where the surface of the yielding piece is flush with the surface of the first negative pressure area and the staggered position of the surface of the yielding piece and the first negative pressure area, the film is placed above the first negative pressure area and the yielding piece, the yielding piece can move downwards when the film conveying device is started, the front end of the film is in a suspended state at the moment, the front end of the film can be closer to or even contact with the laminating device when the first negative pressure area is moved forwards to the position close to the laminating device, and the film can be rapidly contacted with the film to be firmly laminated on the bottom surface of the protective film.

3. Let the position piece be equipped with the second negative pressure district for the film is placed and can be adsorbed by the negative pressure when letting the position piece surface, further guarantees the roughness of film and protection film laminating.

4. When the film end through the first negative pressure zone rear end of rearmost end time signal sensor produces the signal and sends to the controller, the controller closes a plurality of first negative pressure zone forward from the back according to this signal gradually, when the first negative pressure zone negative pressure that is closest to laminating device is closed, controller control protection film conveyer carries the protection film forward one section and sets for distance D, this kind of settlement, can place the film of arbitrary model or size in first negative pressure zone, and guarantee that the interval between two adjacent films is D, the commonality is strong, be applicable to the film of all models or size, the cost and the manpower and materials cost of purchasing equipment have greatly been reduced.

5. The controller closes the first negative pressure regions when the film end moves by the width of one first negative pressure region, and since the width of each first negative pressure region is fixed, the moving speed of the first negative pressure region can be set to be constant, and the time for which the film end moves by one first negative pressure region is fixed, the controller can determine when to close the negative pressure of the first negative pressure region according to the time for which the film end moves.

6. The protective film conveying device further comprises a tension adjusting mechanism, the initial end of the protective film sequentially bypasses the swinging wheel and the swinging shaft and then passes through the laminating device, and due to the fact that the tension adjusting mechanism has dead weight, the swinging wheel swings downwards under the action of self gravity to tighten the protective film when the protective film is loosened due to insufficient tension, and the tension is increased; otherwise, the two are all equal.

Drawings

The invention is further illustrated by the following figures and examples.

FIG. 1 is a schematic side view of a wafer bonding apparatus according to a preferred embodiment.

Fig. 2 is a schematic top view of a die attach apparatus according to a preferred embodiment.

FIG. 3 is a schematic structural diagram of the first negative pressure region and the second negative pressure region according to a preferred embodiment.

Detailed Description

Referring to fig. 1 to 3, a preferred embodiment of a film bonding apparatus includes a machine table 1, a film conveying device 10, a protective film conveying device 20, and a bonding device 30.

The film conveying device 10 is used for conveying the film, is movably arranged on the machine table 1, and is provided with a plurality of mutually independent first negative pressure areas, and the film is placed on the surface of the first negative pressure areas.

In this embodiment, the film conveying device 10 further includes a film conveying driving mechanism (not shown in the figure) installed on the machine table 1, and the film conveying driving mechanism may be a transmission structure of a driving motor and a conveying belt, or a transmission structure of a driving cylinder, and the specific structure is not limited thereto. The film transmission driving mechanism is in transmission connection with the first negative pressure area so that the first negative pressure area can move back and forth relative to the machine table.

The first negative pressure regions are provided in at least two and arranged side by side at intervals along the film advancing direction. In this embodiment, three first negative pressure regions are provided, and the three first negative pressure regions have the same length and the same or different widths. For the convenience of distinguishing, the three first negative pressure regions are named as a first negative pressure region I1, a first negative pressure region II 2 and a first negative pressure region III 3 from back to front respectively.

As shown in fig. 2, a plurality of first negative pressure adsorption holes 100 are formed in the surface of each first negative pressure region, each first negative pressure region is further provided with a first negative pressure adsorption cavity and a first negative pressure gauge, the first negative pressure adsorption cavity of each first negative pressure region is communicated with the first negative pressure adsorption holes, and the first negative pressure gauge is used for monitoring the negative pressure condition of each first negative pressure adsorption cavity. As shown in fig. 1, the three first negative pressure meters are all disposed on the side of the machine.

In this embodiment, the film conveying device 10 is provided with a yielding member 11 capable of yielding the first negative pressure region, the yielding member 11 moves between a position where the surface of the yielding member is flush with the surface of the first negative pressure region and a position where the yielding member is staggered with the first negative pressure region, and the film is placed above the first negative pressure region and the yielding member 11.

In this embodiment, the abdicating part 11 is a strip shape, and the right end part thereof is provided with the first limiting block 12 in an upward protruding manner, and when the film is placed on the surface of the abdicating part 11, the front end part of the film just leans against the first limiting block 12. As shown in fig. 1, a second limiting block 13 is further disposed on a side of the machine table 1, and when the film is placed on the surface of the abdicating member 11, a side end of the film just abuts against the second limiting block 13. The film can be well positioned by matching the first stopper 12 with the second stopper 13.

In this embodiment, the position-giving member 11 is provided with the second negative pressure region 4. The second negative pressure region 4 includes a second negative pressure suction hole, a second negative pressure chamber 41, and a second negative pressure gauge, and the structure of the second negative pressure region 4 is the same as that of the first negative pressure region. The film can be adsorbed by negative pressure when being placed on the surface of the yielding piece, and the flatness of the film and the protective film can be further ensured.

The protective film conveying device 20 is used for conveying a protective film and is installed on the machine table 1.

In this embodiment, the protective film conveying device 20 includes an unwinding shaft 21 and an unwinding motor (not shown) in transmission connection with the unwinding shaft 21, and the protective film is hung on the unwinding shaft 21.

In this embodiment, the protective film conveying device 20 further includes a tension adjusting mechanism, the tension adjusting mechanism includes a balance 22 and a swing axle 23, the balance 22 is connected to the swing axle 23 through a swing rod 24, and an initial end of the protective film sequentially passes around the swing wheel 22 and the swing axle 23 and then passes through the attaching device 30. Since the tension adjusting mechanism has self weight, when the tension of the protective film is insufficient to cause the protective film to be loose, the swinging wheel 22 swings downwards under the action of the gravity of the swinging wheel to tighten the protective film and increase the tension of the protective film; otherwise, the two are all equal. Weights can be added or subtracted to the oscillating lever 24 to increase or decrease the self-weight of the tension adjusting mechanism as needed.

In this embodiment, the protective film conveying device 20 further includes a winding shaft 25, the winding shaft 25 is installed on the machine platform 1 and is close to the unwinding shaft 21, and the winding shaft 25 is used for collecting waste materials of the protective film, such as the bottom film. That is, this protection film raw materials includes that protection film and basement membrane are two-layer, and the protection film raw materials is hung and is put on unreeling axle 21, and the basement membrane is collected through rolling axle 25.

The laminating device 30 is arranged on the machine table 1, the initial end of the protective film penetrates through and extends out of the laminating device 30, and the first negative pressure area moves between a position close to the laminating device 30 and a position far away from the laminating device 30; when the first negative pressure region moves to a position close to the laminating device 30, the protective film conveying device 20 drives the protective film to move forward so as to drive the film to be laminated on the protective film.

In this embodiment, the attaching device 30 includes at least one set of attaching roller, and each set of attaching roller includes two attaching rollers 31 arranged up and down, and the protective film is located between the two attaching rollers 31. As shown in fig. 1, the bonding device is provided with two sets of bonding rollers which are arranged at intervals in the front and back direction, and the positions and the intervals of the two rollers 31 of the two sets of bonding rollers are the same.

In this embodiment, the splicing device further includes a signal sensor 5 and a controller, the signal sensor 5 is installed at the rear end of the first negative pressure region near the rearmost end of the machine table 1, the signal sensor 5 is in signal connection with the controller, and the controller is connected with the film conveying device 10 and the protective film conveying device 20.

In this embodiment, when the end of the film passes through the rear end of the first negative pressure region 1, the signal sensor 5 generates a signal and sends the signal to the controller, the controller gradually closes the first negative pressure region 1, the first negative pressure region two 2, and the first negative pressure region three 3 from back to front according to the signal, and when the first negative pressure region three 3 is closed, the controller controls the protective film conveying device 20 to convey the protective film forward for a set distance D.

In this embodiment, the controller turns off the first negative pressure region negative pressure when the film end moves by the width of the first negative pressure region. Since the width of each first negative pressure region is fixed, the moving speed of the first negative pressure region can be set to be constant, and the time for the film end to move one first negative pressure region is fixed, the controller can determine when to turn off the negative pressure of the first negative pressure region according to the moving time of the film end. Taking the first negative pressure region 1 as an example, the time for the film end to move from the rear end of the first negative pressure region 1 to the front end of the first negative pressure region 1 is set to be T1, and the controller closes the negative pressure of the first negative pressure region 1 after receiving the signal sent by the signal sensor and after the time of T1, and so on, the controller gradually closes the negative pressures of the first negative pressure region two 2 and the first negative pressure region three 3.

A method of film splicing comprising:

step 10, initially, the first negative pressure region is located at a position far away from the laminating device 30, a thin film is placed on the surface of the first negative pressure region, a protective film is placed on the protective film conveying device 20, and the initial end of the protective film penetrates through and extends out of the laminating device;

in this embodiment, in step 10, initially, the surface of the abdicating member 11 is flush with the surface of the first negative pressure region, and the front and rear end faces of the film are respectively placed on the surface of the abdicating member 11 and the surface of the first negative pressure region;

step 20, starting the film conveying device 10, moving the first negative pressure region to a position close to the laminating device 30, enabling the protective film conveying device 20 to act to drive the protective film to move forwards so as to drive the film to be laminated on the protective film, and enabling the tail end of the film to sequentially pass through a plurality of first negative pressure regions;

in this embodiment, in step 20, when the film conveying device 20 is started, the abdicating member 11 moves downward to a position staggered from the first negative pressure region to abdicate the movement of the first negative pressure region, and the first negative pressure region moves to a position close to the attaching device 30, so that the front end of the film can be closer to or contact with the attaching device 30;

in this embodiment, in step 20, when the end of the film passes through the rear end of the first negative pressure region 1, the signal sensor 5 generates a signal and sends the signal to the controller, the controller gradually closes the negative pressures of the plurality of first negative pressure regions from back to front according to the signal, when the negative pressures of the first negative pressure regions three 3 are closed, the controller controls the protective film conveying device 20 to convey the protective film forward for a set distance D, and then the protective film conveying device 20 is suspended for waiting;

specifically, the method comprises the following steps:

since the width of each first negative pressure region is fixed, the moving speed of the first negative pressure region can be set to be constant, and the time for the film end to move one first negative pressure region is fixed, the controller can determine when to turn off the negative pressure of the first negative pressure region according to the moving time of the film end. Taking the first negative pressure region as an example, the time for the film end to move from the rear end of the first negative pressure region 1 to the front end of the first negative pressure region 1 is set to be T1, and the controller closes the negative pressure of the first negative pressure region 1 after receiving the signal sent by the signal sensor 5 and the time of T1 elapses, and so on, the controller gradually closes the negative pressures of the first negative pressure region two 2 and the first negative pressure region three 3.

Step 30, after the film is attached to the protective film, the first negative pressure region is recovered to a position far away from the attaching device;

and step 40, placing a new film on the surface of the first negative pressure area again, and repeating the steps 20 and 30.

The above description is only a preferred embodiment of the present invention, and therefore should not be taken as limiting the scope of the invention, which is defined by the appended claims and their equivalents.

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