A inserted sheet device for silicon chip

文档序号:1615823 发布日期:2020-01-10 浏览:8次 中文

阅读说明:本技术 用于硅片的插片装置 (A inserted sheet device for silicon chip ) 是由 陈宏� 于 2019-10-26 设计创作,主要内容包括:本申请公开了一种用于硅片的插片装置,包括支架和水箱,水箱的端口处设有朝向水箱内倾斜的导流板,导流板上等间设有贯穿导流板两端的多个第一凹槽,多个第一凹槽朝向水箱内设置,导流板远离水箱的端口处设有与第一凹槽垂直的第二凹槽,第二凹槽同时连通多个第一凹槽,第二凹槽底部设有进水口,水箱上方的机架上设有与导流板垂直的电缸,电缸通过滑块连接有摆臂,摆臂可延伸至水箱内,摆臂底部垂直设有与导流板衔接的底板,底板上托举有硅片料框。该插片装置通过进水口进水,水均匀流入各个第一凹槽内形成保护水膜,硅片放置在倾斜导流板上会随着水流方向插入底板上的料框内,通过电缸配合实现自动插片,插片效率高,且碎片率低。(The application discloses inserted sheet device for silicon chip, which comprises a bracket and a water tank, the port department of water tank is equipped with the guide plate of slope in the water tank, be equipped with a plurality of first recesses that run through the guide plate both ends on the guide plate, a plurality of first recesses set up towards the water tank, the port department that the water tank was kept away from to the guide plate is equipped with the second recess with first recess vertically, the second recess communicates a plurality of first recesses simultaneously, second recess bottom is equipped with the water inlet, be equipped with in the frame of water tank top with guide plate vertically electric jar, electric jar is connected with the swing arm through the slider, swing arm extensible to the water tank in, the swing arm bottom is equipped with the bottom plate that links up with the guide plate perpendicularly, it has silicon chip material frame. This inserted sheet device is intake through the water inlet, and water evenly flows into and forms the protection water film in each first recess, and the silicon chip is placed and can be along with the rivers direction insert the material frame on the bottom plate on the guide plate that inclines in, realizes automatic inserted sheet through the cooperation of electric jar, and the inserted sheet is efficient, and the piece rate is low.)

1. The utility model provides an inserted sheet device for silicon chip which characterized in that: including support and the water tank of setting on the support, the port department of water tank is equipped with the guide plate of slope in the water tank, be equipped with a plurality of first recesses that run through the guide plate both ends on the guide plate, it is a plurality of first recess sets up towards the water tank, the port department that the water tank was kept away from to the guide plate is equipped with the second recess with first recess vertically, the second recess communicates a plurality of first recesses simultaneously, second recess bottom is equipped with the water inlet, be equipped with in the frame of water tank top with guide plate vertically electric jar, electric jar is connected with the swing arm that can reciprocate through the slider, extensible swing arm to water tank in, the swing arm bottom is equipped with the bottom plate that links up with the guide plate perpendicularly, it has silicon chip material frame to lift on the bottom plate.

2. The insert device for the silicon wafer according to claim 1, wherein: the support is horizontally extended with a boss, the boss is arranged below the guide plate, and the boss is provided with a supporting block for supporting the bottom of the guide plate.

3. The insert device for the silicon wafer according to claim 1, wherein: the bottom plate and the swing arm are integrally formed.

4. The insert device for the silicon wafer according to claim 1, wherein: the bottom surface of the water tank is obliquely arranged, a flow equalizing disc is arranged in the water tank, and a water outlet is formed in the side wall of the bottom of the water tank.

5. The insert device for the silicon wafer according to claim 1, wherein: and the bottom of the rack is provided with rollers.

Technical Field

The application relates to the field of silicon wafers, in particular to an inserting piece device for a silicon wafer.

Background

In the field of photovoltaics or semiconductors, a 12-inch large silicon wafer is generally operated manually in the process of inserting the wafer, so that the efficiency is low and the fragment rate is high.

Disclosure of Invention

The invention aims to provide a silicon wafer inserting device to overcome the defects in the prior art.

In order to achieve the purpose, the invention provides the following technical scheme:

the embodiment of the application discloses inserted sheet device for silicon chip, its characterized in that: including support and the water tank of setting on the support, the port department of water tank is equipped with the guide plate of slope in the water tank, be equipped with a plurality of first recesses that run through the guide plate both ends on the guide plate, it is a plurality of first recess sets up towards the water tank, the port department that the water tank was kept away from to the guide plate is equipped with the second recess with first recess vertically, the second recess communicates a plurality of first recesses simultaneously, second recess bottom is equipped with the water inlet, be equipped with in the frame of water tank top with guide plate vertically electric jar, electric jar is connected with the swing arm that can reciprocate through the slider, extensible swing arm to water tank in, the swing arm bottom is equipped with the bottom plate that links up with the guide plate perpendicularly, it has silicon chip material frame to lift on the bottom plate.

Preferably, in the above-mentioned insert device for silicon wafer, a boss horizontally extends on the support, the boss is arranged below the guide plate, and the boss is provided with a support block for supporting the bottom of the guide plate.

Preferably, in the above inserting device for the silicon wafer, the base plate and the swing arm are integrally formed.

Preferably, in the above-mentioned insert device for silicon wafer, the bottom surface of the water tank is inclined, a flow equalizing disc is arranged in the water tank, and a water outlet is formed in the side wall of the bottom of the water tank.

Preferably, in the above inserting device for silicon wafers, the bottom of the frame is provided with rollers.

Compared with the prior art, the invention has the advantages that:

this inserted sheet device is intake through the water inlet, and water evenly flows into and forms the protection water film in each first recess, and the silicon chip is placed and can be along with the rivers direction insert the material frame on the bottom plate on the guide plate that inclines in, realizes automatic inserted sheet through the cooperation of electric jar, and the inserted sheet is efficient, and the piece rate is low.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of an interposer device for a silicon wafer according to an embodiment of the present invention;

fig. 2 is a top view of a baffle in an embodiment of the invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described in detail below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

Refer to fig. 1-2 and show, an inserted sheet device for silicon chip in this embodiment, including support 1 and the water tank 2 of setting on the support, the port department of water tank 2 is equipped with the guide plate 3 towards the interior slope of water tank 2, be equipped with a plurality of first recesses 4 that run through guide plate 3 both ends on the guide plate 3 between equal, a plurality of first recesses 4 set up towards the water tank 2 in, the port department that water tank 2 was kept away from to guide plate 3 is equipped with second recess 5 perpendicular with first recess 4, second recess 5 communicates a plurality of first recesses 4 simultaneously, second recess 5 bottom is equipped with water inlet 501, be equipped with in the frame 1 of water tank 2 top with guide plate 3 vertically electric jar 6, electric jar 6 is connected with swing arm 7 that can reciprocate through slider 601, swing arm 7 can extend to in the water tank 2, swing arm 7 bottom is equipped with the bottom plate 8 that links up with guide plate 3 perpendicularly, it has silicon chip material frame 9 to.

Further, the base plate 8 is integrally formed with the swing arm 7.

Further, the bottom surface of the water tank 2 is obliquely arranged, a flow equalizing disc 201 is arranged in the water tank 2, and a water outlet 202 is formed in the side wall of the bottom of the water tank 2.

In this technical scheme, this inserted sheet device passes through water pump or other prior art with water from the water inlet get into the guiding disk in, water evenly flows into and forms the protection water film in each first recess, and the silicon chip is placed and can be along with rivers direction insert the material frame on the bottom plate on the guide plate that inclines, realizes automatic inserted sheet through the cooperation of electric jar, and the inserted sheet is efficient, and the piece rate is low.

In one embodiment, a boss 101 extends horizontally from the bracket 1, the boss 101 is disposed below the baffle 3, and a support block 102 is disposed on the boss 101 for supporting the bottom of the baffle 3.

In the technical scheme, the guide plate is limited through the soil table and the supporting block, so that the guide plate is prevented from deforming or shifting.

In one embodiment, the bottom of the frame 1 is provided with rollers 103.

In the technical scheme, the device is convenient to move.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The foregoing is merely a detailed description of the present application, and it should be noted that modifications and embellishments could be made by those skilled in the art without departing from the principle of the present application, and these should also be considered as the protection scope of the present application.

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