阅读说明：本技术 检查夹具及检查装置 (Inspection jig and inspection device ) 是由 加藤穰 藤野真 于 2020-03-27 设计创作，主要内容包括：本发明提供一种检查夹具,其具备：板状的绝缘部件,其具有凹部；第一基板,其具有第一电极；以及导线,其与接触端子电连接,在上述绝缘部件设有贯通上述凹部的底部的贯通孔,上述导线的一端部配置于上述贯通孔,上述导线的另一端部与上述第一电极连接。(The invention provides an inspection jig, which comprises: a plate-shaped insulating member having a recess; a first substrate having a first electrode; and a lead electrically connected to the contact terminal, wherein the insulating member is provided with a through hole penetrating through a bottom of the recess, one end of the lead is disposed in the through hole, and the other end of the lead is connected to the first electrode.)

1. An inspection jig is characterized by comprising:

a plate-shaped insulating member having a recess;

a first substrate having a first electrode; and

a lead wire electrically connected to the contact terminal,

the insulating member is provided with a through hole penetrating the bottom of the recess,

one end of the lead is disposed in the through hole,

the other end of the wire is connected to the first electrode.

2. The inspection jig of claim 1,

the fixing member is disposed in at least one of the recess and the through hole, and fixes a part of the lead to the insulating member.

3. The inspection jig of claim 2,

the fixing member includes a thermosetting resin or a photocurable resin.

4. The inspection jig of any one of claims 1 to 3,

an end surface of the one end portion of the lead is positioned inside the through hole,

a first metal layer is arranged on the end face,

the first metal layer is harder than the wire.

5. The inspection jig of claim 4,

and a second metal layer is connected with the first metal layer.

6. The inspection jig of any one of claims 1 to 5,

the lead wire has an insulating coating.

7. The inspection jig of any one of claims 1 to 6,

the first substrate has a portion that is disposed on the concave portion side of the insulating member and that overlaps with the insulating member when viewed in a thickness direction of the insulating member.

8. The inspection jig of claim 7,

the insulating member is provided with a first accommodating portion having a concave configuration and accommodating the insulating member.

9. The inspection jig of any one of claims 1 to 8,

the number of the first electrodes of the first substrate is greater than the number of the wires.

10. The inspection jig of any one of claims 1 to 9,

the recessed side of the recess is set to one side in the thickness direction of the insulating member,

the first substrate is disposed on the other side of the insulating member,

the first substrate has a substrate through-hole penetrating in the thickness direction,

the lead is disposed in the substrate through hole,

the lead wire extends from the first electrode to the substrate through-hole radially inward in a plan view viewed from one side.

11. The inspection jig of any one of claims 1 to 10,

the recessed side of the recess is set to one side in the thickness direction of the insulating member,

the first substrate has a second electrode electrically connected to the first electrode and disposed on the other side surface of the first substrate.

12. The inspection jig of claim 11,

further provided with:

a connecting member extending in the thickness direction; and

a second substrate having a first surface and a second surface,

the third electrode is disposed on one side surface of the second substrate,

the fourth electrode is disposed on the other side surface of the second substrate,

the third electrode and the fourth electrode are electrically connected,

the pitch between the fourth electrodes is wider than the pitch between the third electrodes,

one side end of the connecting member is in contact with the second electrode,

the other end of the connecting member is in contact with the third electrode.

13. The inspection fixture of claim 12,

the connecting member has a spring portion that is compressible in the thickness direction.

14. The inspection jig of any one of claims 1 to 13,

the wire harness further includes a contact terminal electrically connected to the lead wire.

15. An inspection apparatus, characterized in that,

the disclosed device is provided with:

the inspection jig of any one of claims 1 to 14; and

and an inspection processing unit electrically connected to the first electrode.

Technical Field

The present invention relates to an inspection jig used for inspecting an inspection object.

Background

An example of a conventional probe card device is disclosed in patent document 1.

The probe card apparatus of patent document 1 functions as an interface between a tester for controlling a test of a DUT and the electronic device. The probe card apparatus has a main subassembly and a probe head.

The primary subassembly includes a wiring structure and a probe head interface. The wiring structure is a printed circuit board or the like. The probe head interface includes an electrical terminal on one side, an electrical contact on the other side, and an electrical connection from the electrical terminal to the electrical contact. The wiring structure is connected to the electric terminals via cables.

The probe head includes a probe insertion portion. The probe insertion part includes a connector of one side of the probe head and a probe extended from the other side of the probe head. The electrical connection connects the connector with the probe. The number and pattern of connectors corresponds to the number and pattern of electrical contacts of the probe head interface. Thus, the connector is electrically connected with the electrical contact. The number and pattern of probes corresponds to the number and pattern of terminals of the DUT to be tested.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2016-524139

Disclosure of Invention

Problems to be solved by the invention

The probe head of patent document 1 electrically connects probes corresponding to the pattern of terminals of the DUT and connectors corresponding to the pattern of electrical contacts of the probe head interface. Therefore, it is considered that if the pattern of the terminals of the DUT cannot be determined, it is difficult to start manufacturing.

The probe head electrically connects probes arranged at positions corresponding to terminals of the DUT and connectors arranged at positions corresponding to electrical contacts of the probe head interface. Therefore, it is considered that the manufacture of the probe tip requires a predetermined manufacturing time.

Therefore, it is presumed that the manufacturing time of the probe card device in patent document 1 becomes long.

In view of the above circumstances, an object of the present invention is to provide an inspection jig capable of shortening the manufacturing time and an inspection apparatus using the inspection jig.

Means for solving the problems

An exemplary inspection jig according to the present invention includes: a plate-shaped insulating member having a recess; a first substrate having a first electrode; and a lead electrically connected to the contact terminal, wherein the insulating member is provided with a through hole penetrating through a bottom of the recess, one end of the lead is disposed in the through hole, and the other end of the lead is connected to the first electrode.

Effects of the invention

The exemplary inspection jig of the present invention can shorten the manufacturing time.

Drawings

Fig. 1 is a schematic longitudinal sectional view of an inspection apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic partial vertical cross-sectional perspective view of an inspection jig according to an embodiment of the present invention.

Fig. 3 is an exploded perspective view of the inspection jig according to the embodiment of the present invention, as viewed from above.

Fig. 4 is an exploded perspective view of the inspection jig according to the embodiment of the present invention, as viewed from below.

Fig. 5 is a view showing a process of inserting a lead wire through a through hole of an insulating member.

Fig. 6 is a view showing a process of bending a protruding portion of a lead wire inserted through a through hole.

Fig. 7 is a diagram showing a step of bonding a wire to the first electrode.

Fig. 8 is a diagram showing a process of disposing a curable resin in the recess and the through-hole of the insulating member.

Fig. 9 is a view showing a step of polishing a cut surface of a lead wire.

Fig. 10 is a diagram showing a process of performing etching processing on a conductive wire.

Fig. 11 is a diagram showing a step of plating an end face of a lead wire.

Detailed Description

Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings. In the drawings, the insulating member 22 described later has a plate shape, and the thickness direction of the insulating member 22 is represented by X direction, one side in the X direction is represented by X1, and the other side in the X direction is represented by X2. A direction perpendicular to the X direction is denoted as a Y direction, one side of the Y direction is denoted as Y1, and the other side of the Y direction is denoted as Y2. The direction perpendicular to the X direction and the Y direction is denoted as a Z direction, one side of the Z direction is denoted as Z1, and the other side of the Z direction is denoted as Z2. The direction around the central axis J (fig. 1 and 2) of the insulating member 22 extending in the X direction is referred to as "circumferential direction". The radial direction with respect to the central axis J is referred to as a "radial direction".

< 1. integral Structure of inspection apparatus

Here, the overall configuration of the inspection apparatus according to an embodiment of the present invention will be described with reference to fig. 1 to 4. As shown in fig. 1, an inspection apparatus 5 according to an embodiment of the present invention performs an electrical inspection of an inspection target 10. In fig. 1, one X1 side is the lower side, and the other X2 side is the upper side. The Y1 side is the left side of the drawing sheet, and the Y2 side is the right side of the drawing sheet. One Z1 side is the front side of the drawing sheet, and the other Z2 side is the back side of the drawing sheet.

The inspection object 10 is, for example, a semiconductor wafer having a plurality of circuits formed on a semiconductor substrate such as silicon. The semiconductor wafer is diced into semiconductor chips having each of the above-described circuits. The inspection object 10 may be, for example, a semiconductor chip, a csp (chip size package), or an electronic component such as a semiconductor device, in addition to a semiconductor wafer.

The inspection object 10 may be a substrate. In this case, the inspection object 10 may be a substrate such as a printed wiring board, a glass epoxy board, a flexible board, a ceramic multilayer wiring board, a package board for semiconductor packaging, an intermediate member board, or a film carrier, or may be an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, or a touch panel display, or an electrode plate for a touch panel.

In addition, a product based on a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) may be used as the inspection target 10. In the EMIB, a small silicon substrate called a silicon bridge is embedded in a package resin substrate, and fine and high-density wiring is formed on a surface of the silicon bridge, so that adjacent silicon dies are mounted in close proximity to the package resin substrate.

The inspection apparatus 5 includes an inspection jig 2 and an inspection processing unit (scanner) 3. In the present embodiment, the number of the inspection processing units 3 is six, for example. However, the number of the inspection processing units 3 may be plural other than six, or may be single.

The inspection jig 2 has a probe head 1. The probe head 1 has a plurality of contact terminals 11 and a support member 12. That is, the inspection jig 2 is provided with the contact terminals 11.

The contact terminal 11 is formed in a rod shape extending in the vertical direction. In the present embodiment, the contact terminal 11 includes, for example, a cylindrical body 111, a first conductor (plunger) 112, and a second conductor (plunger) 113. The cylindrical body 111 is formed in a cylindrical shape, and is formed using a tube of nickel or a nickel alloy having, for example, an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm. Further, a conductive layer such as gold plating is preferably formed on the inner peripheral surface of the cylindrical body 111. Further, the outer peripheral surface of the cylindrical body 111 may be coated with an insulating material as needed.

The first conductor 112 and the second conductor 113 are formed of a conductive material such as a palladium alloy. The first conductor 112 is inserted into the tubular body 111 from one X1 side, and the end of the insertion portion on the one X1 side is fixed to the tubular body 111 by press fitting or the like. In a state where the first conductor 112 is fixed to the cylindrical body 111, a part of the first conductor 112 is a protruding portion protruding from the cylindrical body 111 to one X1 side. One side end of the protruding portion is one side end 11A of the contact terminal 11. The one-side end 11A can be brought into contact with the inspection point 10A of the inspection object 10.

The second conductor 113 is inserted into the cylindrical body 111 from the other X2 side, and the other X2 side end of the insertion portion is fixed to the cylindrical body 111 by press fitting or the like. In a state where the second conductor 113 is fixed to the cylindrical body 111, a part of the second conductor 113 is a protruding portion protruding from the cylindrical body 111 to the other side X2 side. The other end of the protruding portion is the other end 11B of the contact terminal 11.

The cylindrical body 111 has a spring portion in the middle in the vertical direction. This allows the tubular body 111 to expand and contract in the vertical direction. Further, a conductive path is formed through the first conductor 112, the cylindrical body 111, and the second conductor 113.

The support member 12 supports a plurality of contact terminals 11. More specifically, for example, a through hole penetrating in the vertical direction is formed in the support member 12, and the contact terminal 11 is accommodated in the through hole. In this case, the contact terminal 11 is prevented from falling off to the side X1 when the contact terminal 11 is inserted into the through hole due to the dimensional relationship between the contact terminal 11 and the through hole.

The inspection jig 2 includes a first housing member 21, an insulating member 22, a first substrate 23, a plurality of lead wires 24, a fixing portion 25, a second housing member 26, an intermediate member 27, a third housing member 28, and a second substrate 29 in addition to the probe head 1.

As shown in fig. 3, the first accommodating member 21 is plate-shaped having a quadrangular external shape when viewed in the up-down direction, and is formed of, for example, metal having aluminum. The first housing member 21 has a first housing portion 21A recessed toward the other side X2. The first housing portion 21A houses an insulating member 22.

The insulating member 22 is a plate-like member having a recess 22A recessed toward the one X1 side, and is formed of an insulating material. The insulating member 22 is formed of, for example, ceramic, resin, or the like as an insulating material. As an example of the resin, sumikasher (registered trademark) can be used.

That is, the inspection jig 2 includes a plate-like insulating member 22 having a recess 22A.

The insulating member 22 is provided with a through hole 221A penetrating the bottom 221 of the recess 22A. The through-hole 221A is provided in plural, and is formed corresponding to the position of the contact terminal 11, for example.

The one end portion 24A of the lead 24 is inserted into the through hole 221A. The wire 24 is formed of, for example, an enamel wire. The enameled wire is formed by covering a copper wire with an insulating coating film. That is, the lead wires 24 have an insulating coating. This can suppress short-circuiting between the leads 24 even when the pitch between the through holes 221A is narrow and the leads 24 easily contact each other.

An end surface including one end portion 24A of the lead 24 is formed with a fifth electrode E5. The fifth electrode E5 is formed on one side surface 221S1 of the bottom 221. The other end of the second conductor 113, i.e., the other end 11B of the contact terminal 11, is brought into contact with the fifth electrode E5, and the support member 12 is fixed to the one side surface 221S1 of the bottom 221. In this state, the probe head 1 is disposed on one X1 side of the insulating member 22. Thereby, the spring portion of the cylindrical body 111 is compressed in the vertical direction, and the other end portion 11B abuts against the fifth electrode E5 by the elastic force of the spring portion. This stabilizes the conductive state between the contact terminal 11 and the fifth electrode E5. That is, the inspection jig 2 includes the lead wires 24 electrically connected to the contact terminals 11.

Thus, the one end portion 24A of the one lead wire 24 is inserted into the one through hole 221A, and the one contact terminal 11 is electrically connected to the one lead wire 24. That is, the number of the through holes 221A is the same as the number of the wires 24 and the number of the contact terminals 11.

The first substrate 23 is disposed on the other side surface 21S of the first accommodating member 21. The first substrate 23 is disposed on the other side X2 of the insulating member 22. As shown in fig. 3, the first substrate 23 has a quadrangular shape as an outer shape when viewed in the vertical direction, for example. As shown in fig. 2, the first substrate 23 has a substrate through-hole 23A penetrating in the vertical direction at the center. That is, the first substrate 23 has a substrate through-hole 23A penetrating in the thickness direction of the insulating member 22.

As shown in fig. 2, a plurality of first electrode regions 231R in which a plurality of first electrodes 231 are arranged in the circumferential direction around the substrate through-hole 23A on the other side surface 23S of the first substrate 23. In fig. 3, one first electrode 231 in the first electrode region 231R is representatively illustrated, and the same applies to the second electrode 232 and the fourth electrode 292. That is, the inspection jig 2 includes the first substrate 23 having the first electrode 231. The first electrode region 231R is formed in a shape in which a sector is removed from a triangle. The group of first electrodes 231 arranged in each of the first electrode regions 231R is electrically connected to each of the inspection processing units 3 (see fig. 1) provided in plurality. In the present embodiment, since the number of the inspection processing units 3 is six, the number of the first electrode regions 231R is also six.

As shown in fig. 2, the first housing member 21 has a through hole 21C penetrating in the vertical direction at the center. The substrate through-hole 23A is connected to the other side X2 of the through-hole 21C. The lead wire 24 is drawn out from the other side surface 221S2 of the bottom 221 toward the other X2 side, and is connected to the first electrode 231 through the through hole 21C and the substrate through hole 23A. That is, the other end 24B of the wire 24 is connected to the first electrode 231. Thereby, the contact terminal 11 is electrically connected to the first electrode 231 via the wire 24. In other words, the lead wire 24 is disposed in the substrate through hole 23A. The lead wire 24 extends radially inward from the first electrode 231 to the substrate through-hole 23A when viewed in a plan view from the one X1 side. This makes it possible to reduce the pitch of the contact terminals 11 electrically connected to the lead wires 24 and to cope with the narrow pitch of the inspection points 10A of the inspection object 10.

Here, as shown in fig. 1 and 2, the first substrate 23 has a portion which is disposed on the side of the recess 22A of the insulating member 22 and overlaps with the insulating member 22 when viewed from the thickness direction of the insulating member 22. In the case of such a configuration, the distance between the position of the through hole 221A and the position of the first electrode 231 in a plan view viewed from the X direction (the thickness direction) is shorter than in the case where the first substrate 23 and the insulating member 22 do not overlap. Therefore, the length of the lead 24 can be shortened, and the resistance value of the conductive path can be reduced.

Here, the number of the first electrodes 231 in the first substrate 23 is larger than the number of the wires 24. That is, there is the first electrode 231 not connected to the other end portion 24B. Thus, even if the type of the inspection object 10 or the type of the probe head 1 is switched, the first substrate 23 can be shared, and the manufacturing time of the inspection jig 2 can be shortened.

The other end 24B of the lead 24 is not limited to be connected to a part of the first electrodes 231 of the first substrate 23 as described above, and may be connected to all of the first electrodes 231 of the first substrate 23. That is, the other end 24B of the wire 24 is connected to the first electrode 231.

A part of the fixing portion 25 is placed on the other side surface 221S2 of the bottom portion 221 and is accommodated in the recess 22A. As will be described later, the fixing portion 25 is a molded portion formed of a curable resin, and has a function of fixing a part of the lead 24 to the insulating member 22.

A manufacturing method based on the structure of the insulating member 22, the first substrate 23, the lead wire 24, the fixing portion 25, and the fifth electrode E5 will be described later.

As shown in fig. 3, on the other side surface 23S of the first substrate 23, three second electrode regions 232R in which a plurality of second electrodes 232 are arranged in the Z direction on the Y direction one Y1 side and the Y direction other Y2 side of the first electrode region 231R. The group of the second electrodes 232 arranged in each of the second electrode regions 232R is electrically connected to each of the inspection processing units 3 (see fig. 1) provided in plurality. In fig. 3, since the number of the inspection processing units 3 is six, the number of the second electrode regions 232R is also six. The second electrode 232 is electrically connected to the first electrode 231 via a wiring (not shown) disposed inside the substrate portion 230 (see fig. 7) of the first substrate 23.

That is, the first substrate 23 has the second electrode 232 electrically connected to the first electrode 231 and disposed on the other side surface 23S of the first substrate 23. This can facilitate electrical connection between the inspection processing unit 3 disposed on the other side X2 of the first substrate 23 and the first substrate 23.

As shown in fig. 3, the second accommodating member 26 is plate-shaped having a quadrangular external shape when viewed in the up-down direction, and is formed of, for example, metal having aluminum. The second accommodating member 26 has a hole 26A penetrating in the thickness direction at the center. The first electrode region 231R is exposed upward through the hole 26A when viewed from above. This allows the lead wire 24 to be disposed inside the hole 26A.

The second housing member 26 includes three second housing portions 26B arranged in the Z direction on the Y1 side in one Y direction and the Y2 side in the other Y direction. The second housing portion 26B is a hole penetrating in the thickness direction (X direction). The second electrode region 232R is exposed upward through the second accommodation portion 26B when viewed from above.

As shown in fig. 4, a part of the intermediate member 27 protrudes from the third accommodating member 28 to one side X1 side, and has a substantially rectangular outer diameter as an example when viewed in the vertical direction.

As shown in fig. 1 and 2, the intermediate member 27 has a connecting member 271. The coupling member 271 includes, for example, a spring member 2711, a first plunger 2712, and a second plunger 2713 that are vertically extendable. The first plunger 2712 is fixed to one end 2711A of the spring member 2711. The second plunger 2713 is fixed to the other end 2711B of the spring member 2711. The spring component 2711, the first plunger 2712, and the second plunger 2713 are formed of a conductive material.

Two third accommodating members 28 are arranged in the Y direction. Each third accommodating member 28 has a recess 28A recessed toward the one X1 side, and is formed of, for example, metal having aluminum. Three recesses 28A are arranged in the Z direction. Each second substrate 29 is accommodated in each recess 28A. That is, six second substrates 29 are provided. The third accommodating member 28 has a through hole 28B connected to one X1 side of the recess 28A.

The third electrode 291 is formed on one side surface 29S1 of the second substrate 29. The second plunger 2713 is brought into contact with the third electrode 291 in the through hole 28B, and the intermediate member 27 is fixed to the third housing member 28. Thereby, the spring part 2711 is compressed in the up-down direction, and the second plunger 2713 abuts against the third electrode 291 by the elastic force of the spring part 2711. Therefore, the conductive state of the second plunger 2713 and the third electrode 291 is stabilized.

Further, each intermediate member 27 is inserted into each second accommodation portion 26B, the first plunger 2712 is brought into contact with the second electrode 232, and the third accommodation member 28 is fixed to the second accommodation member 26. Thereby, the spring part 2711 is compressed in the up-down direction, and the first plunger 2712 abuts against the second electrode 232 by the elastic force of the spring part 2711. Therefore, the conductive state between the first plunger 2712 and the second electrode 232 is stabilized.

As shown in fig. 3, a fourth electrode region 292R in which a plurality of fourth electrodes 292 are arranged is disposed on the other side surface 29S2 of each second substrate 29. In each of the substrates 29 on the Y-direction one Y1 side, the fourth electrode region 292R is disposed on the Y-direction one Y1 side. In each of the substrates 29 on the other Y2 side in the Y direction, the fourth electrode region 292R is disposed on the other Y2 side in the Y direction.

The group of the fourth electrodes 292 arranged in each of the fourth electrode regions 292R is electrically connected to each of the inspection processing units 3 (see fig. 1) provided in plurality. In fig. 3, since the number of the inspection processing units 3 is six, the number of the fourth electrode regions 292R is also six. The fourth electrode 292 is in contact with a terminal 3A (see fig. 1) of the inspection processing unit 3.

The third electrode 291 and the fourth electrode 292 are electrically connected by a wiring inside the substrate portion of the second substrate 29. The pitch between the fourth electrodes 292 is determined by the pitch between the terminals 3A of the inspection processing unit 3, and is wider than the pitch between the third electrodes 291.

That is, the inspection jig 2 includes the connection member 271 extending in the thickness direction of the insulating member 22 and the second substrate 29. The third electrode 291 is disposed on one side surface 29S1 of the second substrate 29. The fourth electrode 292 is disposed on the other side surface 29S2 of the second substrate 29. The third electrode 291 is electrically connected to the fourth electrode 292. The pitch between the fourth electrodes 292 is wider than the pitch between the third electrodes 291. One side end 271A of the connecting member 271 is in contact with the second electrode 232. The other side end 271B of the connection member 271 is in contact with the third electrode 291.

This allows the pitch between the second electrodes 232 to be converted into the pitch between the fourth electrodes 292 for connection with the inspection processing unit 3. The connection member 271 has a spring portion 2711 that is compressible in the thickness direction. This stabilizes the conductive state between the second electrode 232 and the third electrode 291.

With the above-described configuration, the contact terminal 11 is electrically connected to the inspection processing unit 3 via the fifth electrode E5, the lead wire 24, the first electrode 231, the second electrode 232, the connection member 271, the third electrode 291, and the fourth electrode 292.

When inspecting the inspection object 10, as shown in fig. 1, one side end 11A of the contact terminal 11 is brought into contact with an inspection point 10A of the inspection object 10. At this time, since the spring portion of the cylindrical body 111 is compressed in the vertical direction, the one side end portion 11A abuts against the inspection point 10A by the elastic force of the spring portion. This stabilizes the conduction state between the one side end 11A and the inspection point 10A.

When the inspection object 10 is inspected in this manner, the inspection point 10A and the inspection processing unit 3 are electrically connected. The inspection processing unit 3 sequentially outputs inspection signals to the inspection point 10A via the contact terminal 11, and accordingly acquires the inspection signals from the inspection point 10A. Based on these inspection signals, the inspection processing unit 3 detects whether or not conduction between the inspection points 10A is present, and performs inspection such as disconnection or short-circuit of the inspection object 10.

In addition, if a structure is assumed in which the contact terminals 11 are directly electrically connected to the electrodes of the second substrate 29 via the lead wires 24, the second substrate 29 needs to be replaced each time the specification of the inspection object 10 is changed. In contrast, in the present embodiment, even if the specification of the inspection object 10 is changed, the probe head 1, the first housing member 21, the insulating member 22, the first substrate 23, the lead wires 24, the fixing member 25, and the second housing member 26 may be replaced, and the intermediate member 27, the third housing member 28, and the second substrate 29 do not need to be replaced. Therefore, the six second substrates 29 having a large size can be shared, and the first substrate 23 having a small size can be replaced, so that the running cost can be reduced. In particular, since the pitch between the third electrodes 291 is narrower than the pitch between the fourth electrodes 292, the pitch between the connection members 271 and the pitch between the second electrodes 232 can be made narrower, the size of the first substrate 23 can be made smaller than the size of the six second substrates 28, and the running cost can be reduced.

The contact terminal 11 may be a linear inspection contact having a bendable elasticity. The contact terminal 11 is supported by the support member 12 in a posture inclined in the vertical direction. Then, the inspection point 10A is brought into contact with the one side end 11A of the contact terminal 11, thereby bending the contact terminal 11. By supporting the contact terminals 11 obliquely, the direction of bending can be determined. By using such a linear inspection contact, inspection of the inspection object 10 with higher integration can be performed.

< 2. method for manufacturing electrical connection structure of contact terminal and first substrate

Next, a manufacturing process of the structure for electrically connecting the contact terminal 11 of the inspection jig 2 and the first substrate 23 will be described with reference to fig. 5 to 11.

The steps in fig. 5 to 11 are performed in a state where the insulating member 22 and the first substrate 23 are accommodated in the first accommodating member 21. That is, the inspection jig 2 includes the accommodating member 21, and the accommodating member 21 has the first accommodating portion 21A having a recessed configuration and accommodating the insulating member 22. This makes it possible to easily position the insulating member 22 for connecting the lead wire 24 and the first electrode 231, as will be described later.

First, the type of the probe head 1 is switched, and the arrangement position of the contact terminals 11 is changed according to the type. When the kind of the probe tip 1 is determined, a through hole 221A is formed in the bottom 221 of the insulating member 22 at a position corresponding to the arrangement of the contact terminals 11. The through holes 221A may be formed in a matrix, and the through holes 221A at positions corresponding to the positions of the contact terminals 11 may be used. That is, the number of the through holes 221A is larger than the number of the contact terminals 11. Thus, the insulating member 22 having the through holes 221A in a matrix shape can be prepared in advance, and the insulating member 22 can be manufactured without determining the type of the probe head 1. Further, since the bottom portion 221 is thin, the through-hole 221A is easily formed. Here, as shown in fig. 5, the through-hole 221A has an opening 221A1 on one side 221S1 of the bottom 221, and an opening 221A2 on the other side 221S2 of the bottom 221. Then, as shown in fig. 5, the lead wire 24 is inserted into the through hole 221A from the opening 221A2 side.

Next, as shown in fig. 6, the protruding portion 24T of the lead 24 protruding from the opening 221a1 is true. This can prevent the lead wire 24 from falling off the through hole 221A.

Then, as shown in fig. 7, a step of bonding a bonding portion 24S of the lead wire 24, which is located in the middle of the portion drawn out from the opening 221a2, to the first electrode 231 of the first substrate 23 is performed. Here, bonding is performed using a wire bonding technique. For example, ultrasonic vibration is applied to the bonding portion 24S while pressing the bonding portion 24S against the first electrode 231. Thereby, friction is generated on the contact surface between the joint portion 24S and the first electrode 231, and the joint portion 24S and the first electrode 231 are joined by frictional heat. At this time, the bonding portion 24S and the first electrode 231 are electrically connected.

The first electrodes 231 shown in fig. 7 are film-like pads protruding from the substrate portion 230 of the first substrate 23, but are not limited thereto, and may be pads disposed inside the substrate portion 230, or the like.

Then, the side of the bonding portion with the first electrode 231 in the lead wire 24 other than the side of the through hole 221A is cut off from the bonding portion.

Then, the fixing member flows into the recess 22A around the opening 221a 2. The fixing member is made of a thermosetting resin or a photocurable resin. The fixing member is liquid before curing. The fixing member that has flowed into the recess 22A flows into the gap between the through hole 221A and the lead 24, and then reaches the one side surface 221S1 of the bottom 221. The fixing member of the recess 22A is cured by the supply of heat or light to become the first fixing member 25A (see fig. 8). The fixing member in the gap between the through hole 221A and the lead wire 24 is cured by the supply of heat or light, and becomes the second fixing member 25B (see fig. 8). By the supply of heat or light, the fixing member of the one side surface 221S1 is cured to become the third fixing member 25C (see fig. 8).

After the first fixing member 25A, the second fixing member 25B, and the third fixing member 25C are formed, the bent protruding portion 24T (see fig. 8) of the lead wire 24 is cut out by a cutting step. Then, the cut surface of the lead 24 and the third fixing member 25C are polished. Thus, as shown in fig. 9, the end surface 241 of the ground lead 24 is flush with the one side surface 221S1 of the bottom 221. In the state shown in fig. 9, the fixing member 25 is formed by the first fixing member 25A and the second fixing member 25B.

In the above description, the third fixing member 25C is removed by grinding, but the first fixing member 25A may be removed without removing the third fixing member 25C, or both the first fixing member 25A and the third fixing member 25C may be removed. In fig. 9, both the first fixing member 25A and the second fixing member 25B are provided, but either one of the first fixing member 25A and the second fixing member 25B may be eliminated.

Next, as shown in fig. 10, end surface 24TS of lead 24 is positioned inside through-hole 221A from opening 221A1 by etching. Then, nickel plating is performed on the end surface 24TS to form a first metal layer. The tip of the first metal layer is located at a position protruding from the opening 221a 1. Then, the front end of the first metal layer is polished to be flush with the one side surface 221S 1.

Then, the first metal layer is plated with gold to form a second metal layer. As a result, as shown in fig. 11, one end 24A of the lead 24 is disposed in the through hole 221A, and the first metal layer M1 and the second metal layer M2 are stacked in this order on one side X1 of the end surface 24TS of the one end 24A. The end surface 24TS, the first metal layer M1, and the second metal layer M2 form a fifth electrode E5. The other side end portion 11B of the contact terminal 11 is in contact with the second metal layer M2. That is, the contact terminal 11 is electrically connected to the end surface 24TS via the second metal layer M2 and the first metal layer M1. That is, the contact terminal 11 is electrically connected to the lead wire 24.

Alternatively, the fifth electrode E5 may be formed of the end surface 24TS and the first metal layer M1 without forming the second metal layer M2. Alternatively, the fifth electrode E5 may be formed of the end surface 24TS and the second metal layer M2 without forming the first metal layer M1. Alternatively, the fifth electrode E5 may be formed of the end surface 24TS without forming the first metal layer M1 and the second metal layer M2.

Alternatively, at least one of the first metal layer M1 and the second metal layer M2 may be formed on the end surface 241 without performing etching (see fig. 9). Alternatively, the first metal layer M1 and the second metal layer M2 may not be formed on the end surface 241 without performing etching. Alternatively, the projection 24T may be cut in the state of fig. 8, and the cut surface may be formed as the fifth electrode E5 without polishing.

As described above, according to the present embodiment, when the position of the contact terminal 11 is determined, the through hole 221A is formed in the insulating member 22 in accordance with the position of the contact terminal 11, one end portion of the lead wire 24 is disposed in the through hole 221A, and the other end portion of the lead wire 24 is connected to the first substrate 23. The first substrate 23 and the insulating member 22 can be prepared in advance. The insulating member 22 is processed by forming the through hole 221A. Further, by providing the recess 22A, the thickness of the bottom 221 of the insulating member 2 is reduced, and therefore the through-hole 221A is easily formed. Therefore, the manufacturing time of the inspection jig 2 after the position of the inspection point 10A of the inspection object 10 and the arrangement position of the contact terminals 11 are determined can be shortened. Further, as described above, when the insulating member 22 in which the through holes 221A are formed in a matrix shape can be prepared in advance, the manufacturing time can be further shortened.

In particular, the connection of the wire 24 and the first electrode 231 uses a wire bonding technique, so that the automation of the connection is easily achieved. The number of the leads 24 may be several thousands, and in this case, it takes a lot of time to connect by soldering by a manual work, and the manufacturing efficiency can be greatly improved by automating the connection.

In this way, the inspection apparatus 5 of the present embodiment includes the inspection jig 2 and the inspection processing unit 3 electrically connected to the first electrode 231. This can improve the manufacturing efficiency of the inspection jig for electrically connecting the inspection target 10 and the inspection processing unit 3.

The inspection jig 2 includes a fixing member 25, and the fixing member 25 is disposed in at least one of the recess 22A and the through hole 221A, and fixes a part of the lead 24 to the insulating member 22. This can prevent the lead wire 24 from falling off the insulating member 22.

The fixing member 25 contains a thermosetting resin or a photocurable resin. Since the thermosetting resin and the photocurable resin are in a liquid state before curing, they easily flow into the gap between the through hole 221A and the lead 24. Further, when the fixing member 25 is disposed in the recess 22A, it is possible to suppress the liquid thermosetting resin or photocurable resin from leaking to the outside of the insulating member 22.

The fixing member 25 is not limited to the above, and may include a thermoplastic resin or an adhesive. The fixing member 25 is not essential, and the lead wire 24 may be fixed to the through hole 221A by press fitting.

The end surface 24TS of the one end 24A of the lead 24 is positioned inside the through hole 221A. The end surface 24TS is provided with a first metal layer M1. The first metal layer M1 is formed of, for example, nickel, and has a hardness higher than that of copper, which is a conductor of the wire 24 as an enamel wire. That is, the first metal layer M1 is harder than the wire 24. Since the first metal layer M1 is formed by plating in the through-hole 221A, the thickness of the first metal layer M1 can be easily increased. If the thickness of the first metal layer M1 having a higher hardness than the lead wire 24 is increased, the first metal layer M1 can be prevented from being worn away and exposing the lead wire 24.

Further, a second metal layer M2 is connected to the first metal layer M1. Thus, the surface of the first metal layer M1 is covered with the second metal layer M2, and therefore corrosion of the first metal layer M1 can be suppressed.

< 3. other >)

While the embodiments of the present invention have been described above, the embodiments can be variously modified within the scope of the present invention.

Availability in production

The present invention can be used for electrical inspection of various inspection objects.

Description of the symbols

1-probe head, 11-contact terminal, 111-cylindrical body, 112-first conductor, 113-second conductor, 12-support member, 2-inspection jig, 21-first housing member, 22-insulating member, 221-bottom, 221A-through hole, 22A-recess, 23-first substrate, 231-first electrode, 232-second electrode, 24-lead wire, 25-fixing member, 26-second housing member, 27-intermediate member, 271-connecting member, 28-third housing member, 29-second substrate, 291-third electrode, 292-fourth electrode, 3-inspection processing section, 5-inspection apparatus, 10-inspection object, E5-fifth electrode, M1-first metal layer, M2-second metal layer, J-center axis.