阅读说明：本技术 一种半导体晶圆干燥用打磨膏输送装置 (Polishing paste conveying device for semiconductor wafer drying ) 是由 高定桃 于 2021-10-08 设计创作，主要内容包括：本发明涉及打磨技术领域,尤其涉及一种半导体晶圆干燥用打磨膏输送装置,包括,储存部,所述储存部的腔体适于通入打磨膏；打磨部,所述打磨部具有打磨腔,所述打磨腔位于所述储存部底部,且与所述储存部连通；启闭部,所述启闭部位于所述储存部内,以控制所述打磨部和所述储存部的通断,所述启闭部包括搅拌部、滑动设置在所述搅拌部上的挤压部、固定在所述搅拌部上的破碎部以及驱动所述搅拌部、挤压部运动的驱动部,所述驱动部驱动所述搅拌部转动,以使所述储存部内的打磨膏混合均匀。(The invention relates to the technical field of polishing, in particular to a polishing paste conveying device for drying a semiconductor wafer, which comprises a storage part, wherein a cavity of the storage part is suitable for introducing polishing paste; the grinding part is provided with a grinding cavity, and the grinding cavity is positioned at the bottom of the storage part and is communicated with the storage part; the opening and closing part is located in the storage part to control the grinding part and the on-off of the storage part, the opening and closing part comprises a stirring part, an extrusion part arranged on the stirring part in a sliding mode, a crushing part fixed on the stirring part and a driving part for driving the stirring part and the extrusion part to move, and the driving part drives the stirring part to rotate so as to enable the grinding paste in the storage part to be uniformly mixed.)

1. A polishing paste delivery device for drying a semiconductor wafer is characterized by comprising,

the cavity of the storage part is suitable for being filled with polishing paste;

the grinding part is provided with a grinding cavity, and the grinding cavity is positioned at the bottom of the storage part and is communicated with the storage part;

the opening and closing part is positioned in the storage part to control the connection and disconnection of the polishing part and the storage part, the opening and closing part comprises a stirring part, an extrusion part arranged on the stirring part in a sliding manner, a crushing part fixed on the stirring part and a driving part for driving the stirring part and the extrusion part to move, and the driving part drives the stirring part to rotate so as to uniformly mix polishing paste in the storage part; wherein the content of the first and second substances,

when the driving part drives the extrusion part to slide and separate from the stirring part, the grinding part is communicated with the storage part; when the driving part drives the extrusion part to slide on the stirring part, the grinding part and the storage part are disconnected;

work as the drive division drive the extrusion portion is in slide on the stirring portion, and paste tightly during the crushing portion, stirring portion, crushing portion, extrusion portion and the storage portion inner wall forms broken cavity, the drive division drive stirring portion, extrusion portion and broken portion rotate, with right the granule of polishing in the broken cavity grinds.

2. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 1,

the stirring part comprises a stirring blade arranged in the storage part, wherein,

the quantity of stirring leaf is four, and the mirror image setting is in the storage portion.

3. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 2,

the pressing part comprises a pressing plate, wherein,

the pressure plate is provided with a chute matched with the stirring blade;

the size of the pressure plate is consistent with the size of the inner wall of the storage part.

4. A polishing paste delivery apparatus for drying a semiconductor wafer as defined in claim 3,

the crushing part comprises a fixing ring and crushing teeth arranged on the outer wall of the fixing ring, wherein,

the bottom of the fixing ring is fixed at the upper end of the stirring blade.

5. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 4,

the driving part comprises a lifting cylinder, a bearing, a direct pushing cylinder and a rotating cylinder, wherein,

the lifting cylinder is fixed on the inner ring of the bearing, and a piston of the lifting cylinder is fixedly connected with the pressure plate;

the direct-push cylinder is fixed on the storage part, and a piston of the direct-push cylinder is fixedly connected with the bearing outer ring;

and the piston of the rotary cylinder is in transmission connection with the direct-pushing cylinder, and the rotary cylinder is fixed on the storage part.

6. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 5,

the stirring blade is fixed on the bearing outer ring through a connecting plate.

7. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 5,

a positioning block is fixed on the side wall of the pressure plate, a vertical groove and a ring groove are arranged on the side wall of the storage part, wherein,

the vertical groove is communicated with the annular groove, and the size of the positioning block is matched with that of the vertical groove and the annular groove.

8. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 7,

and a fillet is arranged at the communication position of the vertical groove and the ring groove.

9. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 7,

the lowest point of the vertical groove is positioned below the lowest point of the stirring blade, so that the pressure plate is limited to rotate after being separated from the stirring blade.

10. A polishing paste delivery apparatus for drying a semiconductor wafer as recited in claim 1,

the storage part comprises a grinding cylinder, the grinding cylinder is provided with a feed inlet and a discharge outlet, wherein,

the discharge hole is communicated with the polishing cavity.

Technical Field

The invention relates to the technical field of polishing, in particular to a polishing paste conveying device for drying a semiconductor wafer.

Background

In the traditional technology, a grinding wheel is generally adopted for grinding or polishing a workpiece, but the grinding and polishing quality obtained in the mode is difficult to guarantee, and particularly for some workpieces which are fine, complex in shape or irregular in shape; later, fluid grinding methods have been developed, in which a workpiece is continuously moved in a fluid grinding paste to grind or polish the surface of the workpiece by continuously rubbing against the fluid grinding paste;

in the prior art, although the workpiece can be polished or polished with high quality, there are some disadvantages, such as: the polishing paste is formed by mixing polishing liquid and polishing particles, the polishing particles are uneven in size, the polishing liquid and the polishing particles are uneven in mixing, and the polishing precision is affected.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: in order to overcome the technical problems in the prior art, the invention provides a polishing paste conveying device for drying a semiconductor wafer, which comprises,

the cavity of the storage part is suitable for being filled with polishing paste;

the grinding part is provided with a grinding cavity, and the grinding cavity is positioned at the bottom of the storage part and is communicated with the storage part;

the opening and closing part is positioned in the storage part to control the connection and disconnection of the polishing part and the storage part, the opening and closing part comprises a stirring part, an extrusion part arranged on the stirring part in a sliding manner, a crushing part fixed on the stirring part and a driving part for driving the stirring part and the extrusion part to move, and the driving part drives the stirring part to rotate so as to uniformly mix polishing paste in the storage part; wherein the content of the first and second substances,

when the driving part drives the extrusion part to slide and separate from the stirring part, the grinding part is communicated with the storage part; when the driving part drives the extrusion part to slide on the stirring part, the grinding part and the storage part are disconnected;

work as the drive division drive the extrusion portion is in slide on the stirring portion, and paste tightly during the crushing portion, stirring portion, crushing portion, extrusion portion and the storage portion inner wall forms broken cavity, the drive division drive stirring portion, extrusion portion and broken portion rotate, with right the granule of polishing in the broken cavity grinds.

Further, the stirring part includes a stirring blade provided in the storage part, wherein,

the quantity of stirring leaf is four, and the mirror image setting is in the storage portion.

Further, the pressing part includes a pressing plate, wherein,

the pressure plate is provided with a chute matched with the stirring blade;

the size of the pressure plate is consistent with the size of the inner wall of the storage part.

Further, the crushing part comprises a fixing ring and crushing teeth arranged on the outer wall of the fixing ring, wherein,

the bottom of the fixing ring is fixed at the upper end of the stirring blade.

Further, the driving part comprises a lifting cylinder, a bearing, a direct pushing cylinder and a rotating cylinder, wherein,

the lifting cylinder is fixed on the inner ring of the bearing, and a piston of the lifting cylinder is fixedly connected with the pressure plate;

the direct-push cylinder is fixed on the storage part, and a piston of the direct-push cylinder is fixedly connected with the bearing outer ring;

and the piston of the rotary cylinder is in transmission connection with the direct-pushing cylinder, and the rotary cylinder is fixed on the storage part.

Furthermore, a positioning block is fixed on the side wall of the pressure plate, a vertical groove and a ring groove are arranged on the side wall of the storage part, wherein,

the vertical groove is communicated with the annular groove, and the size of the positioning block is matched with that of the vertical groove and the annular groove.

Further, the stirring blade is fixed on the bearing outer ring through a connecting plate.

Furthermore, a fillet is arranged at the communication position of the vertical groove and the ring groove.

Furthermore, the lowest point of the vertical groove is positioned below the lowest point of the stirring blade, so that the pressure plate is limited to rotate after being separated from the stirring blade.

Further, the storage part comprises a grinding cylinder having a feed inlet and a discharge outlet, wherein,

the discharge hole is communicated with the polishing cavity.

Has the advantages that: 1. the invention relates to a polishing paste conveying device for drying a semiconductor wafer, which adopts an extrusion part to extrude polishing paste into the polishing part; the grinding paste can be more uniformly mixed by adopting the stirring part, and the stirring part and the extrusion part are matched to control the connection and disconnection of the grinding part and the storage part; adopt crushing portion, if need add the granule of polishing in the cream of polishing, can adopt crushing portion to grind the granule of polishing earlier for the granule of polishing is more even.

2. The extrusion part can slide on the stirring part, and when the stirring part rotates, the polishing paste on the extrusion part can be scraped and then extruded out of the chute.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is an exploded view of the open/close portion of the present invention with the pressure plate tightly attached to the fixing ring;

FIG. 3 is an exploded view showing the open/close portion of the present invention in a state where the pressing plate is separated from the fixing ring;

FIG. 4 is a schematic view of the internal structure of the opening and closing part and the storage part of the present invention;

in the figure:

100. a storage part 110, a feed inlet 120, a discharge outlet 130, a vertical groove 140, a ring groove 150 and a grinding cylinder;

200. a polishing part 210, a polishing cavity;

300. the opening and closing part, 310, the stirring part, 311, the stirring leaf, 312, the connecting plate, 320, the extrusion part, 321, pressure disk, 322, the spout, 323, the locating piece, 330, crushing part, 331, solid fixed ring, 332, broken tooth, 340, drive division, 341, promotion cylinder, 342, the bearing, 343, the straight push cylinder, 344, revolving cylinder, 350, crushing cavity.

Detailed Description

In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. In the description of the present invention, it is to be understood that the terms "upper", "top", "bottom", and the like, as used herein, refer to an orientation or positional relationship based on that shown in the drawings, which is for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be taken as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein.

Example one

As shown in fig. 1 to 4, a polishing paste conveying device for drying a semiconductor wafer includes a storage portion 100, wherein a cavity of the storage portion 100 is suitable for introducing polishing paste; a grinding part 200, wherein the grinding part 200 is provided with a grinding cavity 210, and the grinding cavity 210 is positioned at the bottom of the storage part 100 and is communicated with the storage part 100; the opening and closing part 300 is positioned in the storage part 100 to control the on-off of the grinding part 200 and the storage part 100, the opening and closing part 300 comprises a stirring part 310, a squeezing part 320 arranged on the stirring part 310 in a sliding manner, a crushing part 330 fixed on the stirring part 310 and a driving part 340 driving the stirring part 310 and the squeezing part 320 to move, and the driving part 340 drives the stirring part 310 to rotate so as to uniformly mix grinding paste in the storage part 100; wherein the content of the first and second substances,

when the driving part 340 drives the pressing part 320 to slide away from the stirring part 310, the grinding part 200 is communicated with the storage part 100; when the driving part 340 drives the pressing part 320 to slide on the stirring part 310, the grinding part 200 and the storage part 100 are disconnected;

when drive portion 340 drives extrusion portion 320 is in slide on stirring portion 310, and paste tightly when crushing portion 330, stirring portion 310, crushing portion 330, extrusion portion 320 and storage portion 100 inner wall form broken cavity 350, drive portion 340 drive stirring portion 310, extrusion portion 320 and crushing portion 330 rotate, with to the granule of polishing in the broken cavity 350 grinds.

The stirring part 310 includes four stirring blades 311 disposed in the storage part 100, and the stirring blades 311 are disposed in the storage part 100 in a mirror image manner. The stirring blade 311 is driven by the driving part 340 to rotate, and the stirring blade 311 rotates in the storage part 100 to stir and mix, i.e., to mix the polishing particles and the polishing solution into the polishing paste.

The extruding part 320 comprises a pressing plate 321, wherein a sliding groove 322 matched with the stirring blade 311 is formed in the pressing plate 321; the size of the pressing plate 321 corresponds to the size of the inner wall of the storage part 100. The platen 321 is slidable within the reservoir 100, and the platen 321 is sized to conform to the inner wall of the reservoir 100 so as to press the polishing paste into the polishing chamber 210. When the platen 321 is disengaged from the paddle 311, i.e., the platen 321 does not slide on the paddle 311, the polishing paste may flow downward from within the chute 322 into the polishing chamber 210.

The crushing part 330 includes a fixing ring 331 and crushing teeth 332 provided on an outer wall of the fixing ring 331, wherein a bottom of the fixing ring 331 is fixed to an upper end of the agitating blade 311. When grinding particles thrown into the crushing cavity 350 are required to be crushed, the driving part 340 drives the pressing plate 321 to move upwards and cling to the fixing ring 331, so that the stirring part 310, the crushing part 330, the extruding part 320 and the storage part 100 form the crushing cavity 350, the driving part 340 drives the stirring part 310, the crushing part 330 and the extruding part 320 to rotate, the grinding particles in the crushing cavity 350 are ground by the crushing teeth 332, and the grinding particles are more uniform.

The driving part 340 comprises a lifting cylinder 341, a bearing 342, a straight pushing cylinder 343 and a rotating cylinder 344, wherein the lifting cylinder 341 is fixed on the inner ring of the bearing 342, and the piston of the lifting cylinder 341 is fixedly connected with the pressure plate 321; the straight pushing cylinder 343 is fixed on the storage part 100, and a piston of the straight pushing cylinder 343 is fixedly connected with an outer ring of the bearing 342; the piston of the rotary cylinder 344 is in transmission connection with the straight pushing cylinder 343, and the rotary cylinder 344 is fixed on the storage part 100. The lifting cylinder 341 only drives the pressure plate 321 to move up and down, the direct pushing cylinder 343 drives the bearing 342 to move up and down, so that the stirring blade 311 and the fixing ring 331 move up and down together, and the rotating cylinder 344 can drive the direct pushing cylinder 343 to rotate, so that the stirring blade 311, the fixing ring 331 and the direct pushing cylinder 343 move rotationally together. The inner ring of the bearing 342 is only fixedly connected with the lifting cylinder 341, so that the lifting cylinder 341 can independently drive the pressure plate 321 to move up and down. The outer ring of the bearing 342 is fixedly connected with the stirring blade 311 and the straight pushing cylinder 343, and the fixing ring 331 is fixed on the stirring blade 311.

In order to fixedly connect the stirring blade 311 and the bearing 342, the stirring blade 311 is fixed on the outer ring of the bearing 342 by a connecting plate 312.

A positioning block 323 is fixed on the side wall of the pressure plate 321, a vertical groove 130 and a ring groove 140 are formed in the side wall of the storage part 100, wherein the vertical groove 130 is communicated with the ring groove 140, and the positioning block 323 is matched with the vertical groove 130 and the ring groove 140 in size. When the pressing plate 321 is separated from the stirring blade 311, the positioning block 323 on the pressing plate 321 can slide in the vertical groove 130, and the pressing plate 321 can not rotate, so that when the stirring blade 311 rotates, the polishing paste on the surface of the pressing plate 321 can be scraped off and extruded out of the sliding groove 322. When the pressing plate is positioned in the ring groove 140, the straight pushing cylinder 343 pushes the pressing plate 321 and the stirring blade 311 to move downward together, the size of the pressing plate 321 is consistent with the size of the inner wall of the storage part 100, and the sliding groove 322 is blocked by the stirring blade 311, thereby pressing the sanding paste into the sanding part 200.

In order to make the positioning block 323 enter the vertical groove 130 from the ring groove 140 better, the connecting part between the vertical groove 130 and the ring groove 140 is provided with a rounded corner.

The lowest point of the vertical groove 130 is located below the lowest point of the stirring blade 311, so that the rotation of the pressure plate 321 is limited after the pressure plate 321 is separated from the stirring blade 311. When the pressing plate 321 is separated from the stirring blade 311, the positioning block 323 on the pressing plate 321 slides to the lowest end of the vertical slot 130, the pressing plate 321 is not in contact with the stirring blade 311, and when the stirring blade 311 rotates, the pressing plate 321 does not rotate along with the stirring blade 311, so that the stirring blade 311 can scrape off the polishing paste on the surface of the pressing plate 321 and extrude the polishing paste out of the sliding slot 322.

The reservoir 100 includes a grinding cylinder 150, the grinding cylinder 150 having a feed port 110 and a discharge port 120, wherein the discharge port 120 is in communication with the grinding chamber 210.

The working principle is as follows: when the grinding paste is put into the storage part 100 from the feed port 110, the lifting cylinder 341 is started, the lifting cylinder 341 drives the pressing plate 321 to move downwards along the direction of the vertical groove 130, the pressing plate 321 is separated from the stirring blade 311, the pressing plate 321 does not slide on the stirring blade 311, so that the grinding paste flows out from the sliding groove 322 or a gap between the pressing plate 321 and the stirring blade 311 to the discharge port 120 and flows to the bottom of the storage part 100, and the rotating cylinder 344 can be started in the process to enable the stirring blade 311 to rotate, so that the grinding liquid and the grinding particles are better mixed. Then the lifting cylinder 341 drives the pressing plate 321 to move upwards along the direction of the vertical groove 130, so that the pressing plate 321 is located in the ring groove 140, the positioning block 323 on the pressing plate 321 is aligned with the vertical groove 130, the straight pushing cylinder 343 pushes the pressing plate 321 and the stirring blade 311 to move downwards together, the size of the pressing plate 321 is consistent with the size of the inner wall of the storage part 100, the sliding groove 322 is blocked by the stirring blade 311, and thus the polishing paste is extruded into the polishing part 200 to perform polishing operation.

The polishing paste after the polishing operation can be fed from the feed port 110 again, and since the polishing particles in the polishing paste are greatly reduced by one polishing operation, the polishing particles need to be added again. The lifting cylinder 341 is started, the lifting cylinder 341 drives the pressing plate 321 to move upward along the direction of the vertical groove 130 until the pressing plate 321 abuts against the bottom of the fixing ring 331, and at this time, the positioning block 323 of the pressing plate 321 is just positioned in the ring groove 140. The grinding particles are put into the crushing cavity 350, then the rotating cylinder 344 drives the stirring blade 311, the pressing plate 321 and the fixing ring 331 to rotate, because the positioning block 323 of the pressing plate 321 is located in the ring groove 140, the pressing plate 321 can rotate along with the stirring blade 311, and the grinding teeth 332 on the fixing ring 331 of the crushing part 330 grind the grinding particles in the crushing cavity 350. Then revolving cylinder 344 rotates to the position that locating piece 323 just in time was located perpendicular groove 130, lift cylinder 341 drives pressure disk 321 and moves down along the direction of perpendicular groove 130, until pressure disk 321 breaks away from stirring leaf 311, pressure disk 321 does not slide on stirring leaf 311 promptly, thereby make the cream of polishing flow out to discharge gate 120 from spout 322 or the clearance between pressure disk 321 and the stirring leaf 311, after pressure disk 321 breaks away from stirring leaf 311, stirring leaf 311 rotates, can strike off the cream of polishing on pressure disk 321 surface, thereby the cream of polishing is extruded to discharge gate 120 direction in spout 322, stirring leaf 311 is when the pivoted simultaneously, can mix polishing liquid and the granule of polishing better, improve the efficiency of polishing. The pressing plate 321 may press the polishing paste downward by the lifting cylinder 341, and also provides a certain pressing force to press the polishing paste into the bottom of the storage part 100 quickly.

When the polishing paste completely flows to the bottom of the storage part 100, the lifting cylinder 341 drives the pressing plate 321 to move upwards along the direction of the vertical groove 130, so that the pressing plate 321 is located in the ring groove 140, the positioning block 323 on the pressing plate 321 is aligned to the vertical groove 130, and the straight pushing cylinder 343 pushes the pressing plate 321 and the stirring blade 311 to move downwards together, so that the polishing paste is extruded into the polishing part 200 to perform polishing operation.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.