阅读说明：本技术 接合装置 (Joining device ) 是由 関口繁之 永口悠二 瀬山耕平 于 2020-04-07 设计创作，主要内容包括：接合装置1包括：带进给模块10,自载带13取出电子零件301,搬送所取出的电子零件301；裸片供应模块20,具有将半导体裸片201顶起而自贴附于切割片22a的半导体晶片200拾取半导体裸片201的裸片拾取机构21,搬送所拾取的半导体裸片201；以及接合模块40,将自裸片供应模块20提供的半导体裸片201及自带进给模块10提供的电子零件301的至少一者配置于电路基板101。(The joining device 1 includes: a tape feeding module 10 for taking out the electronic component 301 from the carrier tape 13 and carrying the taken out electronic component 301; a die supply module 20 having a die pick-up mechanism 21 for lifting up the semiconductor die 201 and picking up the semiconductor die 201 from the semiconductor wafer 200 attached to the dicing sheet 22a, and carrying the picked-up semiconductor die 201; and a bonding module 40 that disposes at least one of the semiconductor die 201 supplied from the die supply module 20 and the electronic component 301 supplied from the tape feed module 10 on the circuit board 101.)

1. A joining device comprising:

an electronic component supply module for taking out an electronic component from the carrier tape and carrying the taken out electronic component;

a die supply module having a pick-up section for picking up a semiconductor die from a wafer attached to a dicing sheet by lifting up the semiconductor die, and carrying the picked-up semiconductor die; and

a bonding module that disposes at least one of the semiconductor die supplied from the die supply module and the electronic part supplied from the electronic part supply module on a substrate.

2. The joining device according to claim 1, wherein the electronic part providing module has: a first carrier unit for carrying out the electronic component taken out from the carrier tape from the electronic component supply module,

the die providing module has: a second carrying section for carrying out the picked semiconductor die from the die supply module,

one of the first and second conveying members is a common conveying path for conveying both the electronic component and the semiconductor die to the bonding module, and the other is an independent conveying path for conveying either the electronic component or the semiconductor die to the common conveying path.

3. The bonding apparatus according to claim 2, wherein the first and second conveying members convey the semiconductor die and the electronic component in a predetermined conveying direction.

4. The bonding apparatus according to claim 3, wherein the electronic part supply module, the die supply module, and the bonding module are arranged in this order along the carrying direction.

5. The joining device according to any one of claims 2 to 4, wherein the joining module has: and a placement member configured to receive the electronic component from the first conveying member and place the received electronic component on the substrate, and configured to receive the semiconductor die from the second conveying member and place the received semiconductor die on the substrate.

Technical Field

The present invention relates to a joining device.

Background

For example, a Central Processing Unit (CPU), which is one type of electronic device, includes a surface-mount electronic component such as a capacitor (capacitor) and a semiconductor die such as a CPU chip. The manufacturing steps of such electronic components include the step of packaging electronic components and semiconductor dies on a circuit substrate. For example, patent document 1 discloses a device for packaging bare chip parts packaged by a carrier tape (carrier tape) on a circuit board. Patent document 2 discloses an apparatus for packaging a semiconductor die on a circuit board.

Documents of the prior art

Patent document

Patent document 1: international publication No. 2016/208069

Patent document 2: international publication No. 2017/119217

Disclosure of Invention

Problems to be solved by the invention

In the field of technology, diversification of electronic components is advancing. Electronic components can take various component structures depending on their functions. The types and the numbers of electronic components and semiconductor dies packaged on the circuit board are different depending on the types of electronic components.

Accordingly, the present invention provides a bonding apparatus that can cope with various kinds of production of electronic components.

Means for solving the problems

An embodiment of the present invention includes: an electronic component supply module for taking out electronic components from the carrier tape and carrying the taken out electronic components; a die supply module having a pick-up section for lifting up a semiconductor die and picking up the semiconductor die from a wafer attached to a dicing sheet, and for carrying the picked-up semiconductor die; and a bonding module that disposes at least one of the semiconductor die supplied from the die supply module and the electronic component supplied from the electronic component supply module on the substrate.

The bonding apparatus includes a die providing module that provides a semiconductor die. Further, the joining apparatus also includes an electronic part supply module that supplies the electronic parts. The bonding module manufactures the electronic component by receiving supply of the required parts from the die supply module and the electronic part supply module. Thus, the bonding device can cope with the production of electronic elements including at least one of semiconductor dies and electronic parts. As a result, the method can be applied to various kinds of electronic components.

The electronic component providing module of the joining device of an embodiment may have a first conveying part that carries out the electronic component taken out from the carrier tape from the electronic component providing module. The die supply module may have a second handling part that carries the picked semiconductor die out of the die supply module. Either one of the first and second conveying members may be a common conveying path for conveying both the electronic component and the semiconductor die to the bonding module. The other may be an independent transfer path for transferring any one of the electronic component and the semiconductor die to the common transfer path. According to these structures, the semiconductor die and the electronic component can be suitably provided to the mold block.

Can also be: the first and second conveying members of the bonding apparatus of one embodiment convey the semiconductor dies and the electronic components in a predetermined conveying direction. According to the above configuration, the first conveying section and the second conveying section can be configured to be simple.

Can also be: the bonding apparatus of an embodiment is sequentially provided with an electronic component providing module, a bare chip providing module and a bonding module along a conveying direction. According to the structure, the structure for conveying the electronic components and the semiconductor bare chip is simpler.

Can also be: the bonding module of the bonding apparatus of an embodiment has: and a placement member configured to receive the electronic component from the first conveying member and place the received electronic component on the substrate, and configured to receive the semiconductor die from the second conveying member and place the received semiconductor die on the substrate. According to the structure, the bonding module can configure the electronic part and the semiconductor die to the substrate.

ADVANTAGEOUS EFFECTS OF INVENTION

The bonding apparatus according to an embodiment of the present invention can cope with various kinds of production of electronic components.

Drawings

Fig. 1 is a schematic view showing a bonding apparatus according to an embodiment.

Part (a) of fig. 2 is a diagram showing a state immediately before the die transfer mechanism picks up the semiconductor die. Part (b) of fig. 2 is a diagram showing a state immediately after the die transfer mechanism picks up the semiconductor die.

Fig. 3 (a) is a diagram showing a flip-chip operation of the die transfer mechanism. Part (b) of fig. 3 is a diagram showing an operation of delivering a semiconductor die.

Fig. 4 (a) is a diagram showing a state immediately before bonding of semiconductor dies. Part (b) of fig. 4 shows a state where semiconductor dies are bonded.

Part (a) of fig. 5 is a diagram showing a state where the electronic component is picked up. Part (b) of fig. 5 is a diagram showing a state where the electronic component is delivered from the chip conveying mechanism to the bare chip conveying mechanism.

Part (a) of fig. 6 is a diagram showing a state in which an electronic component is delivered from the die transfer mechanism to the bonding head mechanism. Part (b) of fig. 6 is a diagram showing a state where electronic parts are joined.

Fig. 7 is a schematic view showing a bonding apparatus according to a modification.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

The bonding apparatus 1 shown in fig. 1 is used for manufacturing an electronic component. Specifically, the bonding apparatus 1 is used for a die bond (die bond) step for obtaining the intermediate product 100. The intermediate article of manufacture 100 is obtained during the manufacture of an electronic component as a final article of manufacture. The intermediate product 100 includes, for example, a circuit board 101, and a semiconductor die 201 and an electronic component 301 which are mounted on the circuit board 101. The intermediate manufactured article 100 is finally formed into an electronic component through other manufacturing steps. Further, the bonding apparatus 1 can also handle a substrate material different from the circuit substrate 101. For example, a plate-like member formed of a material such as a semiconductor wafer, metal, glass, or resin can be used as the substrate material.

The bonding apparatus 1 has a tape feeder module (tape feeder module)10 (electronic part supply module), a die supply module (die supply module)20 (die supply module), a bonding module 40, and a controller 50. The tape feeding module 10, the die supplying module 20, and the bonding module 40 are arranged in order along a predetermined conveying direction (positive X-axis direction). In other words, the die supply module 20 is arranged between the tape feeding module 10 and the bonding module 40. The controller 50 outputs control signals to the respective modules. The controller 50 is a computer including a storage unit such as a CPU, a Read Only Memory (ROM), a Random Access Memory (RAM), an input/output unit, and a driver. The controller 50 operates the input/output unit under the control of the CPU. The controller 50 reads and writes data from and into the storage unit. These operations generate control signals to be supplied to the respective modules. Each module performs operations such as conveyance and pickup based on the control signal.

In the following description, the transport direction is assumed to be a direction along the X axis. The direction from the tape feed module 10 toward the joining module 40 is a positive X-axis direction. The positive X-axis direction is referred to as a "conveyance direction". Conversely, the direction from the joining module 40 toward the tape feed module 10 is set to the negative X-axis direction.

The tape feeding module 10 houses a plurality of electronic parts 301 supplied to the joining module 40. The die supply module 20 houses a plurality of semiconductor dies 201 provided to the bonding module 40. The bonding module 40 bonds the semiconductor die 201 and the electronic component 301 to the circuit board 101. The bonding may include an operation of disposing the semiconductor die 201 and the electronic component 301 at a desired position on the circuit board 101, and an operation of fixing the semiconductor die 201 and the electronic component 301 to the circuit board 101 at the desired position.

The tape feed module 10 takes out the electronic parts 301 from the carrier tape 13. Then, the tape feed module 10 transports the electronic component 301 taken out. The tape feeding module 10 includes a reel driving mechanism 11 and a chip conveying mechanism 15 (first conveying unit).

The reel 12 is mounted on the reel drive mechanism 11. The carrier tape 13 is wound around the reel 12. The carrier tape 13 is used for transporting and storing the electronic component 301. The electronic component 301 is a surface-mount type component, for example. The carrier tape 13 has pockets (pockets) for individually receiving the electronic parts 301. One electronic component 301 is housed in each of the pockets. The reel driving mechanism 11 winds the carrier tape 13 from the reel 12, thereby disposing the electronic component 301 at a position where the chip carrier mechanism 15 can pick up the electronic component. Furthermore, the cavities of the carrier tape 13 can also receive a plurality of electronic components 301. The carrier tape 13 may hold the electronic component 301 by adhesion or the like.

The chip transfer mechanism 15 performs a transfer operation of the electronic component 301. The chip transfer mechanism 15 is an independent transfer path. The chip transport mechanism 15 transports the electronic component 301 to a die transport mechanism 25 (common transport path) described later. The carrying operation includes an operation of moving the electronic component 301 to a position where the electronic component can be delivered to the die supply module 20, and an operation of delivering the electronic component 301 to the die supply module 20.

The chip carrier mechanism 15 picks up the electronic component 301. Then, the chip transfer mechanism 15 delivers the picked-up electronic component 301 to the die transfer mechanism 25. The chip transfer mechanism 15 includes a chip transfer rail 16 and a chip head 17. The chip carrier rail 16 moves the chip head 17 in the X-axis direction. The chip carrier mechanism 15 has a chip head 17. However, the number of the chip heads 17 included in the chip transfer mechanism 15 is not limited to one. For example, the chip carrier mechanism 15 may have two chip heads 17.

The chip head 17 has a chip nozzle 18 and a chip motor 19. The chip nozzle 18 is a front end portion of the chip head 17. The chip nozzle 18 detachably holds the electronic component 301. The holding may be by vacuum suction, for example. The chip nozzle 18 has a touch sensor (touch sensor). The output of the touch sensor is used for the delivery operation of the electronic component 301. The chip motor 19 reciprocates the chip nozzle 18 in the Z-axis direction. The reciprocating movement is used for picking up the electronic component 301 from the carrier tape 13 and for delivering and receiving the electronic component 301. Further, the die pad 17 may further include a flip-chip mechanism. By including the flip-chip mechanism, the electronic component 301 can be delivered to the die transfer mechanism 25 to be described later in a desired form regardless of the form in which the electronic component 301 is stored in the carrier tape 13.

The die supply module 20 has a die picking mechanism 21 (picking section) and a die transfer mechanism 25 (second transfer section).

The semiconductor wafer 200 is disposed in the die picking mechanism 21. The die pick-up mechanism 21 has a wafer holder 22, a wafer position adjustment portion 23, and a lift pin 24. The die supply module 20 has lift pins 24. The lift pins 24 lift the semiconductor die 201. By the jacking, the semiconductor die 201 is picked up from the semiconductor wafer 200 attached to the dicing sheet 22 a. Also, the die supply module 20 carries the picked-up semiconductor die 201.

The semiconductor wafer 200 attached to the dicing sheet 22a of the wafer holder 22 having a circular ring shape is held. The semiconductor wafer 200 is a semiconductor wafer after a dicing process. The semiconductor wafer 200 is cut into individual pieces with the dicing sheet 22a remaining. The wafer position adjusting part 23 adjusts the relative position of the lift-up pin 24 with respect to the wafer holder 22. In other words, the wafer position adjusting part 23 translates the wafer holder 22 in the X-axis direction and the Y-axis direction. Further, the wafer position adjusting section 23 rotates the wafer holder 22 about the Z axis. For example, the wafer position adjusting unit 23 may include a stage movable in the Y-axis direction and a pulse motor rotatable about the Z-axis. Along with these operations, the semiconductor wafer 200 is also translated in the X-axis direction and the Y-axis direction, and rotated about the Z-axis. By these operations, the wafer position adjusting unit 23 moves the semiconductor die 201 to be picked up onto the lift pins 24. Further, the wafer position adjusting part 23 can be moved in both the X-axis direction and the Y-axis direction.

The lift pins 24 move in the X-axis direction relative to the wafer holder 22. Further, the knock-up pin 24 reciprocates in the Z-axis direction. The power for the movement in the X-axis direction and the reciprocating movement is supplied by a driving motor (not shown). The front end of the jack-up pin 24 configured in the standby position does not contact the cutting piece 22 a. The front end of the knock-up pin 24 configured to the knock-up position contacts the cutting blade 22 a. More specifically, the tip of the lift pin 24 slightly protrudes from the position where the semiconductor die 201 is disposed. The semiconductor die 201 is pushed upward (positive Z-axis direction) by the protrusion. Further, the knock-up pin 24 is movable in both the X-axis direction and the Y-axis direction.

As described above, the desired semiconductor die 201 can be lifted by the die pick mechanism 21 by moving the wafer holder 22 in the Y-axis direction and the lift pins 24 in the X-axis direction and the Z-axis direction.

The die transfer mechanism 25 performs a transfer operation of the semiconductor die 201. The die transfer mechanism 25 is a common transfer path for transferring both the electronic component 301 and the semiconductor die 201 to the bonding module 40. The transfer operation includes an operation of moving the electronic component 301 and the semiconductor die 201 to a position where the electronic component 301 and the semiconductor die 201 can be delivered to the bonding module 40, and an operation of delivering the electronic component 301 and the semiconductor die 201 to the bonding module 40.

The die transfer mechanism 25 picks up the semiconductor die 201. Then, the die transfer mechanism 25 delivers the picked-up semiconductor die 201 to the bonding module 40. Further, the die transfer mechanism 25 receives the electronic component 301 from the tape feed module 10 as an operation different from the above-described operation. Then, the bare chip transfer mechanism 25 delivers the received electronic component 301 to the bonding module 40. That is, the bare chip transfer mechanism 25 bridges the electronic component 301 between the tape feeding module 10 and the bonding module 40.

The die transfer mechanism 25 includes a die transfer guide 26 and a die head 27. The die transfer guide rail 26 moves the die head 27 in the X-axis direction. The die transfer mechanism 25 has a die head 27. However, the number of die heads 27 is not limited to one. For example, the die transfer mechanism 25 may have two die heads 27.

The die head 27 has a die mouth 28 and a flip-chip mechanism 29. The die nozzle 28 is a front end portion of the die head 27. The die nozzle 28 detachably holds the semiconductor die 201 and the electronic part 301. The holding may be performed by vacuum suction, for example. Further, the die head 27 may have a die motor that reciprocates the die nozzle 28 in the Z-axis direction.

The die nozzle 28 detachably holds the semiconductor die 201 and the electronic part 301. That is, the die nozzle 28 picks up the semiconductor die 201. The die nozzle 28 delivers the picked-up semiconductor die 201 to the bonding module 40. The bare chip nozzle 28 receives the electronic component 301 from the chip carrier mechanism 15. The bare die nozzle 28 delivers the received electronic part 301 to the bonding module 40.

The flip-chip mechanism 29 changes the orientation of the die head 27. The orientation of the die head 27 may be, for example, the orientation of a normal line of the suction surface of the die nozzle 28. That is, when the semiconductor die 201 is picked up, the normal line of the suction surface faces downward (negative Z-axis direction). When the semiconductor die 201 is delivered, the normal line of the suction surface faces upward (positive Z-axis direction). The operation of inverting the top and bottom is called a flip-chip operation.

The bonding module 40 includes a substrate transfer mechanism 41 and a bonding head mechanism 42 (placement member).

The substrate transfer mechanism 41 takes out the circuit substrate 101 from a stocker (not shown). The substrate transfer mechanism 41 transfers the circuit substrate 101 to a position where bonding is performed. The substrate transfer mechanism 41 accommodates the intermediate product 100 obtained by the bonding in another stocker (not shown).

The bonding head mechanism 42 is disposed above the substrate transfer mechanism 41. The bonding head mechanism 42 receives the semiconductor die 201 and the electronic component 301 from the die transfer mechanism 25. The bonding head mechanism 42 conveys the received semiconductor die 201 and electronic component 301 to a desired position on the circuit board 101. Then, the bonding head mechanism 42 fixes (die-bonds) the semiconductor die 201 and the electronic component 301 to the circuit board 101.

The bonding head mechanism 42 includes a component transfer guide rail 43 and a sealing head 44. The component transfer guide 43 moves the sealing head 44 in at least one of the X-axis direction and the Y-axis direction. The bond head mechanism 42 has a potting head 44. However, the number of the package heads 44 is not limited to one. For example, the bond head mechanism 42 may also have two encapsulation heads 44.

The package head 44 detachably holds the semiconductor die 201 and the electronic component 301. The package head 44 receives the semiconductor die 201 and the electronic component 301 from the die transfer mechanism 25. The reception includes an operation of releasing the suction of the semiconductor die 201 and the electronic component 301 by the die transfer mechanism 25 and an operation of sucking the semiconductor die 201 and the electronic component 301 by the package head 44.

The packing head 44 has a packing mouth 45 and a packing motor 46. The package head 44 has a heater, not shown. The packing nozzle 45 is a front end portion of the packing head 44. The package nozzle 45 detachably holds the semiconductor die 201 and the electronic component 301. The holding may be by vacuum suction, for example. The sealing motor 46 reciprocates the sealing nozzle 45 in the Z-axis direction. The movement is used for transferring the semiconductor die 201 and the electronic component 301 from the die transfer mechanism 25 to the package head 44. The semiconductor die 201 and the electronic component 301 received are also used for placement on the circuit board 101.

The operation of the joining apparatus 1 will be described below. In the following description, the operation of the packaged semiconductor die 201 and the operation of the packaged electronic component 301 will be described separately. Further, the controller 50 may perform the action of packaging the semiconductor die 201 and the action of packaging the electronic component 301 in a desired order when obtaining the intermediate manufacture 100. For example, the controller 50 may perform the packaging operation of the electronic component 301 after performing the packaging operation of the semiconductor die 201. The controller 50 may perform the packaging operation of the semiconductor die 201 after performing the packaging operation of the electronic component 301.

First, an operation of the packaged semiconductor die 201 will be described. As shown in fig. 2 (a), the controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the die head 27 moves to a predetermined position. The predetermined position is above the position where the semiconductor die 201 is picked up. For example, the predetermined position may be set on the axis of the knock-up pin 24. At this time, the controller 50 controls the die head 27 to be downward. By the control, the suction surface of the die nozzle 28 is opposed to the semiconductor die 201.

As shown in part (b) of fig. 2, the controller 50 outputs a control signal to the die picking mechanism 21. As a result, the semiconductor die 201 as the pickup object moves to directly above the lift pins 24. The die pick mechanism 21, which receives the control signal, moves the wafer holder 22 in the X-axis direction and/or the Y-axis direction. In turn, the die pick mechanism 21 optionally rotates the wafer holder 22 about the Z-axis. By these actions, the semiconductor die 201 as a pickup object is positioned directly above the lift pins 24.

Then, the controller 50 outputs a control signal to the die picking mechanism 21. As a result, the semiconductor die 201 is lifted up. The die pick-up mechanism 21 that receives the control signal moves the ejector pin 24 upward (positive Z-axis direction). By the above-described lift-up operation, the semiconductor die 201 moves upward (positive Z-axis direction). In other words, the semiconductor die 201 moves toward the die tip 28.

The controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the suction action of the die nozzle 28 is started. The timing to start the suction operation may be immediately after the die head 27 has moved to a predetermined position. The timing of the start may be the same as the start of the jack-up operation.

As shown in fig. 3 (a), the controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the die head 27 moves to a position where the semiconductor die 201 can be handed over. The position where the transfer can be performed is an overlap region D1 between the die conveying rail 26 and the component conveying rail 43. The overlap region D1 is set in the joining module 40, for example. The die transfer mechanism 25 receiving the control signal moves the die head 27 in the positive X-axis direction. Further, the die transfer mechanism 25 changes the orientation of the die head 27 to the upward direction (flip-chip operation). By this action, the semiconductor die 201 is opposed to the suction surface of the package nozzle 45.

In addition, the controller 50 also outputs a control signal to the bonding head mechanism 42. As a result, the package head 44 moves to a position (repetition area D1) where the semiconductor die 201 can be accepted. The bonding head mechanism 42 receiving the control signal moves the sealing head 44 in the negative X-axis direction. Further, the bonding head mechanism 42 stops moving after the potting head 44 reaches the overlap region D1.

The controller 50 may adjust the relative position of the package head 44 with respect to the die head 27 after moving the die head 27 and the package head 44 to the overlap region D1, respectively.

As shown in part (b) of fig. 3, the controller 50 outputs a control signal to the bonding head mechanism 42. In this configuration, the bond head mechanism 42 receives the semiconductor die 201. The bonding head mechanism 42 receiving the control signal drives the sealing motor 46 to move the sealing nozzle 45 downward (negative Z-axis direction). The bonding head mechanism 42 brings the package mouth 45 close to the semiconductor die 201 until a distance at which the semiconductor die 201 can be adsorbed. Then, the bonding head mechanism 42 starts the suction action of the package nozzle 45.

The controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the suction action of the die nozzle 28 is stopped. When the suction operation of the package nozzle 45 is started and the suction operation of the die nozzle 28 is stopped, the semiconductor die 201 is transferred from the die transfer mechanism 25 to the bonding head mechanism 42.

As shown in part (a) of fig. 4, the controller 50 outputs a control signal to the bonding head mechanism 42. As a result, the bonding head mechanism 42 bonds the semiconductor die 201 to the circuit substrate 101. The bonding head mechanism 42 that receives the control signal first drives the package motor 46 to move the package nozzle 47, on which the semiconductor die 201 is sucked, upward (in the positive Z-axis direction). Then, the bonding head mechanism 42 drives the component conveying rail 43 to move the packaging head 44 in the positive X-axis direction. The bonding head mechanism 42 stops moving when the position of the sealing head 44 reaches a predetermined position. The predetermined position may be a position directly above a position where the semiconductor die 201 is bonded.

As shown in fig. 4 (b), the bonding head mechanism 42 drives the package motor 46 to move the package nozzle 47 downward (in the negative Z-axis direction) to a position where the suction of the semiconductor die 201 can be released. Then, the bonding head mechanism 42 stops the suction operation of the package nozzle 47. The bonding head mechanism 42 may also perform an operation of curing an adhesive disposed between the semiconductor die 201 and the circuit board 101 via the semiconductor die 201 as necessary. For example, the bonding head mechanism 42 may drive a heater to apply heat and/or pressure to the adhesive through the semiconductor die 201.

The controller 50 may output a control signal to the die transfer mechanism 25 to return the die head 27 to the initial position, if necessary. The controller 50 may output a control signal to the die transfer mechanism 25 to pick up the next semiconductor die 201.

Through the series of operations, the semiconductor die 201 is packaged on the circuit substrate 101.

Next, the operation of the packaged electronic component 301 will be described. As shown in fig. 5 (a), the controller 50 outputs a control signal to the chip carrier mechanism 15. As a result, the chip carrier mechanism 15 picks up the electronic component 301. The chip transfer mechanism 15 receiving the control signal moves the chip head 17 to a predetermined position by driving the chip transfer rail 16. The predetermined position may be set to a position directly above the reel 12 on which the electronic component 301 to be picked up is packed. Then, the chip transfer mechanism 15 moves the chip head 17 downward (negative Z-axis direction) by driving the chip motor 19. The movement is continued until the chip head 17 becomes a position where the electronic component 301 can be adsorbed. Then, the chip transfer mechanism 15 starts the suction operation of the chip nozzle 18.

Then, as shown in fig. 5 (b), the controller 50 outputs a control signal to the chip carrier mechanism 15. As a result, the chip transfer mechanism 15 moves the chip head 17 to a position where the electronic component 301 can be delivered. The position where the transfer can be performed is an overlap region D2 between the chip transport rail 16 and the die transport rail 26. The repeat region D2 is set within the die supply module 20, for example. The chip transfer mechanism 15 receiving the control signal moves the chip head 17 upward (in the positive Z-axis direction) by driving the chip motor 19. Then, the chip transfer mechanism 15 moves the chip head 17 in the positive X-axis direction via the chip transfer guide rail 16.

The controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the die transfer mechanism 25 moves the die head 27 to a position where it can receive the electronic part 301. The die transfer mechanism 25 receiving the control signal changes the orientation of the die head 27 to the upward direction by the flip-chip mechanism 29 (flip-chip operation). By this operation, the suction surface of the die nozzle 28 can be opposed to the electronic component 301 sucked to the chip nozzle 18. The die transfer mechanism 25 moves the die head 27 in the negative X-axis direction. Then, the die transfer mechanism 25 stops moving after the die head 27 reaches the overlap area D2.

The controller 50 may adjust the relative position of the die head 27 with respect to the chip head 17 after moving the chip head 17 and the die head 27 to the overlap region D2, respectively.

The controller 50 outputs a control signal to the chip carrier mechanism 15. As a result, the chip transfer mechanism 15 delivers the electronic component 301 from the chip nozzle 18 to the die nozzle 28. The chip transfer mechanism 15 receiving the control signal drives the chip motor 19 to move the chip nozzle 18, on which the electronic component 301 is sucked, downward (in the negative Z-axis direction). The chip transfer mechanism 15 brings the chip nozzle 18 close to the die nozzle 28 by a distance at which the suction of the electronic component 301 can be stopped. Then, the chip transfer mechanism 15 stops the suction operation of the chip nozzle 18.

The controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the suction action of the die nozzle 28 is started. The timing to start the suction operation may be set after the electronic component 301 contacts the die nozzle 28. The timing to start the suction operation may be set before the suction operation of the chip nozzle 18 is stopped. When the suction operation of the die nozzle 28 is started and the suction operation of the chip nozzle 18 is stopped, the electronic component 301 is delivered from the chip transfer mechanism 15 to the die transfer mechanism 25.

Then, as shown in fig. 6 (a), the controller 50 outputs a control signal to the die transfer mechanism 25. As a result, the die transfer mechanism 25 moves the die head 27 holding the electronic component 301 to the overlap region D1. The die transfer mechanism 25 receiving the control signal moves the die head 27 in the positive X-axis direction. Further, in this operation, the die head 27 is already upward, so the die head 27 may not be flipped. However, the chip transfer mechanism 15 and the die transfer mechanism 25 may transfer the electronic component 301 to the package head 44 in a reversed state depending on the form in which the electronic component 301 is stored in the carrier tape 13.

In addition, the controller 50 also outputs a control signal to the bonding head mechanism 42. As a result, the bonding head mechanism 42 moves the packaging head 44 until the repetition area D1 where the electronic part 301 can be received. The bonding head mechanism 42 receiving the control signal moves the sealing head 44 in the negative X-axis direction. Then, the movement of the packing head 44 is stopped after reaching the overlap region D1. The controller 50 outputs a control signal to the bonding head mechanism 42. As a result, the bonding head mechanism 42 receives the electronic component 301. The operation may be the same as the operation when receiving the semiconductor die 201.

As shown in fig. 6 (b), the controller 50 outputs a control signal to the bonding head mechanism 42. As a result, the bonding head mechanism 42 bonds the electronic component 301 to the circuit substrate 101. The above operation may be the same as the operation when bonding the semiconductor die 201 to the circuit board 101.

Through the series of operations, the semiconductor die 201 is packaged on the circuit substrate 101.

Further, chip components such as semiconductor dies and electronic components may be supplied in different manners. For example, semiconductor die are supplied from a diced wafer. The electronic components are supplied from tape reels (tape reel). Therefore, a module or mechanism that can cope with the manner of supply is required. Therefore, a device corresponding to the supply method is prepared, and the mold clamping module is set. That is, the joining module cannot receive supply of a plurality of kinds of parts only by supplying the parts from the apparatus connected to the joining module. However, with the increasing demand for various types of production in recent years, there is an increasing demand (feeds) for supplying various types of parts without replacing the device for supplying the parts.

Thus, the bonding apparatus 1 comprises a die-supply module 20 providing a semiconductor die 201. Furthermore, the joining device 1 also comprises a tape feed module 10 which supplies the electronic component 301. The bonding module 40 receives the supply of the required parts from these die supply modules 20 and tape feed modules 10 to manufacture electronic components. Thus, the bonding apparatus 1 can cope with production of electronic elements including at least one of the semiconductor die 201 and the electronic part 301. As a result, the method can be applied to various kinds of electronic components.

The bonding apparatus 1 bonds the tape feed module 10 to the die supply module 20. With this structure, the bonding module 40 can receive the supply of both the diced wafer chips and the reel chips. Furthermore, the tape feed module 10 may also be detached as needed when only the semiconductor die 201 is supplied. By the removal, the area required for disposing the engaging device 1 can be reduced.

In short, the joining apparatus 1 does not need to perform the following operations: the tape feeding module 10 and the die supply module 20 are alternately mounted to the bonding module 40 according to parts to be supplied to the bonding module 40. That is, the joining device 1 does not require module replacement.

In addition to this, the engagement device can be variously modified. The embodiments can also be combined with each other according to the purpose and effect as needed.

The bonding apparatus 1 has a structure in which a tape feeding module 10, a die supplying module 20, and a bonding module 40 are arranged in this order along a conveying direction. According to the arrangement, the die transfer mechanism 25 of the die supply module 20 is a common transfer path, and the chip transfer mechanism 15 of the tape feed module 10 is an independent transfer path.

For example, in the bonding apparatus 1A of the modification shown in fig. 7, the die supply module 20A, the tape feeder module 10A, and the bonding module 40 may be arranged in this order along the conveying direction. According to the arrangement, the die transfer mechanism 25A of the die supply module 20A is an independent transfer path, and the chip transfer mechanism 15A of the tape feed module 10A is a common transfer path. In this configuration, the die transfer mechanism 25A may omit the flip-chip mechanism 29. The chip carrier mechanism 15A may include a flip-chip mechanism 19A. The bonding apparatus 1A having the above-described structure can also cope with various kinds of production of electronic components, similarly to the bonding apparatus 1.

Description of the symbols

1: joining device

10: with feed module (electronic parts providing module)

11: reel driving mechanism

12: reel disc

13: carrier tape

15: chip conveying mechanism (first conveying part)

16: chip conveying guide rail

17: chip head

18: chip mouth

19: chip motor

20: bare chip supply module (bare chip supply module)

21: bare chip picking mechanism (picking part)

22: wafer holder

22 a: cutting blade

23: wafer position adjusting part

24: jacking pin

25: bare chip carrying mechanism (second carrying part)

26: bare chip conveying guide rail

27: bare chip head

28: bare chip mouth

29: flip-chip mechanism

40: joint module

41: substrate conveying mechanism

42: joint head mechanism (configuration component)

43: part conveying guide rail

44: packaging head

45: packaging mouth

46: packaged motor

47: packaging mouth

50: controller

100: intermediate product

101: circuit board

200: semiconductor wafer

201: semiconductor bare chip

301: electronic component

D1, D2: repeat region