阅读说明：本技术 一种漫反射型标定板及其制备方法 (Diffuse reflection type calibration plate and preparation method thereof ) 是由 邓辉 陈保国 范海文 于 2020-04-28 设计创作，主要内容包括：本发明公开了一种漫反射型标定板的制备方法,包括以下步骤：使用20%-60%DN95粒径10微米以下的金刚砂溶液,对抛光片/原版玻璃的上表面和/或下表面研磨10-40min,得到第一研磨面,抛光片/原版玻璃的上表面为第一研磨面或平面；在抛光片/原版玻璃的上表面采用半导体掩模版图形制作工艺流程加工制作图形,依次进行镀膜、涂胶、光刻、显影和腐蚀,制得金属铬层；进行精密切割,尺寸精度为±0.05mm,本发明还公开了利用该方法制得的标定板,本发明采用研磨工艺制作磨砂效果,满足高平面度要求,砂粒精细并可控,反射率小于0.1%。(The invention discloses a preparation method of a diffuse reflection type calibration plate, which comprises the following steps: grinding the upper surface and/or the lower surface of the polishing sheet/original glass for 10-40min by using 20-60% DN95 carborundum solution with the grain diameter of less than 10 microns to obtain a first grinding surface, wherein the upper surface of the polishing sheet/original glass is a first grinding surface or plane; processing and manufacturing a graph on the upper surface of the polished wafer/original plate glass by adopting a semiconductor mask graph manufacturing process flow, and sequentially carrying out film coating, glue coating, photoetching, developing and corrosion to prepare a metal chromium layer; the invention adopts grinding process to make the frosted effect, which satisfies the requirement of high flatness, the sand grain is fine and controllable, and the reflectivity is less than 0.1%.)