Object stage of detector and operation method

文档序号:1859094 发布日期:2021-11-19 浏览:12次 中文

阅读说明:本技术 一种检测仪的载物台及操作方法 (Object stage of detector and operation method ) 是由 阳诚贵 冯小杰 于 2021-08-06 设计创作,主要内容包括:本发明公开了一种检测仪的载物台,其包括:拼装箱,所述拼装箱内依次设置有活动室和气密室,所述活动室上设置有活动槽,所述活动槽的下方设置有伸缩装置;密封板,所述密封板安装在所述气密室上;活动筒,所述活动筒的侧壁上设置有侧槽,所述活动筒安装在所述连接槽上;顶针,所述顶针上设置有吸附通孔,所述顶针的下端部侧壁上设置有前凸缘,所述顶针滑动安装在所述活动筒内;抽气装置,所述抽气装置安装在所述拼装箱外侧或所述气密室内,所述抽气装置通过导管与所述吸附通孔连接;复位板,所述复位板上设置有活动耳,所述复位板与所述伸缩装置连接,所述伸缩装置驱动所述复位板作上下往复运动;实现了方便快捷、稳定地承载待测物件。(The invention discloses an object stage of a detector, which comprises: the assembling box is internally provided with a movable chamber and an airtight chamber in sequence, the movable chamber is provided with a movable groove, and a telescopic device is arranged below the movable groove; a sealing plate mounted on the hermetic chamber; the side wall of the movable cylinder is provided with a side groove, and the movable cylinder is arranged on the connecting groove; the ejector pin is provided with an adsorption through hole, the side wall of the lower end part of the ejector pin is provided with a front flange, and the ejector pin is slidably installed in the movable cylinder; the air exhaust device is arranged on the outer side of the assembling box or in the airtight chamber and is connected with the adsorption through hole through a guide pipe; the reset plate is provided with a movable lug and is connected with the telescopic device, and the telescopic device drives the reset plate to reciprocate up and down; the bearing device can conveniently, quickly and stably bear the object to be tested.)

1. An object table of a detector, comprising: the assembling box is internally provided with an airtight chamber and a movable chamber, the airtight chamber is arranged below the movable chamber, the side wall of the movable chamber is provided with a movable groove, and a telescopic device is arranged below the movable groove;

the sealing plate is fixedly arranged on the airtight chamber and isolates the airtight chamber from the movable chamber, and a connecting groove is formed in the sealing plate;

the side wall of the movable cylinder is provided with a side groove, the lower end part of the movable cylinder is provided with a vent hole, and the lower end part of the movable cylinder is fixedly arranged on the connecting groove;

the ejector pin is provided with an adsorption through hole which penetrates through the ejector pin up and down, a front flange is arranged on the side wall of the lower end part of the ejector pin, the front flange is matched with the side groove, and the ejector pin is installed in the movable cylinder in a sliding mode;

the silica gel ring is arranged on the lower side of the front flange and enables the sliding belt of the thimble to damp;

the air extracting device is arranged on the outer side of the assembling box or in the airtight chamber, is connected with the adsorption through hole through a guide pipe and is communicated with the outside;

the reset plate is provided with a movable lug, the movable lug is matched with the movable groove, a matching through groove is formed in the reset plate, the matching through groove is matched with the movable cylinder, the front flange is clamped with the matching through groove, the reset plate is installed in the assembly box and connected with the telescopic device, and the telescopic device drives the reset plate to reciprocate up and down;

the thimble with the activity section of thick bamboo is set up and is provided with nine groups at least in groups.

2. The object stage of claim 1, wherein a front sealing cover is fixedly mounted on an upper side of the movable cylinder, and the front sealing cover is clamped with the front flange.

3. The object table of claim 1, wherein the airtight chamber and the movable chamber are connected by a step, and the sealing plate is mounted on the step.

4. The object table of the inspection apparatus according to claim 1, further comprising: the cover plate is fixedly installed at the top of the movable chamber, and through holes with the number being consistent with that of the thimbles are formed in the cover plate.

5. The object table of the inspection apparatus according to claim 1, further comprising: the front cover is trumpet-shaped, and the front cover is fixedly installed on the top of the assembly box and matched with the movable chamber.

6. The object stage of claim 1, wherein the air-extracting device is pneumatically connected to the retractable device, and the air-extracting device drives the restoring plate to move up and down by air pressure in a manner of air-extracting and inflating the retractable device.

7. The object table of claim 1, wherein the ejector pins and the movable cylinder are arranged in groups and are arranged in a circumferential array or a linear array;

each adsorption through hole of the thimble is connected with the air extractor through a conduit independently, and each conduit is provided with an air pressure sensor which is electrically connected with an external control IC.

8. A method for operating a stage of a testing apparatus according to claim 7, comprising the steps of:

s010, before carrying out object detection on the object carrying table, starting an air extraction device to blow air to the adsorption through hole through a guide pipe, and when the external control IC detects that the measured values of one or more air pressure sensors are not in a preset range, alarming and indicating the position of the current air pressure sensor, otherwise, outputting a normal signal of equipment by the external control IC;

s011, when the external control IC gives an alarm, cleaning a guide pipe and a thimble corresponding to the air pressure sensor giving the alarm by the external control IC, and returning to the step S010 after the cleaning is finished;

s020, placing the object to be detected above the thimble and pressing downwards until the object to be detected does not shake obviously;

s030, starting an air extractor, extracting air on the adsorption through hole through a guide pipe, and adsorbing the object to be detected;

s031, the air pressure sensor reports real-time data to the external control IC and lasts for at least 3 seconds, and the external control IC judges which thimble does not need to be adsorbed or enhanced to be adsorbed through a mathematical model before and after the data reporting is finished, so that the corresponding conduit is closed or the air pressure is increased;

and S040, after the object to be detected is detected, the air exhaust device stops working on the ejector pins, the reset plate installed on the telescopic device is pushed upwards by applying work to the telescopic device, and after all the ejector pins move upwards to reset, the air exhaust device applies work to the telescopic device, and the reset plate moves downwards to reset.

Technical Field

The invention relates to the field of detection equipment, in particular to an object stage of a detector and an operation method.

Background

After some parts are electroplated or sprayed with metal particle coatings, the electroplated layers and the coatings can be detected according to scientific research requirements or standard detection requirements. Among them, thickness detection is conventionally performed by using X-rays and mechanical waves.

When detecting, need place the component to be measured on the objective table, then close the protection casing, open inspection equipment, adjust probe position and detect. Because the microscope carrier or the probe sight of some instruments is relatively poor, operating personnel need to adjust many times to when a plurality of components are detected, need to carry out the operation many times repeatedly, loaded down with trivial details and boring.

In the process of inspection or placement, elements with smooth surfaces and irregular shapes are easy to drift and shake, so that the elements cannot be correctly positioned by a detection program, and the efficiency and even the detection result are affected.

Accordingly, there is a need for a detector stage and method of operation that addresses one or more of the above problems.

Disclosure of Invention

To address one or more of the problems of the prior art, the present invention provides an inspection scope stage. The technical scheme adopted by the invention for solving the problems is as follows: a stage of a detector, comprising: the assembling box is internally provided with an airtight chamber and a movable chamber, the airtight chamber is arranged below the movable chamber, the side wall of the movable chamber is provided with a movable groove, and a telescopic device is arranged below the movable groove;

the sealing plate is fixedly arranged on the airtight chamber and isolates the airtight chamber from the movable chamber, and a connecting groove is formed in the sealing plate;

the side wall of the movable cylinder is provided with a side groove, the lower end part of the movable cylinder is provided with a vent hole, and the lower end part of the movable cylinder is fixedly arranged on the connecting groove;

the ejector pin is provided with an adsorption through hole which penetrates through the ejector pin up and down, a front flange is arranged on the side wall of the lower end part of the ejector pin, the front flange is matched with the side groove, and the ejector pin is installed in the movable cylinder in a sliding mode;

the silica gel ring is arranged on the lower side of the front flange and enables the sliding belt of the thimble to damp;

the air extracting device is arranged on the outer side of the assembling box or in the airtight chamber, is connected with the adsorption through hole through a guide pipe and is communicated with the outside;

the reset plate is provided with a movable lug, the movable lug is matched with the movable groove, a matching through groove is formed in the reset plate, the matching through groove is matched with the movable cylinder, the front flange is clamped with the matching through groove, the reset plate is installed in the assembly box and connected with the telescopic device, and the telescopic device drives the reset plate to reciprocate up and down; the thimble with the activity section of thick bamboo is set up and is provided with nine groups at least in groups. This is the basis.

Furthermore, a front sealing cover is fixedly mounted on the upper side of the movable cylinder, and the front sealing cover is clamped with the front flange.

Furthermore, a step is arranged at the joint of the airtight chamber and the movable chamber, and the sealing plate is arranged on the step.

Further, still include: the cover plate is fixedly installed at the top of the movable chamber, and through holes with the number being consistent with that of the thimbles are formed in the cover plate.

Further, still include: the front cover is trumpet-shaped, and the front cover is fixedly installed on the top of the assembly box and matched with the movable chamber.

Further, the air exhaust device is pneumatically connected with the telescopic device, and the air exhaust device drives the reset plate to move up and down through air pressure in the modes of air exhaust and air inflation of the telescopic device.

Furthermore, the ejector pins and the movable cylinders are arranged in groups and are arranged in a circumferential array or a linear array;

each adsorption through hole of the thimble is connected with the air extractor through a conduit independently, and each conduit is provided with an air pressure sensor which is electrically connected with an external control IC.

And a method of operation: the method comprises the following steps:

s010, before carrying out object detection on the object carrying table, starting an air extraction device to blow air to the adsorption through hole through a guide pipe, and when the external control IC detects that the measured values of one or more air pressure sensors are not in a preset range, alarming and indicating the position of the current air pressure sensor, otherwise, outputting a normal signal of equipment by the external control IC;

s011, when the external control IC gives an alarm, cleaning a guide pipe and a thimble corresponding to the air pressure sensor giving the alarm by the external control IC, and returning to the step S010 after the cleaning is finished;

s020, placing the object to be detected above the thimble and pressing downwards until the object to be detected does not shake obviously;

s030, starting an air extractor, extracting air on the adsorption through hole through a guide pipe, and adsorbing the object to be detected;

s031, the air pressure sensor reports real-time data to the external control IC and lasts for at least 3 seconds, and the external control IC judges which thimble does not need to be adsorbed or enhanced to be adsorbed through a mathematical model before and after the data reporting is finished, so that the corresponding conduit is closed or the air pressure is increased;

and S040, after the object to be detected is detected, the air exhaust device stops working on the ejector pins, the reset plate installed on the telescopic device is pushed upwards by applying work to the telescopic device, and after all the ejector pins move upwards to reset, the air exhaust device applies work to the telescopic device, and the reset plate moves downwards to reset.

The splicing box, the sealing plate, the movable cylinder, the ejector pin and other components are connected together through a smart structure, so that the object to be tested is stably and firmly supported, the irregular object is prevented from shaking or scratching the surface of the object to be tested during testing, and meanwhile, under the condition that the air exhaust device is arranged externally, the other components can be made of nonmetal materials, so that the interference on the inspection is avoided; the long service life of the equipment can be ensured and the power consumption can be reduced by matching with a corresponding operation method, so that the energy is saved and the environment is protected; the structure is stable and compact. The practical value of the invention is greatly improved.

Drawings

FIG. 1 is a perspective view of an object stage of a detector of the present invention;

FIG. 2 is a side view of the stage of a detector of the present invention;

FIG. 3 is a cross-sectional view at side A-A of the stage of a detector of the present invention;

FIG. 4 is a partial cross-sectional view of the stage of a test meter according to the present invention;

fig. 5 is a partial view of the stage of a detector of the present invention.

[ reference numerals ]

101. assembled box

102. Airtight chamber

103. movable chamber

104. Movable groove

110. telescoping device

120. air extractor

130. front cover

201 sealing plate

301. reset plate

302. movable ear

401 cover plate

501 movable cylinder

502. side groove

510. front sealing cover

520. vent

601. thimble

602. adsorption through hole

603. front flange

604. silica gel ring

701. conduit.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

As shown in fig. 1 to 5, the present invention discloses an object stage of a detecting apparatus, which includes: the assembling box 101 is internally provided with an airtight chamber 102 and a movable chamber 103, the airtight chamber 102 is arranged below the movable chamber 103, the side wall of the movable chamber 103 is provided with a movable groove 104, and a telescopic device 110 is arranged below the movable groove 104;

the sealing plate 201 is fixedly installed on the airtight chamber 102 and isolates the airtight chamber 102 from the movable chamber 103, and a connecting groove is formed in the sealing plate 201;

a side groove 502 is formed in the side wall of the movable cylinder 501, a vent hole 520 is formed in the lower end of the movable cylinder 501, and the lower end of the movable cylinder 501 is fixedly mounted on the connecting groove;

the thimble 601 is provided with an adsorption through hole 602 which penetrates through the thimble 601 up and down, a front flange 603 is arranged on the side wall of the lower end part of the thimble 601, the front flange 603 is matched with the side groove 502, and the thimble 601 is slidably mounted in the movable cylinder 501;

a silicone ring 604, wherein the silicone ring 604 is installed on the lower side of the front flange 603, and the silicone ring 604 enables the sliding belt of the thimble 601 to damp;

the air extractor 120 is installed outside the assembling box 101 or inside the airtight chamber 102, the air extractor 120 is connected with the adsorption through hole 602 through a conduit 701, the conduit 701 is generally a transparent plastic pipe, and the air extractor 120 is communicated with the outside;

a reset plate 301, wherein a movable lug 302 is arranged on the reset plate 301, the movable lug 302 is matched with the movable groove 104, a matching through groove is arranged on the reset plate 301, the matching through groove is matched with the movable cylinder 501, the front flange 603 is clamped with the matching through groove, the reset plate 301 is installed in the assembling box 101, the reset plate 301 is connected with the telescopic device 110, and the telescopic device 110 drives the reset plate 301 to reciprocate up and down;

the thimble 601 and the movable cylinder 501 are arranged in groups and at least nine groups are arranged.

It should be noted that the air-extracting device 120 is a conventional external multi-valve air pump. The number and the density of the thimble 601 are generally higher and better, the thimble can be tightly attached to an object to be detected, and meanwhile, the bearing capacity is higher. When bearing the great determinand of quality, spring or the plastic part of buffering usefulness will generally be provided with between thimble 601 and movable cylinder 501, the reason that does not directly use the spring is that, when the determinand is directly placed on thimble 601, the in-process of compression spring probably appears rolling, slip, and the spring will thimble 601 withstands the determinand, leads to the outer surface coating of determinand to be scraped the flower.

Specifically, as shown in fig. 3 and 4, a front sealing cover 510 is fixedly mounted on the upper side of the movable cylinder 501, and the front sealing cover 510 is clamped with the front flange 603 to limit the sliding stroke of the thimble 601. Generally, a step is provided at the junction of the airtight chamber 102 and the movable chamber 103, and the sealing plate 201 is mounted on the step. And further comprising: apron 401, apron 401 fixed mounting be in the activity room 103 top, be provided with on the apron 401 with the through-hole that thimble 601 quantity is unanimous, apron 401 mainly used is dustproof and prevents pressing from both sides and hinder.

Specifically, as shown in fig. 2 and 3, the method further includes: front cover 130, front cover 130 is the loudspeaker form, front cover 130 fixed mounting in the makeup box 101 top and with the activity room 103 cooperation, the horn mouth is up during the installation, and the effect rolls out the objective table when holding irregular object's outer edge and preventing the spheroid from rolling. Further, air exhaust device 120 with telescoping device 110 pneumatic connection, air exhaust device 120 is through right telescoping device 110 is bled, is inflated the mode, through pneumatic drive reset plate 301 reciprocates, at this moment telescoping device 110 is the cylinder, reset plate 301 is provided with the loose axle with cylinder complex. In addition, the telescopic device 110 may also be a linear motor, an electromagnetic valve, or the like. During installation and use, the airtight chamber 102 is generally used for placing the conduit 701, so that no metal parts are in the view of the probe in the top view direction of the device.

It should be noted that the thimble 601 and the movable cylinder 501 are arranged in a group and are arranged in a circumferential array or a linear array; the suction through hole 602 of each thimble 601 is individually connected to the air extractor 120 through a conduit 701, and an air pressure sensor is mounted on each conduit 701 and electrically connected to an external control IC. The air pressure sensor is disposed outside the airtight chamber 102. Air exhaust device 120 shunts atmospheric pressure to each pipe 701 through a main valve on, and is provided with baroceptor and humidity transducer on the main valve, air intake or air outlet department of air exhaust device 120 is provided with drying device, and the effect is when avoiding ambient humidity too high for inside gas circuit is drenched, influences follow-up use.

And a method of operating a stage of a detector, comprising the steps of:

s010, before the object detection of the object stage, the air extractor 120 is started to blow air to the adsorption through hole 602 through the guide pipe 701, when the external control IC detects that the measurement values of one or more air pressure sensors are not in the preset range, the alarm is given and the position of the current air pressure sensor is pointed out, otherwise, the external control IC outputs a normal signal of equipment; the function is to detect whether the gas circuit is normal or not and can adsorb an object to be detected;

s011, when the external control IC gives an alarm, cleaning the guide pipe 701 and the thimble 601 corresponding to the air pressure sensor giving the alarm by the external control IC, and returning to the step S010 after the cleaning is finished;

s020, placing the object to be detected above the thimble 601 and pressing downwards until the object to be detected does not shake obviously;

s021, after placing the object to be tested, before starting the air extractor 120, the external control IC checks whether the ambient humidity is in a threshold range through a humidity sensor on the air extractor 120, if so, the next step is carried out, otherwise, when starting the air extractor 120, the air inlet or the air outlet of the air extractor 120 is arranged at the starting position of the drying device;

s022, in the process that the object to be detected leaves from the placement state, the external control IC detects the ambient humidity in real time through a humidity sensor on the air extracting device 120, whether the drying device needs to be closed or started is judged, and the drying device is powered off when the air extracting device 120 is powered off;

s030, starting the air extraction device 120, extracting air on the adsorption through hole 602 through the guide pipe 701, and adsorbing the object to be detected;

s031, the air pressure sensor reports real-time data to the external control IC for at least 3 seconds, and the external control IC determines which thimble 601 does not need to be adsorbed or strongly adsorbed by the mathematical model before and after the data reporting is finished, so as to close the corresponding conduit 701 or increase the air pressure;

and S040, after the object to be detected is detected, the air exhaust device 120 stops working on the ejector pins 601, the reset plate 301 installed on the telescopic device 110 is pushed upwards by applying work to the telescopic device 110, and after all the ejector pins 601 move upwards to reset, the air exhaust device 120 applies work to the telescopic device 110 to enable the reset plate 301 to move downwards to reset.

It should be noted that the mathematical model provided on the external control IC is a conventional pneumatic common technology, and will not be described in detail herein. The external control IC is generally a computer or a PLC plus computer. In the case that the number of the thimble 601 is larger, the more the guide tube 701 is arranged in the airtight chamber 102, the more the guide tube 701 is wound and bent, and thus, not only the arrangement and fixation work of the guide tube 701 needs to be done, but also whether the guide tube 701 is bent or not needs to be detected through the step S010 before use. Furthermore, when the apparatus is in the erection mode, i.e. by combining a plurality of said erection tanks 101 together, the general method of operation used is the same as described above, but each erection tank may be individually provided with suction means or driven by a powerful general suction means.

In summary, the assembled box 101, the sealing plate 201, the movable cylinder 501, the ejector pins 60 and other components are connected together through a smart structure, so that the object to be tested is stably and firmly supported, the irregular object is prevented from shaking or scratching the surface of the object to be tested during testing, and meanwhile, under the condition that the air exhaust device is arranged externally, the other components can be made of non-metal materials, so that the interference on the inspection is avoided; the long service life of the equipment can be ensured and the power consumption can be reduced by matching with a corresponding operation method, so that the energy is saved and the environment is protected; the structure is stable and compact. The practical value of the invention is greatly improved.

The above-described examples merely represent one or more embodiments of the present invention, which are described in greater detail and detail, but are not to be construed as limiting the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the spirit of the invention, which falls within the scope of the invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

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