阅读说明：本技术 一种含三级位移放大机构的探针微进给平台及工作方法 (Probe micro-feeding platform comprising three-stage displacement amplification mechanism and working method ) 是由 郭志永 曹轶然 张志强 路学成 张天刚 于 2021-08-17 设计创作，主要内容包括：本发明属于探针微进给平台技术领域,尤其涉及一种含三级位移放大机构的探针微进给平台及工作方法。包括基座Ⅰ、基座Ⅱ、压电陶瓷、双平行板导向机构和柔性位移放大机构；压电陶瓷设在基座Ⅰ内侧中心处,压电陶瓷下方设有螺纹连接为一体的盖形螺母和预紧螺栓,压电陶瓷的下端与盖形螺母的球面接触；预紧螺栓下方与基座Ⅱ的顶部接触；双平行板导向机构包括位于压电陶瓷顶部的输入块,双平行板导向机构的左右两侧与基座Ⅰ连接；双平行板导向机构沿压电陶瓷轴向产生的变形,将压电陶瓷压紧在输入块下；柔性位移放大机构包括左右对称布置的SR机构、杠杆机构与双Z型机构,扩大了压电陶瓷输出位移,实现了探针安装台的大行程平移进给。(The invention belongs to the technical field of probe micro-feeding platforms, and particularly relates to a probe micro-feeding platform with a three-stage displacement amplification mechanism and a working method. The device comprises a base I, a base II, piezoelectric ceramics, a double-parallel-plate guide mechanism and a flexible displacement amplification mechanism; the piezoelectric ceramic is arranged at the center of the inner side of the base I, a cap nut and a pre-tightening bolt which are connected into a whole through threads are arranged below the piezoelectric ceramic, and the lower end of the piezoelectric ceramic is in contact with the spherical surface of the cap nut; the lower part of the pre-tightening bolt is in contact with the top of the base II; the double-parallel-plate guide mechanism comprises an input block positioned at the top of the piezoelectric ceramic, and the left side and the right side of the double-parallel-plate guide mechanism are connected with the base I; the double parallel plate guide mechanism compresses the piezoelectric ceramics under the input block along the deformation generated by the piezoelectric ceramics in the axial direction; the flexible displacement amplifying mechanism comprises an SR mechanism, a lever mechanism and a double-Z-shaped mechanism which are symmetrically arranged left and right, the output displacement of the piezoelectric ceramics is enlarged, and the large-stroke translational feeding of the probe mounting table is realized.)

1. A probe micro-feeding platform comprising a three-stage displacement amplification mechanism is characterized in that: the device comprises a base I, a base II, piezoelectric ceramics, a double-parallel-plate guide mechanism and a flexible displacement amplification mechanism;

the piezoelectric ceramic is arranged at the center of the inner side of the base I, a cap nut and a pre-tightening bolt which are connected into a whole through threads are arranged below the piezoelectric ceramic, and the lower end of the piezoelectric ceramic is in contact with the spherical surface of the cap nut; the lower part of the pre-tightening bolt is in contact with the top of the base II;

the double-parallel-plate guide mechanism comprises an input block positioned at the top of the piezoelectric ceramic, and the left side and the right side of the double-parallel-plate guide mechanism are connected with the base I; the deformation of the double parallel plate guide mechanism along the axial direction of the piezoelectric ceramics compresses the piezoelectric ceramics under the input block. The flexible displacement amplifying mechanism comprises an SR mechanism, a lever mechanism and a double-Z-shaped mechanism which are symmetrically arranged left and right; the SR mechanism can convert the unidirectional output displacement of the piezoelectric ceramics into two paths of output displacements with equal size and opposite directions on the same straight line, and amplifies the output displacement of the piezoelectric ceramics, thereby being a first-stage displacement amplification mechanism; the two lever mechanisms are arranged in bilateral symmetry, amplify the input displacement of the respective middle position and are second-stage displacement amplification mechanisms; the double-Z-shaped mechanism enables the probe mounting table to generate vertical displacement and is a third-stage displacement amplification mechanism.

2. The probe microfeeding stage with a three-stage displacement amplification mechanism according to claim 1, wherein: the top end of the SR mechanism is connected with the input block through a flexible hinge B, the lower inner side of the SR mechanism is connected with the base I through a flexible hinge A, the lower outer side of the SR mechanism is connected with the connecting block I through a flexible hinge D, and a flexible hinge C is arranged in the middle of the SR mechanism;

the first stage displacement magnification of the SR mechanism is:

in the formula I_ABIs the distance between the revolute pair A and the revolute pair B, l_ADIs the distance between the revolute pair A and the revolute pair D.

3. The probe microfeeding stage with a three stage displacement amplification mechanism according to claim 2, wherein: the connecting block I is an output end of the SR mechanism and serves as an input end to transmit the output displacement of the piezoelectric ceramics to the middle position of the lever mechanism through the flexible hinge F.

4. The probe microfeeding stage with a three stage displacement amplification mechanism according to claim 3, wherein: one end of the lever mechanism is flexibly connected with the base II through a flexible hinge E, and the other end of the lever mechanism is flexibly connected with the connecting block II through a flexible hinge G;

the second stage displacement magnification of the lever mechanism is as follows:

in the formula I_GEIs the distance between the revolute pair G and the revolute pair E, l_FEThe distance between the revolute pair F and the revolute pair E is shown, and theta is an included angle between the connection line of the revolute pair E and the revolute pair F and the connection line of the revolute pair D and the revolute pair F.

5. The probe microfeeding stage with a three-stage displacement amplification mechanism according to claim 1, wherein: and a parallel flexible supporting mechanism is arranged above the connecting block II, and the upper end of the parallel flexible supporting mechanism is connected with the base II.

6. The probe microfeeding stage with a three-stage displacement amplification mechanism according to claim 1, wherein: and the connecting blocks II are output ends of the lever mechanisms and are used as input ends to transmit displacement to the double-Z-shaped mechanism between the two connecting blocks II.

7. The probe microfeeding stage with a three-stage displacement amplification mechanism according to claim 1, wherein: two Z type mechanisms bilateral symmetry arrange, and a connecting block II is connected respectively to two Z type mechanisms's one end, and the other end at two Z type mechanisms is connected to the probe mount table between two parties.

8. The working method of the probe micro-feeding platform with the three-stage displacement amplification mechanism as claimed in claim 4, characterized by comprising the following steps:

s1, keeping the cap-shaped nut still by using an auxiliary means, and screwing the pre-tightening bolt by using a screwdriver through the pre-tightening through hole to enable the cap-shaped nut and the pre-tightening bolt to generate relative rotation so as to axially pre-tighten the piezoelectric ceramic;

s2, applying a certain voltage to the piezoelectric ceramic, wherein the piezoelectric ceramic can generate corresponding deformation along the axial direction of the pre-tightening bolt, and the output displacement is transferred to the input block; the double-parallel-plate guide mechanism guides the input block to ensure that the piezoelectric ceramics output linear displacement;

s3, the input block transmits the displacement to an SR mechanism through a flexible hinge, the SR mechanism can convert the unidirectional output displacement of the piezoelectric ceramics into two paths of output displacements with equal size and opposite directions on the same straight line, and the output displacement of the piezoelectric ceramics is amplified, which is the first-stage amplification of the displacement;

s4, the SR mechanism outputs the amplified displacement to the connecting block I, and the two lever mechanisms amplify the input displacement at the respective middle positions and transmit the amplified displacement to the connecting block II, so that the second-stage amplification of the displacement is realized;

s5, the two connecting blocks II simultaneously act on the input ends of the bilaterally symmetrical double-Z-shaped mechanisms through two displacements which are equal in size and opposite in direction, and the double-Z-shaped mechanisms amplify the displacements for the third stage and output the amplified displacements to the probe mounting table to enable the probe mounting table to generate vertical displacement;

the third stage displacement magnification of the double Z-shaped mechanism is as follows:

in the formula, C_ZinIs a flexibility matrix, particularly a rank matrix, at the input end of the double Z-shaped mechanism,i and j in (1) are matrixes C_ZinRow i and column j.

The total displacement magnification of the flexible displacement magnification mechanism is AMP ═ AMP₁×AMP₂×AMP₃。

Technical Field

The invention belongs to the technical field of probe micro-feeding platforms, and particularly relates to a probe micro-feeding platform with a three-stage displacement amplification mechanism and a working method.

Background

The processing of the surface micro-nano structure is an important direction in the micro-nano field. Compared with micro-nano technologies such as photoetching and nano-imprinting, the probe-based micro-nano processing technology has the advantages of good flexibility, low cost, simplicity in control and the like, so that the probe-based micro-nano processing technology plays an important role in the field of micro-nano processing, and the precise feeding of the probe is a necessary condition for realizing micro-nano processing. The atomic force microscope is used as common equipment for micro-nano processing, the probe feeding function of the atomic force microscope is mainly realized by directly driving a cantilever beam through piezoelectric ceramics, but the probe feeding stroke is generally small due to the size of the piezoelectric ceramics. In addition, the cantilever beam has large rigidity difference along the axial direction and the transverse direction, which is not beneficial to ensuring the processing precision.

Disclosure of Invention

In order to solve the technical problem, the invention provides a probe micro-feeding platform with a three-stage displacement amplification mechanism and a working method.

In order to achieve the purpose, the technical scheme of the application is as follows:

a probe micro-feeding platform comprising a three-stage displacement amplification mechanism comprises a base I, a base II, piezoelectric ceramics, a double-parallel-plate guide mechanism and a flexible displacement amplification mechanism;

the piezoelectric ceramic is arranged at the center of the inner side of the base I, a cap nut and a pre-tightening bolt which are connected into a whole through threads are arranged below the piezoelectric ceramic, and the lower end of the piezoelectric ceramic is in contact with the spherical surface of the cap nut; the lower part of the pre-tightening bolt is in contact with the top of the base II;

the double-parallel-plate guide mechanism comprises an input block positioned at the top of the piezoelectric ceramic, and the left side and the right side of the double-parallel-plate guide mechanism are connected with the base I; the deformation of the double parallel plate guide mechanism along the axial direction of the piezoelectric ceramics compresses the piezoelectric ceramics under the input block.

The flexible displacement amplifying mechanism comprises an SR mechanism, a lever mechanism and a double-Z-shaped mechanism which are symmetrically arranged left and right; the SR mechanism can convert the unidirectional output displacement of the piezoelectric ceramics into two paths of output displacements with equal size and opposite directions on the same straight line, and amplifies the output displacement of the piezoelectric ceramics, thereby being a first-stage displacement amplification mechanism; the two lever mechanisms are arranged in bilateral symmetry, amplify the input displacement of the respective middle position and are second-stage displacement amplification mechanisms; the double-Z-shaped mechanism enables the probe mounting table to generate vertical displacement and is a third-stage displacement amplification mechanism.

Furthermore, the top end of the SR mechanism is connected with the input block through a flexible hinge B, the lower inner side of the SR mechanism is connected with the base I through a flexible hinge A, the lower outer side of the SR mechanism is connected with the connecting block I through a flexible hinge D, and a flexible hinge C is arranged in the middle of the SR mechanism;

the first stage displacement magnification of the SR mechanism is:

in the formula I_ABIs the distance between the revolute pair A and the revolute pair B, l_ADIs the distance between the revolute pair A and the revolute pair D.

Furthermore, the connecting block I is an output end of the SR mechanism and serves as an input end to transmit the output displacement of the piezoelectric ceramics to the middle position of the lever mechanism through the flexible hinge F.

Furthermore, one end of the lever mechanism is flexibly connected with the base II through a flexible hinge E, and the other end of the lever mechanism is flexibly connected with the connecting block II through a flexible hinge G;

the second stage displacement magnification of the lever mechanism is as follows:

in the formula I_GEIs the distance between the revolute pair G and the revolute pair E, l_FEThe distance between the revolute pair F and the revolute pair E is shown, and theta is an included angle between the connection line of the revolute pair E and the revolute pair F and the connection line of the revolute pair D and the revolute pair F.

Furthermore, a parallel flexible supporting mechanism is arranged above the connecting block II, and the upper end of the parallel flexible supporting mechanism is connected with the base II.

Furthermore, the connecting blocks II are output ends of the lever mechanisms and serve as input ends to transmit displacement to the double-Z-shaped mechanism between the two connecting blocks II.

Furthermore, the two double-Z-shaped mechanisms are arranged in a bilateral symmetry mode, one ends of the two double-Z-shaped mechanisms are connected with the connecting block II respectively, and the probe mounting table is connected to the other ends of the two double-Z-shaped mechanisms in the middle.

Furthermore, the working method of the probe micro-feeding platform with the three-stage displacement amplification mechanism comprises the following steps:

s1, keeping the cap-shaped nut still by using an auxiliary means, and screwing the pre-tightening bolt by using a screwdriver through the pre-tightening through hole to enable the cap-shaped nut and the pre-tightening bolt to generate relative rotation so as to axially pre-tighten the piezoelectric ceramic;

s2, applying a certain voltage to the piezoelectric ceramic, wherein the piezoelectric ceramic can generate corresponding deformation along the axial direction of the pre-tightening bolt, and the output displacement is transferred to the input block; the double-parallel-plate guide mechanism guides the input block to ensure that the piezoelectric ceramics output linear displacement;

s3, the input block transmits the displacement to an SR mechanism through a flexible hinge, the SR mechanism can convert the unidirectional output displacement of the piezoelectric ceramics into two paths of output displacements with equal size and opposite directions on the same straight line, and the output displacement of the piezoelectric ceramics is amplified, which is the first-stage amplification of the displacement;

s4, the SR mechanism outputs the amplified displacement to the connecting block I, and the two lever mechanisms amplify the input displacement at the respective middle positions and transmit the amplified displacement to the connecting block II, so that the second-stage amplification of the displacement is realized;

s5, the two connecting blocks II simultaneously act on the input ends of the bilaterally symmetrical double-Z-shaped mechanisms through two displacements which are equal in size and opposite in direction, and the double-Z-shaped mechanisms amplify the displacements for the third stage and output the amplified displacements to the probe mounting table to enable the probe mounting table to generate vertical displacement;

the third stage displacement magnification of the double Z-shaped mechanism is as follows:

in the formula, C_ZinIs a flexibility matrix, particularly a rank matrix, at the input end of the double Z-shaped mechanism,i and j in (1) are matrixes C_ZinRow i and column j.

The total displacement magnification of the flexible displacement magnification mechanism is AMP ═ AMP₁×AMP₂×AMP₃。

Compared with the prior art, the invention has the following beneficial effects:

the output displacement of the piezoelectric ceramics is enlarged through three-stage amplification of the SR mechanism, the lever mechanism and the double-Z type mechanism, and the large-stroke translational feeding of the probe mounting table is realized; the stability of the left SR mechanism and the right SR mechanism can be improved through the double parallel plate guide mechanisms; through the parallel flexible supporting mechanism, the stability of the double-Z-shaped mechanism can be improved, the input of the double-Z-shaped mechanism is ensured to be translational motion, and the motion precision of the probe mounting table is improved; be equipped with the pretension through-hole of intercommunication on probe mount table and base I, twist through this hole and change the pretension bolt, realize pretension bolt and the relative rotation of cap nut, be convenient for realize piezoceramics's pretension.

Drawings

FIG. 1 is a schematic diagram of a micro-feeding platform according to the present invention;

FIG. 2 is a schematic view of the structure of the flexible mechanism of the present invention;

fig. 3 is a schematic kinematic diagram of the present invention.

In the figure:

1. piezoelectric ceramics, 2, a cover nut, 3, a pre-tightening bolt, 4, a flexible displacement amplification mechanism, 41, a fixing hole, 42, an input block, 43, a double parallel plate guide mechanism, 44, an SR mechanism, 45, a base I, 46, a lever mechanism, 47, a connecting block I, 48, a parallel flexible support mechanism, 49, a connecting block II, 410, a double Z-shaped mechanism, 411, a probe mounting table, 412, a base II, 413, a flexible hinge G, 414, a flexible hinge F, 415, a flexible hinge D, 416, a flexible hinge E, 417, a flexible hinge A, 418, a flexible hinge C, 419, a flexible hinge B, 5, a pre-tightening through hole, 61, a revolute pair A, 62, a revolute pair B, 63, a revolute pair C, 64, a revolute pair D, 65, a revolute pair E, 66, a revolute pair F, 67 and a revolute pair G.

Detailed Description

The invention is further described below with reference to the accompanying drawings:

example (b):

as shown in figures 1 to 3:

the invention provides a probe micro-feeding platform comprising a three-stage displacement amplification mechanism, which specifically comprises a base I45, a base II 412, piezoelectric ceramics 1, a double-parallel-plate guide mechanism 43 and a flexible displacement amplification mechanism 4;

the piezoelectric ceramic 1 is arranged at the center of the inner side of the base I45, the cap nut 2 and the pre-tightening bolt 3 which are connected into a whole through threads are arranged below the piezoelectric ceramic 1, the lower end of the piezoelectric ceramic 1 is in contact with the spherical surface of the cap nut 2, and the piezoelectric ceramic 1 can be prevented from bearing bending moment; the lower part of the pre-tightening bolt 3 is in contact with the top of the base II 412. In actual operation, the cap nut 2 is kept static by using an auxiliary means, and the pre-tightening bolt 3 is screwed by using a screwdriver through the pre-tightening through hole 5, so that the cap nut 2 and the pre-tightening bolt 3 rotate relatively, the cap nut 2 extrudes the piezoelectric ceramic 1 axially, and the pre-tightening purpose is achieved.

The double-parallel-plate guide mechanism 43 comprises an input block 42 positioned at the top of the piezoelectric ceramic 1, and the left side and the right side of the double-parallel-plate guide mechanism 43 are connected with the base I45, so that the output linear displacement of the piezoelectric ceramic 1 is ensured, the left side and the right side of the piezoelectric ceramic are not deviated, and the stability of the mechanism is improved; the deformation of the double parallel plate guide mechanism 43 in the axial direction of the piezoelectric ceramic presses the piezoelectric ceramic 1 under the input block 42.

The flexible displacement amplification mechanism 4 comprises an SR mechanism 44, a lever mechanism 46 and a double Z-shaped mechanism 410 which are symmetrically arranged. The top end of the SR mechanism 44 is connected with the input block 42 through a flexible hinge B419, the lower inner side of the SR mechanism 44 is connected with the base I45 through a flexible hinge A417, the lower outer side of the SR mechanism 44 is connected with the connecting block I47 through a flexible hinge D415, and a flexible hinge C418 is arranged in the middle of the SR mechanism 44. The connecting block I47 is connected to the middle position of the lever mechanism 46 through a flexible hinge F414. The SR mechanism 44 can convert the unidirectional output displacement of the piezoelectric ceramic 1 into two paths of output displacements with equal magnitude and opposite directions on the same straight line, and amplify the output displacement of the piezoelectric ceramic 1, which is a first-stage displacement amplification mechanism. The first-stage displacement magnification calculation formula is as follows:

in the formula I_ABDistance between revolute pair A61 and revolute pair B62,/_ADThe distance between revolute pair a61 and revolute pair D64.

The connecting block i 47 is an output end of the SR mechanism 44, and serves as an input end for transmitting the output displacement of the piezoelectric ceramic 1 to an intermediate position of the lever mechanism 46 through the flexible hinge F414. One end of the lever mechanism 46 is flexibly connected with the base II 412 through a flexible hinge E416, and the other end of the lever mechanism is flexibly connected with the connecting block II 49 through a flexible hinge G413. The two lever mechanisms 46 are arranged in bilateral symmetry, amplify input displacement of the respective middle positions and transmit the amplified input displacement to the connecting block II 49, and are second-stage displacement amplification mechanisms of the flexible mechanism.

The second stage displacement magnification calculation formula is

In the formula I_GEDistance between revolute pair G67 and revolute pair E65,/_FEDistance of revolute pair F66 from revolute pair E65, θ₆Is the included angle between the connecting line of the revolute pair E65 and the revolute pair F66 and the connecting line of the revolute pair D64 and the revolute pair F66.

A parallel flexible supporting mechanism 48 is arranged above the second connecting block 49, and the upper end of the parallel flexible supporting mechanism 48 is connected with the second base 412. The parallel flexible supporting mechanism 48 can prevent the connecting block II 49 from rotating, and ensures the translational motion of the connecting block II 49.

The second connecting block 49 is the output of the lever mechanism 46 and serves as an input for transmitting the displacement to the double-Z mechanism 410 between the two second connecting blocks 49. The two double-Z-shaped mechanisms 410 are arranged in a bilateral symmetry mode, one ends of the two double-Z-shaped mechanisms 410 are connected with one connecting block II 49 respectively, and the probe mounting table 411 is connected to the other ends of the two double-Z-shaped mechanisms 410 in the middle. Two displacements with equal magnitude and opposite directions simultaneously act on the input ends of the bilaterally symmetric double-Z mechanism 410, and the double-Z mechanism 410 causes the probe mounting table 411 to generate vertical displacement, which is the third amplification of the displacement.

The third-stage displacement magnification calculation formula is as follows:

in the formula, C_ZinIs a compliance matrix, specifically a6 th order matrix,i and j in (1) are matrixes C_ZinRow i and column j.

According to the above analysis, the total displacement magnification of the flexible displacement magnifying mechanism 4 is

AMP＝AMP₁×AMP₂×AMP₃。

The working method of the probe micro-feeding platform with the three-stage displacement amplification mechanism comprises the following steps:

s1, keeping the cap-shaped nut 2 static by using an auxiliary means, and screwing the pre-tightening bolt 3 through the pre-tightening through hole 5 by using a screwdriver, so that the cap-shaped nut 2 and the pre-tightening bolt 3 generate relative rotation, and axially pre-tightening the piezoelectric ceramic 1;

s2, applying a certain voltage to the piezoelectric ceramic 1, so that the piezoelectric ceramic 1 can generate corresponding deformation along the axial direction of the pre-tightening bolt 3 and output displacement to the input block 42; the double-parallel-plate guide mechanism 43 guides the input block 42 to ensure that the piezoelectric ceramic 1 outputs linear displacement;

s3, the input block 42 transmits the displacement to the SR mechanism 44 through the flexible hinge, the SR mechanism 44 can convert the unidirectional output displacement of the piezoelectric ceramic 1 into two paths of output displacements with equal size and opposite directions on the same straight line, and amplify the output displacement of the piezoelectric ceramic 1, which is the first-stage amplification of the displacement;

s4, the SR mechanism 44 outputs the amplified displacement to the connecting block I47, and the two lever mechanisms 46 amplify the input displacement of the respective middle positions and transmit the amplified displacement to the connecting block II 49, which is the second-stage amplification of the displacement;

s5, two displacements with equal magnitude and opposite directions simultaneously act on the input end of the bilateral-symmetric dual-Z mechanism 410, and the dual-Z mechanism 410 amplifies the displacement by the third stage and outputs the amplified displacement to the probe mounting stage 411, so that the probe mounting stage 411 generates a displacement in the vertical direction.

The technical solutions of the present invention or similar technical solutions designed by those skilled in the art based on the teachings of the technical solutions of the present invention are all within the scope of the present invention.