Sensor device and method for producing a sensor device
阅读说明:本技术 传感器装置和制造传感器装置的方法 (Sensor device and method for producing a sensor device ) 是由 G·宾德 于 2019-05-27 设计创作,主要内容包括:本发明涉及一种传感器装置和一种制造传感器装置的方法。传感器装置包括在第一方向上磁化的磁体。此外,传感器装置包括布置在磁体上的差分磁场传感器,其具有第一传感器元件和第二传感器元件,其中这些传感器元件在垂直于第一方向的第二方向上间隔开。第一传感器元件和第二传感器元件被设置为,在垂直于第一方向并垂直于第二方向的第三方向上检测磁场分量。(The invention relates to a sensor device and a method for producing a sensor device. The sensor device includes a magnet magnetized in a first direction. Furthermore, the sensor device comprises a differential magnetic field sensor arranged on the magnet, having a first sensor element and a second sensor element, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction. The first sensor element and the second sensor element are arranged to detect the magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.)
1. A sensor device, comprising:
a magnet magnetized in a first direction; and
a differential magnetic field sensor disposed on the magnet, the differential magnetic field sensor having a first sensor element and a second sensor element, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction,
wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
2. The sensor device of claim 1, wherein the sensor device is arranged relative to a ferromagnetic wheel, wherein the ferromagnetic wheel is configured to rotate about a rotational axis extending in the third direction.
3. A sensor arrangement according to claim 1 or 2, wherein the first and second sensor elements are arranged to detect the speed of the ferromagnetic wheel.
4. The sensor device of any one of the preceding claims, wherein the sensor device and the ferromagnetic wheel are separated by an air gap.
5. The sensor device according to any one of the preceding claims, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the first and second directions.
6. The sensor device according to any of the preceding claims, wherein the differential magnetic field sensor comprises a hall sensor sensitive in the third direction.
7. The sensor device of any one of the preceding claims, wherein the magnet has a side edge extending in the second direction, wherein the center of each of the two sensor elements and the side edge intersect in a projection along the third direction.
8. The sensor device of claim 7, wherein the first and second sensor elements are equidistant from a midpoint of the side edge of the magnet.
9. The sensor device of any one of the preceding claims, wherein the first sensor element and the second sensor element are subjected to the same magnetic working point of the magnet.
10. The sensor device according to any one of the preceding claims, wherein the first and second sensor elements are arranged with a magnetic field distribution of a magnetic field component of the magnet in a third direction in case of a local extremum, wherein the magnetic field distribution extends in the first direction.
11. The sensor device according to any one of the preceding claims, wherein the magnetic field sensor is arranged on a conductor frame and the connection conductor of the conductor frame has a substantially rectilinear extension in the first direction.
12. The sensor device according to any one of claims 1 to 4, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the second and third directions.
13. The sensor device of claim 12, wherein the differential magnetic field sensor comprises an xMR sensor element sensitive in the third direction.
14. The sensor device of claim 12 or 13, wherein the magnet has a recess.
15. The sensor device of any one of claims 1 to 13, wherein the magnet comprises a block magnet.
16. The sensor device of any one of claims 2 to 15, further comprising a third sensor element of the magnetic field sensor, wherein the third sensor element is arranged between the first and second sensor elements and is arranged to detect a rotational direction of the ferromagnetic wheel.
17. A method, comprising:
providing a magnet magnetized in a first direction; and
arranging a differential magnetic field sensor having a first sensor element and a second sensor element on the magnet, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction,
wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
18. The method of claim 17, further comprising:
arranging the sensor device relative to a ferromagnetic wheel, wherein the ferromagnetic wheel is arranged to rotate around a rotation axis extending in the third direction.
19. The method of claim 17 or 18, further comprising:
arranging the differential magnetic field sensor on the magnet, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the first direction and the second direction.
20. The method of any of claims 17 or 18, further comprising:
arranging the differential magnetic field sensor on the magnet, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the second direction and the third direction plane.
Technical Field
The invention relates to a sensor device and a method for producing a sensor device.
Background
In automotive applications, a combination of ferromagnetic wheels and a magnetically sensitive sensor may be used to measure wheel speed. Such magnetic speed sensors are used, for example, in safety-relevant applications, such as ABS (anti-lock braking system), motors or gearboxes. Of course, magnetic sensors may be susceptible to stray magnetic fields. As the electrification and hybridization of modern vehicles is driven forward, the requirements in terms of insensitivity of magnetic sensors with respect to stray magnetic fields are increasing and will continue to increase in the future. Manufacturers of sensor devices are constantly striving to improve their products and their methods of manufacture. It is therefore desirable to develop sensor arrangements to provide improved performance in the present stray magnetic fields.
Disclosure of Invention
One aspect of the invention relates to a sensor arrangement comprising a magnet magnetized in a first direction and a differential magnetic field sensor arranged on the magnet, the differential magnetic field sensor having a first sensor element and a second sensor element, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction, wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
Another aspect of the invention relates to a method comprising providing a magnet magnetized in a first direction, and providing a differential magnetic field sensor on the magnet having a first sensor element and a second sensor element, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction, wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
Drawings
The sensor device and the method of manufacturing the sensor device according to the invention are explained in more detail below with reference to the drawings. Elements illustrated in the figures have not necessarily been drawn to scale. Like reference numerals may denote like components.
Fig. 1 includes fig. 1A and 1B, which schematically show a cross-sectional side view and a top view of a
Fig. 2 includes fig. 2A and 2B, which schematically illustrate a cross-sectional side view and a front view of a
Fig. 3 includes fig. 3A and 3B, and shows a side cross-sectional view of
Fig. 4 comprises fig. 4A to 4C and shows the magnetic field distribution of the magnet of the sensor device according to the invention along the y-axis. FIG. 4A shows the y-component B of the magnetic fieldyThe magnetic field distribution of (1). FIG. 4B shows the x-component B of the magnetic fieldxThe magnetic field distribution of (1). FIG. 4C shows the z-component B of the magnetic fieldzThe magnetic field distribution of (1).
Fig. 5 includes fig. 5A and 5B and shows a simulation model showing the effect of stray fields on different magnetic field sensors at low gap widths. FIG. 5A shows an overview of a simulation model. FIG. 5B shows a detailed depiction of a magnetic strip representing a gear iron in a simulation model.
Fig. 6 includes fig. 6A and 6B, and shows the trend of the differential signal amplitude depending on the position. FIG. 6A shows the signal trend of an xMR sensor under the influence of different stray fields. Fig. 6B shows the signal trend of the hall sensor under the influence of different stray fields.
Fig. 7 comprises fig. 7A and 7B and shows the trend of the differential signal amplitude depending on the distance between the sensor elements of the sensor device. FIG. 7A shows the signal trend of an xMR sensor under the influence of different stray fields. Fig. 7B shows the signal trend of the hall sensor under the influence of different stray fields.
Fig. 8 schematically shows a top view of a
Fig. 9 includes fig. 9A and 9B, and shows for various magnetic field sensors that the differential signal amplitude is dependent on the trend of the air gap width under the influence of stray magnetic fields in the air gap direction. Fig. 9A shows the air gap width values for error-free operation of a hall sensor sensitive in the z direction. The values of the air gap width for error-free operation of an xMR sensor sensitive in the y-direction are shown in fig. 9B.
Fig. 10 includes fig. 10A to 10C and illustrates the effect of stray magnetic fields in the air gap direction on the operating principle of various magnetic field sensors. FIG. 10A illustrates the effect on an xMR sensor sensitive in the x-direction for different strengths of stray magnetic fields. FIG. 10B illustrates the effect on an xMR sensor sensitive in the y-direction for different strengths of stray magnetic fields. Fig. 10C shows the effect on a hall sensor sensitive in the z-direction for different strengths of the stray magnetic field.
Fig. 11 schematically shows a top view of a
Fig. 12 includes fig. 12A and 12B, and shows for various magnetic field sensors that the differential signal amplitude depends on the trend of the air gap width under the influence of stray magnetic fields in the tangential direction. Fig. 12A shows the air gap width values for error-free operation of a hall sensor sensitive in the z direction. The values of the air gap width for error-free operation of an xMR sensor sensitive in the y-direction are shown in fig. 12B.
Fig. 13 includes fig. 13A to 13C and shows the effect of stray magnetic fields in the tangential direction on the operating principle of various magnetic field sensors. FIG. 13A illustrates the effect on an xMR sensor sensitive in the x-direction for different strengths of stray magnetic fields. FIG. 13B illustrates the effect on an xMR sensor sensitive in the y-direction for different strengths of stray magnetic fields. Fig. 13C shows the effect on a hall sensor sensitive in the z-direction for different strengths of the stray magnetic field.
Fig. 14 schematically shows a top view of a
Fig. 15 includes fig. 15A and 15B, and shows for various magnetic field sensors that the differential signal amplitude is dependent on the trend of the air gap width under the influence of stray magnetic fields in the axial direction. In fig. 15A, values of the air gap width are shown for error-free operation of a hall sensor sensitive in the z-direction. The values of the air gap width for error-free operation of an xMR sensor sensitive in the y-direction are shown in fig. 15B.
Fig. 16 includes fig. 16A to 16C and illustrates the effect of stray magnetic fields in the axial direction on the operating principle of various magnetic field sensors. FIG. 16A illustrates the effect on an xMR sensor sensitive in the x-direction for different strengths of stray magnetic fields. FIG. 16B illustrates the effect on an xMR sensor sensitive in the y-direction for different strengths of stray magnetic fields. Fig. 16C shows the effect on a hall sensor sensitive in the z-direction for different strengths of the stray magnetic field.
Fig. 17 shows a flow chart of a method of manufacturing a sensor device according to the invention.
Detailed Description
Fig. 1 includes fig. 1A and 1B, and shows an example of a
The
The
The
In one example, the
The
Based on the shown relative arrangement of the
The sensor assembly containing the
In fig. 1A and 1B, vertical dashed lines indicate that the
Due to the congruent arrangement, the
The differential scanning principle of the
The
Fig. 2 includes fig. 2A and 2B, and shows an example of a
The
The
The
In the example of fig. 2, the
The
Fig. 3 includes fig. 3A and 3B, and shows examples of
Fig. 4 includes fig. 4A to 4C, and shows the magnetic field distribution of the magnet along the y-axis of the magnet. The magnet may be part of a sensor device according to the invention. For example, it may be the
FIG. 4A shows the y-component B of the magnetic fieldyThe magnetic field distribution of (1). In FIG. 4A, the magnetic field component ByIs plotted against the y-position of the magnet.
FIG. 4B shows the x-component B of the magnetic fieldxThe magnetic field distribution of (1). In FIG. 4B, the magnetic field component BxIs plotted against the y-position of the magnet.
FIG. 4C shows the z-component B of the magnetic fieldzThe magnetic field distribution of (1). In FIG. 4C, the magnetic field component BzIs plotted against the y-position of the magnet. At the y-position (y ═ 0.001) at the left edge of the magnet, the z-component of the magnetic field has a local maximum. At the y-position (y ═ 0.008) at the right edge of the magnet, the z-component of the magnetic field has a local minimum. In the example of fig. 4, the sensor element of the magnetic field sensor may be located at the y-position 0.008 of the local minimum.
In the production of the sensor device according to the invention, the magnetic field sensor can be arranged on the magnet by a Pick-and-Place (Pick-and-Place) method. Due to inaccuracies of this method, deviations between the desired and the actual positioning of the magnetic field sensor relative to the magnet may occur. If the sensor element is subjected to different magnetic operating points as a result of such deviations, this may result in a distortion of the measurement results of the sensor. Such distortions can be avoided by arranging the sensor elements of the magnetic field sensor in the case of local extrema. At the location of the local extremum, a slight shift of the sensor element, for example in the y direction, results in only a slight change of the magnetic field, since the slope of the magnetic field distribution at the location of the extremum is zero. Thus, in the example of fig. 4C, the sensor element may preferably be positioned at the position of the local maximum at the y position 0.001, or at the position of the local minimum at the y position 0.008.
Fig. 5 includes fig. 5A and 5B and shows a simulation model showing the effect of stray fields on the measurements of different magnetic field sensors at low gap widths. In the simulation, the uniform stray field is disturbed by the irregular shape of the ferromagnetic gear. The results of the simulation model are shown in fig. 6 and 7.
FIG. 5A shows a simulated scene in a rectangular three-dimensional coordinate system having x, y, and z axes. In the example of fig. 5, consider a scenario without an auxiliary field provided by a magnet. A ferromagnetic bar representing the gear moves along the x-axis. In addition, a uniform stray magnetic field BzStreufeldExtending along the z-axis. In the example of fig. 5 an ideal stray field source is assumed which can generate DC fields of 0MT, 1MT, 2MT, 3MT, 4MT and 5MT at the location of the sensor element of the magnetic field sensor.
A detailed description of the ferromagnetic strip is shown in fig. 5B. The ferromagnetic strip has a comb-like extension, wherein the simulated gear width has a value of, for example, 3.92 and the gear height has a value of, for example, 4.32. In the example of fig. 5, the permeability μ of the ferromagnetic striprIs 4000.
Fig. 6 includes fig. 6A and 6B and shows the trend of the differential signal amplitude depending on the position of the ferromagnetic strip. In the example of fig. 6, the distance between the Sensor elements (Sensor Pitch) has a value of 2mm, and the air gap width has a value of 0.5 mm. The differential signal (in mT) detected by the corresponding magnetic field sensor is plotted against the position of the ferromagnetic strip (in mm). The signal trend of the stray magnetic field in the z direction is shown, with values of 0mT, 1mT, 2mT, 3mT, 4mT and 5 mT.
FIG. 6A shows signal trends detected by a differential xMR sensor for stray magnetic fields of different strengths. These signals correspond to the difference between the magnetic field detected on the right sensor element (see "BxRight") and the magnetic field detected on the left sensor element (see "BxLinks") in the x-direction, respectively. Alternatively, the sensor may be a vertical hall sensor.
Fig. 6B shows the signal trend detected by the differential hall sensor for different strengths of stray magnetic fields. In each case, the signal corresponds to the difference between the magnetic field in the z-direction detected on the right sensor element (see "BzRight") and the magnetic field detected on the left sensor element (see "BzLinks"). Alternatively, the sensor may be an xMR sensor sensitive in the z-direction.
Fig. 6A and 6B show that the function of both sensors is affected by stray magnetic fields. This is made clear in particular by the signal trend at a stray field of 5 mT. The differential sensor should ideally suppress the influence of stray magnetic fields on the measurement results. However, at low air gap widths, the stray field is deflected and enhanced by the ferromagnetic gear. Instead of obtaining a zero signal value, the signal detected by the sensor is shifted up to a differential signal value of about 3 mT.
Fig. 7 includes fig. 7A and 7B, and shows the trend of the differential signal amplitude depending on the distance between the Sensor elements (Sensor Pitch) of the Sensor device. FIG. 7A shows the signal trend of an xMR sensor under the influence of various stray magnetic fields. Alternatively, the sensors may be respective vertical hall sensors. Fig. 7B shows the signal trend of the hall sensor under the influence of various stray magnetic fields. Alternatively, the sensors may be respective xMR sensors. In the example of fig. 7, the air gap width has a value of 0.5 mm. The differential signal (in mT) detected by the respective magnetic field sensor is plotted against the distance (in mm) of the sensor element. The signal trend of the stray magnetic field in the z direction is shown, with values of 0mT, 1mT, 2mT, 3mT, 4mT and 5 mT.
Fig. 7A and 7B show that the influence of stray magnetic fields on the function of the magnetic field sensor increases with increasing distance between the sensor elements.
Fig. 8 schematically shows a top view of a
Fig. 9 includes fig. 9A and 9B and shows the trend of the differential signal amplitude depending on the air gap width under the influence of stray magnetic fields in the air gap direction (see fig. 8). The signal trends for an xMR sensor sensitive in the x-direction, for an xMR sensor sensitive in the y-direction and for a hall sensor sensitive in the z-direction are shown. The differential signal (in T) detected by the respective magnetic field sensor is plotted against the air gap width (in mm). The horizontal dashed line represents the dB limit. The corresponding sensor operates when its differential signal amplitude extends above the dB limit. If the signal amplitude is below the dB limit, no other switching pulses are output by the sensor. As can be seen in FIG. 9, the differential signal amplitude of the xMR sensor is stronger than the differential signal amplitude of the Hall sensor.
Fig. 9A shows the air gap width values for error-free operation of a hall sensor sensitive in the z-direction (see the unshaded area). The hall sensor therefore operates without error with an air gap width of 0.5mm to about 2.8mm, i.e. in the range of about 2.3mm (see LS range). In this range, the differential signal amplitude of the hall sensor extends above the dB limit. Furthermore, the stray field has negligible effect, as follows from fig. 10C discussed below.
FIG. 9B shows the air gap width values for error-free operation of an xMR sensor sensitive in the y-direction (see the unshaded regions). Accordingly, xMR sensors operate erroneously with an air gap width of about 2.4mm to about 4.2mm, i.e., in the range of about 1.8mm (see LS range). Within this range, the differential signal amplitude of the xMR sensor extends above the dB limit. Furthermore, the stray field has negligible effect, as follows from fig. 10C discussed below.
Fig. 10 includes fig. 10A to 10C and shows the effect of stray magnetic fields in the air gap direction (see fig. 8) on the operating principle of various magnetic field sensors. In fig. 10A to 10C, deviations from the nominal mapping (in mT) are plotted against the air gap width (in mm), respectively. The trend of the stray field in the direction of the air gap with magnitudes of 0mT, 2.5mT and 5mT is shown. The dashed horizontal line in the case of a value of, for example, about 0.8mT represents the dB limit. When the respectively illustrated signal trends extend below the dB limit, the influence of stray fields on the operating principle of the respective sensor can be ignored.
FIG. 10A illustrates the effect of stray fields in the air gap direction on the operating principle of an xMR sensor that is sensitive in the x-direction. As can be seen from the stray field curve of 5mT, the stray field exceeds the dB limit when the air gap width is less than about 2.5mm, and therefore the sensor cannot operate without error. This means that in the presence of a stray field of 5mT, the sensor is not suitable for operation with an air gap width of less than 2.5 mm.
FIG. 10B illustrates the effect of stray fields in the air gap direction on the operating principle of an xMR sensor that is sensitive in the y-direction. As can be seen from the stray field curve of 5mT, the stray field exceeds the dB limit when the air gap width is less than about 2.4mm, and therefore the sensor cannot operate without error. This means that in the presence of a stray field of 5mT, the sensor is not suitable for operation with an air gap width of less than 2.4mm (see also fig. 9B for this).
Fig. 10C shows the effect of the stray field in the air gap direction on the operating principle of a hall sensor sensitive in the z direction. As can be seen from the graph of fig. 10C, the stray field signal extends over the entire air gap width extending below the dB limit. In this respect, the hall sensor is therefore suitable for operation with any air gap width within the indicated range (see also fig. 9A for this). It has been concluded from fig. 9A that for air gap widths smaller than about 2.8mm, the hall sensor operates error-free with respect to the differential signal amplitude.
Fig. 11 schematically shows a top view of a
Fig. 12 includes 12A and 12B and shows for various sensors that the differential signal amplitude depends on the trend of the air gap width under the influence of a stray magnetic field in the tangential direction (see fig. 11).
Fig. 12A shows the value of the air gap width in the z-direction for error-free operation of the sensitive hall sensor (see the unshaded area). Thus, the Hall sensor is suitable for air gap widths of 0.5mm to about 2.8 mm.
FIG. 12B shows the air gap width values for error-free operation of an xMR sensor sensitive in the y-direction. Thus, the xMR sensor operates error-free for air gap widths of about 2.5mm to about 4.2 mm.
Fig. 13 includes fig. 13A to 13C, and shows the influence of stray fields in the tangential direction (see fig. 11) on the operating principle of various magnetic field sensors. The comments made in connection with fig. 10 also apply to fig. 13.
FIG. 13A illustrates the effect of stray fields in the tangential direction on the operating principle of an xMR sensor that is sensitive in the x-direction. As can be seen from fig. 13A, the stray field signal extends across the full air gap width range below the dB limit.
FIG. 13B illustrates the effect of stray fields in the tangential direction on the operating principle of an xMR sensor that is sensitive in the y-direction. As can be seen from the plot of the 5mT stray field, the stray field exceeds the dB limit when the air gap width is less than about 2.5mm, and therefore the sensor cannot operate without error.
Fig. 13C shows the effect of the stray field in the tangential direction on the operating principle of a hall sensor which is sensitive in the z direction. As can be seen from fig. 13C, the stray field signal extends across the full air gap width range below the dB limit.
Fig. 14 schematically shows a top view of a
Fig. 15 includes fig. 15A and 15B, and shows the trend of the differential signal amplitude depending on the air gap width under the influence of the stray magnetic field in the axial direction (see fig. 14). The comments made in connection with fig. 9 also apply to fig. 15.
Fig. 15A shows the air gap width values for error-free operation of a hall sensor sensitive in the z-direction. Thus, the hall sensor operates without error for air gap widths of 0.5mm to about 2.8 mm.
FIG. 15B shows values of air gap width for error-free operation of an xMR sensor sensitive in the y-direction. Thus, the xMR sensor operates error-free for air gap widths of 0.5mm to about 4.2 mm.
Fig. 16 includes fig. 16A to 16C, and shows the influence of stray fields in the axial direction (see fig. 14) on the operating principle of various magnetic field sensors. The comments made in connection with fig. 10 also apply to fig. 16.
FIG. 16A illustrates the effect of stray fields in the axial direction on the operating principle of an xMR sensor that is sensitive in the x-direction. As can be seen from fig. 16A, the stray field signal extends across the full air gap width range below the dB limit.
FIG. 16B illustrates the effect of stray fields in the axial direction on the operating principle of an xMR sensor that is sensitive in the y-direction. It can be seen from fig. 16B that the stray field signal extends across the full air gap width range below the dB limit.
Fig. 16C shows the effect of the stray field in the axial direction on the operating principle of a hall sensor which is sensitive in the z direction. It can be seen from fig. 16C that the stray field signal extends across the full air gap width range below the dB limit.
Fig. 17 shows a flow chart of a method of manufacturing a sensor device according to the invention. At 24, a magnet magnetized in a first direction is provided. At 26, a differential magnetic field sensor having a first sensor element and a second sensor element is arranged on a magnet. The sensor elements are spaced apart in a second direction perpendicular to the first direction. The first sensor element and the second sensor element are arranged to detect the magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
Examples of the invention
Example 1. a sensor device, comprising:
a magnet magnetized in a first direction; and
a differential magnetic field sensor arranged on the magnet, the differential magnetic field sensor having a first sensor element and a second sensor element, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction,
wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
Example 2. the sensor device of example 1, wherein the sensor device is arranged relative to a ferromagnetic wheel, wherein the ferromagnetic wheel is configured to rotate about an axis of rotation extending in the third direction.
Example 3. the sensor arrangement of examples 1 or 2, wherein the first sensor element and the second sensor element are arranged to detect a speed of the ferromagnetic wheel.
Example 4. the sensor device of any of the preceding examples, wherein the sensor device and the ferromagnetic wheel are separated by an air gap.
Example 5 the sensor arrangement of any of the preceding examples, wherein the major surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the first and second directions.
Example 6. the sensor device of any of the preceding examples, wherein the differential magnetic field sensor comprises a hall sensor sensitive in the third direction.
Example 7. the sensor arrangement of any one of the preceding examples, wherein the magnet has side edges extending in the second direction, wherein the respective centers of the two sensor elements and the side edges intersect in a projection along the third direction.
Example 8. the sensor device of example 7, wherein the first sensor element and the second sensor element are equidistant from a midpoint of the side edge of the magnet.
Example 9. the sensor arrangement of any of the preceding examples, wherein the first sensor element and the second sensor element are subjected to the same magnetic operating point of the magnet.
Example 10 the sensor arrangement of any one of the preceding examples, wherein, in case of a local extremum, the first and second sensor elements are arranged with a magnetic field distribution of a magnetic field component of the magnet in a third direction, wherein the magnetic field distribution extends in the first direction.
Example 11 the sensor arrangement according to any of the preceding examples, wherein the magnetic field sensor is arranged on a conductor frame and the connection conductor of the conductor frame has a substantially linear extension in the first direction.
Example 12. the sensor device of any one of examples 1 to 4, wherein a major surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the second and third directions.
Example 13. the sensor device of example 12, wherein the differential magnetic field sensor includes an xMR sensor element that is sensitive in the third direction.
Example 14. the sensor device of examples 12 or 13, wherein the magnet has a recess.
Example 15 the sensor device of any one of examples 1 to 13, wherein the magnet comprises a block magnet.
Example 16 the sensor arrangement of any of examples 2 to 15, further comprising a third sensor element of the magnetic field sensor, wherein the third sensor element is arranged between the first and second sensor elements and is arranged to detect a direction of rotation of the ferromagnetic wheel.
Example 17. a method, comprising:
providing a magnet magnetized in a first direction; and
arranging a differential magnetic field sensor having a first sensor element and a second sensor element on the magnet, wherein the sensor elements are spaced apart in a second direction perpendicular to the first direction,
wherein the first sensor element and the second sensor element are arranged to detect a magnetic field component in a third direction perpendicular to the first direction and perpendicular to the second direction.
Example 18. the method of example 17, further comprising:
arranging the sensor device relative to a ferromagnetic wheel, wherein the ferromagnetic wheel is arranged to rotate around a rotation axis extending in the third direction.
Example 19. the method of example 17 or 18, further comprising:
arranging the differential magnetic field sensor on the magnet, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the first direction and the second direction.
Example 20. the method of any of examples 17 or 18, further comprising:
arranging the differential magnetic field sensor on the magnet, wherein a main surface of the differential magnetic field sensor facing the magnet is arranged parallel to a plane spanned by the second direction and the third direction plane.
Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that a variety of alternate and/or equivalent implementations may be substituted for the specific embodiments shown and described without departing from the scope of the present invention. This application is intended to cover any adaptations or variations of the specific embodiments discussed herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof.
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