阅读说明：本技术 一种电子束增熔丝材制造装置及方法 (A kind of electron beam increases fuse material manufacturing device and method ) 是由 巩水利 许海鹰 杨光 左从进 于 2019-09-06 设计创作，主要内容包括：一种电子束增熔丝材制造装置及方法,该装置进行熔丝增材时,通过控制系统控制Z向运动机构A、Z向运动机构B、Y向运动机构和X向工作台之间的移动,以及送丝机构的送丝速度,并调节冷阴极电子枪A和冷阴极电子枪B的焦点位置,使丝材熔化形成的熔滴以“搭桥”过渡方式沉积到金属基板上进行零件成形。本发明通过两个能形成圆形束斑的冷阴极电子枪倾斜一定角度对称安装,以及在两个圆形束斑交汇处将丝材垂直送进,使得整个加工过程无需丝束对中装置,从而大幅提高成形质量；采用冷阴极电子枪使得电子枪的阴极寿命最高达到数百小时以上,能够在恶劣的真空环境下长期稳定工作,且冷阴极电子枪结构简洁,体积小,从而降低设备制造成本。(A kind of electron beam increases fuse material manufacturing device and method, when the device carries out fuse increasing material, Z-direction movement mechanism A, Z-direction movement mechanism B, Y-direction motion and X are controlled to the movement between workbench by control system, and the wire feed rate of wire feeder, and the focal position of cold-cathode gun A and cold-cathode gun B are adjusted, so that silk material is melted the molten drop to be formed and is deposited to " bridging " transient mode and carries out part forming on metal substrate.The present invention is tilted a certain angle by two cold-cathode guns that can form circular beam spot and is symmetrically installed, and is vertically sent into silk material in Liang Ge circular beam spot intersection, so that whole process is not necessarily to tow centralising device, to greatly improve forming quality；Make the cathode life of electron gun be up to hundreds of hours or more using cold-cathode gun, can under severe vacuum environment long-term stable operation, and cold-cathode gun is simple for structure, small in size, to reduce equipment manufacturing costs.)

A kind of control system 1. electron beam increases fuse material manufacturing device, including vacuum chamber, and outside the vacuum chamber, Cooling system, vacuum system, jet system, high voltage power supply A and high voltage power supply B, which is characterized in that set in the vacuum chamber There are the Z-direction movement mechanism A installed in parallel and Z-direction movement mechanism B, both ends are separately mounted to Z-direction movement mechanism A and Z-direction fitness machine Y-direction motion on structure B, the Y-direction in the Y-direction motion move rifle fuse cell, and are set to the Y-direction and move rifle For X below fuse cell to workbench, the X is equipped with metal substrate to workbench；

It includes the fixed glides in the Y-direction motion that the Y-direction, which moves rifle fuse cell, and the fixed glides are equipped with Wire leading pipe, and centered on wire leading pipe and it is in " V "-shape the cold-cathode gun A and cold-cathode gun B of installation, it is described to lead The silk material of one end stretching of fiber tube, the other end are connected with wire feeder, and the cold-cathode gun A and cold-cathode gun B divide Not Shu Chu the identical electron beam of line be intersected in a bit, when carrying out fuse and increasing material, pass through the control system and control the Z-direction Movement mechanism A, Z-direction movement mechanism B, Y-direction motion and X between workbench movement and the wire feeder give Silk speed, and the focal position of the cold-cathode gun A and cold-cathode gun B are adjusted, so that silk material is melted the molten drop to be formed It is deposited to " bridging " transient mode and carries out part forming on the metal substrate.

2. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the cold-cathode gun A It is single structure with the high-tension cable in cold-cathode gun B.

3. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the wire leading pipe is long taper Structure and it is equipped with thread eye through both ends, the pore diameter range of the thread eye is 1~3.5mm, wherein

The small end of the wire leading pipe is towards the X to workbench, big end towards the wire feeder, the large end face of the wire leading pipe It is equipped with water inlet pipe and outlet pipe, inside is equipped with the water-cooling channel with the water inlet pipe and outlet pipe connection.

4. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the seal wire tube outer surface is logical It crosses plasma spraying method and sprays one layer of zirconia coating resistant to high temperature.

5. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the control system is to be based on The control system of CNC and PLC, including human-computer interaction interface, movement mechanism control unit, fuse Morphing Software unit, vacuum are patrolled It collects control unit, water-cool control unit, throughput control unit, high pressure and line and adjusts unit, wherein

The human-computer interaction interface controls fuse increasing material manufacturing equipment for operator；

The movement mechanism control unit is separately connected by the vacuum air plug on vacuum-chamber wall is installed on the indoor Z-direction fortune of vacuum Motivation structure A, Z-direction movement mechanism B, Y-direction motion, wire feeder speed regulating motor, and connect X to work also outside vacuum chamber The speed regulating motor of platform；

The fuse Morphing Software unit is moved for controlling movement mechanism according to desired trajectory, and control wire feeder is according to predetermined Wire feed rate wire feed, and exported according to the line that predetermined line size adjusts cold-cathode gun；

The vacuum logic control element is used to control starting/stopping of vacuum system intermediate pump group, switches vacuum valve, and The vacuum degree for the vacuum chamber that vacuum meter detects is acquired；

The water-cool control unit controls cathode water cooling unit, the Leng Yin of vacuum pump group water cooling unit, cold-cathode gun A respectively The starting of the cathode water cooling unit, the gun body shell water cooling unit of cold-cathode gun A and cold-cathode gun B of pole electron gun B/ Stop, and each water cooling unit hydraulic pressure and temperature are detected, it is too small for water flow pressure to be reported with water temperature over-high state It is alert；

The throughput control unit connects jet system, for controlling cold-cathode gun A, cold-cathode gun respectively The working gas input flow rate of B；

The high pressure adjusts unit with line and connect high voltage power supply A and high voltage power supply B, for controlling two high voltage power supplies respectively Starting/stopping, high pressure setting, line are adjusted.

6. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the cooling system includes cold But the water cooling unit A of vacuum system, cold-cathode gun A gun body shell and cold-cathode gun B gun body shell and wire leading pipe is cold But the cathode water cooling unit B of cold-cathode gun A, and the cathode water cooling unit C of cooling cold-cathode gun B, wherein

The water cooling unit A connects the water cooled pipeline of vacuum system outside vacuum chamber, and the water cooling unit A passes through vacuum-chamber wall Gun body water inlet/water outlet mouthpiece of setting is separately connected outside the gun body shell of cold-cathode gun A and the gun body of cold-cathode gun B The water cooled pipeline of shell and the water cooled pipeline of wire leading pipe；

The cathode water that cathode A water inlet/water outlet is connected to cold-cathode gun A is arranged by vacuum-chamber wall by the water cooling unit B Cold pipeline；

The cathode water that cathode B water inlet/water outlet is connected to cold-cathode gun B is arranged by vacuum-chamber wall by the water cooling unit C Cold pipeline.

7. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the vacuum system includes using In the vacuum meter of the detection indoor vacuum degree of vacuum, and the vacuum pump group being connect by vacuum pipe with internal vacuum chamber.

8. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the jet system is used The output line size of each cold-cathode gun is adjusted in control working gas flow, including is sent for cold-cathode gun A The air-flow regulation unit A of gas regulates and controls unit B with the air-flow supplied gas for cold-cathode gun B, wherein

The gas transmission pipe fitting A that the air-flow regulation unit A is arranged by vacuum-chamber wall is connected to the discharge cavity of cold-cathode gun A It is indoor；

The gas transmission pipe fitting B that air-flow regulation unit B is arranged by vacuum-chamber wall is connected to the electric discharge chamber of cold-cathode gun B It is interior.

9. electron beam according to claim 1 increases fuse material manufacturing device, which is characterized in that the vacuum indoor location is logical The thermal camera that control line is connected to control system is crossed, the thermal camera is for monitoring vacuum chamber Internal fuse forming process And the positioning of silk end, and by the video signal transmission of acquisition to control system.

10. a kind of electron beam increases fuse material manufacturing method, which is characterized in that using such as the described in any item electricity of claim 1-9 Beamlet increases fuse material manufacturing device, and the manufacturing method includes:

Metal substrate is installed on X on workbench, and passes through control system, cooling system, vacuum system, gas flow optimized system System, high voltage power supply A and high voltage power supply B are configured corresponding preset condition；

X is adjusted to workbench to setting position by control system, controls Z-direction movement mechanism A, the motor of Z-direction movement mechanism B is incited somebody to action Y-direction is moved rifle fuse cell and is moved downward at the position of 5~10mm of upper surface of the lower end surface of wire leading pipe apart from metal substrate, and Starting wire feeder makes the silk end in contact metal substrate of silk material；

Working gas is respectively fed to the discharge cavity of cold-cathode gun A Yu cold-cathode gun B by starting jet system Interior, and it is respectively turned on high voltage power supply A, high voltage power supply B, so that cold-cathode gun A and cold-cathode gun B is respectively formed electronics Beam A, electron beam B；

Adjust respectively the focus current in cold-cathode gun A and cold-cathode gun B make focal position and silk end melt metal, Molten bath is located at same position, and the silk material of focus point position is melted；

X is controlled by control system to move to workbench, the dynamic rifle fuse cell of Y-direction according to desired trajectory, while starting wire-feed motor Structure is by the synchronous feeding of silk material, to carry out current layer stack shaping；

When the current layer stack shaping finishes, high voltage power supply A, high voltage power supply B are closed by control system, and close wire feed Mechanism stops wire feed, controls control Z-direction movement mechanism A by control system, Z-direction movement mechanism B is moved up until reaching pre- Fixed height, adjustment X make the position of wire leading pipe lower end silk material reach next layer of stack shaping to workbench, the dynamic rifle fuse cell of Y-direction The initial position of layer opens high voltage power supply A, high voltage power supply B by control system, and opens wire feeder, starts wire feed, and control X processed moves rifle fuse cell to workbench, Y-direction and moves according to next layer of desired trajectory, while it is same by silk material to start wire feeder Step is sent into, to carry out next layer of stack shaping, until the part manufacturing of quasi- forming is completed.

Technical field

The present invention relates to increase fuse material manufacturing technology field, more particularly to a kind of electron beam increase fuse material manufacturing device and Method.

Background technique

Metal increases material manufacturing technology be it is a kind of using heat source fusing metal material according to desired trajectory shape rapid processing system A kind of technology for making part can be divided into powdery type and silk material class, powdery type increasing material manufacturing according to the original state of molten material Technology has laser coaxial powder feeding, electron beam selective melting, selective laser fusing etc., and silk material class increases material manufacturing technology has laser fuse Increasing material manufacturing, the increasing material manufacturing of electric arc fuse, electron beam fuse increasing material manufacturing etc..Wherein, electron beam fuse increases material manufacturing technology is Part forming is carried out under vacuum conditions, and vacuum environment provides good ring for the quick manufacture of the high added values part such as titanium alloy Border has been applied in aerospace and civilian industry field using the components of electron beam fuse increasing material manufacturing.

Currently, the electron beam fuse increasing material manufacturing equipment that domestic and international research institution is developed almost is all based on hot cathode electricity Determine the axis side wire feed technology of rifle or indoor dynamic rifle in the outdoor in beamlet source.Wherein, the electron gun structure of hot-cathode electric electron gun is complicated, Technical difficulty of operation is larger；Cathode life is short, influences processing efficiency and forming quality；The electron gun conduct of hot-cathode electric electron gun The dynamic rifle in interior uses, and electron gun self structure volume is larger, and need multicore high-tension cable transmission filament heating current, bias etc. Voltage, the magnitude of current, the factors such as the conductor inside multicore high-tension cable is more, and thickness of insulating layer is big cause cable size larger, curved Bilge radius is big, significantly impacts the effective range of work of part in vacuum chamber.And axis side wire feed needs cross slid platform mechanism to realize silk Beam centering, it is more demanding to operator's technical capability；The installation site of cross slid platform mechanism will affect fuse forming and effectively add Work range；And silk material is larger to the distance of beam spot fusing point from wire guiding nipple, since the stress that silk material coiling process generates is difficult quickly Release is easy the deformation of silk material fuse, so that forming accuracy hardly results in guarantee.In addition, hot cathode electricity rifle requires independent vacuum System ensures that the vacuum degree of electron gun section is sufficiently high, but during fuse increasing material manufacturing, metal vapors is larger, leads to vacuum environment It is very severe, easily electron gun is caused to discharge, to influence forming quality.

Therefore, it inventor provides a kind of electron beam and increases fuse material manufacturing device and method.

Summary of the invention

The embodiment of the invention provides a kind of electron beams to increase fuse material manufacturing device and method, passes through in a vacuum chamber Two cold-cathode guns that can form circular beam spot are tilted a certain angle and are symmetrically installed, while in Liang Ge circular beam spot intersection Silk material is vertically sent into, whole process is not necessarily to tow centralising device, and the service life of cold-cathode gun is longer, thus Reduce equipment manufacturing costs.

In a first aspect, the embodiment of the present invention proposes a kind of electron beam increasing fuse material manufacturing device, which includes true Empty room, and control system, cooling system, vacuum system, jet system, high voltage power supply outside the vacuum chamber A and high voltage power supply B, the vacuum chamber is interior to be equipped with the Z-direction movement mechanism A and Z-direction movement mechanism B installed in parallel, and both ends are pacified respectively Y-direction motion on Z-direction movement mechanism A and Z-direction movement mechanism B, the Y-direction in the Y-direction motion move rifle Fuse cell, and the X below rifle fuse cell is moved to workbench set on the Y-direction, the X is equipped with Metal Substrate to workbench Plate；

It includes the fixed glides in the Y-direction motion that the Y-direction, which moves rifle fuse cell, in the fixed glides Equipped with wire leading pipe, and centered on wire leading pipe and it is in " V "-shape the cold-cathode gun A and cold-cathode gun B of installation, institute State the silk material stretched out one end of wire leading pipe, the other end is connected with wire feeder, the cold-cathode gun A and cold-cathode gun B exports the identical electron beam of line respectively and is intersected in a bit, when carrying out fuse increasing material, by described in control system control Z-direction movement mechanism A, Z-direction movement mechanism B, Y-direction motion and X between workbench movement and the wire feeder Wire feed rate, and adjust the focal position of the cold-cathode gun A and cold-cathode gun B, make silk material melt to be formed it is molten Drop is deposited to " bridging " transient mode carries out part forming on the metal substrate.

Further, the high-tension cable in the cold-cathode gun A and cold-cathode gun B is single structure.

Further, the wire leading pipe is long pyramidal structure and is equipped with the thread eye for running through both ends, the hole of the thread eye Diameter range is 1~3.5mm, wherein

The small end of the wire leading pipe towards the X to workbench, big end towards the wire feeder, the wire leading pipe it is big End face is equipped with water inlet pipe and outlet pipe, and inside is equipped with the water-cooling channel with the water inlet pipe and outlet pipe connection.

Further, the seal wire tube outer surface sprays one layer of zirconium oxide resistant to high temperature by plasma spraying method and applies Layer.

Further, the control system is the control system based on CNC and PLC, including human-computer interaction interface, fitness machine Structure control unit, fuse Morphing Software unit, vacuum logic control element, water-cool control unit, throughput control unit, high pressure Unit is adjusted with line, wherein

The human-computer interaction interface controls fuse increasing material manufacturing equipment for operator；

The movement mechanism control unit is separately connected by the vacuum air plug on vacuum-chamber wall and is installed on the indoor Z of vacuum To movement mechanism A, Z-direction movement mechanism B, Y-direction motion, wire feeder speed regulating motor, and also outside vacuum chamber connect X to The speed regulating motor of workbench；

The fuse Morphing Software unit is moved according to desired trajectory for controlling movement mechanism, control wire feeder according to Predetermined wire feed rate wire feed, and exported according to the line that predetermined line size adjusts cold-cathode gun；

The vacuum logic control element is used to control starting/stopping of vacuum system intermediate pump group, switches vacuum valve Door, and the vacuum degree for the vacuum chamber that vacuum meter detects is acquired；

The water-cool control unit control respectively vacuum pump group water cooling unit, cold-cathode gun A cathode water cooling unit, The gun body shell water cooling unit of the cathode water cooling unit of cold-cathode gun B, cold-cathode gun A and cold-cathode gun B Starting/stopping, and each water cooling unit hydraulic pressure and temperature are detected, it is too small for water flow pressure with water temperature over-high state into Row alarm；

The throughput control unit connects jet system, for controlling cold-cathode gun A, cold cathode electricity respectively The working gas input flow rate of sub- rifle B；

The high pressure adjusts unit with line and connect high voltage power supply A and high voltage power supply B, for controlling two high-voltage electricity respectively Starting/the stopping in source, high pressure setting, line are adjusted.

Further, the cooling system includes cooling vacuum system, cold-cathode gun A gun body shell and cold cathode electricity The water cooling unit A of sub- rifle B gun body shell and wire leading pipe, the cathode water cooling unit B of cooling cold-cathode gun A, and cooling are cold The cathode water cooling unit C of cathode electron gun B, wherein

The water cooling unit A connects the water cooled pipeline of vacuum system outside vacuum chamber, and the water cooling unit A passes through vacuum Gun body water inlet/water outlet mouthpiece of locular wall setting is separately connected the gun body shell of cold-cathode gun A and the rifle of cold-cathode gun B The water cooled pipeline of body case water cooled pipeline and wire leading pipe；

The yin that cathode A water inlet/water outlet is connected to cold-cathode gun A is arranged by vacuum-chamber wall by the water cooling unit B Pole water cooled pipeline；

The yin that cathode B water inlet/water outlet is connected to cold-cathode gun B is arranged by vacuum-chamber wall by the water cooling unit C Pole water cooled pipeline.

Further, the vacuum system includes the vacuum meter for detecting the indoor vacuum degree of vacuum, and by true The vacuum pump group that vacant duct is connect with internal vacuum chamber.

Further, the jet system is for controlling working gas flow to adjust each cold-cathode gun Line size is exported, the air-flow including supplying gas for cold-cathode gun A regulates and controls unit A and is the gas that cold-cathode gun B supplies gas Stream regulation unit B, wherein

The gas transmission pipe fitting A that the air-flow regulation unit A is arranged by vacuum-chamber wall is connected to putting for cold-cathode gun A In electric chamber；

The gas transmission pipe fitting B that air-flow regulation unit B is arranged by vacuum-chamber wall is connected to the discharge cavity of cold-cathode gun B It is indoor.

Further, the vacuum indoor location is connected to the thermal camera of control system by control line, described red Outer video camera is positioned for monitoring vacuum chamber Internal fuse forming process and silk end, and is to control by the video signal transmission of acquisition System.

Second aspect provides a kind of manufacturing method of electron beam increasing fuse material manufacturing device using first aspect, should Method includes:

Metal substrate is installed on X on workbench, and passes through control system, cooling system, vacuum system, gas flow optimized System, high voltage power supply A and high voltage power supply B are configured corresponding preset condition；

X is adjusted to workbench to setting position by control system, controls the electricity of Z-direction movement mechanism A, Z-direction movement mechanism B Y-direction is moved the position that rifle fuse cell is moved downward to upper surface 5~10mm of the lower end surface of wire leading pipe apart from metal substrate by machine Locate, and start wire feeder to make the silk end in contact metal substrate of silk material；

Start jet system and working gas is respectively fed to putting to cold-cathode gun A and cold-cathode gun B In electric chamber, and it is respectively turned on high voltage power supply A, high voltage power supply B, is respectively formed cold-cathode gun A and cold-cathode gun B Electron beam A, electron beam B；

The focus current adjusted in cold-cathode gun A and cold-cathode gun B respectively melts focal position and silk end Metal, molten bath are located at same position, and the silk material of focus point position is melted；

It controls X by control system to move to workbench, the dynamic rifle fuse cell of Y-direction according to desired trajectory, while starting is sent Silk mechanism is by the synchronous feeding of silk material, to carry out current layer stack shaping；

When the current layer stack shaping finishes, high voltage power supply A, high voltage power supply B are closed by control system, and close Wire feeder stops wire feed, controls control Z-direction movement mechanism A by control system, Z-direction movement mechanism B is moved up until reaching To predetermined altitude, adjust X makes the position of wire leading pipe lower end silk material reach next layer heap product to workbench, the dynamic rifle fuse cell of Y-direction The initial position of shaping layer opens high voltage power supply A, high voltage power supply B by control system, and opens wire feeder, starts wire feed, And it controls X and is moved to workbench, the dynamic rifle fuse cell of Y-direction according to next layer of desired trajectory, while starting wire feeder for silk Material is synchronous to be sent into, to carry out next layer of stack shaping, until the part manufacturing of quasi- forming is completed.

To sum up, the present invention is tilted a certain angle by two cold-cathode guns that can form circular beam spot and is symmetrically installed, And be vertically sent into silk material in Liang Ge circular beam spot intersection, so that whole process is not necessarily to tow centralising device, thus Greatly improve forming quality；The cathode life of electron gun is made to be up to hundreds of hours or more, energy using cold-cathode gun Enough long-term stable operations under severe vacuum environment, and cold-cathode gun is simple for structure, it is small in size, it is used as in vacuum chamber and moves When rifle, movement mechanism load can reduce, to reduce equipment manufacturing costs；In addition, using two cold-cathode guns, so that function Rate is big, and forming efficiency will greatly improve.

Detailed description of the invention

In order to illustrate the technical solution of the embodiments of the present invention more clearly, will make below to required in the embodiment of the present invention Attached drawing is briefly described, it should be apparent that, drawings described below is only some embodiments of the present invention, for For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.

Fig. 1 is a kind of general structure schematic diagram of electron beam fuse increasing material manufacturing device of the embodiment of the present invention.

Fig. 2 is the schematic diagram of wire leading pipe in the present invention.

Fig. 3 is the schematic diagram of control system in the present invention.

Fig. 4 is the schematic diagram of cooling system in the present invention.

Fig. 5 is a kind of flow chart of electron beam fuse increasing material manufacturing method in the present invention.

In figure:

1- control system；101- human-computer interaction interface；102- movement mechanism control unit；103- fuse Morphing Software list Member；104- vacuum logic control element；105- water-cool control unit；1051- vacuum pump group water cooling unit；1052- cold cathode electricity The cathode water cooling unit of sub- rifle A；The cathode water cooling unit of 1053- cold-cathode gun B；1054- cold-cathode gun A and Leng Yin The gun body shell water cooling unit of pole electron gun B；106- throughput control unit；107- high pressure and line adjust unit；2- is cooling System；3- vacuum system；30- vacuum meter；31- vacuum pipe；32- vacuum pump group；4- jet system；5- high voltage power supply A； 51- high-tension cable A；6- high voltage power supply B；61- high-tension cable B；7-Z is to movement mechanism A；71-Z is to speed regulating motor A；72- column A；73- lead screw A；74- fixing bearing A1；75- fixing bearing A2；8-Z is to movement mechanism B；81-Z is to speed regulating motor B；82- column B；83- lead screw B；84- fixing bearing B1；85- fixing bearing B2；9-Y is to dynamic rifle fuse cell；10- cold-cathode gun A；11- Cold-cathode gun B；111- electron beam A；112- electron beam B；12- wire leading pipe；122- zirconia coating；123- thread eye； 124- water-cooling channel；13- wire feeder；14- fixed glides；15-X is to workbench；16- metal substrate；17- part；18- vacuum Room；181- control line 181；182- thermal camera；19-Y is to movement mechanism；191-Y is to speed regulating motor；192- horizontal beam； 193- lead screw C；194- fixing bearing C1；195- fixing bearing C2；20- silk material.

Specific embodiment

Embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples.Following embodiment it is detailed Thin description and attached drawing cannot be used to limit the scope of the invention for illustratively illustrating the principle of the present invention, i.e., of the invention It is not limited to described embodiment, covers part, component and connection type under the premise of without departing from the spirit of the present invention Any modification, replacement and improvement.

It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail below with reference to accompanying drawings and in conjunction with the embodiments.

Fig. 1 is a kind of general structure schematic diagram of electron beam fuse increasing material manufacturing device of the embodiment of the present invention, such as Fig. 1 institute Show, which includes vacuum chamber 18, and the control system 1 outside the vacuum chamber 18, cooling system 2, vacuum system 3, jet system 4, high voltage power supply A 5 and high voltage power supply B 6, the vacuum chamber 18 is interior to be equipped with the Z-direction movement installed in parallel Mechanism A 7 and Z-direction movement mechanism B 8, both ends are separately mounted to the fortune of the Y-direction on Z-direction movement mechanism A 7 and Z-direction movement mechanism B 8 Motivation structure 19, the Y-direction in the Y-direction motion 19 move rifle fuse cell 9, and are set to the Y-direction and move rifle fuse list Member 9 lower section X to workbench 15, the X on workbench 15 be equipped with metal substrate 16, the Y-direction move rifle fuse cell 9 include Fixed glides 14 in the Y-direction motion 19, the fixed glides 14 are equipped with wire leading pipe 12, and with wire leading pipe Centered on 12 and it is in " V "-shape the cold-cathode gun A 10 and cold-cathode gun B 11 of installation, the one of the wire leading pipe 12 The silk material 20 stretched out, the other end is held to be connected with wire feeder 13, the cold-cathode gun A 10 and cold-cathode gun B 11 The identical electron beam of output line is intersected in a bit respectively.

It should be noted that manufacturing device of the present invention is controlled described when carrying out fuse increasing material by the control system 1 Z-direction movement mechanism A 7, Z-direction movement mechanism B 8, Y-direction motion 19 and X are to the movement between workbench 15 and described send The wire feed rate of silk mechanism 13, and the focal position of the cold-cathode gun A 10 and cold-cathode gun B 11 are adjusted, make The molten drop that the fusing of silk material 20 is formed is deposited on the metal substrate 16 with " bridging " transient mode carries out part forming.Due to this Invention is tilted a certain angle by two cold-cathode guns that can form circular beam spot and is symmetrically installed, and in two circular beams Silk material 20 is vertically sent by spot intersection, so that whole process is not necessarily to tow centralising device, can simplify control system 1, To greatly improve forming quality.And rush-harvesting and rush-planting structure is used, power not only can be improved, but also can be empty in limited vacuum chamber Between, increase valid shaping range.

Further, the high-tension cable in the cold-cathode gun A 10 and cold-cathode gun B 11 is single knot Structure, due to using cold-cathode gun, so the high-voltage transmission of cold cathode electron electron gun is extremely succinct, it is only necessary to single high-voltage electricity Cable can be realized, and use single structure, so that bending radius is small, can make indoor dynamic rifle and use, electron gun greatly improved Movement travel.And the cathode life of electron gun of the present invention is up to hundreds of hours or more, to reduce filament replacement Frequency effectively improves forming quality and forming efficiency, enables apparatus of the present invention steady in a long-term under severe vacuum environment Work.In addition, cold-cathode gun is simple for structure, and it is small in size, when being used as in vacuum chamber dynamic rifle, it can reduce movement mechanism load, To reduce equipment manufacturing costs.

Specifically, being respectively mounted on the cold-cathode gun A 10 and the intracorporal beam channel of 11 rifle of cold-cathode gun B Focus coil, two focus coils are used to adjust the focal position of line in two electron guns.

Referring to Fig. 2, the wire leading pipe 12 is long pyramidal structure and is equipped with the thread eye 123 for running through both ends, the seal wire The pore diameter range in hole 123 is 1~3.5mm, can select leading for different seal wire apertures according to 20 diameter of silk material used in the present invention Fiber tube 12.

Specifically, the small end of the wire leading pipe 12 towards the X to workbench 15, big end towards the wire feeder 13, The large end face of the wire leading pipe 13 is equipped with water inlet pipe and outlet pipe, and inside is equipped with the water with the water inlet pipe and outlet pipe connection Cold passage 124, convenient for being cooled down to the wire leading pipe 12, to ensure 12 long-term stable operation of wire leading pipe.

As another preferred embodiment, 12 outer surface of wire leading pipe is resistance to by one layer of plasma spraying method spraying The zirconia coating 122 of high temperature, the zirconia coating 122 is for preventing electron beam in line adjustment process to be irradiated to the seal wire It is damaged on pipe 12.

Referring to Fig. 3, the control system 1 is the control system based on CNC and PLC, including human-computer interaction interface 101, Movement mechanism control unit 102, fuse Morphing Software unit 103, vacuum logic control element 104, water-cool control unit 105, Throughput control unit 106, high pressure and line adjust unit 107, wherein

The human-computer interaction interface 101 controls fuse increasing material manufacturing equipment for operator, to realize entire add Work technical process；

The movement mechanism control unit 102 is separately connected by the vacuum air plug on 18 wall of vacuum chamber and is installed on vacuum chamber The speed regulating motor of Z-direction movement mechanism A 10, Z-direction movement mechanism B 11, Y-direction motion 19, wire feeder 13 in 18, and also Speed regulating motor of the X to workbench 15 is connected outside vacuum chamber 18；

The fuse Morphing Software unit 103 is moved for controlling movement mechanism according to desired trajectory, controls wire feeder 13 according to predetermined wire feed rate wire feed, and exports according to the line that predetermined line size adjusts cold-cathode gun；

The vacuum logic control element 104 is used to control starting/stopping of 4 intermediate pump group 32 of vacuum system, switching Vacuum valve, and the vacuum degree for the vacuum chamber 18 that vacuum meter 30 detects is acquired；

The water-cool control unit 105 controls the cathode water of vacuum pump group water cooling unit 1051, cold-cathode gun A respectively The gun body of cold unit 1052, the cathode water cooling unit 1053 of cold-cathode gun B, cold-cathode gun A and cold-cathode gun B Starting/stopping of shell water cooling unit 1054, and each water cooling unit hydraulic pressure and temperature are detected, for water flow pressure mistake It is small to alarm with water temperature over-high state；

The throughput control unit 106 connects jet system 4, for control respectively cold-cathode gun A 10, The working gas input flow rate of cold-cathode gun B 11；

The high pressure adjusts unit 107 with line and connect high voltage power supply A 5 and high voltage power supply B 6, for controlling two respectively Starting/stopping of platform high voltage power supply, high pressure setting, line are adjusted.

Referring to Fig. 4, the cooling system includes vacuum pump group cooling unit 1051, cooling 10 rifle of cold-cathode gun A The water cooling unit 1053 and cold-cathode gun A of the water cooling unit 1052 of cathode, cooling 11 rifle cathode of cold-cathode gun B The water cooling unit 1054 of 10 gun body shells and 11 gun body shell of cold-cathode gun B and wire leading pipe, wherein

The vacuum pump group cooling unit 1051 connects the water cooled pipeline of vacuum system 3 outside vacuum chamber 18；

The water cooling unit 1052 of the cold-cathode gun A is arranged cathode A water inlet/water outlet by vacuum-chamber wall and is connected to The cathode water cooled pipeline of cold-cathode gun A 10；

The water cooling unit 1053 of the cold-cathode gun B is arranged cathode B water inlet/water outlet by vacuum-chamber wall and is connected to The cathode water cooled pipeline of cold-cathode gun B 11；

And the water of the 10 gun body shell of cold-cathode gun A and 11 gun body shell of cold-cathode gun B and wire leading pipe Gun body water inlet/water outlet mouthpiece that cold unit 1054 is arranged by vacuum-chamber wall is separately connected 10 gun body shell of cold-cathode gun A With the water cooled pipeline of 11 gun body shell of cold-cathode gun B and the water cooled pipeline of wire leading pipe 12.

Referring again to Fig. 1, the vacuum system 3 includes the vacuum meter 30 for detecting the vacuum degree in vacuum chamber 18, with And the vacuum pump group 32 by being connected inside vacuum pipe 31 and vacuum chamber 18, by the vacuum pump group 32 by the vacuum chamber Vacuum degree in 18 is drawn into setting value.

Further, installation passes through the thermal camera that control line 181 is connected to control system 1 in the vacuum chamber 18 182, the thermal camera 182 is for monitoring 18 Internal fuse forming process of vacuum chamber and the positioning of silk end, and by the video of acquisition Signal is transferred to control system 1.

As another preferred embodiment, the jet system 4 adjusts each for controlling working gas flow The output line size of a cold-cathode gun, the air-flow including supplying gas for cold-cathode gun A 10 regulate and control unit A and are cold The air-flow that cathode electron gun B 11 supplies gas regulates and controls unit B, wherein

The gas transmission pipe fitting A that the air-flow regulation unit A is arranged by vacuum-chamber wall is connected to cold-cathode gun A 10 Discharge cavity room in；

The gas transmission pipe fitting B that air-flow regulation unit B is arranged by vacuum-chamber wall is connected to putting for cold-cathode gun B 11 In electric chamber.

Referring again to Fig. 1, heretofore described high voltage power supply A 5 is identical as 6 topological circuit structure of high voltage power supply B, output Power is identical.High voltage power supply A 5 exports high pressure and is connected by the sealing of 18 wall of vacuum chamber through component by high-tension cable A 51 To the cathode of the cold-cathode gun A 10 in vacuum chamber 18, high voltage power supply A 5 is by high-voltage feedback signal A and Beam Feedback signal A feedback adjusts unit 107 with line to the high pressure in control system 1；High voltage power supply B 6 exports high pressure and passes through high-tension cable B 61 The cathode of the cold-cathode gun B 11 in vacuum chamber 18, high voltage power supply are connected to through component by the sealing of 18 wall of vacuum chamber B 6 feeds back high-voltage feedback signal B and Beam Feedback signal B to the high pressure and line adjusting unit 107 in control system 1.

It should be noted that heretofore described Z-direction movement mechanism A 7 and Z-direction movement mechanism B 8 is identical structure, Using ball screw framework, moving synchronously for 9 both ends of rifle fuse cell is moved convenient for the Y-direction.

The Z-direction movement mechanism A 7 is by Z-direction speed regulating motor A71, column A 72, lead screw as a preferred implementation manner, A 73, fixing bearing A1 74, fixing bearing A2 75 are formed, and central post A 72 is installed vertically on the following table inside vacuum chamber 18 Face, a medial surface for being fixed on vacuum chamber 18 on one side of the column A 72；Lead screw A 73 and fixing bearing A1 74, consolidate Dead axle holds A2 75, and to be installed on column A 72 ipsilateral；Fixing bearing A1 74 is installed on the upper end of lead screw A 73, fixing bearing A2 75 It is installed on the lower end of lead screw A 73, Z-direction speed regulating motor A 71 is installed on 73 upper end lead screw A.

Specifically, the Z-direction movement mechanism B 8 is by Z-direction speed regulating motor B 81, column B 82, lead screw B 83, fixing bearing B1 84, fixing bearing B2 85 composition, central post B 82 are installed vertically on the lower surface inside vacuum chamber 18, the column B 82 another medial surface for being fixed on vacuum chamber 18 on one side；Lead screw B 83 and fixing bearing B1 84, fixing bearing B2 85 to be installed on column B82 ipsilateral；Fixing bearing B1 84 is installed on the upper end of lead screw B 83, and fixing bearing B2 85 is installed on lead screw The lower end of B83, Z-direction speed regulating motor B 81 are installed on 83 upper end lead screw B.

As another preferred embodiment, the Y-direction motion 19 is by Y-direction speed regulating motor 191, horizontal beam 192, silk Thick stick C 193, fixing bearing C1 194, fixing bearing C2 195 are formed, wherein

The lead screw C 193 is by the way that fixing bearing C1 194 is installed at both ends respectively, fixing bearing C2 195 is installed on level The one side of beam 192；The Y-direction speed regulating motor 191 is installed on one end of lead screw C 193；One end of the horizontal beam 192 passes through silk Base A is installed on lead screw A 73, and the other end of the horizontal beam 192 is installed on lead screw B 83 by nut seat B；The water Flat-topped ridge 192 is realized by the forward/reverse of Z-direction speed regulating motor A 71 and Z-direction speed regulating motor B 81 and is moved up and down；The Z-direction tune Speed motor A 71 is identical as the movement velocity of Z-direction speed regulating motor B 81, and the direction of motion is synchronous, and guarantee is installed on lead screw A 73, silk Horizontal beam 192 on thick stick B 83 is not in stuck phenomenon.

Referring again to Fig. 1, specifically, the fixed glides 14 are installed on lead screw C193 by nut seat C.The fixation Slide plate 14 drives cold-cathode gun A 10, cold-cathode gun B 11, wire leading pipe by 191 forward/reverse of Y-direction speed regulating motor 12, wire feeder 13 carries out left and right movement.The X is installed on lead screw D to workbench 15 by screw D, and X is to speed regulating motor Be installed on outside vacuum chamber, by control X to the forward/reverse of speed regulating motor can control X to workbench 15 in vacuum chamber 18 into The forward and backward movement of row, and the X can be reached on the guide table outside vacuum chamber 18 to workbench 15.

To sum up, the present invention is tilted a certain angle by two cold-cathode guns that can form circular beam spot and is symmetrically installed, And be vertically sent into silk material 20 in Liang Ge circular beam spot intersection, so that whole process is not necessarily to tow centralising device, from And greatly improve forming quality；The cathode life of electron gun is made to be up to hundreds of hours or more using cold-cathode gun, Can under severe vacuum environment long-term stable operation, and cold-cathode gun is simple for structure, small in size, is used as in vacuum chamber When dynamic rifle, movement mechanism load can reduce, to reduce equipment manufacturing costs；In addition, using two cold-cathode guns, so that Power is big, and forming efficiency will greatly improve.

Second aspect, the present invention also provides a kind of electron beam fuse increasing material manufacturing method, this method uses first aspect Electron beam fuse increasing material manufacturing device as shown in Figure 1, include the following steps S110~step S160:

Metal substrate is installed on X on workbench by step S110, and passes through control system 1, cooling system 2, vacuum system System 3, jet system 4, high voltage power supply A 5 and high voltage power supply B 6 are configured corresponding preset condition.

Step S120 adjusts X by control system 1 and arrives setting position to workbench 15, controls Z-direction movement mechanism A 7, Z Y-direction is moved into rifle fuse cell 9 to the motor of movement mechanism B 8 and is moved downward to the lower end surface of wire leading pipe 12 apart from metal substrate 16 5~10mm of upper surface position at, and start wire feeder 13 and make the silk end in contact metal substrate 16 of silk material 20.

Step S130 starts jet system 4 for working gas and is respectively fed to cold-cathode gun A 10 and Leng Yin In the discharge cavity room of pole electron gun B 11, and it is respectively turned on high voltage power supply A 5, high voltage power supply B 6, makes cold-cathode gun A 10 Electron beam A111, electron beam B 112 are respectively formed with cold-cathode gun B 11.

Step S140, the focus current adjusted in cold-cathode gun A 10 and cold-cathode gun B 11 respectively make focus Position and silk end fusing metal, molten bath are located at same position, and the silk material 20 of focus point position is melted.

Step S150 controls X by control system 1 and moves rifle fuse cell 9 to workbench 15, Y-direction and transport according to desired trajectory It is dynamic, while starting wire feeder 13 by the synchronous feeding of silk material 20, to carry out current layer stack shaping.

Step S160 closes high voltage power supply A 5, high pressure by control system 1 when the current layer stack shaping is finished Power supply B 6, and wire feeder 13 is closed, stop wire feed, control Z-direction movement mechanism A 7 is controlled by control system 1, Z-direction moves Mechanism B 8 is moved up until reaching predetermined altitude, and adjustment X makes under wire leading pipe 12 to workbench 15, the dynamic rifle fuse cell 9 of Y-direction The position of terminal filament material 20 reaches the initial position of next layer heap product shaping layer, opens high voltage power supply A 5, height by control system 1 Voltage source B 6, and wire feeder 13 is opened, start wire feed, and control X and move rifle fuse cell 9 under to workbench 15, Y-direction One layer of desired trajectory movement, while starting wire feeder 13 by the synchronous feeding of silk material 20, to carry out next layer of stack shaping, directly Part manufacturing to quasi- forming is completed.

Referring to Fig. 5, needing to be further illustrated, the present invention provides a kind of electron beam fuse increasing material manufacturing sides The detailed step of method is as follows:

Step 1: checking the water, electricity, gas of the external connection of apparatus of the present invention, 18 gate of vacuum chamber is opened, by metal substrate 16 are installed on X on workbench 15；

Step 2: silk material 20 used is installed on wire feeder 13, and silk material 20 is introduced into wire leading pipe 12, closes vacuum 18 gate of room；

Step 3: by human-computer interaction interface 101, start cooling system 2, cooling water is introduced into cold cathode electron respectively The cathode of rifle A 10, the cathode of cold-cathode gun B 11, the gun body shell of cold-cathode gun A 10, cold-cathode gun B 11 gun body shell, wire leading pipe 12 and vacuum pump group 32；

Step 4: preheating vacuum pump group 32 reaches sets requirement until preheating time；

Step 5: starting vacuum pump group 32 starts to vacuumize, the vacuum logic control element 104 of control system 1 is according to true Sky 30 testing results of meter judges the high/low vacuum of vacuum pump group 32 switching Startup time, and detect vacuum degree and whether reach design and want It asks；

Step 6: 18 vacuum degree of vacuum chamber meet design requirements, and continues to vacuumize；

Step 7: by the movement mechanism control unit 102 of control system 1, adjusting X to workbench 15 and arrive setting position, Control Z-direction movement mechanism A 7, Y-direction is moved rifle fuse cell 9 and moved down by the motor of Z-direction movement mechanism B 8；It is taken the photograph by infrared Camera 182 detects at the position of upper surface about 5~10mm of 12 lower end surface of wire leading pipe apart from metal substrate 16, stops moving down；

Step 8: starting wire feeder 13 makes an end in contact metal substrate 16, stops wire feed；

Step 9: the throughput control unit 106 in control system 1 starts jet system 4, and working gas is distinguished It is sent in the discharge cavity room of cold-cathode gun A 10 and cold-cathode gun B 11, starts high voltage power supply A 5 and adjusting adds Fast voltage starts high voltage power supply B6 and adjusts acceleration voltage to setting value to setting value, makes cold-cathode gun A respectively 10, the discharge cavity office work gas discharge of cold-cathode gun B11, and pass through cold-cathode gun A 10, cold cathode respectively Acceleration voltage accelerates between 11 cathode of electron gun B, anode, forms electron beam A 111, electron beam B112；

Step 10: the focus coil A of cold-cathode gun A 10, the focus coil B of cold-cathode gun B11 are adjusted respectively Focus current, make the focal position fusing of electron beam A 111, electron beam B 112 by the silk material 20 of 12 output end of wire leading pipe, Focal position and silk end fusing metal, molten bath is set to be located at same position；

Step 11: the fuse Morphing Software unit 103 of control system 1 is according to the movement rail for presetting current shaping layer Mark, control Y-direction moves rifle fuse cell 9, X is moved to workbench 15 according to desired trajectory, starts wire feeder 13, and silk material 20 is synchronous It is sent into；

Step 12: control system 1 detect current layer stack shaping whether completion of processing, do not complete, then repeatedly step 10 One；

Step 13: current layer stack shaping finishes, then closes high voltage power supply A 5, high voltage power supply B6, closes line, send Silk mechanism 13 stops wire feed；

Step 14: the fuse Morphing Software unit 103 of control system is according to preset next stack shaping layer Highly, control control Z-direction movement mechanism A 7, Z-direction movement mechanism B 8 drive Y-direction to move rifle fuse cell 9 and move up, Zhi Daoda To predetermined altitude, that is, stop moving up；

Step 15: adjustment X moves rifle fuse cell 9 to workbench 15, Y-direction, makes the position of 12 lower end silk material 20 of wire leading pipe, Reach the initial position of next stack shaping layer described in step 14, start high voltage power supply A 5, high voltage power supply B 6, opens beam Stream starts wire feed, and the fuse Morphing Software unit 103 of control system 1 sets the motion profile of next stack shaping layer, Control Y-direction moves rifle fuse cell 9, X is moved to workbench 15 according to desired trajectory, and silk material 20 is sent into simultaneously, starts to shape；

Step 10 six: the next stack shaping layer of control system judgment step 14 whether completion of processing, do not finish, Repeat step 15；

Step 10 seven: next stack shaping layer completion of processing described in step 14 then closes high voltage power supply A 5, high pressure Power supply B 6 closes line, stops wire feed；

Step 10 eight: whether the part 17 of quasi- forming manufactures completions, unfinished, then repeatedly step 14~step 10 seven；

Step 10 nine: the part 17 of quasi- forming, which manufactures, to be completed, and so that Y-direction is moved rifle fuse cell 9 and is moved up disengaging forming zero Part 17, and the motor of all movement mechanisms is closed, wire feeder 13 is closed, closed gas flow control system 4 is cooling to part 17 Afterwards, vacuum pump group 32 is closed, vacuum chamber 18 is deflated to atmospheric pressure, opens vacuum chamber 18, X is moved to guide table to workbench 15 On, remove formation of parts 17；

Step 2 ten: whether need to continue to process next part；

Step 2 11: needs continue to process part, check whether remaining silk material 20 can shape next part, not enough Then need replacing new wire tray, start wire feeder 13, imported into wire leading pipe 12 by silk material 20, and silk end position be adjusted to away from From within the scope of 12 lower end surface 5-6mm of wire leading pipe, stop wire feed；

Step 2 12: reinstalling metal substrate 16, and X is moved in vacuum chamber 18 to workbench 15, closes vacuum 18 gate of room repeats step 5~step 2 ten；

Step 2 13: processing part is needed not continue to, then closes all water, electricity, gas.

It should be clear that all the embodiments in this specification are described in a progressive manner, each embodiment it Between the same or similar part may refer to each other, the highlights of each of the examples are it is different from other embodiments it Place.For the embodiment of method, related place can be found in the part explanation of apparatus embodiments.The invention is not limited to upper Literary particular step described and shown in figure and structure.Also, it for brevity, omits here to known method technology Detailed description.

The above description is only an example of the present application, is not restricted to the application.The scope of the present invention is not being departed from In the case where to those skilled in the art, various changes and changes are possible in this application.It is all in spirit herein and Any modification, equivalent replacement, improvement and so within principle, should be included within the scope of claims hereof.