阅读说明：本技术 一种适用于各类等离子体真空室的外置驱动二维探针系统 (External drive two-dimensional probe system suitable for various plasma vacuum chambers ) 是由 张炜 靳琛垚 叶孜崇 于 2021-08-17 设计创作，主要内容包括：本发明公开了一种适用于各类等离子体真空室的外置驱动二维探针系统,通过在等离子体装置主腔体内或与其相连的真空腔室内置放置一套由直线导杆和直线轴承及支座(支架)等组成的二维进动机构把真空室外的两个方向的一维驱动转化为二维进动来驱动探针,实现对目标等离子体参数的二维平面空间测量。该二维探针系统包括直线导杆,直线轴承,安装支座及支架,真空腔室,真空穿墙插座,探针安装杆,焊接波纹管,一维驱动器及其它连接真空室外部与内部的结构部件,包括但不限于电机,丝杠,气缸,导杆及其组合。通过精密配合的直线导杆和直线轴承等组成的二维驱动机构来保证探针的二维测量的空间位置的可重复性和精度。(The invention discloses an externally-driven two-dimensional probe system suitable for various plasma vacuum chambers, which is characterized in that a two-dimensional precession mechanism consisting of a linear guide rod, a linear bearing, a support (bracket) and the like is arranged in a main cavity of a plasma device or a vacuum chamber connected with the main cavity to convert one-dimensional driving in two directions outside the vacuum chamber into two-dimensional precession to drive a probe, so that two-dimensional plane space measurement of target plasma parameters is realized. The two-dimensional probe system comprises a linear guide rod, a linear bearing, a mounting support and a bracket, a vacuum chamber, a vacuum wall-through socket, a probe mounting rod, a welding corrugated pipe, a one-dimensional driver and other structural components for connecting the outside and the inside of the vacuum chamber, wherein the structural components comprise but are not limited to a motor, a lead screw, a cylinder, a guide rod and a combination thereof. The repeatability and the precision of the space position of the two-dimensional measurement of the probe are ensured by a two-dimensional driving mechanism consisting of a linear guide rod, a linear bearing and the like which are precisely matched.)

1. An external drive two-dimensional probe system suitable for various plasma vacuum chambers is characterized in that: the two-dimensional space parameter measurement device has the advantages that the driving mechanisms capable of converting two one-dimensional motions in different directions into two-dimensional motions are arranged in the main vacuum chamber of the plasma device or in the vacuum chambers connected with the main vacuum chamber, the driving force transmission between the two-dimensional driving mechanisms in the vacuum chambers and the one-dimensional driver outside the vacuum chambers is realized through the two sets of movable vacuum sealing structures, and the two-dimensional space parameter measurement of plasma parameters is realized by arranging probes on the two-dimensional mechanism in the vacuum chambers.

2. The system of claim 1, wherein: the driving mechanism converts two one-dimensional motions in different directions into two-dimensional motions, and the two-dimensional linkage mechanism is formed by respectively arranging guide rods which are parallel to each other and play a role in guiding and driving rods which play a role in driving in two vertical directions and combining a plurality of supports and brackets; the external one-dimensional drives in two vertical directions of the vacuum chamber are respectively connected with two sets of driving rods of the two-dimensional movable mechanism through the connecting shaft device to realize the transmission of driving force, the drivers which respectively control the two-dimensional movement can convert the one-dimensional movement outside the vacuum chamber into the two-dimensional movement of the probe head in the vacuum chamber through the two-dimensional linkage mechanism device, and the spatial position of the two-dimensional probe head is calculated by recording the positions of the one-dimensional drives outside the two vacuum chambers.

3. The system of claim 1, wherein: the dynamic sealing structure for connecting the inner vacuum chamber and the outer vacuum chamber adopts a welding corrugated pipe or other dynamic sealing forms.

4. The system of claim 2, wherein: the vacuum chamber, which is connected to the main plasma and in which the two-dimensional drive mechanism is disposed, may be of any shape.

5. The system of claim 2, wherein: modular probe mounting structures allow for the connection of different types of probe systems, including langmuir probes and their accompanying rf compensation systems, and other types of probes (e.g., magnetic probes, mach probes, etc.), through modular design of the probe mounting structures.

6. The system of claim 1, wherein: the driving mechanism comprises a transverse driving rod (12), a longitudinal guide rod (13), a longitudinal driven support (14), a front fixed support (15), a driven transverse guide rod (16), a transverse guide rod (17), a transverse driven support (18), a front fixed support (19), a probe mounting support (20), a longitudinal driving sliding support (21), a bottom plate (22), a driven longitudinal guide rod (23), a transverse driving support (24), a rear fixed support (25) and a longitudinal driving rod (26); the bottom plate (22) is a structural component for bearing the two-dimensional driving probe system, supports for fixing guide rods are arranged on the periphery of the bottom plate (22), and are mounted on the bottom plate (22), wherein the front two front fixed supports (15, 19) are used for fixing the transverse guide rod (17) and the longitudinal guide rod (13), and the rear two rear fixed supports (25) are respectively provided with a linear bearing for fixing the longitudinal guide rod (13) and enabling the transverse driving rod (12) and the longitudinal driving rod (26) to penetrate through the linear bearings; the transverse driving rod (12) penetrates through a linear bearing of the rear fixed support (25) and then is fixedly connected with the transverse driving support (24) and is connected to the transverse driven support (18) through the driven longitudinal guide rod (23), the transverse driving rod (12) is parallel to the transverse guide rod (17), and when the transverse driving rod does one-dimensional motion, the transverse driving support (24) and the driven longitudinal guide rod (23) arranged on the transverse driving rod drive the transverse driven support (18) to move along the transverse guide rod (17); the longitudinal driving rod (26) penetrates through a linear bearing of the rear fixed support (25) and then is fixedly connected with the longitudinal driving sliding support (21) and is connected to the longitudinal driven support (14) through the driven transverse guide rod (16), the longitudinal driving rod (26) is parallel to the transverse guide rod (17), and when the longitudinal driving sliding support (21) does one-dimensional motion, the longitudinal driven support (14) is driven to move along the longitudinal guide rod (13) through the longitudinal driving sliding support (21) and the driven transverse guide rod (16) arranged on the longitudinal driving sliding support; because the probe mounting bracket (20) is provided with a linear bearing in the transverse direction and the longitudinal direction respectively and penetrates through the driven transverse guide rod (16) and the driven longitudinal guide rod (23), the probe mounting bracket (20) is driven when the transverse driving rod (12) or the longitudinal driving rod (26) moves, and thus two one-dimensional motions are combined into a two-dimensional probe motion.

Technical Field

The invention relates to the technical field of diagnosis of parameters such as local potential, electron temperature, electron density and the like in plasma by using Langmuir probes and other derived probes, in particular to a method for acquiring two-dimensional space parameter distribution measurement of plasma by using a Langmuir probe, and particularly relates to a two-dimensional probe system suitable for various plasma experiments and process equipment.

Background

Langmuir probe is the earliest diagnostic system for plasma parameters, has the advantages of simple structure, low cost, large measurable physical quantity, and the like, and is still a parameter measuring means of a large number of plasma experiments and process devices at present, even the only measuring means. Langmuir probes are classified into single probes, double probes, and triple probes, as well as various derived Mach probes, and the like. In particular, single probe scanning measurement belongs to direct measurement of plasma electron and ion distribution, and is a method for measuring electron distribution which is difficult to replace for plasmas with unknown electron specific distribution modes. Because the parameters of Langmuir probe diagnosis measurement have the characteristic of locality, different space distribution measurement requirements exist for different experiments and process plasmas, and in actual use, for the measurement of space distribution parameters, a fixed point probe, a one-dimensional probe, a two-dimensional probe and even a three-dimensional probe exist.

The one-dimensional movable probe is fixed point measurement and has one-dimensional space measurement capability, and the one-dimensional movable probe can realize one-dimensional movement measurement of the probe only by a linear driver and a dynamic sealing mechanism, so that the one-dimensional movable probe is the most common realization method in one-dimensional probe measurement. Two-dimensional and three-dimensional space measurement probes are mostly seen in a self-made probe system in a laboratory, the realization methods are many, one method is that two-dimensional or three-dimensional measurement can be realized by adding one-dimensional drive to push and change the space position in a mode of arranging a plurality of fixed probe heads on a straight line or a plane in parallel, the structure is simple and easy to realize, but the defects are obvious, the space measurement is that the points are fixed intervals, the size of the probe is large, the disturbance to plasma is aggravated, and the accuracy of data is influenced. Another is a probe for near three-dimensional measurement, which is provided with a rotatable vacuum coupling component, and a probe rod extends into the plasma, so that the advantage is that the near three-dimensional spatial distribution can be obtained, but the transmission structure and the driving control are very complicated, the reliability has certain risks, and the vacuum coupling component has angle limitation, so that the measurable space is limited. Therefore, a set of two-dimensional probe which has simple structure, is relatively miniaturized and can realize automatic control and two-dimensional plane space distribution measurement is developed, and the two-dimensional probe has certain performance improvement and convenience for an experiment or process plasma device needing to obtain space distribution.

Disclosure of Invention

The invention aims to make up the defects of the prior art, improve the performance of two-dimensional space distribution measurement of a probe, and provide a method for realizing a probe system, which is driven from an external device to a vacuum chamber internal system so as to continuously perform parameter distribution measurement on a two-dimensional plane area of a plasma in a vacuum environment through a miniaturized transmission structure.

The invention adopts the following technical scheme:

a two-dimensional probe system with external drive suitable for various plasma vacuum chambers is characterized in that a driving mechanism capable of converting one-dimensional motion in two different directions into two-dimensional motion is arranged in a main vacuum chamber of plasma equipment or a vacuum chamber connected with the main vacuum chamber, the transmission of driving force between the two-dimensional driving mechanism in the vacuum chamber and a one-dimensional driver outside the vacuum chamber is realized through two sets of movable vacuum sealing structures, and a probe is arranged on the two-dimensional mechanism in the vacuum chamber to realize the measurement of two-dimensional space parameters of plasma parameters.

Furthermore, the driving mechanism for converting the one-dimensional motion in two different directions (set as transverse and longitudinal) into the two-dimensional motion is a two-dimensional linkage mechanism formed by respectively arranging guide rods and driving rods which are parallel to each other and have a guiding function in two vertical directions and combining a plurality of supports and supports. The external one-dimensional drives in two vertical directions of the vacuum chamber are respectively connected with two sets of driving rods of the two-dimensional movable mechanism through shaft connectors and other shaft connecting devices to realize the transmission of driving force, the drivers which respectively control the motion in two directions can convert the one-dimensional motion outside the vacuum chamber into the two-dimensional motion of the probe head in the vacuum chamber through the two-dimensional linkage mechanism device, and the spatial position of the two-dimensional probe head is calculated by recording the positions of the one-dimensional drives outside the two vacuum chambers.

Furthermore, the dynamic sealing structure for connecting the inner vacuum chamber and the outer vacuum chamber uses a welding corrugated pipe or other dynamic sealing forms. For the requirement state of high vacuum, it is a more reliable way to use the welding bellows, for the not high circumstances of vacuum requirement can use other dynamic seal structure.

Further, the vacuum chamber, which is connected to the main plasma and in which the two-dimensional driving structure is disposed, may be of any shape.

Further, the modular probe mounting structure can be used to connect different types of probe systems, including Langmuir probes, RF compensation probes and their accompanying RF compensation systems, and other types of probes (e.g., magnetic probes, Mach probes, etc.), by modular design of the probe mounting structure. The probe may be of any shape, as long as the size is limited to a specific range.

Furthermore, the driving mechanism comprises a transverse driving rod (12), a longitudinal guide rod (13), a longitudinal driven support (14), a front fixed support (15), a driven transverse guide rod (16), a transverse guide rod (17), a transverse driven support (18), a front fixed support (19), a probe mounting support (20), a longitudinal driving sliding support (21), a bottom plate (22), a driven longitudinal guide rod (23), a transverse driving support (24), a rear fixed support (25) and a longitudinal driving rod (26); the bottom plate (22) is a structural component for bearing the two-dimensional driving probe system, supports for fixing guide rods are arranged on the periphery of the bottom plate (22), and are mounted on the bottom plate (22), wherein the front two front fixed supports (15, 19) are used for fixing the transverse guide rod (17) and the longitudinal guide rod (13), and the rear two rear fixed supports (25) are respectively provided with a linear bearing for fixing the longitudinal guide rod (13) and enabling the transverse driving rod (12) and the longitudinal driving rod (26) to penetrate through the linear bearings; the transverse driving rod (12) penetrates through a linear bearing of the rear fixed support (25) and then is fixedly connected with the transverse driving support (24) and is connected to the transverse driven support (18) through the driven longitudinal guide rod (23), the transverse driving rod (12) is parallel to the transverse guide rod (17), and when the transverse driving rod does one-dimensional motion, the transverse driving support (24) and the driven longitudinal guide rod (23) arranged on the transverse driving rod drive the transverse driven support (18) to move along the transverse guide rod (17); the longitudinal driving rod (26) penetrates through a linear bearing of the rear fixed support (25) and then is fixedly connected with the longitudinal driving sliding support (21) and is connected to the longitudinal driven support (14) through the driven transverse guide rod (16), the longitudinal driving rod (26) is parallel to the transverse guide rod (17), and when the longitudinal driving sliding support (21) does one-dimensional motion, the longitudinal driven support (14) is driven to move along the longitudinal guide rod (13) through the longitudinal driving sliding support (21) and the driven transverse guide rod (16) arranged on the longitudinal driving sliding support; because the probe mounting bracket (20) is provided with a linear bearing in the transverse direction and the longitudinal direction respectively and penetrates through the driven transverse guide rod (16) and the driven longitudinal guide rod (23), the probe mounting bracket (20) is driven when the transverse driving rod (12) or the longitudinal driving rod (26) moves, and thus two one-dimensional motions are combined into a two-dimensional probe motion.

The external drive two-dimensional probe system is characterized in that a two-dimensional transmission system consisting of a linear optical axis, a linear bearing, a sliding block and a support base plate is arranged in a vacuum chamber connected with a plasma main vacuum chamber, the probe is arranged on the sliding block, and the optical axis for transmitting linear motion pushes the sliding block for mounting the probe to do longitudinal and transverse reciprocating motion so as to measure two-dimensional space parameters of the probe. Two mutually perpendicular linear movements outside the vacuum chamber are then transmitted to a two-dimensional transmission system inside the vacuum chamber by means of linear and vacuum coupling (welding bellows or other forms of dynamic seals). The high-precision linear driving system (such as an electric cylinder) is used, and the high-precision two-dimensional space parameter measurement position information of the probe can be obtained.

The invention has the beneficial effects that:

the invention provides an externally-driven two-dimensional probe system suitable for various plasma vacuum chambers, which can carry different probe heads to continuously measure two-dimensional spatial positions of plasma parameters according to actual requirements of experiments, is favorable for carrying out fine research on the spatial distribution of the plasma parameters and improves the operation efficiency of the experiments.

Drawings

FIG. 1 is a schematic diagram of an example two-dimensional probe structure (three sealing surfaces hidden for clarity);

fig. 2 is a schematic diagram of an example two-dimensional drive mechanism.

In the figure, 1-probe, 2-probe rod and mounting seat, 3-vacuum cavity, 4-one-dimensional linear coupling, 5-one-dimensional driving rod, 6-welding corrugated pipe, 7-longitudinal one-dimensional driving (electric cylinder), 8-L-shaped connecting plate, 9-transverse one-dimensional driving (electric cylinder), 10-aviation plug, 11-two-dimensional driving mechanism, 12-transverse driving rod, 13-longitudinal guiding rod, 14-longitudinal driven bracket, 15-front fixed support, 16-driven transverse guiding rod, 17-transverse guiding rod, 18-transverse driven bracket, 19-front fixed support, 20-probe mounting bracket, 21-longitudinal driving sliding bracket, 22-bottom plate, 23-driven longitudinal guiding rod, 24-transverse driving bracket, 25-rear fixed support and 26-longitudinal driving rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.

The specific embodiment of the invention is as follows:

the two-dimensional probe base structure is shown in fig. 1, and the two-dimensional probe system comprises a probe head 1, a probe rod and mounting base 2, a vacuum cavity 3, a one-dimensional linear coupler 4, a one-dimensional driving rod 5, a welding corrugated pipe 6, a longitudinal one-dimensional driving (electric cylinder) 7, an L-shaped connecting plate 8, a transverse one-dimensional driving (electric cylinder) 9, an aviation plug 10 and a two-dimensional driving mechanism 11. The vacuum cavity 3 is connected with a plasma main vacuum chamber, a two-dimensional driving mechanism 11 is installed in the vacuum cavity 3, a probe head 1, a probe rod and an installation seat 2 are installed on the two-dimensional driving mechanism 11, a longitudinal one-dimensional driving (electric cylinder) 7 is connected with a one-dimensional driving rod 5 through an L-shaped connecting plate 8 on the longitudinal one-dimensional driving (electric cylinder), the one-dimensional driving rod 5 is connected with the two-dimensional driving mechanism 11 through a one-dimensional linear coupler 4 and isolated from vacuum by a welding corrugated pipe 6, and a transverse one-dimensional driving 9 is also connected with the two-dimensional driving mechanism 11 and sealed in vacuum with the longitudinal same connecting mechanism. The aviation plug 10 used for probe signal is used to make electrical signal connection and vacuum sealing. In addition, the control of the two-dimensional motion of the probe with higher precision and the measurement of the space position parameters can be realized through a linear driver (such as an electric cylinder) outside the vacuum chamber with high positioning and measuring precision.

In order to convert linear motion in two vertical directions into two-dimensional motion, the invention designs a set of mechanism for converting one-dimensional drive in two vertical directions into two-dimensional drive as shown in fig. 2. The bottom plate of the two-dimensional driving mechanism is mainly used for bearing structural components of the two-dimensional driving system and ensuring the rigidity of the whole system with the support on the same plane. The periphery is provided with a support for fixing the guide rod, the support is arranged on a bottom plate 22, wherein the front two fixed supports (15, 19) are used for fixing the transverse guide rod 17 and the longitudinal guide rod 13, and the rear two fixed supports 25 are respectively provided with a linear bearing which is respectively used for fixing the longitudinal guide rod 13 and enabling the transverse driving rod 12 and the longitudinal driving rod 26 to pass through the linear bearings. The transverse driving rod 12 passes through a linear bearing of the rear fixed support 25, is fixedly connected with the transverse driving bracket 24 and is connected to the transverse driven bracket 18 through the driven longitudinal guide rod 23, the transverse driving rod 12 is parallel to the transverse guide rod 17, and when the transverse driving rod 12 does one-dimensional motion, the transverse driven bracket 18 is driven to move along the transverse guide rod 17 through the transverse driving bracket 24 and the driven longitudinal guide rod 23 arranged on the transverse driving bracket 24. The longitudinal driving rod 26 passes through the linear bearing of the rear fixed support 25, is fixedly connected with the longitudinal driving sliding support 21 and is connected to the longitudinal driven support 14 through the driven transverse guide rod 16, the longitudinal driving rod 26 is parallel to the transverse guide rod 17, and when the longitudinal driving rod 26 does one-dimensional motion, the longitudinal driven support 14 is driven to move along the longitudinal guide rod 13 through the longitudinal driving sliding support 21 and the driven transverse guide rod 16 arranged on the longitudinal driving sliding support. Because the probe mounting bracket 20 is provided with a linear bearing in the transverse direction and the longitudinal direction and penetrates through the driven transverse guide rod 16 and the driven longitudinal guide rod 23, when the transverse driving rod 12 or the longitudinal driving rod 26 moves, the probe mounting bracket 20 is driven, so that two one-dimensional movements are combined into two-dimensional probe movements, and the movable range of the probe mounting bracket 20 is limited within the range of a right-angled quadrangle surrounded by the four fixed supports (15, 19, 25) due to the structure.

The one-dimensional driving mechanism can use an electric cylinder, an air cylinder or even a manual or motor-driven lead screw, in order to achieve the purposes of high precision and automatic control in the example, as shown in fig. 1, the electric cylinder driven by a servo or stepping motor is used as a one-dimensional driver, the electric cylinder can have good positioning precision and repeatability precision, the electric cylinders of certain types can also output position information in real time, a computer or other upper computers and data acquisition systems are comprehensively applied, and a two-dimensional probe system is matched with corresponding probe peripheral circuits after space calibration, so that the one-to-one corresponding relation between the plasma parameters measured by the probe and the space positions of the probe relative to the plasma device can be quickly obtained.

Because the two-dimensional driving mechanism 11 is provided with the mounting holes reserved in the probe mounting bracket 20, the modular standard design of the probe is performed according to the reference of the mounting holes, and after the signal line and the aviation plug 10 of the probe are properly replaced, different types of probe systems including a Langmuir probe, a radio frequency compensation probe and a radio frequency compensation system attached to the radio frequency compensation probe can be connected, and other types of probes (such as magnetic probes) can be connected. The modular probe can be any shape as long as the size is within the specified specification.

The invention has not been described in detail and is part of the common general knowledge of a person skilled in the art. The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and the preferred embodiments are not exhaustive and do not limit the invention to the precise embodiments described. Various modifications and improvements of the technical solution of the present invention may be made by those skilled in the art without departing from the spirit of the present invention, and the technical solution of the present invention is to be covered by the protection scope defined by the claims.