阅读说明：本技术 旋转式槽体自动开关盖机构 (Rotary type groove body automatic cover opening and closing mechanism ) 是由 魏杰 林威良 崔正宏 于 2019-10-08 设计创作，主要内容包括：本发明公开了旋转式槽体自动开关盖机构,包括两个端盖,两个所述端盖位于槽体的上方槽口位置处,两个所述端盖的两侧均设置有转臂,所述端盖通过连接板与转臂固定连接,其中一个所述转臂的一侧转动连接有支撑块,另一个所述转臂的一侧连接有联轴器,所述联轴器的一侧固定安装有旋转气缸；使用旋转气缸驱动方式,可以改进端盖开关的稳定性、改善开启角度和紧密性问题,并提高工作效率；该开关盖机构降低工人的劳动强度、提高工作效率,端盖能够在更小的空间内实现闭合、打开动作,可以适应各种湿式制程设备中开关盖所允许安装空间狭小的安装环境,满足端盖开启时自身高度要求、角度和紧密性要求。(The invention discloses a rotary type automatic cover opening and closing mechanism for a groove body, which comprises two end covers, wherein the two end covers are positioned at the position of a notch above the groove body, rotating arms are arranged on two sides of each end cover, the end covers are fixedly connected with the rotating arms through connecting plates, one side of one rotating arm is rotatably connected with a supporting block, one side of the other rotating arm is connected with a coupler, and a rotary air cylinder is fixedly arranged on one side of the coupler; the rotary cylinder driving mode is adopted, so that the stability of the end cover switch can be improved, the problems of opening angle and tightness can be solved, and the working efficiency can be improved; the cover opening and closing mechanism reduces the labor intensity of workers and improves the working efficiency, the end cover can realize closing and opening actions in a smaller space, the cover opening and closing mechanism can adapt to the narrow installation environment of the installation space allowed by the switch cover in various wet-type process equipment, and the height requirement, the angle and the tightness requirement of the end cover when the end cover is opened are met.)

1. Rotation type cell body automatic switch lid mechanism, its characterized in that includes two end covers (1), two end cover (1) are located the top notch position department of cell body (8), two the both sides of end cover (1) all are provided with rocking arm (2), end cover (1) are through connecting plate (6) and rocking arm (2) fixed connection, one of them one side of rocking arm (2) is rotated and is connected with supporting shoe (5), another one side of rocking arm (2) is connected with shaft coupling (7), one side fixed mounting of shaft coupling (7) has revolving cylinder (3).

2. The rotary type groove body automatic switch cover mechanism according to claim 1, wherein the end cover (1) comprises a connecting portion (101) and a covering portion (102) located on one side of the connecting portion (101), the connecting portion (101) and the covering portion (102) are of an integrated structure, two first mounting grooves (1011) are formed in the upper surface of the connecting portion (101), the notch of each first mounting groove (1011) is rectangular, two first mounting grooves (1011) are respectively arranged at the edge positions of two sides of the upper surface of the connecting portion (101), and a first strip-shaped through groove (1012) is formed in the middle of each first mounting groove (1011).

3. The rotary tank body automatic opening and closing cover mechanism according to claim 2, wherein the cross section of the connecting part (101) is an arc-shaped structure.

4. The rotary type groove body automatic switch cover mechanism as claimed in claim 1, wherein the connecting plate (6) comprises a first connecting arm (61) and a second connecting arm (62), the second connecting arm (62) is fixedly connected to one end of the first connecting arm (61), the first connecting arm (61) and the second connecting arm (62) are perpendicular to each other, two first mounting holes are formed in the first connecting arm (61), and a second strip-shaped through groove (621) is formed in the second connecting arm (62).

5. The rotary type groove body automatic switch cover mechanism as claimed in claim 4, wherein the first connecting arm (61) is arranged in a first mounting groove (1011), the first connecting arm (61) is matched with the first mounting groove (1011), the connecting part (101) of the first connecting arm (61) and the end cover (1) is fixedly connected through a first bolt, the first bolt is installed in a first mounting hole and a first strip-shaped through groove (1012) in a penetrating manner, and the first bolt is matched with the first mounting hole and the first strip-shaped through groove (1012).

6. The rotary type groove body automatic switch cover mechanism according to claim 1, wherein the rotary arm (2) comprises an arm body (21) and a connecting shaft (22), the connecting shaft (22) is fixedly connected to one side of the arm body (21), a second mounting groove is formed in one side of the arm body (21), a notch of the second mounting groove is rectangular, two second mounting holes (211) are formed in the second mounting groove, the second mounting holes (211) penetrate through the arm body (21), the second connecting arm (62) is arranged in the second mounting groove, the arm body (21) and the second connecting arm (62) are fixedly connected through a second bolt, the second bolt is installed in the second mounting holes (211) and the second strip-shaped through groove (621) in a penetrating manner, and the second bolt is matched with the second mounting holes (211) and the second strip-shaped through groove (621).

7. the rotary type groove body automatic opening and closing cover mechanism as claimed in claim 1, wherein a connecting shaft (22) of one of the rotating arms (2) is rotatably connected with the supporting block (5), a connecting shaft (22) of the other rotating arm (2) is fixedly connected with one end of a coupler (7), and the other end of the coupler (7) is fixedly connected with a rotating head of the rotating cylinder (3).

8. The rotary type groove body automatic opening and closing cover mechanism as claimed in claim 1, wherein the rotary cylinder (3) and the supporting block (5) are respectively and fixedly arranged on two symmetrical groove walls of the groove body (8).

9. The rotary type groove body automatic switch cover mechanism as claimed in claim 1, wherein three positioning pipes (4) are fixedly installed on one side of the rotary cylinder (3), and the three positioning pipes (4) are annularly distributed on the periphery of the coupler (7) in equal radian.

10. The rotary type groove body automatic opening and closing cover mechanism as claimed in claim 1, wherein the working steps of the opening and closing cover mechanism are as follows:

by starting the rotary cylinder (3), the rotating head of the rotary cylinder (3) rotates positively and drives the coupling (7) fixed with the rotating head to rotate, the connecting shaft (22) is driven to rotate positively through the coupler (7), the whole rotating arm (2) is driven to rotate positively around the connecting shaft (22), the rotating arm (2) drives the end cover (1) to rotate positively through the connecting plate (6), the covering part (102) of the end cover (1) is far away from the notch of the groove body (8), the notch is in an open state, the cover is opened, and when the notch is closed, by starting the rotary cylinder (3), the rotary head of the rotary cylinder (3) rotates reversely and drives the connecting shaft (22) to rotate reversely through the coupling (7), and the end cover (1) is driven to rotate around the connecting shaft (22) in the reverse direction, so that the covering part (102) of the end cover (1) moves to the upper part of the notch of the groove body (8), and the notch is closed.

Technical Field

The invention relates to semiconductor wet processing equipment, in particular to a rotary type groove body automatic cover opening and closing mechanism.

Background

Currently, the cover opening and closing manner of each wet process equipment is not complete, and many cover opening and closing manners cannot meet the requirements due to a small allowed installation space, the height requirement of the end cover when the end cover is opened, the angle requirement and the tightness requirement and other factors. Because the traditional mechanism mostly uses manpower, a stretching cylinder and a connecting rod to realize the opening and closing movement of the end cover, the limitation of gravity, the stretching cylinder and the connecting rod mechanism not only brings inconvenience to the operation of workers, but also greatly restricts the height, the angle and the tightness of the opening of the end cover.

disclosure of Invention

The invention aims to provide a rotary type automatic cover opening and closing mechanism for a groove body, wherein the opening and closing of an end cover are driven by a rotary air cylinder, so that the stability of the opening and closing of the end cover can be improved, the problems of opening angle and tightness are solved, and the working efficiency is improved; the special end cover and the connection design of the end cover and the rotating arm can realize the closing and opening actions of the end cover in a smaller space, and can regulate the self height of the end cover when the end cover is opened; this switch cover mechanism need not artifical manual switch to the end cover, can adapt to the narrow and small installation environment of installation space that the switch cover allows among the various wet-type processing procedure equipment, self altitude mixture demand, angle and compactness requirement when satisfying the end cover and opening have solved current wet-type processing procedure equipment switch cover and need the manpower switch, and intensity of labour is big, and work efficiency is low to and can't adapt to narrow and small installation environment's technical problem.

The purpose of the invention can be realized by the following technical scheme:

rotation type cell body automatic switch lid mechanism, including two end covers, two the end cover is located the top notch position department of cell body, two the both sides of end cover all are provided with the rocking arm, the end cover passes through connecting plate and rocking arm fixed connection, one of them one side of rocking arm is rotated and is connected with the supporting shoe, another one side of rocking arm is connected with the shaft coupling, one side fixed mounting of shaft coupling has rotary cylinder.

Further, the end cover includes connecting portion and the portion that covers that is located connecting portion one side, connecting portion and the structure that covers portion as an organic whole, two first mounting grooves have been seted up to the upper surface of connecting portion, the notch of first mounting groove is the rectangle, and two first mounting groove sets up respectively with the both sides border position department of connecting portion upper surface, first bar logical groove has been seted up at the middle part of first mounting groove.

Further, the cross section of the connecting part is of an arc-shaped structure.

Further, the connecting plate includes first linking arm and second linking arm, second linking arm fixed connection is in the one end of first linking arm, just first linking arm with second linking arm mutually perpendicular, two first mounting holes have been seted up on the first linking arm, the logical groove of second bar has been seted up on the second linking arm.

Furthermore, first connecting arm sets up in first mounting groove, first connecting arm and first mounting groove looks adaptation, just the connecting portion of first connecting arm and end cover pass through first bolt fixed connection, first bolt runs through and installs in first mounting hole and the logical inslot of first bar, just first bolt and first mounting hole, the logical groove looks adaptation of first bar.

Further, the rocking arm includes the arm body and connecting axle, connecting axle fixed connection is in one side of the arm body, the second mounting groove has been seted up to arm body one side, the notch of second mounting groove is the rectangle, two second mounting holes have been seted up on the second mounting groove, the second mounting hole runs through the arm body, and the second linking arm sets up in the second mounting groove, through second bolt fixed connection between the arm body and the second linking arm, the second bolt runs through to be installed in the logical inslot of second mounting hole and second bar, just the logical groove looks adaptation of second bolt and second mounting hole, second bar.

Furthermore, the connecting shaft of one of the rotating arms is rotatably connected with the supporting block, the connecting shaft of the other rotating arm is fixedly connected with one end of a coupler, and the other end of the coupler is fixedly connected with the rotating head of the rotating cylinder.

Furthermore, the rotary cylinder and the supporting block are respectively and fixedly arranged on two symmetrical groove walls of the groove body.

Furthermore, one side fixed mounting of revolving cylinder has three registration arm, and is three radian annular distribution such as registration arm is in week side of shaft coupling.

Further, the working steps of the cover opening and closing mechanism are as follows:

Through starting revolving cylinder, revolving cylinder's rotating head forward rotates and drives rather than the shaft coupling of fixing and rotate, and drive connecting axle forward rotation through the shaft coupling, and drive whole rocking arm around connecting axle forward rotation, the rocking arm passes through the connecting plate and drives the forward rotation of end cover, the notch of cell body is kept away from to the portion that hides that makes the end cover, make the notch be in and open the state, accomplish and uncap, when closing the notch, through starting revolving cylinder, revolving cylinder's rotating head antiport drives the connecting axle antiport through the shaft coupling, and drive the end cover around the connecting axle antiport, make the portion that hides of end cover remove the notch top of cell body, make the notch close.

the invention has the beneficial effects that:

The switch of the end cover is driven by the rotary air cylinder, so that the stability of the switch of the end cover can be improved, the problems of opening angle and tightness can be solved, and the working efficiency can be improved; the end cover and the rotating arm are fixedly connected through the connecting plate, the structure is simple and compact, the cross section of the connecting part of the end cover is of an arc structure, the connecting plate is of a bent structure, and the special end cover and the connecting design of the end cover and the rotating arm can realize the closing and opening actions of the end cover in a smaller space and regulate the self height of the end cover when the end cover is opened; this switch cover mechanism need not artifical manual switch to the end cover, compares with traditional automatic switch lid mode, has bigger progress, not only can reduce workman's intensity of labour, improve work efficiency, can adapt to the narrow and small installation environment of installation space that switch cover allows among the various wet-type processing procedure equipment simultaneously, self high requirement, angle and compactness requirement when satisfying the end cover and opening.

Drawings

In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic structural view of a rotary tank body automatic cover opening and closing mechanism according to the present invention;

FIG. 2 is a partial structure view of the automatic cover opening and closing mechanism of the rotary tank of the present invention;

FIG. 3 is a schematic structural view of the end cap of the present invention;

FIG. 4 is a schematic structural view of a connecting plate according to the present invention;

Fig. 5 is a schematic view showing the structure of the rotor arm according to the present invention.

In the figure: 1. an end cap; 101. a connecting portion; 1011. a first mounting groove; 1012. a first bar-shaped through groove; 102. a cover portion; 2. a rotating arm; 21. an arm body; 211. a second mounting hole; 22. a connecting shaft; 3. a rotating cylinder; 4. a positioning tube; 5. a support block; 6. a connecting plate; 61. a first connecting arm; 62. a second connecting arm; 621. a second strip-shaped through groove; 7. a coupling; 8. a tank body.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1-5, the rotary type automatic cover opening and closing mechanism for the tank body comprises two end covers 1, wherein the two end covers 1 are positioned at the position of a notch above a tank body 8, rotating arms 2 are arranged on two sides of the two end covers 1, the end covers 1 are fixedly connected with the rotating arms 2 through connecting plates 6, one side of each rotating arm 2 is rotatably connected with a supporting block 5, the other side of each rotating arm 2 is connected with a coupler 7, and a rotary cylinder 3 is fixedly mounted on one side of the coupler 7.

End cover 1 includes connecting portion 101 and the portion 102 that covers that is located connecting portion 101 one side, connecting portion 101 and the structure that covers 102 as an organic whole, two first mounting grooves 1011 have been seted up to the upper surface of connecting portion 101, the notch of first mounting groove 1011 is the rectangle, and two first mounting groove 1011 sets up respectively with the both sides border position department of connecting portion 101 upper surface, first bar logical groove 1012 has been seted up at the middle part of first mounting groove 1011.

The cross section of the connecting part 101 is an arc-shaped structure.

Connecting plate 6 includes first linking arm 61 and second linking arm 62, second linking arm 62 fixed connection is in the one end of first linking arm 61, just first linking arm 61 with second linking arm 62 mutually perpendicular, two first mounting holes have been seted up on first linking arm 61, the logical groove 621 of second bar has been seted up on the second linking arm 62.

first connecting arm 61 sets up in first mounting groove 1011, first connecting arm 61 and first mounting groove 1011 looks adaptation, just first connecting arm 61 and the connecting portion 101 of end cover 1 pass through first bolt fixed connection, first bolt run-through is installed in first mounting hole and the logical groove 1012 of first bar, just first bolt and first mounting hole, the logical groove 1012 looks adaptation of first bar.

Rocking arm 2 includes arm body 21 and connecting axle 22, connecting axle 22 fixed connection is in one side of arm body 21, the second mounting groove has been seted up to arm body 21 one side, the notch of second mounting groove is the rectangle, two second mounting holes 211 have been seted up on the second mounting groove, second mounting hole 211 runs through arm body 21, and second linking arm 62 sets up in the second mounting groove, pass through second bolt fixed connection between arm body 21 and the second linking arm 62, the second bolt runs through to be installed in the logical groove 621 of second mounting hole 211 and second bar, just the logical groove 621 looks adaptation is led to second bolt and second mounting hole 211, second bar.

one of the connecting shafts 22 of the rotating arms 2 is rotatably connected with the supporting block 5, the other connecting shaft 22 of the rotating arm 2 is fixedly connected with one end of a coupler 7, and the other end of the coupler 7 is fixedly connected with a rotating head of the rotating cylinder 3.

The rotary cylinder 3 and the supporting block 5 are respectively and fixedly arranged on two symmetrical groove walls of the groove body 8.

One side fixed mounting of revolving cylinder 3 has three registration arm 4, three the radian annular distribution such as registration arm 4 is in week side of shaft coupling 7.

The working principle of the invention is as follows:

When the cover opening and closing mechanism is used, the two end covers 1 are arranged above the groove body 8, one sides of two connecting parts 101 on the two end covers 1 are close to each other, by starting the rotary cylinder 3, the rotating head of the rotary cylinder 3 rotates forwards and drives the shaft coupler 7 fixed with the rotary cylinder to rotate, and the shaft coupler 7 drives the connecting shaft 22 to rotate forwards, so as to drive the whole rotating arm 2 to rotate forwards around the connecting shaft 22, the rotating arm 2 drives the end cover 1 to rotate forwards through the connecting plate 6, so that the covering part 102 of the end cover 1 is far away from the notch of the groove body 8, so that the notch is in an open state, the cover opening is completed, when the notch is closed, by starting the rotary cylinder 3, the rotating head of the rotary cylinder 3 rotates backwards and drives the connecting shaft 22 to rotate backwards through the shaft coupler 7, and drives the end cover 1 to rotate backwards around the connecting, the notch is closed.

The switch of the end cover 1 in the invention adopts a driving mode of the rotary cylinder 3, so that the stability of the switch of the end cover 1 can be improved, the problems of opening angle and tightness can be solved, and the working efficiency can be improved; the end cover 1 and the rotating arm 2 are fixedly connected through the connecting plate 6, the structure is simple and compact, the cross section of the connecting part 101 of the end cover 1 is of an arc structure, the connecting plate 6 is of a bent structure, and the special end cover 1 and the connecting design of the end cover 1 and the rotating arm 2 can realize closing and opening actions of the end cover 1 in a smaller space and regulate the self height of the end cover 1 during opening;

This switch lid mechanism need not artifical manual switch to the end cover, compares with traditional automatic switch lid mode, has bigger progress, not only can reduce workman's intensity of labour, improve work efficiency, can adapt to the narrow and small installation environment of installation space that the switch lid allowed in various wet-type processing procedure equipment simultaneously, self high requirement, angle and compactness requirement when satisfying end cover 1 and opening.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.