阅读说明：本技术 热固性马来酰亚胺树脂组合物和使用其的粘合剂、基板材料、底漆、涂料和半导体装置 (Thermosetting maleimide resin composition, and adhesive, substrate material, primer, coating material and semiconductor device using same ) 是由 工藤雄贵 堤吉弘 山口伸介 于 2021-05-19 设计创作，主要内容包括：本发明提供一种固化物的玻璃化转变温度高、介电特性优异、且与金属箔的粘合性优异,并且与其它树脂的相容性良好,在固化时不存在固化非均匀性,从而能够进行均匀地固化的热固性马来酰亚胺树脂组合物、以及含有所述热固性马来酰亚胺树脂组合物的粘合剂、基板材料、底漆、涂料以及半导体装置。所述热固性马来酰亚胺树脂组合物包含(A)马来酰亚胺化合物和(B)反应促进剂。(The invention provides a thermosetting maleimide resin composition which has a cured product with high glass transition temperature, excellent dielectric properties, excellent adhesion to metal foil, good compatibility with other resins, no curing nonuniformity during curing and uniform curing, and an adhesive, a substrate material, a primer, a coating and a semiconductor device containing the thermosetting maleimide resin composition. The thermosetting maleimide resin composition comprises (A) a maleimide compound and (B) a reaction accelerator.)

1. A thermosetting maleimide resin composition comprising (A) a maleimide compound and (B) a reaction promoter,

the maleimide compound (A) is represented by the following formula (1) and has a number average molecular weight of 3000 to 50000,

in the formula (1), A independently represents a tetravalent organic group having a cyclic structure, B independently represents a divalent hydrocarbon group having 6 to 200 carbon atoms, Q independently represents a divalent alicyclic hydrocarbon group having 6 to 60 carbon atoms and having a cyclohexane skeleton represented by the following formula (2), W represents B or Q, n represents 1 to 100, m represents 0 to 100, the sequence of the repeating units consisting of n and m is not limited, and the bonding mode may be alternating, block, or random,

in the formula (2), R¹、R²、R³And R⁴Independently of hydrogen atomA carbon atom or an alkyl group having 1 to 5 carbon atoms, wherein x1 and x2 are each a number of 0 to 4.

2. The thermosetting maleimide resin composition according to claim 1,

it further comprises (C) a thermosetting resin having at least 1 group selected from the group consisting of an epoxy group, a maleimide group, a hydroxyl group, an acid anhydride group, an alkenyl group, a (meth) acrylic group and a mercapto group as a reactive group capable of reacting with the maleimide group.

3. The thermosetting maleimide resin composition according to claim 1,

wherein in the maleimide compound having an alicyclic skeleton of the formula (1), the bonding form of each repeating unit composed of n and m is a block.

4. The thermosetting maleimide resin composition according to claim 1,

wherein A in the formula (1) is any one of tetravalent organic groups represented by the following structural formula,

the bonding end of the unbonded substituent in the above structural formula is bonded to the carbonyl carbon forming the cyclic imide structure in formula (1).

5. The thermosetting maleimide resin composition according to claim 1,

wherein B in the formula (1) is one or more divalent hydrocarbon groups represented by the following structural formulae (3-1), (3-2), (4) and (5),

in the above formula, n¹And n²Each being a number of 5 to 30, which may be the same or different, n³And n⁴Each of which is a number of 4 to 24, and may be the same or different, and R independently represents a hydrogen atom, or a linear or branched alkyl or alkenyl group having 4 to 40 carbon atoms.

6. A sheet-like or film-like composition,

comprising the thermosetting maleimide resin composition of claim 1.

7. A kind of adhesive composition is provided, which comprises a base material,

comprising the thermosetting maleimide resin composition of claim 1.

8. A primer composition for a primer coating composition,

comprising the thermosetting maleimide resin composition of claim 1.

9. A composition for use in a substrate is provided,

comprising the thermosetting maleimide resin composition of claim 1.

10. A coating composition is provided which comprises a base material,

comprising the thermosetting maleimide resin composition of claim 1.

11. A kind of semiconductor device is provided, in which,

which comprises a cured product of the thermosetting maleimide resin composition according to claim 1.

Technical Field

The present invention relates to a thermosetting maleimide resin composition and an adhesive, a substrate material, a primer, a coating material and a semiconductor device using the same.

Background

In recent years, with the progress of miniaturization and high performance of electronic devices, demands for miniaturization and high density of wiring have been made in multilayer printed wiring boards. Further, in the next-generation products, materials for high frequency bands are required, and it is necessary to reduce transmission loss as a measure for reducing noise, and therefore, it is necessary to develop an insulating material having excellent dielectric characteristics.

As an insulating material used for a multilayer printed wiring board, an epoxy resin composition containing an epoxy resin, a specific phenol curing agent, a phenoxy resin, rubber particles, a polyvinyl acetal resin, and the like, which is disclosed in patent document 1 and patent document 2, is known. However, it is known that these materials cannot be used satisfactorily for high-frequency band applications represented by the subject 5G. On the other hand, patent document 3 discloses that an epoxy resin composition containing an epoxy resin, an active ester compound and a triazine cresol novolac resin is effective for reducing the dielectric loss tangent, but even this material requires a reduction in the dielectric loss for use in high frequency applications.

On the other hand, patent document 4 discloses a resin film which is a non-epoxy resin and is formed of a resin composition containing a bismaleimide resin having a long chain alkyl group and a curing agent, and has excellent low dielectric characteristics, but since it is a combination of a bismaleimide resin having a long chain alkyl group and a hard low molecular aromatic maleimide, compatibility is poor, non-uniformity of characteristics and non-uniformity of curing are likely to occur, and it is difficult to achieve a high glass transition temperature (Tg) of 100 ℃.

In recent studies, it has been known that the bismaleimide resin having a long chain alkyl group has a problem in that it is difficult to improve the dielectric properties when the resin design is attempted to increase Tg, and to lower Tg when the dielectric properties are improved. Further, it has been found that, when the Tg is increased, even in the case of bismaleimide resins having the same long chain alkyl group, the resins are aggregated or separated from each other, and the compatibility between the resins is deteriorated.

Further, patent documents 5 and 6 disclose polyimide-containing resin compositions and the like, which are prepared from dimer acid derived from aromatic tetracarboxylic acid anhydride and dimer acid which is a dimer of unsaturated fatty acid such as oleic acid, or alicyclic diamine. However, the polyimides described in all the documents are difficult to use when cured alone, and have poor compatibility with other resins. Further, since the polyimide undergoes ring closure dehydration during curing, for example, when a resin composition containing the polyimide is used in contact with a metal foil, swelling is likely to occur under the use conditions, which is not preferable.

In this context, in recent years, as shown in patent documents 7 and 8, polyphenylene ether resin (PPE) capable of being thermally cured by modifying functional groups at molecular chain terminals is used as a main resin for a 5G substrate. The modified PPE has a cured product having a high Tg of 200 ℃ or higher and is excellent in reliability.

Documents of the prior art

Patent document

[ patent document 1 ]: japanese patent laid-open No. 2007 and 254709

[ patent document 2 ]: japanese laid-open patent publication No. 2007-254710

[ patent document 3 ]: japanese patent laid-open publication No. 2011-132507

[ patent document 4 ]: international publication No. 2016/114287

[ patent document 5 ]: japanese patent laid-open publication No. 2017-119361

[ patent document 6 ]: japanese patent laid-open publication No. 2019-104843

[ patent document 7 ]: japanese patent laid-open publication No. 2017-128718

[ patent document 8 ]: japanese patent laid-open publication No. 2018-95815

Disclosure of Invention

Problems to be solved by the invention

From the viewpoint of skin effect, transmission loss increases due to the use of a metal foil having a rough surface. Therefore, for 5G applications, it is preferable to use a metal foil having a small surface roughness. However, when a metal foil having a small surface roughness is used, the fixing effect cannot be obtained. Therefore, although a resin having higher adhesion to a metal foil is desired, the modified PPE described in patent documents 7 and 8 has a problem in adhesion between the resin and the metal foil.

Accordingly, an object of the present invention is to provide a thermosetting maleimide resin composition, and an adhesive, a substrate material, a primer, a coating material and a semiconductor device using the same. The cured product of the thermosetting maleimide resin composition has a high glass transition temperature (Tg), excellent dielectric properties, excellent adhesion to a metal foil, and good compatibility with other resins, and thus, curing non-uniformity does not occur during curing, and uniform curing is possible.

Means for solving the problems

As a result of intensive studies to solve the above problems, the present inventors have found that the following thermosetting maleimide resin compositions can achieve the above objects, and have completed the present invention.

＜1＞

A thermosetting maleimide resin composition comprising (A) a maleimide compound and (B) a reaction promoter,

the maleimide compound (A) is represented by the following formula (1), and has a number average molecular weight of 3000 to 50000.

In the formula (1), A independently represents a tetravalent organic group having a cyclic structure, B independently represents a divalent hydrocarbon group having 6 to 200 carbon atoms, Q independently represents a divalent alicyclic hydrocarbon group having 6 to 60 carbon atoms and having a cyclohexane skeleton represented by the following formula (2), W represents B or Q, n represents 1 to 100, m represents 0 to 100, and the sequence of the repeating units consisting of n and m is not limited, and the bonding mode may be alternating, block, or random.

In the formula (2), R¹、R²、R³And R⁴Independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and x1 and x2 are each a number of 0 to 4.

＜2＞

The thermosetting maleimide-based resin composition described in < 1 >,

it further comprises (C) a thermosetting resin having at least 1 group selected from the group consisting of an epoxy group, a maleimide group, a hydroxyl group, an acid anhydride group, an alkenyl group, a (meth) acrylic group and a mercapto group as a reactive group capable of reacting with the maleimide group.

＜3＞

The thermosetting maleimide-based resin composition as described in < 1 > or < 2 >,

wherein in the maleimide compound having an alicyclic skeleton of the formula (1), the bonding form of each repeating unit composed of n and m is a block.

＜4＞

The thermosetting maleimide resin composition of any of < 1 > - < 3 >,

wherein A in the formula (1) is any one of tetravalent organic groups represented by the following structural formula.

The bonding end of the unbonded substituent in the above structural formula is bonded to the carbonyl carbon forming the cyclic imide structure in formula (1).

＜5＞

The thermosetting maleimide resin composition of any of < 1 > - < 4 >,

wherein B in the formula (1) is one or more divalent hydrocarbon groups represented by the following structural formulae (3-1), (3-2), (4) and (5).

In the above formula, n¹And n²Each being a number of 5 to 30, which may be the same or different, n³And n⁴Each of which is a number of 4 to 24, and may be the same or different, and R independently represents a hydrogen atom, or a linear or branched alkyl or alkenyl group having 4 to 40 carbon atoms.

＜6＞

A sheet-like or film-like composition,

which comprises the thermosetting maleimide resin composition of any one of < 1 > -5 >.

＜7＞

A kind of adhesive composition is provided, which comprises a base material,

which comprises the thermosetting maleimide resin composition of any one of < 1 > -5 >.

＜8＞

A primer composition for a primer coating composition,

which comprises the thermosetting maleimide resin composition of any one of < 1 > -5 >.

＜9＞

A composition for use in a substrate is provided,

which comprises the thermosetting maleimide resin composition of any one of < 1 > -5 >.

＜10＞

A coating composition is provided which comprises a base material,

which comprises the thermosetting maleimide resin composition of any one of < 1 > -5 >.

＜11＞

A kind of semiconductor device is provided, in which,

which has a cured product of the thermosetting maleimide resin composition of any one of < 1 > -to < 5 >.

ADVANTAGEOUS EFFECTS OF INVENTION

The thermosetting maleimide resin composition of the present invention has a cured product with a high glass transition temperature, excellent dielectric properties, and excellent adhesion to a metal foil. In addition, the maleimide compound contained in the thermosetting maleimide resin composition of the present invention is excellent in compatibility with other resins having different structures, and therefore, can be easily used in combination with other resins, and can easily bring out good performance by complementing the mutual performance. Further, the thermosetting maleimide resin composition of the present invention can be cured uniformly without curing unevenness during curing, and particularly, when molded into a sheet, film or substrate, the thermosetting maleimide resin composition has little variation in curability and physical properties.

Therefore, the thermosetting maleimide resin composition of the present invention can be suitably used for adhesives, substrate materials, primers, coatings and semiconductor devices.

Detailed Description

The present invention will be described in more detail below.

(A) A maleimide compound represented by the following formula (1) and having a number average molecular weight of 3000 to 50000

(A) The component (A) is a maleimide compound having an alicyclic skeleton, which is represented by the following formula (1) and has a number average molecular weight of 3000 to 50000. Preferably 2 or more, preferably 2 to 5 maleimide groups in one molecule.

In formula (1), a independently represents a tetravalent organic group having a cyclic structure.

B is independently a divalent hydrocarbon group having 6 to 200 carbon atoms.

Q is independently a divalent alicyclic hydrocarbon group having 6 to 60 carbon atoms and having a cyclohexane skeleton represented by the following formula (2).

W is B or Q.

n is 1 to 100, and m is 0 to 100.

The order of the repeating units included in n and m is not limited, and the bonding may be alternating, block, or random.

(in the formula (2), R¹、R²、R³And R⁴Independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and x1 and x2 are each a number of 0 to 4. )

(A) The maleimide compound of component (A) has a number average molecular weight of 3000 to 50000, preferably 5000 to 40000. A number average molecular weight within this range is preferable because it is excellent in solubility in a solvent and compatibility with other resins. When the number average molecular weight is within this range, a cured product having a small variation in physical properties after curing and a small curing non-uniformity can be obtained.

The number average molecular weight referred to in the present specification means a number average molecular weight of polystyrene as a standard substance measured by Gel Permeation Chromatography (GPC) under the following conditions.

[ measurement conditions ]

Eluent: tetrahydrofuran (THF)

Flow rate: 0.35mL/min

A detector: RI (Ri)

Column: TSK-GEL H type (manufactured by TOSOH CORPORATION)

Column temperature: 40 deg.C

Sample injection amount: 5 μ L

In the formula (1), a independently represents a tetravalent organic group having a cyclic structure, and among them, any of the tetravalent organic groups represented by the following structural formulae is preferable.

(wherein the bonding terminal of the unbound substituent is a bonding terminal bound to the carbonyl carbon forming the cyclic imide structure in formula (1))

In the formula (1), B is a divalent hydrocarbon group having 6 to 200 carbon atoms, preferably 8 to 100 carbon atoms, and more preferably 10 to 50 carbon atoms. Among them, a branched divalent hydrocarbon group in which one or more hydrogen atoms in the divalent hydrocarbon group are substituted with an alkyl group or alkenyl group having 6 to 200 carbon atoms, preferably 8 to 100 carbon atoms, and more preferably 10 to 50 carbon atoms is preferable. The branched divalent hydrocarbon group may be either a saturated aliphatic hydrocarbon group or an unsaturated hydrocarbon group, or may have an alicyclic structure or an aromatic ring structure in the middle of the molecular chain. The branched divalent hydrocarbon group is specifically a hydrocarbon group derived from a diamine at both ends called a dimer diamine. The dimer diamine is a compound derived from a dimer of an unsaturated fatty acid such as oleic acid.

Specific examples of the branched divalent hydrocarbon group include one or more divalent hydrocarbon groups represented by the following structural formula (3-1), structural formula (3-2), structural formula (4), and structural formula (5).

Here, n is¹And n²The number of each of them is 5 to 30, preferably 5 to 15, more preferably 6 to 10, and they may be the same or different. In addition, n³And n⁴The number of each of them is 4 to 24, preferably 4 to 12, more preferably 5 to 10, and they may be the same or different.

And R independently represents a hydrogen atom or a linear or branched alkyl or alkenyl group having 4 to 40 carbon atoms, preferably 5 to 20 carbon atoms, more preferably 6 to 15 carbon atoms. Specific examples of R include a hydrogen atom, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a lauryl group, a stearyl group, a 3-octenyl group, and structural isomers thereof.

Specific examples of the above-mentioned formulae (3-1), (3-2), (4) and (5) include the following structures.

Denoted as the bonding site.

In the formula (1), Q is independently a divalent alicyclic hydrocarbon group having 6 to 60 carbon atoms, preferably 8 to 30 carbon atoms, and more preferably 10 to 20 carbon atoms, which has a cyclohexane skeleton and is represented by the following formula (2).

(in the formula (2), R¹、R²、R³And R⁴Independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and x1 and x2 are each a number of 0 to 4. )

Herein as R¹、R²、R³And R⁴Specific examples thereof include a hydrogen atom, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group and tert-butyl group. Among them, a hydrogen atom and a methyl group are preferable. In addition, R is¹、R²、R³And R⁴May be the same or different.

Further, x1 and x2 are each a number of 0 to 4, preferably a number of 0 to 2. X1 and x2 may be the same or different.

In the formula (1), specific examples of Q include the following structures.

Denoted as the bonding site.

In the formula (1), W is B or Q. The W may have a structural unit of either B or Q depending on the manufacturing method described later.

In the formula (1), n is 1 to 100, preferably 1 to 50, and more preferably 1 to 40. Further, m is 0 to 100, preferably 1 to 50, and more preferably 1 to 40.

In the maleimide compound represented by the formula (1), the order of the repeating units included in n and m in the formula (1) is not limited, and the bonding may be alternating, block, or random, but block bonding is preferable.

The method for producing the maleimide compound of the component (a) is not particularly limited, and for example, the maleimide compound can be produced efficiently by 2 methods shown below.

Production method 1

As one production method, a method for producing a bismaleimide compound having the steps a, B, and C is provided. The step A is a step of synthesizing amic acid from an acid anhydride represented by the following formula (6) and an alicyclic diamine represented by the following formula (7) and subjecting the amic acid to ring-closure dehydration;

a step of synthesizing an amic acid from the reaction product obtained in the step A and a diamine represented by the following formula (8) and subjecting the amic acid to ring-closure dehydration, after the step A;

and a step C of synthesizing maleamic acid using the reaction product obtained in the step B and maleic anhydride after the step B, and terminating the ends of the molecular chains with maleimide groups by ring-closing dehydration.

Production method 2

As another production method, there is a method for producing a bismaleimide compound including the steps a ', B ', and C '. The step A' is a step of synthesizing an amic acid with the diamine represented by the formula (6) and the formula (8) and subjecting the amic acid to ring-closure dehydration;

the step B ' is a step of synthesizing an amic acid from the reaction product obtained in the step A ' and an alicyclic diamine represented by the following formula (7) and subjecting the amic acid to ring-closure dehydration after the step A ';

the step C ' is a step of synthesizing maleamic acid using the reactant obtained in the step B ' and maleic anhydride after the step B ', and terminating the ends of the molecular chains by ring-closing dehydration.

In formula (6), a represents a tetravalent organic group containing a cyclic structure.

In the formula (7), R¹、R²、R³And R⁴Independently a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, and x1 and x2 are each a number of 0 to 4.

H₂N-B-NH₂ (8)

In the formula (8), B is a divalent hydrocarbon group having 6 to 200 carbon atoms.

Specific examples and preferred examples of the symbols in the formulae (6) to (8) are the same as those exemplified by the corresponding symbols in the formula (1).

Although the above two production methods are shown, the basic process is a step a (or step a') of synthesizing an amic acid from a tetracarboxylic dianhydride and a diamine and subjecting the amic acid to ring-closure dehydration; then, after the step A (or the step A '), the step B (or the step B ') of synthesizing an amic acid by adding a diamine different from that used in the previous step A (or the step A ') and further performing ring-closure dehydration is carried out; and a step (C) of reacting maleic anhydride after the step (B) (or step B') to synthesize maleamic acid, and then performing ring-closing dehydration to terminate the molecular chain ends with maleimide groups. The difference between the above two production methods is mainly only the order of the diamine species to be charged.

In the above two production methods, the respective steps can be roughly divided into two steps of a synthesis reaction of amic acid or maleamic acid and a ring-closing dehydration reaction, and the details thereof will be described below.

In step a (or step a'), amic acid is first synthesized by reacting a specific tetracarboxylic dianhydride with a specific diamine. The reaction is usually carried out in an organic solvent (e.g., an nonpolar solvent or a high-boiling aprotic polar solvent) at room temperature (25 ℃) to 100 ℃.

Then, after the reaction at 90 to 120 ℃, the ring-closure dehydration reaction of the amic acid is carried out while removing the water by-produced by the condensation reaction from the system. In order to promote the ring-closing dehydration reaction, an organic solvent (e.g., a nonpolar solvent, a high-boiling aprotic polar solvent, etc.) and an acid catalyst may be added.

Examples of the organic solvent include toluene, xylene, anisole, biphenyl, naphthalene, N-Dimethylformamide (DMF), and dimethyl sulfoxide (DMSO). These may be used alone in 1 kind, or may be used in combination of 2 or more kinds. Examples of the acid catalyst include sulfuric acid, methanesulfonic acid, and trifluoromethanesulfonic acid. These may be used alone in 1 kind, or may be used in combination of 2 or more kinds.

The molar ratio of the tetracarboxylic dianhydride to the diamine is preferably 1.01 to 1.50/1.0, more preferably 1.01 to 1.35/1.0. By blending them at such a ratio, a copolymer containing imide groups at both ends can be synthesized.

In the step B (or the step B '), first, the amic acid is synthesized by reacting the copolymer having imide groups at both ends obtained in the step a (or the step a') with a specific diamine. The reaction is usually carried out in an organic solvent (e.g., an nonpolar solvent or a high-boiling aprotic polar solvent) at room temperature (25 ℃) to 100 ℃.

Similarly, after the reaction is carried out at 95 to 120 ℃, the ring-closure dehydration reaction of the amic acid is continued while removing the water by-produced by the condensation reaction from the system. In order to promote the ring-closing dehydration reaction, an organic solvent (e.g., a nonpolar solvent, a high-boiling aprotic polar solvent, etc.) and an acid catalyst may be added.

Examples of the organic solvent include toluene, xylene, anisole, biphenyl, naphthalene, N-Dimethylformamide (DMF), and dimethyl sulfoxide (DMSO). These may be used alone in 1 kind, or may be used in combination of 2 or more kinds. Examples of the acid catalyst include sulfuric acid, methanesulfonic acid, and trifluoromethanesulfonic acid. These may be used alone in 1 kind, or may be used in combination of 2 or more kinds.

The molar ratio of the imide group-containing copolymer at both ends to the diamine is preferably 1.0:1.6 to 2.5, more preferably 1.0:1.8 to 2.2.

In the step C (or the step C '), the diamine having amino groups at both ends (both-end diamine compound) obtained in the step B (or the step B') is reacted with maleic anhydride at room temperature (25 ℃) to 100 ℃ to synthesize maleamic acid, and finally, water by-produced at 95 to 120 ℃ is removed from the system and ring-closure dehydration is performed to terminate the molecular chain ends with maleimide groups, thereby obtaining a bismaleimide compound as a target product. The above production method is preferred because a side reaction and a high molecular weight substance are less likely to occur when the terminal blocking reaction is performed by the maleimide group at the molecular chain end under the condition of 120 ℃ or lower.

The bismaleimide compound obtained by such a production method has a block copolymer structure, and therefore, the compatibility of the synthesized resin can be made uniform and the compatibility of the synthesized resin can be improved.

The molar ratio of the diamine having an amino group at both ends to the maleic anhydride is preferably 1.0:1.6 to 2.5, more preferably 1.0:1.8 to 2.2.

Finally, the maleimide compound of component (a) can be obtained by purification according to a conventional method, for example, by reprecipitation or the like.

In the resin component of the present invention, the component (a) is preferably 10 to 95% by mass, more preferably 15 to 85% by mass.

(B) Reaction accelerator

The reaction accelerator as the component (B) is added for accelerating a crosslinking reaction of the maleimide compound as the component (a) or a reaction between the maleimide group in the component (a) and a reactive group capable of reacting with the maleimide group in the component (C) described later.

The component (B) is not particularly limited as long as it promotes the crosslinking reaction. Examples thereof include ionic catalysts such as imidazoles, tertiary amines, quaternary ammonium salts, boron trifluoride amine complexes, organic phosphines, and organic phosphonium salts, organic peroxides such as diallyl peroxide, dialkyl peroxides, peroxycarbonates, and hydroperoxides, and radical polymerization initiators such as azoisobutyronitrile. Among them, in the case where the component (A) is reacted alone or the reactive group in the component (C) is a carbon-carbon double bond such as other maleimide group, alkenyl group, or (meth) acrylic group, an organic peroxide and a radical polymerization initiator are preferable; when the reactive group in the component (C) is an epoxy group, a hydroxyl group, or an acid anhydride group, a basic compound such as an imidazole or a tertiary amine is preferable.

The reaction accelerator is preferably blended in the range of 0.05 to 10 parts by mass, particularly preferably 0.1 to 5 parts by mass, based on 100 parts by mass of the total of the thermosetting resin components such as the component (A) and the component (C). If it is outside the above range, there is a possibility that the curing thereof at the time of molding of the maleimide resin composition will be very slow and/or fast, and therefore it is not preferred; in addition, the balance between the heat resistance and the moisture resistance of the resulting cured product may be lost.

(C) Thermosetting resins having reactive groups capable of reacting with maleimide groups

In the present invention, a thermosetting resin having a reactive group capable of reacting with a maleimide group may be further added as the component (C).

Examples of the reactive group capable of reacting with a maleimide group include an epoxy group, a maleimide group, a hydroxyl group, an acid anhydride group, an alkenyl group such as an allyl group and a vinyl group, a (meth) acrylic group, and a mercapto group. However, in the thermosetting resin having a maleimide group as a reactive group, a portion thereof corresponding to the maleimide compound of the component (a) is removed from the component (C).

The reactive group of the thermosetting resin which is the component (C) is preferably selected from the group consisting of an epoxy group, a maleimide group, a hydroxyl group, an acid anhydride group and an alkenyl group from the viewpoint of reactivity, and more preferably an alkenyl group or a (meth) acrylic group from the viewpoint of dielectric characteristics.

The thermosetting resin is not limited in kind, and examples thereof include epoxy resin, phenol resin, melamine resin, silicone resin, cyclic imide resin, urea resin, thermosetting polyimide resin, modified polyphenylene ether resin, thermosetting acrylic resin, epoxy-silicone hybrid resin, etc., and preferably modified polyphenylene ether resin.

(C) The number average molecular weight of the thermosetting resin of component (A) is preferably 350 to 6000, more preferably 1000 to 5000.

(C) The component (A) may be used alone in 1 kind, or may be used in combination in 2 or more kinds.

The component (C) is preferably contained in an amount of 5 to 90% by mass, more preferably 15 to 85% by mass, based on 100% by mass of the resin component.

< inorganic Filler >

In the present invention, an inorganic filler may be added as the component (D) in addition to the components (A) to (C).

The component (D) may be blended with an inorganic filler for the purpose of improving the strength and rigidity of a cured product of the thermosetting maleimide resin composition of the present invention and/or adjusting the thermal expansion coefficient and the dimensional stability of the cured product. As the inorganic filler of the component (D), an inorganic filler which is generally blended in an epoxy resin composition or a silicone resin composition can be used. Examples thereof include silica such as spherical silica, fused silica and crystalline silica, alumina, silicon nitride, aluminum nitride, boron nitride, barium sulfate, talc, clay, aluminum hydroxide, magnesium hydroxide, calcium carbonate, glass fiber and glass particles. Further, in order to improve the dielectric characteristics, a filler containing or coated with a fluororesin and/or hollow particles may be used, and a conductive filler such as metal particles, metal-coated inorganic particles, carbon fibers, and carbon nanotubes may be added for the purpose of imparting conductivity or the like.

(D) The inorganic filler of component (A) may be used alone in 1 kind or in combination of 2 or more kinds.

The average particle diameter and shape of the inorganic filler of component (D) are not particularly limited, and in the case of molding a film or a substrate, spherical silica having an average particle diameter of 0.5 to 5 μm is particularly preferably used. The average particle diameter is defined as a mass average value D in the measurement of the particle diameter distribution by a laser diffraction method₅₀(or median particle diameter).

Further, the inorganic filler of the component (D) is preferably surface-treated with a silane coupling agent. The silane coupling agent has an organic group capable of reacting the maleimide group of the component (a) with the reactive group of the thermosetting resin of the component (C). Examples of such a coupling agent include epoxy group-containing alkoxysilanes, amino group-containing alkoxysilanes, (meth) acrylic group-containing alkoxysilanes, and alkenyl group-containing alkoxysilanes.

As the coupling agent, an alkoxysilane containing a (meth) acrylic group and/or an amino group is preferably used. Specific examples thereof include 3-methacryloxypropyltrimethoxysilane, 3-acryloxypropyltrimethoxysilane, N-phenyl-3-aminopropyltrimethoxysilane, N-2- (aminoethyl) -3-aminopropyltrimethoxysilane and 3-aminopropyltrimethoxysilane.

These coupling agents not only can reduce the viscosity and thixotropy of the resin composition before curing and/or can improve the mechanical strength and dielectric properties of the cured product, but also have the effect of improving the adhesion to metals such as copper.

These coupling agents may be used alone in 1 kind, or may be used in combination in 2 or more kinds.

(D) The amount of the inorganic filler of component (b) is not particularly limited, but is preferably 20 to 400 parts by mass, and particularly preferably 50 to 300 parts by mass, based on 100 parts by mass of the total of the thermosetting resin components comprising component (a) and/or component (C), depending on the use of the film or substrate. When the amount of the inorganic filler as component (D) is in the range of 20 parts by mass or more and less than 400 parts by mass, the Coefficient of Thermal Expansion (CTE) of the cured product is small, sufficient strength can be obtained, flexibility as a film is not lost, and appearance defects are not caused. In addition, the adhesion can be maintained at a high value. The inorganic filler is preferably contained in an amount of 10 to 80% by mass, particularly preferably 15 to 75% by mass, based on the total composition.

< other additives >

Various additives may be further compounded in the thermosetting maleimide resin composition of the present invention as required within the range not impairing the effects of the present invention. Examples of the additive include an organopolysiloxane having a reactive functional group, a nonfunctional silicone oil, a thermoplastic resin, a thermoplastic elastomer, an organic synthetic rubber, a photosensitizer, a light stabilizer, a polymerization inhibitor, a flame retardant, a pigment, a dye, and an adhesion promoter. In addition, in order to improve the electrical characteristics of the cured product of the thermosetting maleimide resin composition, an ion scavenger or the like may be added as another additive.

The thermosetting maleimide resin composition of the present invention may be treated by dissolving it in an organic solvent to form a varnish. By forming the thermosetting maleimide resin composition into varnish, it is easy to mold into a sheet or film shape, and also to coat-impregnate a glass cloth made of E glass, low dielectric glass, quartz glass, or the like. The organic solvent is not limited, and any thermosetting resin component can be used as long as the component (A) or the component (C) can be dissolved therein. As the organic solvent, for example, toluene, xylene, anisole, cyclohexanone, cyclopentanone, and the like can be preferably used. The organic solvent can be used alone in 1, or can be mixed with 2 or more. The concentration of the thermosetting maleimide resin composition of the present invention in the varnish is preferably 5 to 80% by mass, more preferably 10 to 75% by mass.

The thermosetting maleimide resin composition can be used as a coating material such as an adhesive, a primer and a semiconductor device application, and can be used as a material for a substrate. The method of use and the form of use thereof can be used without limitation. The following examples illustrate examples of use, but the present invention is not limited thereto.

For example, after applying a thermosetting maleimide resin composition (varnish) dissolved in an organic solvent to a substrate, the organic solvent is usually removed by heating at a temperature of 80 ℃ or higher, preferably 100 ℃ or higher, for 0.5 to 5 hours. Further, by heating at a temperature of 150 ℃ or higher, preferably 175 ℃ or higher, for 0.5 to 10 hours, a flat and strong maleimide resin cured film can be formed. The temperature in the drying step for removing the organic solvent and the subsequent heat curing step may be respectively constant, but it is preferable to gradually increase the temperature. Through the above steps, the organic solvent can be efficiently removed from the composition, and the curing reaction of the resin can be further efficiently advanced.

The cured film obtained by curing the thermosetting maleimide resin composition of the present invention has excellent heat resistance, mechanical properties, electrical properties, adhesion to a substrate and solvent resistance, and also has a low dielectric constant. Therefore, the thermosetting maleimide resin composition of the present invention can be used for, for example, semiconductor devices, and specifically, can be used for passivation films or protective films on the surfaces of semiconductor devices, junction protective films for junctions of diodes, transistors, and the like, α -ray shielding films for VLSI, interlayer insulating films, ion implantation masks, and the like, as well as for conformal layers of printed circuit boards, alignment films for liquid crystal surface elements, protective films for glass fibers, and surface protective films for solar cells. Further, the paste composition can be used in a wide range of applications, such as a paste composition for printing in the case where an inorganic filler is blended with the thermosetting maleimide resin composition of the present invention, and a conductive paste composition in the case where a conductive filler is blended with the thermosetting maleimide resin composition of the present invention.

The method for applying the thermosetting maleimide resin composition dissolved in the organic solvent to the substrate is not particularly limited, and examples thereof include a spin coater, a slit coater, a spray coater, a dip coater, and a bar coater.

Further, by molding the epoxy resin molding material for semiconductor encapsulation after the cured coating film is formed, the adhesion between the epoxy resin molding material for semiconductor encapsulation and the base material can be improved. The semiconductor device obtained in this way is highly reliable because cracks in the epoxy resin molding material for semiconductor encapsulation and peeling of the molding material from the substrate are not observed in reflow after moisture absorption.

In this case, as the epoxy resin molding material for semiconductor encapsulation, a known epoxy resin ring composition for semiconductor encapsulation including an epoxy resin having 2 or more epoxy groups in 1 molecule, a curing agent for an epoxy resin such as a phenol resin or an acid anhydride, an inorganic filler, and the like can be used, and a commercially available product can also be used.

In the case where a metal such as copper which is easily oxidized is used as the base material, the atmosphere in which the thermosetting maleimide resin composition or the epoxy resin molding material for semiconductor encapsulation of the present invention is subjected to main curing is preferably a nitrogen atmosphere in order to prevent oxidation.

The resin composition of the present invention may be applied to a support sheet to form a film. As the support sheet, a commonly used support sheet can be used, and examples thereof include polyolefin resins such as Polyethylene (PE) resin, polypropylene (PP) resin, Polystyrene (PS) resin, and the like; polyester resins such as polyethylene terephthalate (PET) resins, polybutylene terephthalate (PBT) resins, and Polycarbonate (PC) resins, and the like, and the surfaces of these support sheets may be subjected to a mold release treatment. The coating method is not particularly limited, and examples thereof include coating methods such as a gap coater, a curtain coater, a roll coater, and a laminator. The thickness of the coating layer is not particularly limited, but the thickness after the solvent is distilled off is in the range of 1 to 100 μm, preferably 3 to 80 μm. Further, a cover film may also be used on the coating.

Further, the copper foil may be used as a substrate material of a resin-attached copper foil by attaching the copper foil to the coat layer.

Alternatively, a glass cloth made of E glass, low dielectric glass, quartz glass, or the like may be impregnated with the varnished resin composition, and the resin composition may be removed from the resin composition to form a b-stage state, thereby being used as a prepreg.

[ examples ]

The present invention will be described in detail below by way of examples and comparative examples, but the present invention is not limited to the following examples.

The components used in the examples and comparative examples are shown below. The number average molecular weight (Mn) below is a number average molecular weight measured under the following measurement conditions.

[ measurement conditions ]

Eluent: tetrahydrofuran (THF)

Flow rate: 0.35mL/min

A detector: RI (Ri)

Column: TSK-GEL H type (manufactured by TOSOH CORPORATION)

Column temperature: 40 deg.C

Sample injection amount: 5 μ L

Synthesis example 1 (preparation of bismaleimide Compound, reaction formula 1)

37.25g (0.219 mol) of isophorone diamine, 76.94g (0.35 mol) of pyromellitic dianhydride, and 350g of toluene were charged into a 2L glass four-necked flask equipped with a stirrer, a dean-Stark tube, a cooling condenser, and a thermometer, and the mixture was stirred at 80 ℃ for 3 hours, thereby synthesizing amic acid. Then, the temperature was raised to 110 ℃ as it was, and the mixture was stirred for 4 hours while distilling off the by-produced water, thereby synthesizing a block copolymer having imide groups at both terminals.

116.88g (0.219 mol) of a diamine compound containing a dimer diamine represented by the following formulae (3 ') to (5'), manufactured by CRODA, was added₂N-C₃₆H₇₀-NH₂(average composition formula)) was added to a flask containing a block copolymer solution containing imide groups at both ends, which had been cooled to room temperature, and stirred at 80 ℃ for 3 hours, thereby synthesizing amic acid. Then, the temperature was raised to 110 ℃ as it is, and the mixture was stirred for 4 hours while distilling off the water by-produced, thereby synthesizing a both-terminal diamine.

After the flask containing the obtained solution of the both-terminal diamine body was cooled to room temperature, 18.88g (0.193 mol) of maleic anhydride was further added, and by heating again and stirring at 80 ℃ for 3 hours, amic acid was synthesized. Then, it was directly heated to 110 ℃ and stirred for 15 hours while distilling off the by-produced water, and washed 5 times with 300g of water, thereby obtaining a varnish of bismaleimide compound. Then, this varnish was dropped into 3000g of isopropyl alcohol (IPA) to carry out a reprecipitation step, and the solvent was removed and dried to obtain a dark brown solid (A-1) (number average molecular weight: 8000) of the target product.

(reaction formula 1)

H₂N-C₃₆H₇₀-NH₂Denoted as Priamine-1075.

n ≈ 3, m ≈ 1 (mean values, respectively)

[ Synthesis example 2] (production of bismaleimide Compound, reaction formula 2)

31.13g (0.219 mol) of 1, 3-bisaminomethylcyclohexane, 76.94g (0.35 mol) of pyromellitic dianhydride and 350g of toluene were charged into a 2L glass four-necked flask equipped with a stirrer, a dean-Stark tube, a cooling condenser and a thermometer, and the mixture was stirred at 80 ℃ for 3 hours, whereby amic acid was synthesized. Then, the temperature was raised to 110 ℃ as it was, and the mixture was stirred for 4 hours while distilling off the by-produced water, thereby synthesizing a block copolymer having imide groups at both terminals.

116.88g (0.219 mol) of Priamine-1075 (manufactured by CRODA, dimer diamine-containing diamine compounds represented by the above formulas (3 ') to (5'): H₂N-C₃₆H₇₀-NH₂(average composition formula)) was added to a flask containing a block copolymer solution containing imide groups at both ends, which had been cooled to room temperature, and stirred at 80 ℃ for 3 hours, thereby synthesizing amic acid. Then, the temperature was raised to 110 ℃ as it is, and the mixture was stirred for 4 hours while distilling off the water by-produced, thereby synthesizing a both-terminal diamine.

After the flask containing the obtained solution of the both-terminal diamine body was cooled to room temperature, 18.88g (0.193 mol) of maleic anhydride was further added, and by heating again and stirring at 80 ℃ for 3 hours, amic acid was synthesized. Then, it was directly heated to 110 ℃ and stirred for 15 hours while distilling off the by-produced water, and washed 5 times with 300g of water, thereby obtaining a varnish of a bismaleimide compound. Then, this varnish was dropped into 2000g of IPA to carry out a reprecipitation step, and the solvent was removed and dried to obtain a dark brown solid (A-2) (number average molecular weight: 7600) of the objective product.

(reaction formula 2)

H₂N-C₃₆H₇₀-NH₂Denoted as Priamine-1075.

n ≈ 3, m ≈ 1 (mean values, respectively)

(B) Reaction accelerator

(B-1) dicumyl peroxide (PERCUMYL D, manufactured by Nissan oil Co., Ltd.)

(B-2) imidazole-based curing accelerator (1B2PZ, manufactured by Nippon Kagaku Kogyo Co., Ltd.)

(C-1): a bismaleimide compound containing a linear alkylene group represented by the following formula (BMI-3000J, manufactured by Designer Molecules Inc., Mn7000)

m is approximately equal to 3 (as an average value)

(C-2): a linear alkylene group-containing bismaleimide compound represented by the following formula (BMI-2500, manufactured by Designer Molecules Inc., Mn4500)

m1 ≈ 3, m2 ≈ 3 (average values)

(C-3): solid bisphenol A type epoxy resin (JeR-1001, manufactured by Mitsubishi chemical corporation, Japan, epoxy equivalent 475)

(C-4): a styrene-modified polyphenylene ether resin having a terminal represented by the following formula (OPE-2St-1200, number average molecular weight 1200, manufactured by Mitsubishi gas chemical Co., Ltd.)

(C-5)4, 4 ' -diphenylmethane bismaleimide (BMI-1000, manufactured by Nippon Kagaku K.K.; wherein x ' is 0 to 20, y ' is 0 to 20, and both x ' and y ' cannot be 0 at the same time.)

(D) Inorganic Filler (D-1) fused spherical silica (SO-25R, manufactured by Admatechs, Inc., having an average particle diameter of 0.5 μm) was treated with a methacrylic acid based modified silane coupling agent (KBM-503, manufactured by Nippon Denshoku industries, Inc.).

Examples 1 to 10 and comparative examples 1 to 10

Varnishes (varnish 1) of the respective resin compositions were obtained by dissolving and dispersing the respective components in anisole at the blending ratios (parts by mass) shown in tables 1 and 2, and adjusting the nonvolatile components to 60% by mass. The varnish 1 of each resin composition was coated on a PET film having a thickness of 38 μm by a roll coater and dried at 80 ℃ for 15 minutes to obtain each uncured resin film having a thickness of 50 μm. In the following evaluation test, each of the uncured resin films was used after the PET films were peeled from each of the uncured resin films formed on each of the PET films.

< clearcoat clarity >

In the blending amounts shown in tables 1 and 2, an anisole solution was prepared in a blending ratio excluding the component (D), thereby forming a varnish (varnish 2) having a nonvolatile component of 60 mass%. The transparency of each varnish 2 which had been prepared separately was evaluated in accordance with the following 2 conditions. When the following 2 conditions were all satisfied, the evaluation was "o", and when the other cases were, the evaluation was "x".

Visual inspection of the resulting mixture revealed no dissolution residue and turbidity

When the transmittance of direct light having an optical path length of 1mm and an optical path length of 740nm was measured by a spectrophotometer U-4100 (manufactured by Hitachi instruments Co., Ltd., Japan), the transmittance of the direct light was 50% or more.

< appearance of cured film >

Each of the uncured resin films was cured by stepwise curing at 150 ℃ for 1 hour and further at 180 ℃ for 2 hours using a test press machine (KVHC) manufactured by hokkawa seikagaku corporation, and the appearance of each of the cured resin films obtained was confirmed with the naked eye. The film was evaluated as "o" when the film had no uneven curing and had a uniform color over the entire film, and as "x" when the film had uneven curing or separation and had a locally different color.

< relative dielectric constant, dielectric loss tangent >

Each of the uncured resin films was cured by stepwise curing at 150 ℃ for 1 hour and further at 180 ℃ for 2 hours using a test press machine (KVHC) manufactured by hokkawa seikagaku corporation, to obtain each cured resin film. Then, a network analyzer (manufactured by Keysight Technologies, Inc. of E5063-2D5) and a dielectric strip line (manufactured by Keycom corporation) were connected to each other, and the relative dielectric constant and the dielectric loss tangent at a frequency of 10GHz were measured for each of the above cured resin films.

< glass transition temperature >

Each of the uncured resin films was cured by stepwise curing at 150 ℃ for 1 hour and further at 180 ℃ for 2 hours using a test press machine (KVHC) manufactured by hokkawa seikagaku corporation, to obtain each cured resin film. After each of the cured resin films was naturally cooled to 25 ℃, the glass transition temperature (Tg) of each of the cured resin films was measured by using TA Instruments, DMA-800.

< adhesion to copper foil >

First, the respective uncured resin films were laminated on E glass plates 80mm in length, 25mm in width and 1mm in thickness, respectively, at 80 ℃. Then, electrolytic copper foils (MLS-G, manufactured by Mitsui Metal mining Co., Ltd., Japan) having a thickness of 12 μm were disposed on the surfaces of the respective uncured resin films laminated on the glass plate, respectively, under a pressure of 30kg/cm²And vacuum press molding was performed at 180 ℃ for 120 minutes to obtain copper clad laminates which had been bonded to the glass plate via the respective cured resin films. Fixing the glass sheet part, according to JIS C6481: 1996, the peel strength of each copper foil was measured and used as the adhesive strength between each copper foil and each resin.

[ Table 1]

[ Table 2]

1, 1: the measured values of the dielectric properties are shown as different values depending on the measurement sites, because of the uneven curing. The numerical values of the dielectric properties are expressed as the average values of 5 different measurement sites.

A, 2: readings of measured values expressed as glass transition temperatures are unclear and/or have multiple glass transition temperatures.

< measurement of adhesion to substrate >

The adhesion strength of the compositions obtained in examples 1 and 2 and comparative example 1 to a nickel-plated or nickel-palladium-gold-plated copper substrate was evaluated by the following method, and the primer performance of the compositions was confirmed. For comparison, the results of the adhesion strength measurements performed in the same manner as in the primer-less examples in which the compositions of all examples and comparative examples were not used as primers are shown in table 3.

The compositions (varnish 1) obtained in examples 1 and 2 and comparative example 1 were applied to frame substrates on which copper frames of 20mm × 20mm were plated, respectively, by a spray coater, and cured by stepwise curing at 100 ℃ for 1 hour and 180 ℃ for 2 hours, respectively, to form cured films.

On each of the above cured films, an epoxy resin molding material KMC-2284 for semiconductor encapsulation manufactured by Nippon shin-Etsu chemical industries, Ltd was molded to have a bottom area of 10mm²And a cylindrical shape having a height of 3mm (molding conditions: 175 ℃ C. times.120 seconds. times.6.9 MPa), and then post-cured at 180 ℃ for 4 hours to obtain each test piece for measuring adhesive strength. The adhesion of each test piece for measuring the adhesion was measured at room temperature by ejecting the test piece at a speed of 0.2 mm/sec using a universal adhesion tester (DAGE SERIES 4000: manufactured by DAGE).

Further, in order to confirm reflow resistance, the adhesion force under room temperature conditions after applying 3 times of IR reflow at 260 ℃ was measured for each test piece for measuring the adhesion force prepared in the same manner as above by using a universal adhesion tester and ejecting the test piece at a speed of 0.2 mm/sec.

[ Table 3]

< characteristics of prepreg >

Prepregs were prepared from the compositions obtained in examples 3 and 5 and comparative examples 5 and 7, respectively, and dielectric characteristics were confirmed. The results are shown in Table 4.

Each prepreg was prepared by impregnating a quartz glass cloth (Q2116 manufactured by japan shin-Etsu chemical industries, Ltd., thickness 0.1mm) with each of the compositions (varnish 1) obtained in examples 3 and 5 and comparative examples 5 and 7, respectively, and then drying the resultant at 120 ℃ for 5 minutes. In this case, the amount of deposition of components (a) to (D) was adjusted to 44 mass%. Then, each of the prepregs thus prepared was cured by stepwise curing at 150 ℃ for 1 hour and further at 180 ℃ for 2 hours using a pressure tester (KVHC) manufactured by hokkawa seikagaku corporation, to obtain each prepreg impregnated with each of the curing resins. Then, a network analyzer (Keysight Technologies, Inc. manufacturing E5063-2D5) and a dielectric strip line (manufactured by Keycom corporation) were connected, and the relative dielectric constant and the dielectric loss tangent at a frequency of 10GHz were measured for each of the above prepregs.

[ Table 4]

And 3. a value in which the measured value of the dielectric properties varies depending on the measurement site due to uneven curing. The numerical values of the dielectric properties are expressed as the average values of 5 different measurement sites.

From the above results, it was confirmed that the composition of the present invention has a high glass transition temperature, excellent dielectric properties, excellent adhesion to metal foils, good compatibility with other resins, and uniform curing without curing non-uniformity during curing, and thus is useful for adhesives, substrate materials, primers, paints, semiconductor devices, and the like.