阅读说明：本技术 一种运动平台垂直度的检测工具及方法 (A kind of detection instrument and method of motion platform verticality ) 是由 王军华 陈姝 张泰� 于 2019-08-06 设计创作，主要内容包括：一种运动平台垂直度的检测工具,用于辅助显微图像采集装置的XY运动平台完成垂直度检测工作,包括菲林尺、玻璃板、检测基板；检测基板与片夹基板安装尺寸一致,用于设置于XY运动平台上；玻璃板设置于检测基板上,用于承载菲林尺；菲林尺上设置有校验图形,校验图形用于标定XY运动平台的安装误差。一种检测方法,用于通过显微图像采集装置和检测工具辅助完成垂直度检测,包括(1)检测Y方向垂直度；(2)计算X方向垂直度。本发明操作方法简单,采用菲林尺来制作配套的测量工具,可以有效的提高测量精度；同时,因为采用的校准工具简单,且有效地利用了显微图像采集装置的现有成像放大系统,可以在很大程度上降低校准成本。(A kind of detection instrument of motion platform verticality, for assisting the XY motion platform of microscopic image acquisition device to complete measuring for verticality work, including film ruler, glass plate, detection substrate；It is consistent with piece folder substrate installation dimension to detect substrate, for being set to XY motion platform；Glass plate is set on detection substrate, for carrying film ruler；Verification figure is provided on film ruler, verification figure is used to demarcate the installation error of XY motion platform.A kind of detection method, for completing measuring for verticality, including (1) detection Y-direction verticality by microscopic image acquisition device and detection instrument auxiliary；(2) X-direction verticality is calculated.Operation of the present invention method is simple, and matched measuring tool is made of film ruler, can effectively improve measurement accuracy；Meanwhile because the truing tool used is simple, and the existing imaging amplification system of microscopic image acquisition device is efficiently utilized, it can largely reduce calibration cost.)

1. a kind of detection instrument of motion platform verticality, for assisting the XY motion platform of microscopic image acquisition device (200) (230) measuring for verticality work is completed, it is characterised in that: including film ruler (110), glass plate (120), detection substrate (130)；

The detection substrate (130) is consistent with piece folder substrate (260) installation dimension, for being set to the XY motion platform (230) on；The glass plate (120) is set on the detection substrate (130), for carrying the film ruler (110)；

Verification figure is provided on the film ruler (110), the verification figure is for demarcating the XY motion platform (230) Installation error.

2. a kind of detection instrument of motion platform verticality according to claim 1, it is characterised in that: the verification figure Including 4 successively orthogonal and intersection reference reticles；3 calibration grooves are all vertically installed on 4 reference reticles； The equal calibrated scale of spacing is all provided on 3 calibrations groove.

3. a kind of detection instrument of motion platform verticality according to claim 2, it is characterised in that: 3 calibrations Groove is set to the centre and both ends of the reference reticle.

4. a kind of detection instrument of motion platform verticality according to claim 2, it is characterised in that: 4 benchmark Groove forms the first datum mark, the second datum mark, third datum mark, the 4th datum mark.

5. a kind of detection instrument of motion platform verticality according to claim 2, it is characterised in that: 4 benchmark The line width of groove is smaller than 10 μm；Verticality grade between 4 reference reticles is all optionally greater than 3 grades；The calibration is carved The precision of degree is optionally greater than 50 μm.

6. a kind of detection method, for passing through any detection work in microscopic image acquisition device (200) and claim 1-5 Tool auxiliary completes measuring for verticality, it is characterised in that: detects Y-direction verticality including (1)；(2) X-direction verticality is calculated.

7. detection method according to claim 6, it is characterised in that: the verification figure includes 4 successively orthogonal And the reference reticle of intersection；3 calibration grooves are all vertically installed on 4 reference reticles；On 3 calibrations groove all It is provided with the equal calibrated scale of spacing；4 reference reticles form the first datum mark, the second datum mark, third benchmark Point, the 4th datum mark.

8. detection method according to claim 7, it is characterised in that: the detection Y-direction verticality the following steps are included:

S11, the XY motion platform (230) is adjusted, is filled until first datum mark is moved to the micro image collection Set the central region of (200)；

S12, the adjusting XY motion platform (230) are moved along the Y-direction forward direction, find second datum mark；

S13, check that second datum mark deviates the central region in the visual field of the microscopic image acquisition device (200) The situation of position adjusts the XY motion platform (230) and adjusts the second datum mark if offset distance is more than error requirements To central region；

S14, the XY motion platform (230) is adjusted along Y-direction reverse movement, until first datum mark is moved to In the visual field of the microscopic image acquisition device (200), and check whether first datum mark is located at central region position, such as Fruit is not then to repeat S11 to S13 step, until the XY motion platform (230) is moved repeatedly along the Y-direction both forward and reverse directions When dynamic, the first datum mark and the second datum mark are all located at the central region of the XY motion platform (230).

9. detection method according to claim 7, it is characterised in that: the detection X-direction verticality the following steps are included:

S21, the XY motion platform (230) is adjusted, is filled until second datum mark is moved to the micro image collection Set the central region of (200)；

S22, the adjusting XY motion platform (230) are moved along the X-direction forward direction, find the third datum mark；

S23, check that the third datum mark deviates the central region in the visual field of the microscopic image acquisition device (200) The situation of position adjusts the XY motion platform (230) and adjusts third datum mark if offset distance is more than error requirements To central region；

S24, the XY motion platform (230) is adjusted along X-direction reverse movement, until second datum mark is moved to In the visual field of the microscopic image acquisition device (200), and check whether second datum mark is located at central region position, such as Fruit is not then to repeat S21 to S23 step, until the XY motion platform (230) is moved repeatedly along the X-direction both forward and reverse directions When dynamic, the second datum mark and third datum mark are all located at the central region of the XY motion platform (230).

Technical field

The invention belongs to microscopic image acquisition device fields, and in particular to a kind of detection instrument of motion platform verticality and Method.

Background technique

Microscopic image acquisition device 200 is the common observation device of medical domain, and pathological section scanner is to use at present A kind of more microscopic image acquisition device 200；As shown in Figure 1, microscopic image acquisition device 200 includes light path imaging system 210, object lens 220, XY motion platform 230, pathological section 240；Microscopic image acquisition device 200 is usually to pass through XY motion platform 230 carry out digital scanning in object lens 220 moved beneaths with pathological section 240, eventually by light path imaging system 210 at Picture；

As shown in Fig. 2, pathological section 240 is usually fixed on piece folder substrate 260 by being sliced fixed mechanism 250, then XY motion platform 230 is sent by piece folder substrate 260, then presss from both sides substrate 260 in X and/or Y-direction with piece by XY motion platform 230 Movement is scanned.

Currently, the scanning effect of microscopic image acquisition device 200 is easy the peace by XY motion platform 230 in many cases The precision of dress or mould group itself influences, when XY motion platform 230 is in the movement of X-direction and the motion path verticality of Y-direction When inadequate, cause during scanning, the case where edge is easy to appear dislocation between different images, increases subsequent image and spell Connect difficulty.

Summary of the invention

To solve the above-mentioned problems, the present invention provides a kind of detection of motion platform verticality high-precision, at low cost Tool and method.

The technical solution adopted by the present invention to solve the technical problems is:

A kind of detection instrument of motion platform verticality, for assisting the XY motion platform of microscopic image acquisition device to complete Measuring for verticality work, including film ruler, glass plate, detection substrate；

The detection substrate is consistent with piece folder substrate installation dimension, for being set to the XY motion platform；The glass Glass plate is set on the detection substrate, for carrying the film ruler；

Verification figure is provided on the film ruler, the installation that the verification figure is used to demarcate the XY motion platform misses Difference.

Preferably, the verification figure includes 4 successively orthogonal and intersection reference reticles；4 benchmark are carved 3 calibration grooves are all vertically installed on line；The equal calibrated scale of spacing is all provided on 3 calibrations groove.

Preferably, 3 calibrations groove is set to the centre and both ends of the reference reticle.

Further, 4 articles of reference reticles form the first datum mark, the second datum mark, third datum mark, the 4th base On schedule.

Preferably, the line width of 4 reference reticles is smaller than 10 μm；Verticality etc. between 4 reference reticles Grade is all optionally greater than 3 grades；The precision of the calibrated scale is optionally greater than 50 μm.

A kind of detection method, for completing verticality inspection by microscopic image acquisition device and above-mentioned detection instrument auxiliary It surveys, including detection Y-direction verticality；Calculate X-direction verticality.

Further, the verification figure includes 4 successively orthogonal and intersection reference reticles；4 benchmark are carved 3 calibration grooves are all vertically installed on line；The equal calibrated scale of spacing is all provided on 3 calibrations groove；Described 4 Article reference reticle forms the first datum mark, the second datum mark, third datum mark, the 4th datum mark.

Further, the detection Y-direction verticality the following steps are included:

S11, the XY motion platform is adjusted, until first datum mark is moved to the microscopic image acquisition device Central region；

S12, the adjusting XY motion platform are moved along the Y-direction forward direction, find second datum mark；

S13, check that second datum mark deviates the central region in the visual field of the microscopic image acquisition device The situation of position adjusts the XY motion platform for the second datum mark and is adjusted to view if offset distance is more than error requirements The Yezhong heart；

S14, the adjusting XY motion platform are moved backward along the Y-direction, until first datum mark is moved to In the visual field of the microscopic image acquisition device, and check whether first datum mark is located at central region position, if not It is then to repeat S11 to S13 step, when the XY motion platform is moved repeatedly along the Y-direction both forward and reverse directions, first Datum mark and the second datum mark are all located at the central region of the XY motion platform.

Further, the detection X-direction verticality the following steps are included:

S21, the XY motion platform is adjusted, until second datum mark is moved to the microscopic image acquisition device Central region；

S22, the adjusting XY motion platform are moved along the X-direction forward direction, find the third datum mark；

S23, check that the third datum mark deviates the central region in the visual field of the microscopic image acquisition device The situation of position adjusts the XY motion platform for third datum mark and is adjusted to view if offset distance is more than error requirements The Yezhong heart；

S24, the adjusting XY motion platform are moved backward along the X-direction, until second datum mark is moved to In the visual field of the microscopic image acquisition device, and check whether second datum mark is located at central region position, if not It is then to repeat S21 to S23 step, when the XY motion platform is moved repeatedly along the X-direction both forward and reverse directions, second Datum mark and third datum mark are all located at the central region of the XY motion platform.

The embodiment of the present invention the utility model has the advantages that

Operating method is simple, and as truing tool while making matched survey by using high-precision film ruler Amount tool can effectively improve measurement accuracy；

Meanwhile because the truing tool used is simple, and the existing imaging for efficiently utilizing pathological section scanner is put Big system can largely reduce calibration cost.

Detailed description of the invention

A specific embodiment of the invention is described further with reference to the accompanying drawing.

Fig. 1 is the structural schematic diagram of the pathological section scanner of the embodiment of the present invention；

Fig. 2 is the pathological section scheme of installation of the embodiment of the present invention；

Fig. 3 is the testing tool structural schematic diagram of the embodiment of the present invention；

Fig. 4 is the film ruler schematic diagram of the embodiment of the present invention.

Specific embodiment

Below with reference to Figure of description, the present invention is described in more detail.

As shown in figure 3, a kind of detection instrument of motion platform verticality, for assisting microscopic image acquisition device 200 XY motion platform 230 completes measuring for verticality work, including film ruler 110, glass plate 120, detection substrate 130；

Pathological section mounting groove is provided on XY motion platform 230, pathological section mounting groove presss from both sides substrate for installation sheet 260；It is consistent with piece folder 260 installation dimension of substrate to detect substrate 130, for being installed on XY motion platform 230；Glass plate 120 It is set on detection substrate 130 for carrying film ruler 110；

As shown in figure 4, being provided with verification figure on film ruler 110, verification figure is used to demarcate the peace of XY motion platform 230 Fill error；Verification figure includes 4 successively orthogonal and intersection reference reticles；3 are all vertically installed on 4 reference reticles Item calibrates groove；The equal calibrated scale of spacing is all provided on 3 calibration grooves.3 calibration grooves are set to reference reticle Centre and both ends.4 articles of reference reticles form the first datum mark, the second datum mark, third datum mark, the 4th datum mark.

In the present embodiment, the line width of reference reticle is smaller than 10 μm；Verticality grade between reference reticle is all not less than 3 Grade；The precision of calibrated scale is not less than 50 μm.

A kind of detection method of motion platform verticality, for passing through microscopic image acquisition device 200 and above-mentioned detection work Tool auxiliary completes measuring for verticality, including (1) detects Y-direction verticality；(2) X-direction verticality is calculated.

Detect X-direction verticality the following steps are included:

S11, XY motion platform 230 is adjusted, until the first datum mark to be moved to the visual field of microscopic image acquisition device 200 Center；

S12, the positive movement along the Y direction of XY motion platform 230 is adjusted, finds the second datum mark；

S13, the shape that the second datum mark offset central region position is checked in the visual field of microscopic image acquisition device 200 Condition adjusts XY motion platform 230 for the second datum mark and is adjusted to central region if offset distance is more than error requirements；

S14, adjusting XY motion platform 230 move backward along the Y direction, until the first datum mark is moved to micro-image and adopts In the visual field of acquisition means 200, and check whether the first datum mark is located at central region position, if it is not, then repeating S11 extremely S13 step, when both forward and reverse directions move repeatedly XY motion platform 230 along the Y direction, the first datum mark and the second datum mark are all Positioned at the central region of XY motion platform 230.

Detect Y-direction verticality the following steps are included:

S21, XY motion platform 230 is adjusted, until the second datum mark to be moved to the visual field of microscopic image acquisition device 200 Center；

S22, the positive movement along the X direction of XY motion platform 230 is adjusted, finds third datum mark；

S23, the shape that third datum mark offset central region position is checked in the visual field of microscopic image acquisition device 200 Condition adjusts XY motion platform 230 for third datum mark and is adjusted to central region if offset distance is more than error requirements；

S24, adjusting XY motion platform 230 move backward along the X direction, until the second datum mark is moved to micro-image and adopts In the visual field of acquisition means 200, and check whether the second datum mark is located at central region position, if it is not, then repeating S21 extremely S23 step, when both forward and reverse directions move repeatedly XY motion platform 230 along the X direction, the second datum mark and third datum mark are all Positioned at the central region of XY motion platform 230.

In the present embodiment, error requirements use the minimum scale of calibrated scale, and the error fix specifically used can be according to reality Depending on the situation of border.

In the present embodiment, the instruction not absolute for X-direction and Y-direction, after specifying X-direction, with its horizontal vertical Direction is just referred to as Y-direction, for the calibration sequence of X and Y-direction, successively can first be carried out with X there is no specific, and can also It is first carried out with Y.

The above description is only a preferred embodiment of the present invention, and the present invention is not limited to above embodiment, as long as with Essentially identical means realize that the technical solution of the object of the invention belongs within protection scope of the present invention.