阅读说明：本技术 一种光刻机用晶圆片涂胶系统 (Wafer gluing system for photoetching machine ) 是由 覃冬梅 于 2019-10-21 设计创作，主要内容包括：本发明公开了一种光刻机用晶圆片涂胶系统,其结构包括电机、支架、主转轴、调节杆、吸盘、水平调节装置、支撑圆盘,支架下方设有电机,电机与主转轴底部相连接,主转轴顶部贯穿支架并通过调节杆与吸盘相连接,支撑圆盘设在支架上方并与之相平行,支撑圆盘与主转轴垂直焊接在一起,吸盘底部设有水平调节装置,本发明的有益效果是：通过移动杆能够使液位传感器和内磁铁位于吸盘直径的两端,便于找到最低处,且通过磁吸作用能够移动伸缩杆位于最低处正下方,由于伸缩杆能够根据最低处进行移动,便于调节吸盘任意角度发生的倾斜,使用性更强,能够直接通过最低点与最高点确定一条直线直接进行调节,调节更加方便。(The invention discloses a wafer gluing system for a photoetching machine, which structurally comprises a motor, a support, a main rotating shaft, an adjusting rod, a sucker, a horizontal adjusting device and a supporting disc, wherein the motor is arranged below the support, the motor is connected with the bottom of the main rotating shaft, the top of the main rotating shaft penetrates through the support and is connected with the sucker through the adjusting rod, the supporting disc is arranged above the support and is parallel to the support, the supporting disc and the main rotating shaft are vertically welded together, and the horizontal adjusting device is arranged at the bottom of the sucker, so that the wafer gluing system has the beneficial effects that: can make level sensor and interior magnet be located the both ends of sucking disc diameter through the carriage release lever, be convenient for find the lower, and can remove the telescopic link through the magnetism effect of inhaling and be located under the lower, because the telescopic link can remove according to the lower, be convenient for adjust the slope that the arbitrary angle of sucking disc takes place, the usability is stronger, can directly confirm a straight line through minimum and peak and directly adjust, it is more convenient to adjust.)

1. The utility model provides a wafer rubber coating system for lithography machine, its structure includes motor (1), support (2), main rotating shaft (3), adjusts pole (4), sucking disc (5), horizontal adjusting device (6), support disc (7), its characterized in that: the support is characterized in that a motor (1) is arranged below the support (2), the motor (1) is connected with the bottom of the main rotating shaft (3), the top of the main rotating shaft (3) penetrates through the support (2) and is connected with a sucker (5) through an adjusting rod (4), a supporting disc (7) is arranged above the support (2) and is parallel to the support, the supporting disc (7) is vertically welded with the main rotating shaft (3), and a horizontal adjusting device (6) is arranged at the bottom of the sucker (5).

2. The wafer gumming system for lithography machines as recited in claim 1, wherein: the horizontal adjusting device (6) comprises a telescopic rod (8), an external magnet (9), a sliding rail (10) and a horizontal detection box (11), the top of the horizontal detection box (11) is attached to the bottom of the sucker (5) and connected together, the horizontal detection box (11) is circular, the sliding rail (10) is arranged on the outer side of the horizontal detection box (11), the external magnet (9) is arranged in the sliding rail (10), the side face of the external magnet (9) is matched with the top of the telescopic rod (8), and the bottom of the telescopic rod (8) is connected with the supporting disc (7).

3. The wafer gumming system for lithography machines as recited in claim 2, wherein: a groove (90) is formed in the outer side face of the outer magnet (9), and the top of the telescopic rod (8) is arranged in the groove (90).

4. The wafer gumming system for lithography machines as recited in claim 1, wherein: the supporting disc (7) is provided with a circular sliding groove (71), a sliding block (72) is arranged in the sliding groove (71), and the sliding block (72) is connected with the bottom of the telescopic rod (8).

5. The wafer gumming system for lithography machines as recited in claim 2, wherein: horizontal detection box (11) include interior magnet (12), box body (13), micromotor (14), carriage release lever (15), level sensor (16), center pin (17), micromotor (14) are installed at the top in box body (13), micromotor (14) are connected with center pin (17) of establishing below, center pin (17) are connected with carriage release lever (15) perpendicularly, the both ends of carriage release lever (15) are connected with interior magnet (12), level sensor (16) respectively, interior magnet (12) laminate mutually with box body (13) inner wall.

6. The wafer gumming system for lithography machines as recited in claim 5, wherein: and water is filled in the horizontal detection box (11).

7. The wafer gumming system for lithography machines as recited in claim 1, wherein: the top of the main rotating shaft (3) is provided with a spherical groove (30).

8. The wafer gumming system for lithography machines as recited in claim 1, wherein: the bottom of the adjusting rod (4) is provided with a ball body (40), and the ball body (40) is arranged in the spherical groove (30).

Technical Field

The invention relates to the field of wafer processing equipment, in particular to a wafer gluing system for a photoetching machine.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and when glue is uniformly distributed, a motor is generally adopted to drive a wafer adsorbed on a vacuum suction disc to rotate, so that glue is uniformly distributed on the wafer under the action of centrifugal force, and the coating thickness of a glue film can be controlled according to the speed of a rotating shaft of the motor.

Disclosure of Invention

The invention mainly aims to overcome the defects of the prior art and provides a wafer gluing system for a photoetching machine.

The invention is realized by adopting the following technical scheme: the utility model provides a wafer rubber coating system for lithography machine, its structure includes motor, support, main rotating shaft, regulation pole, sucking disc, level adjustment device, support disc, the support below is equipped with the motor, the motor is connected with main rotating shaft bottom, main rotating shaft top is run through the support and is connected with the sucking disc through adjusting the pole, support disc establishes in the support top and parallels with it, support disc and main rotating shaft vertical welding together, the sucking disc bottom is equipped with level adjustment device.

Preferably, the horizontal adjusting device comprises a telescopic rod, an external magnet, a sliding rail and a horizontal detection box, the top of the horizontal detection box is attached to the bottom of the sucker and connected together, the horizontal detection box is circular, the sliding rail is arranged on the outer side of the horizontal detection box, the external magnet is arranged in the sliding rail, the side face of the external magnet is matched with the top of the telescopic rod, and the bottom of the telescopic rod is connected with the supporting disc.

Preferably, the outer side surface of the outer magnet is provided with a groove, and the top of the telescopic rod is arranged in the groove.

Preferably, the supporting disc is provided with a circular sliding groove, a sliding block is arranged in the sliding groove, and the sliding block is connected with the bottom of the telescopic rod.

As optimizing, the level detection box includes interior magnet, box body, micromotor, carriage release lever, level sensor, center pin, micromotor is installed at the top in the box body, micromotor is connected with the center pin of establishing in the below, the center pin is connected with the carriage release lever is perpendicular, the both ends of carriage release lever are connected with interior magnet, level sensor respectively, interior magnet and the laminating of box body inner wall.

As optimization, the horizontal detection box is filled with water.

Preferably, the top of the main rotating shaft is provided with a spherical groove.

Preferably, the bottom of the adjusting rod is provided with a ball body, and the ball body is arranged inside the spherical groove.

Preferably, the inner wall of the spherical groove is made of metal.

Preferably, the ball is a strong magnet.

Preferably, the outer magnet is arranged on the side surface of the inner magnet, and the outer magnet and the inner magnet are magnetically attracted together.

Advantageous effects

When the invention is used, the micro motor drives the central shaft to rotate, so that the inner magnets and the liquid level sensors at two ends of the moving rod rotate around the inner wall of the box body, the liquid level sensors can detect the height of the internal water level, when the heights are consistent, the sucking discs are in a horizontal state, when the heights of the water levels are different, the liquid level sensors are rotated to the highest position of the water level, at the moment, the inner magnets are positioned at the lowest position of the water level, the sucking discs positioned at the inner magnets are low, when the inner magnets rotate, the inner magnets and the outer magnets are attracted together by the magnetic force, the outer magnets can move along with the inner magnets, the telescopic rods are clamped in the grooves of the inner magnets, the telescopic rods can be driven to move along with the inner magnets, therefore, when the inner magnets stop at the lowest position of the sucking discs, the telescopic rods are just positioned under the lowest position of the sucking discs, the sucking discs, because the sucking disc is inhaled in spherical groove through spheroid magnetism, consequently can fix, the sucking disc of being convenient for again carries out the altitude mixture control of 360 degrees optional positions.

Compared with the prior art, the invention has the beneficial effects that: can make level sensor and interior magnet be located the both ends of sucking disc diameter through the carriage release lever, be convenient for find the lower, and can remove the telescopic link through the magnetism effect of inhaling and be located under the lower, because the telescopic link can remove according to the lower, be convenient for adjust the slope that the arbitrary angle of sucking disc takes place, the usability is stronger, can directly confirm a straight line through minimum and peak and directly adjust, it is more convenient to adjust.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is a schematic structural diagram of a wafer gumming system for a lithography machine according to the present invention.

FIG. 2 is a schematic structural view of the leveling device of the present invention.

FIG. 3 is a schematic view showing the internal structure of the horizontal measuring cassette according to the present invention.

Fig. 4 is a schematic structural view of the support disk of the present invention.

Fig. 5 is a plan view of the outer magnet of the present invention.

FIG. 6 is a schematic view of the connection structure of the adjusting lever and the main rotating shaft according to the present invention.

In the figure: the device comprises a motor 1, a bracket 2, a main rotating shaft 3, an adjusting rod 4, a sucker 5, a horizontal adjusting device 6, a supporting disc 7, a sliding groove 71, a sliding block 72, a telescopic rod 8, an outer magnet 9, a groove 90, a sliding rail 10, a horizontal detection box 11, an inner magnet 12, a box body 13, a micro motor 14, a moving rod 15, a liquid level sensor 16, a central shaft 17, a spherical groove 30 and a sphere 40.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides a wafer glue spreading system for a lithography machine, comprising: the structure of the device comprises a motor 1, a support 2, a main rotating shaft 3, an adjusting rod 4, a sucker 5, a horizontal adjusting device 6 and a supporting disc 7, wherein the motor 1 is arranged below the support 2, the motor 1 is connected with the bottom of the main rotating shaft 3, the top of the main rotating shaft 3 penetrates through the support 2 and is connected with the sucker 5 through the adjusting rod 4, the supporting disc 7 is arranged above the support 2 and is parallel to the support, the supporting disc 7 is vertically welded with the main rotating shaft 3, and the horizontal adjusting device 6 is arranged at the bottom of the sucker 5.

Preferably, the horizontal adjusting device 6 comprises a telescopic rod 8, an external magnet 9, a sliding rail 10 and a horizontal detection box 11, the top of the horizontal detection box 11 is attached to the bottom of the sucker 5 and connected together, the horizontal detection box 11 is circular, the sliding rail 10 is arranged on the outer side of the horizontal detection box 11, the external magnet 9 is arranged in the sliding rail 10, the side surface of the external magnet 9 is matched with the top of the telescopic rod 8, and the bottom of the telescopic rod 8 is connected with the supporting disc 7.

Preferably, a groove 90 is formed in the outer side surface of the outer magnet 9, and the top of the telescopic rod 8 is arranged in the groove 90, so that the outer magnet and the telescopic rod can move simultaneously.

As an optimization, a circular sliding groove 71 is formed in the supporting disc 7, a sliding block 72 is arranged in the sliding groove 71, and the sliding block 72 is connected with the bottom of the telescopic rod 8, so that the telescopic rod 8 can be moved while the telescopic rod 8 is supported conveniently.

As an optimization, the horizontal detection box 11 comprises an inner magnet 12, a box body 13, a micro motor 14, a moving rod 15, a liquid level sensor 16 and a central shaft 17, the micro motor 14 is installed at the top inside the box body 13, the micro motor 14 is connected with the central shaft 17 arranged below, the central shaft 17 is vertically connected with the moving rod 15, the inner magnet 12 and the liquid level sensor 16 are respectively connected to two ends of the moving rod 15, and the inner magnet 12 is attached to the inner wall of the box body 13.

Preferably, the level detection box 11 is filled with water, and whether the suction cup 5 is kept level or not can be detected by the water level.

Preferably, the top of the main rotating shaft 3 is provided with a spherical groove 30.

Preferably, the adjusting rod 4 is provided with a ball 40 at the bottom thereof, the ball 40 is disposed inside the spherical groove 30, and the spherical groove 30 can prevent the ball 40 from being separated from a space where the ball 40 can rotate.

Preferably, the inner wall of the spherical groove 30 is made of metal.

Preferably, the ball 40 is a strong magnet, and can be firmly adsorbed in the spherical groove 30 made of metal, so as to achieve a fixing effect and facilitate adjustment.

Preferably, the outer magnet 9 is arranged on the side surface of the inner magnet 12, and the two magnets are magnetically attracted together, so that the two magnets can move inside and outside at the same time.

When the invention is used, the micro motor 14 drives the central shaft 17 to rotate, so that the inner magnets 12 and the liquid level sensors 16 at two ends of the moving rod 15 rotate around the inner wall of the box body 13, the liquid level sensors 16 can detect the height of the inner water level, when the heights are consistent, the sucker 5 is in a horizontal state, when the heights of the water levels are different, the liquid level sensors 16 are rotated to the highest position of the water level, at the moment, the inner magnets 12 are located at the lowest position of the water level, which means that the suckers 5 located at the positions of the inner magnets 12 are lower, when the inner magnets 12 rotate, because the inner magnets 12 and the outer magnets 9 are magnetically attracted together, the outer magnets 9 can move along with the inner magnets 12, the telescopic rods 8 are clamped in the grooves 90 of the inner magnets 12, the telescopic rods 8 can be driven to move along with the inner magnets, therefore, when the inner magnets 12 stop at the lowest positions of the suckers 5, the telescopic rods 8 are just located, the water level is detected by matching with the liquid level sensor 16, so that the sucking disc 5 is adjusted to a horizontal position, and the sucking disc 5 is magnetically attracted in the spherical groove 30 through the sphere 40, so that the fixing can be realized, and the height adjustment of 360-degree any position of the sucking disc 5 can be conveniently carried out.

Compared with the prior art, the invention has the technical progress that: can make level sensor and interior magnet be located the both ends of sucking disc diameter through the carriage release lever, be convenient for find the lower, and can remove the telescopic link through the magnetism effect of inhaling and be located under the lower, because the telescopic link can remove according to the lower, be convenient for adjust the slope that the arbitrary angle of sucking disc takes place, the usability is stronger, can directly confirm a straight line through minimum and peak and directly adjust, it is more convenient to adjust.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.