阅读说明：本技术 一种玻璃钝化新型石英舟 (novel quartz boat of glass passivation ) 是由 崔文荣 于 2019-10-08 设计创作，主要内容包括：本发明公开了一种玻璃钝化新型石英舟,包括石英舟机构,在石英舟机构上设有一级石英舟支架,石英舟槽,一级石英舟,主支架,二级石英舟,石英舟机构上的一级石英舟,一级石英舟的石英舟槽倾角为80度,进行玻璃烧结时需要通入较大流量的气体,调整硅片的角度后,降低气流对硅片的冲击,降低硅片的损伤,而且石英舟槽宽为10mm,定期清理舟槽中残留的玻璃粉,降低硅片边缘粘在石英舟上的几率,该技术方案有效降低硅片破碎的概率,提高良品率,大大降低了产品钝化的成本。(The invention discloses a novel glass passivation quartz boat, which comprises a quartz boat mechanism, wherein a first-stage quartz boat support, a quartz boat groove, a first-stage quartz boat, a main support, a second-stage quartz boat and a first-stage quartz boat on the quartz boat mechanism are arranged on the quartz boat mechanism, the inclination angle of the quartz boat groove of the first-stage quartz boat is 80 degrees, gas with a larger flow is required to be introduced during glass sintering, after the angle of a silicon wafer is adjusted, the impact of air flow on the silicon wafer is reduced, the damage of the silicon wafer is reduced, the width of the quartz boat groove is 10mm, residual glass powder in the boat groove is periodically cleaned, and the probability that the edge of the silicon wafer is stuck on the quartz boat is reduced.)

1. the utility model provides a novel quartz boat of glass passivation, includes quartz boat mechanism (1), its characterized in that: be equipped with main support (5) on quartz boat mechanism (1), the top of main support (5) is equipped with one-level quartz boat support (2), welded fastening between one-level quartz boat support (2) and main support (5), be equipped with one-level quartz boat (4) on the end that the top of one-level quartz boat support (2) is close to both ends, the bottom symmetry of main support (5) is equipped with second grade quartz boat (6), the inner wall welded connection of the both ends end of second grade quartz boat (6) and main support (5), one-level quartz boat (4), the inside of second grade quartz boat (6) all is equipped with quartz boat groove (3).

2. the novel quartz boat of claim 1, wherein: the width of the quartz boat groove (3) is 10mm, and the groove depth is 15 mm.

3. the novel quartz boat of claim 1, wherein: the inclination angle of the quartz boat groove (3) is 80 degrees, and the upper opening angle of the quartz boat groove (3) is 60 degrees.

4. The novel quartz boat of claim 1, wherein: the bottom of the main support (5) is symmetrically provided with two semi-cylindrical grooves, and the distance between the groove cores of the two semi-cylindrical grooves is 100mm +/-1 mm.

5. the novel quartz boat of claim 1, wherein: and a silicon wafer placing groove is formed in the upper part of the quartz boat mechanism (1).

6. The novel quartz boat for passivating glass, which is used for realizing the method of claim 1, comprises the following steps:

A. Cleaning the surface of a silicon wafer needing glass passivation;

B. Placing the cleaned silicon wafer into a quartz boat groove (3) of a first-stage quartz boat (4) and a second-stage quartz boat (6);

C. putting the quartz boat mechanism with the mounted silicon wafer into a sintering furnace for passivation;

D. And taking out the passivated silicon wafer.

Technical Field

The invention relates to the technical field of semiconductor glass sintering, in particular to a novel glass passivated quartz boat.

background

quartz, also known as quartz glass, is a mineral composed of silicon dioxide.

The quartz glass is mainly used for electric light sources, semiconductors, new optical technologies and the like.

In the aspect of novel light source: can be used as high-pressure mercury lamp, long-arc xenon lamp, iodine-tungsten lamp, thallium iodide lamp, infrared lamp, germicidal lamp, etc.

semiconductor aspect: is an indispensable material in the production process of semiconductor materials and devices, such as crucibles for growing germanium and silicon single crystals, boat muffle tubes, bell jars and the like.

In the new technical field: the excellent performance of sound, light and electricity is used as an ultrasonic delay line on a radar, an infrared tracking direction finding, a prism of an infrared photograph, a communication, a spectrograph and a spectrophotometer, a lens, a reflection window of a large astronomical telescope, a high-temperature operation window, a reactor and a radioactive device; rocket, nose cone of missile, nozzle and radome: radio-insulating parts of satellites, radiation; a hot balance, a vacuum adsorption device, precision casting and the like.

The glass passivation chip is used for protecting PN junctions by using the fused glass and is used for producing high-voltage high-power rectifying devices, and the glass plays a role in reducing leakage current and improving reverse breakdown voltage. The common glass passivation protection process generally adopts a blade coating method, a light resistance method or an electrophoresis method to coat glass, then carries out high-temperature sintering on the glass, aims to remove organic components and carbon elements in the glass, solidifies after cooling to form a glass body with compact structure, good thermal stability and strong mechanical property, and a single wafer often has thousands of chips after photoetching and etching processes, so the uniformity of glass sintering is of great importance.

the quartz boat with 75 grooves is used for sintering at present, silicon wafers are vertically placed on the quartz boat when the sintering is carried out, and due to the fact that the silicon wafers are powdery before the glass sintering and become solid passivation layers after the sintering is completed, a large amount of glass powder is remained in the grooves of the quartz boat after the sintering is completed, and when the silicon wafer fragment rate of a station reaches 1.12%.

disclosure of Invention

The invention aims to provide a novel glass passivated quartz boat to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a novel quartz boat of glass passivation, includes quartz boat mechanism, be equipped with the main support in the quartz boat mechanism, the top of main support is equipped with one-level quartz boat support, welded fastening between one-level quartz boat support and the main support, the top of one-level quartz boat support is close to and is equipped with the one-level quartz boat on the end at both ends, the bottom symmetry of main support is equipped with the second grade quartz boat, and the both ends end of second grade quartz boat and the inner wall welded connection of main support, the one-level quartz boat, the inside of second grade quartz boat all is equipped with quartz boat groove.

preferably, the width of the groove of the quartz boat is 10mm, and the depth of the groove is 15 mm.

preferably, the inclination angle of the quartz boat groove is 80 degrees, and the upper opening angle of the quartz boat groove is 60 degrees.

Preferably, the bottom of the main support is symmetrically provided with two semi-cylindrical grooves, and the distance between the groove cores of the two semi-cylindrical grooves is 100mm +/-0.1 mm.

preferably, a silicon wafer placing groove is formed in the upper portion of the quartz boat mechanism.

Preferably, the novel glass passivated quartz boat comprises the following steps:

A. cleaning the surface of a silicon wafer needing glass passivation;

B. placing the cleaned silicon wafer into a quartz boat groove of a first-stage quartz boat and a quartz boat groove of a second-stage quartz boat;

C. putting the quartz boat mechanism with the mounted silicon wafer into a sintering furnace for passivation;

D. And taking out the passivated silicon wafer.

Compared with the prior art, the invention has the beneficial effects that:

(1) the residual glass powder in the boat groove is cleaned regularly, so that the probability that the edge of the silicon wafer is stuck on the quartz boat is reduced;

(2) the technical scheme effectively reduces the probability of silicon wafer breakage, improves the yield and greatly reduces the cost of product passivation.

Drawings

FIG. 1 is a front view of the quartz boat mechanism of the present invention;

FIG. 2 is a side view of the quartz boat mechanism of the present invention;

FIG. 3 is a top view of the quartz boat mechanism of the present invention;

FIG. 4 is a cross-sectional view of the quartz boat groove of the present invention.

in the figure: 1. a quartz boat mechanism; 2. a first-stage quartz boat support; 3. a quartz boat trough; 4. a first-stage quartz boat; 5. a main support; 6. and a second-stage quartz boat.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides a novel quartz boat of glass passivation, includes quartz boat mechanism 1, and quartz boat mechanism 1's top is inside to be equipped with the silicon chip standing groove, is equipped with main support 5 on the quartz boat mechanism 1, and the bottom symmetry of main support 5 is equipped with two half-cylinder recesses, and interval 100mm 0.1mm between two half-cylinder recess groove cores.

the top of main support 5 is equipped with one-level quartz boat support 2, welded fastening between one-level quartz boat support 2 and the main support 5, and the top of one-level quartz boat support 2 is close to and is equipped with one-level quartz boat 4 on the end at both ends, and the bottom symmetry of main support 5 is equipped with second grade quartz boat 6, and the both ends end of second grade quartz boat 6 is connected with the inner wall welded connection of main support 5.

A novel glass passivated quartz boat comprises the following steps:

A. cleaning the surface of a silicon wafer needing glass passivation;

B. Placing the cleaned silicon wafer into a quartz boat groove 3 of a first-stage quartz boat 4 and a second-stage quartz boat 6;

C. Putting the quartz boat mechanism with the mounted silicon wafer into a sintering furnace for passivation;

D. And taking out the passivated silicon wafer.