阅读说明：本技术 超疏水电容式湿度传感器及其制造方法 (Super-hydrophobic capacitive humidity sensor and manufacturing method thereof ) 是由 米查·因特赞特 弗雷德里克·威廉姆·毛里茨·万海尔蒙特 内博伊沙·内纳多维茨 迪米特里·索科尔 于 2018-05-04 设计创作，主要内容包括：一种传感器半导体器件(10)包括换能器(11),该换能器(11)包括具有至少两个电极(13)的电容器(12)。换能器(11)还包括布置在电容器(12)的至少两个电极(13)之间的聚合物(14),和换能器(11)的顶表面(15)。聚合物(14)能够吸收水,并且顶表面(15)被布置为使得其暴露于传感器半导体器件(10)的环境。此外,顶表面(15)的至少一部分是超疏水的,并且传感器半导体器件(10)能够测量传感器半导体器件(10)的环境湿度。(A sensor semiconductor device (10) comprises a transducer (11), which transducer (11) comprises a capacitor (12) with at least two electrodes (13). The transducer (11) further comprises a polymer (14) arranged between the at least two electrodes (13) of the capacitor (12), and a top surface (15) of the transducer (11). The polymer (14) is capable of absorbing water, and the top surface (15) is arranged such that it is exposed to the environment of the sensor semiconductor device (10). Furthermore, at least a portion of the top surface (15) is superhydrophobic, and the sensor semiconductor device (10) is capable of measuring an ambient humidity of the sensor semiconductor device (10).)