阅读说明：本技术 一种晶圆蚀刻槽 (kinds of wafer etching tank ) 是由 李�杰 葛林海 赵建龙 王利强 丁高生 于 2019-09-19 设计创作，主要内容包括：本发明公开了一种晶圆蚀刻槽,所述蚀刻槽包括：基座；基板,所述基板固定连接在所述基座上,所述基板形成水平的支撑面；外槽,所述外槽为上部开口的长方壳体,所述外槽的底部安置在所述支撑面上,所述外槽侧壁的下方开孔且与第一管路的一端连通；内槽,所述内槽为上部开口的长方壳体,所述内槽设置在所述外槽内,所述第一管路的另一端设置在所述内槽上方,所述内槽的底部开孔并与第二管路的一端连通,所述第二管路的另一端与外部连通；以及晶舟,所述晶舟内承载有多个晶圆,所述晶舟设置在所述内槽内；其中,含有氢氟酸的药液自所述内槽开口加入,将所述晶舟上的晶圆全部浸没。本发明设备能够耐受高温下晶圆蚀刻中氢氟酸的强腐蚀性。(The invention discloses an wafer etching bath which comprises a base, a substrate, an outer bath, an inner bath and a crystal boat, wherein the substrate is fixedly connected to the base and forms a horizontal supporting surface, the outer bath is a rectangular shell with an opening at the upper part, the bottom of the outer bath is arranged on the supporting surface, an opening is formed in the lower part of the side wall of the outer bath and is communicated with a end of a pipeline, the inner bath is a rectangular shell with an opening at the upper part and is arranged in the outer bath, the other end of the pipeline is arranged above the inner bath, an opening is formed in the bottom of the inner bath and is communicated with a end of a second pipeline, the other end of the second pipeline is communicated with the outside, the crystal boat is loaded with a plurality of wafers, and is arranged in the inner bath, liquid medicine containing hydrofluoric acid is added from the opening of the inner bath, and all the wafers on the crystal boat are immersed.)

1, wafer etching bath, characterized in that the etching bath comprises:

a base (1);

the base plate (2), the base plate (2) is fixedly connected to the base (1), and the base plate (2) forms a horizontal supporting surface;

the outer tank (3) is a rectangular shell with an upper opening, the bottom of the outer tank (3) is arranged on the supporting surface, and a hole is formed below the side wall of the outer tank (3) and is communicated with the end of the pipeline;

an inner tank (4), the inner tank (4) being a rectangular case having an upper portion opened, the inner tank (4) being disposed in the outer tank (3), the other end of the th pipe line being disposed above the inner tank (4), the bottom of the inner tank (4) being perforated and communicating with the end of the second pipe line, the other end of the second pipe line communicating with the outside, and

the wafer boat (5) is internally provided with a plurality of wafers, and the wafer boat (5) is arranged in the inner groove (4);

the liquid medicine containing hydrofluoric acid is added from the opening of the inner tank (4), the wafers on the wafer boat (5) are completely immersed, the overflowed liquid medicine enters the outer tank (3), then enters the inner tank (4) through an th pipeline, and finally the liquid medicine is discharged from the second pipeline.

2. The wafer etching bath according to claim 1, characterized in that a holder (9) is provided in the outer bath (3) for holding the inner bath (4).

3. The wafer etching bath according to claim 1, characterized in that the right-angled structure (6) of the outer bath (3) is rounded by means of stick welding.

4. The wafer etching bath according to claim 1, characterized in that the etching bath comprises supports (7), the supports (7) are respectively arranged at two sides of the outer bath (3), grooves are arranged on the supports (7), two sides of the wafer boat (5) are accommodated in the grooves, and the wafer boat (5) can slide in the grooves to adjust the position of the wafer boat (5).

5. The wafer etching bath according to claim 1, characterized in that the inner bath (4) and the outer bath (3) are made of PTFE material by injection molding.

6. The wafer etch bath according to claim 1, characterized in that the boat (5) is made of PEEK material.

7. The wafer etching bath according to claim 1, characterized in that the substrate (2) is made of PVC material.

8. The wafer etching bath according to claim 1, characterized in that an insulating thermal pad (8) is interposed between the substrate (2) and the outer bath (3), the insulating thermal pad (8) being made of PTFE material.

Technical Field

The invention belongs to the technical field of wafer manufacturing, and particularly relates to an wafer etching tank.

Background

Wafer (Wafer) refers to a silicon chip used for manufacturing a silicon semiconductor integrated circuit, and is called Wafer because the shape is circular, the Wafer is a carrier used for producing the integrated circuit, the Wafer in the meaning of refers to a monocrystalline silicon Wafer, the monocrystalline silicon Wafer is drawn and refined by common silicon sand, and is made into a monocrystalline silicon rod through the measures of dissolving, purifying and distilling , and the monocrystalline silicon rod becomes the Wafer after being polished and sliced.

The wafer processing generally includes the steps of cleaning the wafer, performing oxidation and chemical vapor deposition on the surface of the wafer, then performing coating, exposure, development, etching, ion implantation, metal sputtering, and the like, and finally completing the processing and fabrication of several layers of circuits and devices on the wafer.

Hydrofluoric acid is needed in a wafer etching process, and the strong corrosiveness of the hydrofluoric acid makes the requirement on the corrosion resistance of etching equipment high.

Disclosure of Invention

Aiming at the problems in the prior art, the invention provides an wafer etching tank, and partial embodiments of the invention can realize wafer etching processing.

In order to achieve the purpose, the invention adopts the following technical scheme:

A wafer etching bath comprises a base, a substrate fixed on the base and forming a horizontal supporting surface, an outer bath as a rectangular shell with an open upper part, the bottom of the outer bath being arranged on the supporting surface, the lower part of the side wall of the outer bath having an opening and being communicated with end of pipeline, an inner bath as a rectangular shell with an open upper part and being arranged in the outer bath, the other end of the pipeline being arranged above the inner bath, the bottom of the inner bath having an opening and being communicated with end of the second pipeline, the other end of the second pipeline being communicated with the outside, and

the wafer boat is arranged in the inner groove, a liquid medicine containing hydrofluoric acid is added from the opening of the inner groove, the wafers on the wafer boat are completely immersed, the overflowing liquid medicine enters the outer groove and then enters the inner groove through an th pipeline, and finally the liquid medicine is discharged from the second pipeline.

Preferably, a fixing frame is arranged in the outer groove and used for fixing the inner groove.

Preferably, the right-angle structure of the outer groove is subjected to fillet treatment through welding rod welding.

Preferably, the etching bath comprises supports, the supports are respectively arranged on two sides of the outer bath, grooves are arranged on the supports, two sides of the wafer boat are accommodated in the grooves, and the wafer boat can slide in the grooves to adjust the position of the wafer boat.

Preferably, the inner groove and the outer groove are both made of PTFE materials through injection molding.

Preferably, the wafer boat is made of PEEK material.

Preferably, the substrate is made of a PVC material.

Preferably, a heat insulation pad is clamped between the base plate and the outer groove, and the heat insulation pad is made of a PTFE material.

Compared with the prior art, the invention has the beneficial effects that: the PTFE material can resist corrosion of hydrofluoric acid while realizing injection molding and manufacturing, and can bear the high temperature of 80-100 degrees, make send out the inside groove and the outer tank overflow circulation system can realize the etching reaction to the wafer, the wafer boat that adopts PEEK material preparation is resisting the corrosion of hydrofluoric acid simultaneously because its hardness is enough, can reach the precision of stably bearing the weight of the wafer by machine tooling, the right angle structure department of the medial surface of the both sides of whole inside groove and outer tank all adopts the fillet to handle, make liquid medicine concentration evenly distributed, whole liquid medicine flows smoothly, the outer tank is in order to support for the base when the high temperature, prevent the heat altered shape, reduce the shape influence of temperature transmission to the base through the heat insulating mattress simultaneously.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention.

Fig. 2 is a schematic top view of an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only partial embodiments of the present invention , rather than all embodiments.

In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.

As shown in FIGS. 1-2, the present embodiment provides kinds of wafer etching baths, the etching baths include a susceptor 1, a substrate 2, the substrate 2 being fixedly attached to the susceptor 1, the substrate 2 forming a horizontal support surface, an outer bath 3, the outer bath 3 being a rectangular case with an open upper portion, the bottom of the outer bath 3 being placed on the support surface, the lower portion of the side wall of the outer bath 3 being opened and communicating with the end of the th pipe line, an inner bath 4, the inner bath 4 being a rectangular case with an open upper portion, the inner bath 4 being disposed in the outer bath 3, the other end of the th pipe line being disposed above the inner bath 4, the bottom of the inner bath 4 being opened and communicating with the end of the second pipe line, the other end of the second pipe line being communicated with the outside

The wafer boat 5 is provided with a plurality of wafers, the wafer boat 5 is arranged in the inner groove 4, wherein, the liquid medicine containing hydrofluoric acid is added from the opening of the inner groove 4, the wafers on the wafer boat 5 are completely immersed, the overflowed liquid medicine enters the outer groove 3 and then enters the inner groove 4 through the pipeline, and finally the liquid medicine is discharged from the second pipeline.

The outer tank 3 is provided with a fixing frame 9 for fixing the inner tank 4.

And the right-angle structure 6 of the outer groove 3 is welded by welding rods to be rounded.

The etching tank comprises a support 7, the support 7 is respectively arranged on two sides of the outer tank 3, a groove is arranged on the support 7, two sides of the wafer boat 5 are accommodated in the groove, and the wafer boat 5 can slide in the groove to adjust the position of the wafer boat 5.

The inner groove 4 and the outer groove 3 are made of PTFE materials through injection molding.

The wafer boat 5 is made of PEEK material.

The base plate 2 is made of PVC material.

A heat insulating pad 8 is interposed between the base plate 2 and the outer tub 3, and the heat insulating pad 8 is made of a PTFE material.

Although the present invention has been described in detail with respect to the above embodiments, it will be understood by those skilled in the art that modifications or improvements based on the disclosure of the present invention may be made without departing from the spirit and scope of the invention, and these modifications and improvements are within the spirit and scope of the invention.