阅读说明：本技术 一种晶圆加工用加热载盘 (Heating carrier disc for wafer processing ) 是由 王艳良 张志强 于 2021-08-19 设计创作，主要内容包括：本发明公开了一种晶圆加工用加热载盘,包括：晶圆载盘,所述晶圆载盘上活动连接有晶圆,所述晶圆载盘的内部安装有多个加热棒,所述晶圆载盘的一侧设置有直流电源,所述直流电源通过电源连接线与所述加热棒串联,所述直流电源的一侧设置有PID控制器,所述PID控制器的控制输出端与所述加热棒的电控端连接,所述温度传感器的信号输出端与所述PID控制器的信号输入端连接,本发明中,通过将加热棒均匀的安装到晶圆载盘中,减少加热棒加热时对晶圆载盘的温度传输距离,同时通过温度传感器实时监控温度,并通过PID控制器对加热棒的温度进行控温,大大提高了温度传输的均匀性,便于工作人员均匀对晶圆进行去胶。(The invention discloses a heating carrying disc for wafer processing, which comprises: a wafer carrying disc, wherein the wafer carrying disc is movably connected with a wafer, a plurality of heating rods are arranged inside the wafer carrying disc, a direct current power supply is arranged on one side of the wafer carrying disc and is connected with the heating rod in series through a power supply connecting wire, a PID controller is arranged on one side of the direct current power supply, the control output end of the PID controller is connected with the electric control end of the heating rod, the signal output end of the temperature sensor is connected with the signal input end of the PID controller, the heating rod is uniformly arranged in the wafer carrying disc, so that the temperature transmission distance of the heating rod to the wafer carrying disc during heating is reduced, meanwhile, the temperature is monitored in real time through the temperature sensor, the temperature of the heating rod is controlled through the PID controller, the uniformity of temperature transmission is greatly improved, and workers can uniformly remove glue on wafers conveniently.)

1. A wafer processing is with heating carrier plate characterized in that includes: a heat conducting structure and a heating structure;

the heat conduction structure comprises a wafer carrying disc (10), a wafer (11) is movably connected onto the wafer carrying disc (10), a copper block layer (30) is fixedly installed inside the wafer carrying disc (10), a heat pipe (32) is fixedly installed outside the copper block layer (30), threaded through holes (31) are formed in the copper block layer (30) and the heat pipe (32), an outer copper ring (20) is fixedly installed outside the wafer (11), a heat conduction silica gel layer (33) is bonded inside the wafer carrying disc (10), and a heat insulation layer (34) is bonded on the inner wall of the wafer carrying disc (10);

wherein, the heating structure comprises, the heating structure includes heating rod (12), the outside integrated into one piece of heating rod (12) has external screw thread (16), heating rod (12) swing joint in the inside of screw thread through-hole (31), one side of wafer year dish (10) is provided with DC power supply (13), DC power supply (13) through power connecting wire (17) with heating rod (12) are established ties, one side of DC power supply (13) is provided with PID controller (14), one side of PID controller (14) is provided with temperature sensor (15), fixed mounting has magnet piece (40) on heating rod (12), a plurality of spacing grooves (41) have been seted up to the inside of magnet piece (40), the inside fixed mounting of spacing groove (41) has spring (42), and spring (42) are kept away from the one end fixed mounting of spacing groove (41) has gag lever (43), the wafer carrying disc (10) is internally provided with a limiting hole (44), and a plurality of iron fixing pieces (46) are fixedly arranged outside the wafer carrying disc (10).

2. A heated boat for wafer processing as recited in claim 1, wherein: the electric control end of the heating rod (12) is connected with the PID controller (14), and the signal output end of the temperature sensor (15) is connected with the signal input end of the PID controller (14).

3. A heated boat for wafer processing as recited in claim 1, wherein: the number of the heating rods (12) is at least four.

4. A heated boat for wafer processing as recited in claim 1, wherein: the heating rods (12) are uniformly distributed.

5. A heated boat for wafer processing as set forth in claim 4 wherein: the diameter of the outer wall of the wafer carrying disc (10) is equal to that of the outer wall of the wafer (11).

6. A heated boat for wafer processing as set forth in claim 5 wherein: the heating rods (12) are symmetrically arranged inside the wafer carrying disc (10).

7. A heated boat for wafer processing as recited in claim 1, wherein: the heating rod (12) is in threaded connection with the threaded through hole (31) through an external thread (16).

8. A heated boat for wafer processing as recited in claim 1, wherein: the wafer carrying disc (10) is in sliding connection with the wafer (11).

9. A heated boat for wafer processing as recited in claim 1, wherein: the inside of spacing hole (44) is provided with rake (45), and the inclination of rake (45) is 45.

10. A heated boat for wafer processing as recited in claim 1, wherein: the limiting rod (43) is inserted into the limiting hole (44).

Technical Field

The invention relates to the technical field of wafer processing, in particular to a heating carrying disc for wafer processing.

Background

In semiconductor processing, a wafer carrier is used to carry a wafer, which on the one hand serves as a mechanical support and on the other hand usually requires a certain thermal conductivity to the wafer in order to stabilize or increase the process rate. For the common design of the heating carrier disc, two heating rods are usually arranged in the center part, the heating rods are heated and then conducted to the whole heating carrier disc through heat conduction, the design method usually has the advantages that the center part is heated quickly and then conducted to the periphery of the carrier disc, the conduction path is long, and the requirement on the uniformity of the heat conductivity of the material of the heating carrier disc is very high; tests have found that even when a temperature control system is used, the center temperature is 1-2 degrees higher than the edge temperature when heated to a certain temperature point and maintained for a long time, and this physical difference causes the process uniformity to be poor, and thus, a heating carrier plate for wafer processing is proposed.

Disclosure of Invention

The present invention is directed to a heating carrier plate for wafer processing, which solves the above problems.

In order to achieve the purpose, the invention provides the following technical scheme: a heat conducting structure and a heating structure;

the heat conduction structure comprises a wafer carrying disc, a wafer is movably connected onto the wafer carrying disc, a copper block layer is fixedly installed inside the wafer carrying disc, a heat pipe is fixedly installed outside the copper block layer, threaded through holes are formed in the copper block layer and the heat pipe, an outer copper ring is fixedly installed outside the wafer, a heat conduction silica gel layer is bonded inside the wafer carrying disc, and a heat insulation layer is bonded on the inner wall of the wafer carrying disc;

wherein, heating structure includes the heating rod, the outside integrated into one piece of heating rod has the external screw thread, heating rod swing joint in the inside of screw thread through-hole, one side that the dish was carried to the wafer is provided with DC power supply, DC power supply pass through the power connecting wire with the heating rod is established ties, one side of DC power supply is provided with the PID controller, one side of PID controller is provided with temperature sensor, fixed mounting has the magnet piece on the heating rod, a plurality of spacing grooves have been seted up to the inside of magnet piece, the inside fixed mounting of spacing groove has the spring, and the spring is kept away from the one end fixed mounting of spacing groove has the gag lever post, spacing hole has been seted up to the inside that the dish was carried to the wafer, the outside fixed mounting that the dish was carried to the wafer has a plurality of iron stationary blades.

By adopting the technical scheme, the direct current power supply supplies power to the heating rod in a direct current mode, and the temperature of the heating rod is measured in real time by the temperature sensor, so that the monitoring of workers is facilitated, meanwhile, the temperature is controlled by a PID controller, and the heating rods are reinstalled and distributed on the wafer carrying disc, greatly improves the temperature transmission and the temperature uniformity, is favorable for obtaining the wafer photoresist removing speed with good uniformity, meanwhile, through the arrangement of the external threads and the threaded through holes, the heating rod is convenient for workers to install in the wafer carrying disc, the limiting rod is driven by the spring to be inserted into the limiting hole, meanwhile, the stability of the heating rod during installation is enhanced through the adsorption of the magnet block on the iron fixing sheet, and the heat of the heating rod is quickly transferred to the wafer through the arrangement of the copper block layer and the heat pipe, the heating speed of the wafer is increased, and the outer copper ring of the outer ring of the wafer can quickly transfer heat into the wafer from outside to inside.

Preferably, the electric control end of the heating rod is connected with the PID controller, and the signal output end of the temperature sensor is connected with the signal input end of the PID controller

Preferably, the number of the heating rods is at least four.

Through adopting above-mentioned technical scheme, the quantity makes rate of heating faster for four heating rods at least, and rate of heating is more even.

Preferably, a plurality of the heating rods are uniformly distributed.

By adopting the technical scheme, the heating rods are uniformly distributed, so that the heating rods can more quickly diffuse the heating of the wafer carrying disc into the whole wafer carrying disc, and the heating speed is improved.

Preferably, the diameter of the outer wall of the wafer carrying disc is equal to that of the outer wall of the wafer.

By adopting the technical scheme, the equal outer wall diameter is convenient for the wafer carrying disc to carry the wafer.

Preferably, the heating rods are symmetrically arranged inside the wafer carrying disc.

Through adopting above-mentioned technical scheme, the heating rod that the symmetry set up can be when the heating rod starts, even carry the dish with the wafer with heat diffusion for it is more even to being heated of wafer, avoids appearing the condition that the temperature is too high on one side, and the temperature is crossed too low on one side.

Preferably, the heating rod is in threaded connection with the threaded through hole through an external thread.

Through adopting above-mentioned technical scheme, through threaded connection's heating rod, the staff of being convenient for is to the dismantlement and the installation of heating rod.

Preferably, the wafer carrying disc is in sliding connection with the wafer.

By adopting the technical scheme, the wafer carrying disc is in sliding connection with the wafer, so that the separation of the wafer and the wafer carrying disc by workers is facilitated.

Preferably, an inclined portion is provided inside the limiting hole, and the inclined portion has an inclination angle of 45 °.

Through adopting above-mentioned technical scheme, inclination is 45 the inside that is convenient for the staff to peg graft the gag lever post or extract the spacing hole.

Preferably, the limiting rod is inserted into the limiting hole.

Through adopting above-mentioned technical scheme, the inside in spacing hole is pegged graft into to the gag lever post, has guaranteed the stability between heating rod and the wafer year dish.

Compared with the prior art, the invention has the beneficial effects that:

according to the invention, the heating rods are uniformly arranged in the wafer carrying disc, so that the temperature transmission distance of the heating rods to the wafer carrying disc during heating is reduced, meanwhile, the temperature is monitored in real time through the temperature sensor, the temperature of the heating rods is controlled through the PID controller, the uniformity of temperature transmission is greatly improved, workers can uniformly remove glue from wafers conveniently, meanwhile, the copper block layer and the heat pipes are arranged in the wafer carrying disc, the temperature is rapidly transmitted to the wafers through the copper block layer and the heat pipes, heat is rapidly transmitted from the outside to the inside through the outer copper rings arranged on the outer rings of the wafers, and the heating speed and the heating efficiency of the wafers are greatly improved by matching with the heating rods.

Drawings

FIG. 1 is a schematic view of a heating carrier plate for wafer processing according to one embodiment of the present invention;

FIG. 2 is a second schematic view of a heating carrier plate for wafer processing according to the present invention;

FIG. 3 is a schematic view of the structure of the heating rods and the wafer carrier plate of the heating carrier plate for wafer processing according to the present invention;

FIG. 4 is a schematic cross-sectional view of a wafer carrier of the present invention;

FIG. 5 is a schematic view of a heating rod of the wafer processing heating carrier plate according to the present invention;

FIG. 6 is a schematic structural view of a limiting hole and an inclined portion of a heating carrier plate for wafer processing according to the present invention;

FIG. 7 is a schematic structural view of a spring and a stop lever in a heating carrier plate for wafer processing according to the present invention;

FIG. 8 is a schematic structural view of the wafer and the outer copper ring in the heating carrier plate for wafer processing according to the present invention.

In the figure: 10. a wafer carrying tray; 11. a wafer; 12. a heating rod; 13. a direct current power supply; 14. a PID controller; 15. a temperature sensor; 16. an external thread; 17. a power connection line; 20. an outer copper ring; 30. a copper block layer; 31. a threaded through hole; 32. a heat pipe; 33. a heat conductive silica gel layer; 34. a heat-insulating layer; 40. a magnet block; 41. a limiting groove; 42. a spring; 43. a limiting rod; 44. a limiting hole; 45. an inclined portion; 46. iron stator.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 to 8, the present invention provides a technical solution:

a heated boat for wafer processing, comprising: a heat conducting structure and a heating structure.

The wafer carrying disc 10 is characterized in that at least four heating rods 12 are uniformly arranged in the wafer carrying disc 10, the diameter of the outer wall of the wafer carrying disc 10 is equal to that of the outer wall of a wafer 11, the equal diameter of the outer wall is convenient for the wafer carrying disc 10 to carry and install the wafer 11, the heating rods 12 are in threaded connection with threaded through holes 31 through external threads 16, a limiting rod 43 is driven by a spring 42 positioned in a limiting groove 41 to be matched with an inclined part 45 to be inserted into the limiting hole 44, the stability of the heating rods 12 during installation is ensured, meanwhile, the stability of the heating rods 12 during installation is enhanced through the adsorption of an iron fixing piece 46 by a magnet block 40, the heating rods 12 are powered by a direct current power supply 13, the direct current power supply 13 is connected with the heating rods 12 in series through a power supply connecting line 17, the heating rods 12 are subjected to temperature control through a PID controller 14 in the heating process of the heating rods 12, and the control output end of the PID controller 14 is connected with an electric control end of the heating rods 12, meanwhile, the temperature of the heating rod 12 is measured in real time through a temperature sensor 15, and the signal output end of the temperature sensor 15 is connected with the signal input end of the PID controller 14;

meanwhile, the copper block layer 30 and the heat pipe 32 are installed in the wafer carrying disc 10, the heat conduction efficiency is improved, a heat conduction silica gel layer 33 is bonded between the heat pipe 32 and the wafer carrying disc 10 to improve the heat conduction efficiency again, a heat insulation layer 34 is bonded in the wafer carrying disc 10, the internal temperature of the wafer carrying disc 10 is kept through the heat insulation layer 34, the energy loss is reduced, when the wafer 11 is heated, the temperature of the wafer 11 is improved from the outside and the inside through the outer copper ring 20 and the heating rod 12, and the heating speed of the wafer is improved.

According to the technical scheme, the working steps of the scheme are summarized and carded: the worker supplies power to the heating rod 12 through the direct current power supply 13 in a direct current power supply mode, the temperature of the heating rod 12 is measured in real time through the temperature sensor 15 in the heating process of the heating rod 12, the monitoring of the worker is facilitated, meanwhile, the temperature control is performed through the PID controller 14, the phenomenon that the temperature is too high or the temperature is low is avoided, the heating rod 12 is re-installed and distributed on the wafer carrying disc 10, the temperature transmission and the temperature uniformity are greatly improved, the photoresist removing rate of the wafer 11 with good uniformity is facilitated, meanwhile, through the arrangement of the external threads 16 and the threaded through holes 31, the worker can conveniently install the heating rod 12 into the wafer carrying disc 10, the limiting rod 43 is driven by the spring 42 to be inserted into the limiting holes 44, and meanwhile, the stability of the heating rod 12 during installation is enhanced through the magnet block 40 to absorb the iron fixing pieces 46, and through the arrangement of the copper block layer 30 and the heat pipe 32, the heat of the heating rod 12 is quickly conducted into the wafer 11, so that the heating speed of the wafer 11 is increased, and the outer copper ring 20 on the outer ring of the wafer 11 can quickly conduct the heat into the wafer 11 from the outside to the inside.

To sum up: according to the invention, the heating rods 12 are uniformly arranged in the wafer carrying disc 10, so that the temperature transmission distance of the heating rods 12 to the wafer carrying disc 10 during heating is reduced, meanwhile, the temperature is monitored in real time through the temperature sensor 15, the temperature of the heating rods 12 is controlled through the PID controller 14, the uniformity of temperature transmission is greatly improved, workers can uniformly remove glue from wafers conveniently, meanwhile, the copper block layer 30 and the heat pipe 32 are arranged in the wafer carrying disc 10, the temperature is rapidly transmitted to the wafers 11 through the copper block layer 30 and the heat pipe 32, heat is rapidly transmitted from the outside to the inside through the outer copper ring 20 arranged on the outer ring of the wafers 11, and the heating speed and the heating efficiency of the wafers 11 are greatly improved by matching with the heating rods 12.

The parts not involved in the present invention are the same as or can be implemented by the prior art. Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.