阅读说明：本技术 一种快速移动定位发射度测量仪的装置 (Device for quickly moving, positioning and measuring instrument for emittance ) 是由 刘振威 符振辉 管峰平 温立鹏 于 2019-10-16 设计创作，主要内容包括：本发明公开了一种快速移动定位发射度测量仪的装置,属于束流诊断探测技术领域其技术方案要点是包括支撑架、位于支撑架下方的大密封法兰、安装在支撑架上的信号室以及和信号室连接的测量仪头部；支撑架上还设有气动装置以及微调装置,气动装置和微调装置连接,微调装置和信号室连接在一起。本发明解决了测量仪头部需要较长时间运动到束流区域,强度较大的束流容易对其他设备造成影响的问题,达到了能够使测量仪头部快速运动到束流区域,及时的进行测量,避免束流对其他设备造成影响。(The invention discloses a device for quickly moving and positioning an emittance measuring instrument, which belongs to the technical field of beam diagnosis and detection and has the technical scheme that the device comprises a support frame, a large sealing flange positioned below the support frame, a signal chamber arranged on the support frame and a measuring instrument head connected with the signal chamber; the support frame is also provided with a pneumatic device and a fine adjustment device, the pneumatic device is connected with the fine adjustment device, and the fine adjustment device is connected with the signal chamber. The invention solves the problems that the head of the measuring instrument needs to move to the beam area for a long time and the beam with higher intensity easily affects other equipment, achieves the purposes of enabling the head of the measuring instrument to move to the beam area quickly, measuring in time and avoiding the beam affecting other equipment.)

1. The utility model provides a device of emittance measuring apparatu is fixed a position to quick travel which characterized in that: comprises a support frame (1), a large sealing flange (5) positioned below the support frame (1), a signal chamber (2) arranged on the support frame (1) and a measuring instrument head (6) connected with the signal chamber (2);

the support frame (1) is also provided with a pneumatic device (3) and a fine adjustment device (4), the pneumatic device (3) is connected with the fine adjustment device (4), and the fine adjustment device (4) is connected with the signal chamber (2).

2. The apparatus of claim 1, wherein the apparatus comprises: pneumatic device (3) include mounting bracket (31) and cylinder (32) of fixed connection on mounting bracket (31) be connected with support frame (1), and cylinder (32) are vertical sets up downwards, and the piston rod lower extreme fixedly connected with movable plate (33) of cylinder (32), and micromatic setting (4) are installed on movable plate (33).

3. A device for fast moving positioning of emittance meters according to claim 2, characterized by: the fine adjustment device (4) comprises a stepping motor (41) arranged on the moving plate (33) and a connecting plate (42) bolted with the signal, and the connecting plate (42) is arranged in a U shape;

step motor (41) vertical setting downwards, and step motor (41) run through axle formula step motor (41) for the lead screw, and the lower extreme and connecting plate (42) of lead screw rotate to be connected, make the lead screw can rotate along the axis of self.

4. The apparatus of claim 1, wherein the apparatus comprises: the supporting frame (1) is composed of two symmetrically arranged supporting plates (11), the supporting plates (11) are vertically arranged, and a sliding rail (7) is bolted to the side wall of one supporting plate (11) of the two supporting plates (11) and is positioned on the side wall, close to each other, of the two supporting plates (11);

a sliding block (28) is bolted to the side wall of the signal chamber (2) close to the sliding rail (7), and a sliding groove (29) matched with the sliding rail (7) is formed in the sliding block (28).

5. A device for fast moving positioning of emittance meters according to claim 2, characterized by: vertical grooves (12) are formed in the side walls, close to each other, of the two supporting plates (11), and convex blocks (331) capable of sliding up and down in the grooves (12) are fixedly connected to the moving plate (33);

limiting plates (34) are fixedly connected to two side walls of one end, far away from the air cylinder (32), of the moving plate (33), and buffering type limiting devices capable of being matched with the limiting plates (34) are arranged on the side walls of the two supporting plates (11).

6. The apparatus of claim 5, wherein the apparatus comprises: the buffer type limiter comprises a fixed block (36) fixedly connected to the side wall of the supporting plate (11) and a supporting block (35) positioned above the fixed block (36), and the supporting block (35) can move up and down;

the lower surface fixedly connected with guide post (37) of supporting shoe (35), guide post (37) pass fixed block (36) and can be along self axis direction up-and-down motion, still overlap on guide post (37) and be equipped with spring (38), the upper and lower both ends of spring (38) respectively with fixed block (36) and supporting shoe (35) fixed connection.

7. The apparatus of claim 4, wherein the apparatus comprises: a straight sliding potentiometer (8) is arranged on a supporting plate (11) which is not bolted with the sliding rail (7) in the two supporting plates (11), a sliding seat (81) is bolted on the supporting plate (11), and an electric brush (82) is arranged on a vacuum chamber.

8. The apparatus of claim 4, wherein the apparatus comprises: and the upper end and the lower end of the sliding rail (7) are respectively provided with a limiting block (71) which is bolted on the supporting plate (11).

9. The apparatus of claim 1, wherein the apparatus comprises: the lower surface of the signal chamber (2) is fixedly connected with a cylinder (21), the lower end of the cylinder (21) passes through a large sealing flange (5) and is fixedly connected with the head (6) of the measuring instrument, a water-cooling pipe (23) and a signal transmission line (22) are arranged in the cylinder (21), and the water-cooling pipe (23) and the signal transmission line (22) extend along the cylinder (21) and are connected with the head (6) of the measuring instrument;

and a water-cooling joint (25) and a signal joint (24) are fixedly arranged on two vertical side walls of the signal chamber (2) and the supporting plate (11) respectively, the water-cooling joint (25) is connected with a water-cooling pipe (23), and the signal joint (24) is connected with a signal transmission line (22).

10. A device for rapidly moving a position emittance meter according to claim 9, wherein: the cylinder (21) is sleeved with a corrugated pipe (26), the corrugated pipe (26) is bolted with the signal chamber (2) through a small sealing flange (27), and the lower end of the corrugated pipe (26) is fixedly connected with a large sealing flange (5).

Technical Field

The invention relates to the technical field of beam diagnosis and detection, in particular to a device for quickly moving and positioning an emittance measuring instrument.

Background

The emittance of the ion source is an important index for adjusting and optimizing a beam streamline, so the measurement of the emittance is very important. During the process of measuring the emittance of the ion source injection line of the accelerator, the head of the measuring instrument needs to be inserted from the vertical direction of the injection line, moves to the initial measuring position at the front end of the beam area, and is controlled by the stepping motor to carry out gradual scanning.

Referring to the chinese patent with the publication number CN104090292B, the present invention discloses a position sensitive detector for diagnosis of high energy heavy ion beam, which is mainly characterized in that a beam probe is arranged in a gas-tight cavity, and the beam probe is fixedly connected to a fixed bracket of a port sealing flange component; the gas sealing cavity comprises an entrance window arranged on one side of the gas box and an exit window arranged on the other side of the gas box; the beam probe consists of two groups of beam measuring units, and each group of beam measuring unit consists of a high-voltage electrode, an insulating base plate and a signal electrode which are sequentially arranged; the port sealing flange component consists of a fixed bracket and a port sealing flange; the multi-path signal leading-out adapter plate comprises a multi-path signal leading-out plate and a multi-path signal adapter plate; one end of the multi-path signal adapter plate is provided with a sealing port, a contact end of the multi-path signal adapter plate is inserted into the sealing port of the sealing flange and is connected with the signal output end of the multi-path signal leading-out plate, the other end of the multi-path signal adapter plate is provided with a multi-core connector which is a signal output port of the beam position sensitive detector, and the signal input end of the multi-path signal leading-out plate is.

The defects of the technology are as follows: in the technology and most of the existing emittance measuring instruments, the head of the measuring instrument is controlled to move to the beam by the stepping motor to carry out measurement, the movement distance is too long, so the required time is long, the ion source beam is in an unobstructed state in an injection line in the time of controlling the head of the measuring instrument to move by the stepping motor, and the beam intensity is high, so that unnecessary influence is generated on other equipment.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide a device for quickly moving and positioning an emittance measuring instrument, which realizes the quick movement of the head of the measuring instrument through the matching of a pneumatic device and a fine adjustment device, so that the head of the measuring instrument can move to a beam area more quickly, and the influence on other equipment caused by the fact that the beam is in an unobstructed state for a long time is reduced or compensated.

In order to achieve the purpose, the invention provides the following technical scheme: a device for quickly moving and positioning an emittance measuring instrument comprises a support frame, a large sealing flange positioned below the support frame, a signal chamber arranged on the support frame and a measuring instrument head connected with the signal chamber;

the support frame is also provided with a pneumatic device and a fine adjustment device, the pneumatic device is connected with the fine adjustment device, and the fine adjustment device is connected with the signal chamber.

By adopting the technical scheme, the pneumatic device firstly drives the signal chamber and the measuring instrument head to move rapidly, then the fine adjustment device controls the signal chamber and the measuring instrument head to move slightly, and the fine adjustment device can drive the measuring instrument head to move to the beam area rapidly to monitor because the pneumatic device drives the measuring instrument head to move rapidly for more distance.

The invention is further configured to: the pneumatic device comprises a mounting frame connected with the support frame and a cylinder fixedly connected to the mounting frame, the cylinder is vertically arranged downwards, a movable plate is fixedly connected to the lower end of a piston rod of the cylinder, and the fine adjustment device is installed on the movable plate.

Through adopting above-mentioned technical scheme, the cylinder can be faster more steady drive signal room and measuring apparatu head, and the vibrations that produce are removed in-process in the reduction that can be as far as possible avoid causing the damage to the inside part of emittance measuring apparatu.

The invention is further configured to: the fine adjustment device comprises a stepping motor arranged on the moving plate and a connecting plate bolted with the signal, and the connecting plate is arranged in a U shape;

the stepping motor is vertically arranged downwards, the stepping motor is a lead screw penetrating shaft type stepping motor, the lower end of the lead screw is rotatably connected with the connecting plate, and the lead screw can rotate along the axis of the lead screw.

By adopting the technical scheme, the stepping motor is a lead screw through shaft type stepping motor, can better control the movement speed of the head of the measuring instrument, has a self-locking function, can enable the head of the measuring instrument to stay in a beam area, and further enables the emittance measuring instrument to better measure the emittance of the ion source; because pneumatic means has compensatied most displacement, greatly reduced the stroke of step motor lead screw, avoided the tenesmus that leads to because measuring apparatu head weight to reduce the influence of measuring apparatu head weight to the precision, and step motor need not remove too big distance, so can be through selecting the lead screw that the screw thread interval is littleer more, make the step-by-step subdivision of emittance measurement, thereby further improved measuring accuracy degree.

The invention is further configured to: the support frame is composed of two symmetrically arranged support plates, the support plates are vertically arranged, a slide rail is bolted to the side wall of one support plate of the two support plates, and the slide rail is positioned on the side wall of the two support plates close to each other;

the side wall of the signal chamber close to the slide rail is bolted with a slide block, and the slide block is provided with a slide groove matched with the slide rail.

Through adopting above-mentioned technical scheme, the cooperation of slider and slide rail can carry on spacingly to the motion of signal room, makes the signal room only can the up-and-down motion, prevents to rock about the signal room, and then avoids causing the influence to the work of emittance measuring apparatu.

The invention is further configured to: vertical grooves are formed in the side walls, close to each other, of the two supporting plates, and the moving plate is fixedly connected with a convex block capable of sliding up and down in the grooves;

the movable plate is far away from fixedly connected with limiting plate on the one end both sides wall of cylinder, all is equipped with on the lateral wall of two backup pads can with limiting plate complex buffering formula stopper.

Through adopting above-mentioned technical scheme, the cooperation of recess and lug, can restrict the motion of removal, and step motor installs on the movable plate simultaneously, step motor's lead screw and signal room are connected, can further carry on spacingly to the motion of signal room, avoid the signal room to take place to rock, buffering formula stopper can restrict pneumatic means's movement distance, and can reduce the impact force that the cylinder promoted signal room motion and produce, and then the vibrations that produce when reducing the movable plate and buffering stopper contact, the event can reduce and lead to the fact the influence to signal room and measuring apparatu head.

The invention is further configured to: the buffer type limiter comprises a fixed block fixedly connected to the side wall of the supporting plate and a supporting block positioned above the fixed block, and the supporting block can move up and down;

the lower fixed surface of supporting shoe is connected with the guide post, and the guide post passes the fixed block and can be along self axis direction up-and-down motion, still overlaps on the guide post to be equipped with the spring, the upper and lower both ends of spring respectively with fixed block and supporting shoe fixed connection.

Through adopting above-mentioned technical scheme, when movable plate and supporting shoe contact, the impact force that the movable plate removed and caused can lead to the supporting shoe to move down, thereby compress the spring, the spring compression holds power and can apply bounce to the supporting shoe, thereby make the movable plate receive bounce, can play absorbing effect, the reaction force that receives when reducing movable plate and supporting shoe contact, and then can reduce the shaking force that the emittance measuring apparatu received, avoid the emittance measuring apparatu to receive the damage, the guide post can avoid the supporting shoe to take place horizontal removal, avoid causing the distortion to the spring, increase the life of buffering formula stopper.

The invention is further configured to: and a straight sliding potentiometer is arranged on the support plate without the bolted sliding rail in the two support plates, the sliding seat is bolted on the support plates, and the electric brush is arranged on the vacuum chamber.

By adopting the technical scheme, the reciprocating motion of the signal chamber can be monitored, the accuracy of the motion position of the signal chamber can be monitored, and the accuracy of the beam current measurement can be improved.

The invention is further configured to: and the upper end and the lower end of the sliding rail are respectively provided with a limiting block which is bolted on the supporting plate.

Through adopting above-mentioned technical scheme, the stopper can carry on spacingly to the maximum movement distance of signal room, avoids signal room to move the dislocation to can prevent that signal room and slide rail from breaking away from, make the slide rail can prescribe a limit to the signal room always.

The invention is further configured to: the lower surface of the signal chamber is fixedly connected with a cylinder, the lower end of the cylinder is fixedly connected with the head of the measuring instrument through a large sealing flange, a water-cooled tube and a signal transmission line are arranged in the cylinder, and the water-cooled tube and the signal transmission line extend along the cylinder and are connected with the head of the measuring instrument;

and a water-cooling joint and a signal joint are fixedly arranged on two vertical side walls of the signal chamber and the supporting plate respectively, the water-cooling joint is connected with a water-cooling pipe, and the signal joint is connected with a signal transmission line.

Through adopting above-mentioned technical scheme, the water-cooling pipe can let in cold water to can cool down the measuring apparatu head, can avoid the measuring apparatu head to generate heat when receiving the line, improve emittance measuring apparatu's life.

The invention is further configured to: the cylinder is sleeved with a corrugated pipe, the corrugated pipe is bolted with the signal chamber through a small sealing flange, and the lower end of the corrugated pipe is fixedly connected with a large sealing flange.

By adopting the technical scheme, the beam is in the vacuum chamber, the large sealing flange is connected with the vacuum chamber, the signal chamber is also in a vacuum environment, the corrugated pipe and the signal chamber are bolted by the small sealing flange, and the lower end of the corrugated pipe is connected with the large sealing flange, so that the signal chamber and the vacuum chamber can be connected together, the movement of the cylinder cannot be influenced, and air cannot enter.

In summary, compared with the prior art, the invention has the following beneficial effects:

1. the pneumatic device drives the signal chamber and the head of the measuring instrument to perform initial and most displacement, and the fine adjustment device controls the signal chamber and the head of the measuring instrument to perform slow and small displacement, so that the cooperation of the pneumatic device and the fine adjustment device can enable the head of the measuring instrument to accurately, stably and rapidly enter a beam area to measure the beam angle, and the influence of the beam on other equipment without being blocked for a long time is avoided;

2. the pneumatic device is mainly driven by an air cylinder, the fine adjustment device is mainly driven by a lead screw through shaft type stepping motor, the air cylinder can be driven quickly and stably, the lead screw through shaft type stepping motor does not need an overlong lead screw, the head of the measuring instrument can be better driven to move, and the influence on the measurement accuracy caused by the weight of the head of the measuring instrument is avoided;

3. the side wall of the supporting plate is provided with a buffer type limiter which mainly comprises a fixed block, a spring and a supporting block, when a moving plate in the pneumatic device is contacted with the supporting block, the spring is stressed and compressed, the reaction force borne by the moving plate can be reduced, and therefore the vibration force borne by the emittance measuring instrument can be reduced, and the service life of the emittance measuring instrument can be prolonged;

4. because the work of initial movement is avoided to step motor, can change the lead screw that selects the screw thread interval to be littleer for the marching of emittance measurement is more subdivided, thereby has further improved the measuring accuracy degree.

Drawings

FIG. 1 is a block diagram of an embodiment;

FIG. 2 is a partial cross-sectional view of a highlighted water-cooled tube and signal transmission line of an embodiment;

FIG. 3 is a block diagram showing the mating relationship of the recess and the projection in practice;

FIG. 4 is a view showing a structure of a highlighted supporting block in the embodiment;

FIG. 5 is a diagram illustrating a structure of a bump stopper in an embodiment;

FIG. 6 is an enlarged view of portion A of FIG. 5;

FIG. 7 is a schematic diagram of an embodiment of a direct slide potentiometer;

FIG. 8 is a schematic view showing a state in which the signal chamber is driven by the pneumatic device in the embodiment;

fig. 9 is an enlarged view of a portion B in fig. 8.

In the figure: 1. a support frame; 11. a support plate; 12. a groove; 13. a strip hole; 14. positioning a groove; 2. a signal chamber; 21. a cylinder; 22. a signal transmission line; 23. a water-cooled tube; 24. a signal connector; 25. a water-cooled joint; 26. a bellows; 27. a small sealing flange; 28. a slider; 29. a chute; 3. a pneumatic device; 31. a mounting frame; 32. a cylinder; 33. moving the plate; 331. a bump; 34. a limiting plate; 35. a support block; 36. a fixed block; 37. a guide post; 38. a spring; 4. a fine adjustment device; 41. a stepping motor; 42. a connecting plate; 5. a large sealing flange; 6. a gauge head; 7. a slide rail; 71. a limiting block; 8. a direct slide potentiometer; 81. a slide base; 82. an electric brush; 9. a maximum limit protector; 91. a fixing plate; 92. a base; 93. a spring plate; 94. plastic rollers; 95. and (5) fixing the bolt.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.