阅读说明：本技术 一种晶体生长炉 (A kind of crystal growing furnace ) 是由 胡卫东 杨利涛 刘侃 王冬 于 2019-08-02 设计创作，主要内容包括：本发明提出的一种晶体生长炉,包括炉体,炉体包括壳体、内筒体和至少一个隔热毡,内筒体采用绝缘保温材料制成,隔热毡设置在内筒体内并将内筒体隔成多个温度区,每个隔热毡中部均设有用于容纳籽晶杆和晶体通过的通孔,每个温度区设有用于测量该区温度的温度传感器,每个温度区的内筒体内侧均设有用于加热该温度区的加热组件,每个温度区对应内筒体和壳体之间设有用于冷却该温度区的冷却组件,每个温度区内设有至少一个导热杆,导热杆穿过内筒体与冷却组件固定连接。本发明可自动调节不同温度区的温度,形成适合晶体生长所需的温度梯度,提高晶体质量。(A kind of crystal growing furnace proposed by the present invention, including furnace body, furnace body includes shell, inner cylinder and at least one heat insulation felt, inner cylinder is made of insulating heat insulating material, heat insulation felt is arranged in inner cylinder and inner cylinder is divided into multiple humidity provinces, the through-hole passed through for accommodating seed rod and crystal is equipped in the middle part of each heat insulation felt, each humidity province is equipped with the temperature sensor for measuring area's temperature, the heating component for heating the humidity province is equipped on the inside of the inner cylinder of each humidity province, each humidity province corresponds to the cooling component being equipped between inner cylinder and shell for cooling down the humidity province, at least one heat conducting bar is equipped in each humidity province, heat conducting bar passes through inner cylinder and is fixedly connected with cooling component.The present invention can automatically adjust the temperature in different temperatures area, form temperature gradient needed for being suitble to crystal growth, improve crystal quality.)

1. a kind of crystal growing furnace, which is characterized in that including furnace body, furnace body include shell (1), inner cylinder (8), at least one every Hot felt (4) and controller, inner cylinder (8) are made of insulating heat insulating material, and heat insulation felt (4) setting is interior in inner cylinder (8) and will Inner cylinder (8) is divided into multiple humidity provinces, be equipped in the middle part of each heat insulation felt (4) for accommodate seed rod and crystal pass through it is logical Hole, each humidity province are equipped with the temperature sensor for measuring area's temperature；

The heating component for heating the humidity province, each humidity province pair are equipped on inner cylinder (8) inside of each humidity province It is equipped with the cooling component for cooling down the humidity province between the inner cylinder (8) answered and shell (1), is equipped at least in each humidity province One heat conducting bar (7), heat conducting bar (7) pass through inner cylinder (8) and are fixedly connected with cooling component；

Temperature sensor signal connects controller, and controller controls the heating component for connecting each humidity province and cooling group respectively Part.

2. crystal growing furnace according to claim 1, which is characterized in that heating component includes being located in inner cylinder (8) The heater (10) of side and the induction heating circle (9) being located between heater (10) and inner cylinder (8) inner wall, controller control It connects induction heating circle (9).

3. crystal growing furnace according to claim 1, which is characterized in that cooling component includes cooling pipe (5), cooling tube Road (5) bottom is equipped with inlet, and cooling pipe (5) upper end is equipped with liquid outlet, and cooling pipe (5) is equipped with heat sink (6), thermally conductive Bar (7) is fixedly connected with heat sink (6).

4. crystal growing furnace according to claim 3, which is characterized in that further include recirculation assembly, recirculation assembly includes cold Water tank, circulating pump and condenser, cold water storage cistern, circulating pump and inlet pass sequentially through pipeline and connect, liquid outlet, condenser and cold water Case passes sequentially through pipeline connection, and the pipeline between circulating pump and inlet is equipped with liquid feed valve, between liquid outlet and condenser Pipeline is equipped with liquid valve, and controller controls connection circulating pump, liquid feed valve, liquid valve and condenser respectively.

5. crystal growing furnace according to claim 4, which is characterized in that the pipeline between liquid valve and inlet is equipped with Flow control valve, controller control connection flow control valve.

6. crystal growing furnace according to claim 3, which is characterized in that case inside is successively arranged the first insulating layer (2) It is arranged with the liquid feeding end of the second insulating layer (3), the cold water pipes (5) of each cooling component in the first insulating layer (2) and second Between insulating layer (3).

7. crystal growing furnace according to claim 3, which is characterized in that cooling pipe (5) is the metal of high thermoconductivity Pipe, outside is cased with bellows.

8. crystal growing furnace according to claim 1, which is characterized in that heat insulation felt (4) is hard graphite carbon felt.

9. crystal growing furnace according to claim 1, which is characterized in that liquid feed valve and liquid valve are solenoid valve.

Technical field

The present invention relates to technical field of crystal growth, and in particular to a kind of crystal growing furnace.

Background technique

When producing different crystal using crystal growing furnace, different temperature fields is needed, and the temperature of general crystal growing furnace Degree field is generally fixed to be adjusted according to the crystal to be grown.

Summary of the invention

Technical problems based on background technology, a kind of crystal growing furnace proposed by the present invention, to automatically adjust temperature Gradient.

A kind of crystal growing furnace proposed by the present invention, including furnace body, furnace body includes shell, inner cylinder, at least one is heat-insulated Felt and controller, inner cylinder are made of insulating heat insulating material, and heat insulation felt is arranged in inner cylinder and is divided into inner cylinder multiple Humidity province, each heat insulation felt middle part are equipped with the through-hole passed through for accommodating seed rod and crystal, and each humidity province is equipped with and is used for Measure the temperature sensor of area's temperature；

The heating component for heating the humidity province is equipped on the inside of the inner cylinder of each humidity province, each humidity province is corresponding Shell and inner cylinder between be equipped with cooling component for cooling down the humidity province, it is thermally conductive equipped at least one in each humidity province Bar, heat conducting bar pass through inner cylinder and are fixedly connected with cooling component；

Temperature sensor signal connects controller, and controller controls the heating component and cooling for connecting each humidity province respectively Component.

Preferably, heating component includes the heater being located on the inside of inner cylinder and is located on heater and inner cylinder inner wall Between induction heating circle, controller control connection induction heating circle.

Preferably, cooling component includes cooling pipe, and cooling pipe bottom is equipped with inlet, and cooling pipe upper end is equipped with Liquid mouth, cooling pipe are equipped with heat sink, and heat conducting bar is fixedly connected with heat sink.

It preferably, further include recirculation assembly, recirculation assembly includes cold water storage cistern, circulating pump and condenser, cold water storage cistern, circulating pump It passes sequentially through pipeline with inlet to connect, liquid outlet, condenser and cold water storage cistern pass sequentially through pipeline and connect, circulating pump and inlet Between pipeline be equipped with liquid feed valve, pipeline between liquid outlet and condenser is equipped with liquid valve, the controller company of control respectively Connect circulating pump, liquid feed valve, liquid valve, condenser.

Preferably, the pipeline between liquid valve and inlet is equipped with flow control valve, controller control connection flow tune Save valve.

Preferably, case inside is successively arranged the first insulating layer and the second insulating layer, the cold water pipe of each cooling component The liquid feeding end in road is arranged between the first insulating layer and the second insulating layer.

Preferably, cooling pipe is the metal tube of high thermoconductivity, and outside is cased with bellows.

Preferably, heat insulation felt is hard graphite carbon felt.

Preferably, liquid feed valve and liquid valve are solenoid valve.

A kind of crystal growing furnace proposed by the present invention, by the way that multiple humidity provinces are arranged, controller can be according to temperature sensor The temperature of humidity province detected, control heating component and/or cooling component work to corresponding humidity province carry out heating and/or It is cooling, to automatically adjust the temperature in different temperatures area, temperature gradient needed for being suitble to crystal growth is formed, improves crystal quality.

Detailed description of the invention

Fig. 1 is a kind of structural schematic diagram of crystal growing furnace proposed by the present invention.

Specific embodiment

Referring to Fig.1, a kind of crystal growing furnace proposed by the present invention, including furnace body, furnace body include shell 1, inner cylinder 8, extremely A few heat insulation felt 4 and controller, inner cylinder 8 are made of insulating heat insulating material, and heat insulation felt 4 is arranged in inner cylinder 8 and will Inner cylinder 8 is divided into multiple humidity provinces, the through-hole passed through for accommodating seed rod and crystal is equipped in the middle part of each heat insulation felt 4, often A humidity province is equipped with the temperature sensor for measuring area's temperature；

The heating component for heating the humidity province, each humidity province are equipped on 8 inside of inner cylinder of each humidity province It is equipped with the cooling component for cooling down the humidity province between corresponding shell 1 and inner cylinder 8, is equipped at least one in each humidity province A heat conducting bar 7, heat conducting bar 7 pass through inner cylinder 8 and are fixedly connected with cooling component；

Temperature sensor signal connects controller, and controller controls the heating component and cooling for connecting each humidity province respectively Component.

The present invention by being arranged multiple humidity provinces, controller can according to the temperature of temperature sensor humidity province detected, Control heating component and/or cooling component work heat and/or cool corresponding humidity province, to automatically adjust not equality of temperature The temperature in area is spent, temperature gradient needed for being suitble to crystal growth is formed, improves crystal quality.

In the present embodiment, heating component includes being located on the heater 10 of 8 inside of inner cylinder and being located on heater Induction heating circle 9 between 10 and 8 inner wall of inner cylinder, controller control connection induction heating circle 9.By induction heating circle 9 into Row induction heating, it is convenient and efficient, it can be heated to required temperature quickly, it is easily controllable.

In the present embodiment, cooling component includes cooling pipe 5, and 5 bottom of cooling pipe is equipped with inlet, cooling pipe 5 upper ends are equipped with liquid outlet, and cooling pipe 5 is equipped with heat sink 6, and heat conducting bar 7 is fixedly connected with heat sink.Heat conducting bar 7 by pair Heat is distributed on cooling pipe 5 by the heat derives for the humidity province answered by heat sink 6, and the coolant liquid of flowing takes away heat.

It in the present embodiment, further include recirculation assembly, recirculation assembly includes cold water storage cistern, circulating pump and condenser, cold water Case, circulating pump and inlet pass sequentially through pipeline and connect, and liquid outlet, condenser and cold water storage cistern pass sequentially through pipeline and connect, circulation Pipeline between pump and inlet is equipped with liquid feed valve, and the pipeline between liquid outlet and condenser is equipped with liquid valve, controller point Circulating pump, liquid feed valve, liquid valve, condenser Kong Zhi not connected.It is formd by cold water storage cistern, circulating pump, cold water pipes, condenser One circulating cooling system can cool down corresponding humidity province, effectively prevent the waste of water, save water resource.

In the present embodiment, the pipeline between liquid valve and inlet is equipped with flow control valve, and controller control connects Flow control valve is connect, to adjust the flow velocity of cooling liquid, to adjust cooling velocity and cooling degree.

In the present embodiment, case inside is successively arranged the first insulating layer 2 and the second insulating layer 3, each cooling group The liquid feeding end of the cold water pipes of part is arranged between the first insulating layer 2 and the second insulating layer 3, convenient for making the cooling positioned at liquid feeding end Liquid is maintained at lower temperature, quickly takes away heat convenient for subsequent.

In the present embodiment, cooling pipe 5 is the metal tube of high thermoconductivity, and outside is cased with bellows.Convenient for heat dissipation.

In the present embodiment, heat insulation felt 4 is hard graphite carbon felt, has preferable insulation ability, every convenient for making The temperature of a humidity province is stablized.

In the present embodiment, liquid feed valve and liquid valve are solenoid valve, and controller controls liquid feed valve and liquid valve respectively. Solenoid valve is convenient for controlling the disengaging of coolant liquid by controller, consequently facilitating controlling cooling degree in order to adjust different temperatures area Temperature with change temperature gradient adapt to different crystal growth demand.

The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.