CN113687548A - 阵列基板及其制作方法、以及显示面板 - Google Patents
阵列基板及其制作方法、以及显示面板 Download PDFInfo
- Publication number
- CN113687548A CN113687548A CN202110975502.6A CN202110975502A CN113687548A CN 113687548 A CN113687548 A CN 113687548A CN 202110975502 A CN202110975502 A CN 202110975502A CN 113687548 A CN113687548 A CN 113687548A
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- Prior art keywords
- layer
- metal oxide
- substrate
- common electrode
- sub
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- 239000000758 substrate Substances 0.000 title claims abstract description 95
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 239000010410 layer Substances 0.000 claims abstract description 267
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 96
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 96
- 239000010409 thin film Substances 0.000 claims abstract description 40
- 238000000059 patterning Methods 0.000 claims abstract description 23
- 239000011229 interlayer Substances 0.000 claims abstract description 20
- 229920002120 photoresistant polymer Polymers 0.000 claims description 67
- 239000007772 electrode material Substances 0.000 claims description 32
- 238000005530 etching Methods 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound 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- 239000000377 silicon dioxide Substances 0.000 claims description 9
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- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
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[Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound 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[Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N Indium(III) oxide Chemical compound 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c+Cg== 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[O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium Chemical compound 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[O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt Chemical compound 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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
Abstract
本发明实施例公开一种阵列基板及其制作方法、以及显示面板。在一具体实施方式中,该制作方法包括:在基板上形成公共电极和第一缓冲层;在第一缓冲层上形成金属氧化物层,并对金属氧化物层进行图案化形成第一金属氧化物子层和第二金属氧化物子层;在第一金属氧化物子层上形成栅极,栅极在基板上的正投影部分覆盖第一金属氧化物子层在基板上的正投影;对第一金属氧化物子层和第二金属氧化物子层进行导体化,第一金属氧化物子层被栅极覆盖的部分作为沟道区,第二金属氧化物子层形成像素电极;形成覆盖栅极的层间绝缘层;在层间绝缘层上形成源漏极以形成薄膜晶体管。该实施方式通过一层金属氧化物层形成沟道区和像素电极,简化了工艺步骤。
Description
技术领域 本发明涉及显示技术领域。更具体地,涉及一种阵列基板及其制作方法、以及显示面板。 背景技术 薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display,TFT-LCD)装置具有体积小、功耗低、无辐射等特点。边缘开关技术(Fringe Filed Switching,FFS)通过同一平面内像素间电极产生边缘电场,使电极间以及电极正上方的取向液晶分子都能在平面方向(平行于基板)产生旋转转换,在增大视角的同时提高液晶层的透光效率。 目前,在FFS型TFT-LCD阵列基板的制作工艺中,通常采用顶栅自对准器件结构,其中形成遮光层、氧化物半导体层、栅极绝缘层、栅极图案、层间绝缘层、栅漏极、有源绝缘层、公共电极、第一和第二缓冲层、以及像素电极各需要一次掩模版工艺,因此,总共需要9次掩模版工艺,这使得制作阵列基板的过程过于复杂,造成较高成本。 发明内容 本发明的目的在于提供一种,以解决现有技术存在的问题中的至少一个。 为达到上述目的,本发明采用下述技术方案: 本发明第一方面提供了一种阵列基板的制作方法,阵列基板包括阵列排布的多个子像素和驱动各子像素的薄膜晶体管,方法包括: 在基板上形成公共电极和覆盖公共电极的第一缓冲层; 在第一缓冲层上形成金属氧化物层,并对金属氧化物层进行图案化形成第一金属氧化物子层和第二金属氧化物子层; 在第一金属氧化物子层上形成栅极绝缘层和覆盖栅极绝缘层的栅极,栅极在基板上的正投影部分覆盖第一金属氧化物子层在基板上的正投影; 对第一金属氧化物子层和第二金属氧化物子层进行导体化,第一金属氧化物子层被栅极覆盖的部分作为沟道区,第二金属氧化物子层形成像素电极; 形成覆盖栅极的层间绝缘层; 在层间绝缘层上形成源漏极以形成薄膜晶体管。 在一些可选的实施例中,在基板上形成公共电极和覆盖公共电极的第一缓冲层进一步包括: 在基板上形成公共电极材料层; 在公共电极材料层上形成第一光刻胶层,并对第一光刻胶层图案化形成第二光刻胶层,第二光刻胶层包括开口; 基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极,公共电极包括第一孔隙。 在一些可选的实施例中, 在基板上形成公共电极材料层之后,在公共电极材料层上形成第一光刻胶层之前,还包括:在公共电极材料层上形成遮光层; 基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极进一步包括: 基于第二光刻胶层对遮光层进行刻蚀形成遮光子层,遮光子层包括第二孔隙; 基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极,第一孔隙在基板上的正投影覆盖第二孔隙在基板上的正投影。 在一些可选的实施例中,第二光刻胶层包括第一区域和第二区域,第二区域的厚度小于第一区域的厚度, 在基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极之后,方法还包括: 对第二光刻胶层进行第一次灰化处理去除第二区域形成第二光刻胶子层; 基于第二光刻胶子层对遮光子层进行湿法刻蚀形成遮光部,遮光部包括第一遮光部,第一遮光部在基板上的正投影覆盖沟道区在基板上的正投影;以及 对第二光刻胶子层进行第二次灰化处理使第二光刻胶子层内缩为在基板上的正投影落在遮光部在基板上的正投影内。 在一些可选的实施例中, 开口设置在第一区域中,并且遮光部还包括第二遮光部,第二遮光部在基板上的正投影位于第一孔隙在基板上的正投影与待形成的像素电极在基板上的正投影之间,或者 开口设置在第一区域与第二区域之间。 在一些可选的实施例中, 第一缓冲层包括第一缓冲子层和形成在第一缓冲子层远离基板一侧的第二缓冲子层,第一缓冲子层的材料为氮化硅,第二缓冲子层的材料为二氧化硅,和/或 在层间绝缘层上形成源漏极以形成薄膜晶体管进一步包括: 在源漏极上形成第二缓冲层,并对第二缓冲层图案化露出像素电极以形成薄膜晶体管, 其中,第二缓冲层包括第三缓冲子层和形成在第三缓冲子层远离基板一侧的第四缓冲子层,第三缓冲子层的材料为二氧化硅,第四缓冲子层的材料为氮化硅。 在一些可选的实施例中,在层间绝缘层上形成源漏极以形成薄膜晶体管进一步包括: 对像素电极进行导体化。 在一些可选的实施例中,金属氧化物层的材料为氧化铟镓锌,公共电极材料层的材料为氧化铟。 本发明第二方面提供一种阵列基板,包括阵列排布的多个子像素和驱动各子像素的薄膜晶体管, 其中,薄膜晶体管的沟道区为金属氧化物,像素电极为导体化的金属氧化物,薄膜晶体管的沟道区与像素电极同层设置。 本发明第三方面提供一种显示面板,包括上文所述的阵列基板。 本发明的有益效果如下: 本发明针对目前现有的问题,制定一种阵列基板及其制作方法、以及显示面板,并通过利用金属氧化物层图案化形成第一金属氧化物子层和第二金属氧化物子层,并对第一金属氧化物子层和第二金属氧化物子层进行导体化将第一金属氧化物子层中被栅极遮挡而未被导体化的部分作为沟道区,将导体化的第二金属氧化层子层作为像素电极,使得通过一层金属氧化物层经过一次图案化形成沟道区和像素电极,简化了工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高了产品的市场竞争力,具有广泛的应用前景。 附图说明 下面结合附图对本发明的具体实施方式作进一步详细的说明。 图1示出根据本发明实施例的阵列基板的制作方法的流程图; 图2-5示出根据本发明实施例的阵列基板的制作方法的流程的剖视图; 图6示出根据本发明实施例的阵列基板的制作方法中形成的公共电极的示意性俯视图;以及 图7-17示出根据本发明实施例的阵列基板的制作方法的流程的剖视图。 具体实施方式 为了更清楚地说明本发明,下面结合实施例和附图对本发明做进一步的说明。附图中相似的部件以相同的附图标记进行表示。本领域技术人员应当理解,下面所具体描述的内容是说明性的而非限制性的,不应以此限制本发明的保护范围。 需要说明的是,本发明中描述的“具有”、“包含”、“包括”等均为开式的含义,即,当描述模块“具有”、“包含”或“包括”第一元件、第二元件和/或第三元件时,表示该模块除了第一元件、第二元件和/或第三元件外还包括其他的元件。另外,本发明中“第一”、“第二”和“第三”等序数词并不旨在限定具体的顺序,而仅在于区分各个部分。 本发明中所述的“在……上”、“在……上形成”和“设置在……上”可以表示一层直接形成或设置在另一层上,也可以表示一层间接形成或设置在另一层上,即两层之间还存在其它的层。 另外,在本发明中,所采用的术语“同层设置”指的是两个层、部件、构件、元件或部分可以通过相同制备工艺(例如构图工艺等)形成,并且,这两个层、部件、构件、元件或部分一般由相同的材料形成。例如两个或更多个功能层同层设置指的是这些同层设置的功能层可以采用相同的材料层并利用相同制备工艺形成,从而可以简化显示基板的制备工艺。 针对以上问题,参照图1所示,本发明的实施例提供一种阵列基板的制作方法,阵列基板包括阵列排布的多个子像素和驱动各子像素的薄膜晶体管,包括: S1、在基板上形成公共电极和覆盖公共电极的第一缓冲层; S2、在第一缓冲层上形成金属氧化物层,并对金属氧化物层进行图案化形成第一金属氧化物子层和第二金属氧化物子层; S3、在第一金属氧化物子层上形成栅极绝缘层和覆盖栅极绝缘层的栅极,栅极在基板上的正投影部分覆盖第一金属氧化物子层在基板上的正投影; S4、对第一金属氧化物子层和第二金属氧化物子层进行导体化,第一金属氧化物子层被栅极覆盖的部分作为沟道区,第二金属氧化物子层形成像素电极; S5、形成覆盖栅极的层间绝缘层; S6、在层间绝缘层上形成源漏极以形成薄膜晶体管。 在本实施例中,通过利用金属氧化物层图案化形成第一金属氧化物子层和第二金属氧化物子层,并对第一金属氧化物子层和第二金属氧化物子层进行导体化将第一金属氧化物子层中被栅极遮挡而未被导体化的部分作为沟道区,将导体化的第二金属氧化层子层作为像素电极,使得通过一层金属氧化物层经过一次图案化形成沟道区和像素电极,简化了工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高了产品的市场竞争力,具有广泛的应用前景。 下面参照图2至图17通过具体的示例详细描述本发明实施例的阵列基板的制作方法。 在步骤S1中,在基板100上形成公共电极101和覆盖公共电极101的第一缓冲层104。 具体地,如图2所示,步骤S11中,在提供的基板100上形成公共电极材料层101-1。例如,基板100可以为玻璃基板,公共电极材料层101-1的材料可以为氧化铟锡(ITO)。当然这仅是示例性的,本发明并不旨在进行限制。 步骤S12中,在公共电极材料层上形成第一光刻胶层,并对第一光刻胶层图案化形成第二光刻胶层,第二光刻胶层包括开口;步骤S13中,基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极,公共电极包括第一孔隙。其中,第二光刻胶层中开口的位置与公共电极中形成的第一孔隙位置对应,即,利用第二光刻胶层中的开口使得形成的公共电极中包括第一孔隙。 考虑到待形成的薄膜晶体管的沟道区的金属氧化物,例如氧化镓铟锌(IGZO)对光线敏感,在本示例中,需要在公共电极上形成遮光部。下面参照图2至图7进一步详细描述在本示例中的具体方法步骤。 具体在本示例中,参照图2所示,在基板上形成公共电极材料层101-1之后,在公共电极材料层101-1上形成遮光层102-1。遮光层102-1的材料可以为不透明的金属,例如,铜(Cu),但不限于此。 如图3所示,在遮光层102-1上形成第一光刻胶层,并对第一光刻胶层图案化形成第二光刻胶层103。第一光刻胶层103的材料可以为有机平坦层光阻(JAS)。如图3所示,第二光刻胶层103包括开口,开口的位置与待形成的像素电极中的第一孔隙位置相对应。此外,在本示例中,第二光刻胶层103还包括第一区域和第二区域,第二区域的厚度小于第一区域的厚度,该第一区域用于后续步骤中形成遮光部。 步骤S13基于第二光刻胶层对公共电极材料层进行刻蚀形成公共电极在本示例中具体包括以下步骤。 步骤S131,在形成第二光刻胶层103后,基于第二光刻胶层103对遮光层102-1进行刻蚀形成遮光子层。较为优选地,刻蚀方法可以采用湿法刻蚀。例如,当遮光层102-1的材料为Cu时,采用刻蚀Cu的有机酸对遮光层102-1进行湿法刻蚀,形成如图4所示的遮光子层102-2。在遮光子层102-2中与第二光刻胶层103的开口对应的位置形成了第二孔隙。 参照图5所示,基于第二光刻胶层103对公共电极材料层101-1进行刻蚀形成公共电极101,公共电极101包括第一孔隙,第一孔隙在基板100上的正投影覆盖第二孔隙在所述基板上的正投影。较为优选地,刻蚀方法可以采用湿法刻蚀。例如,当公共电极材料层101-1的材料为ITO时,采用刻蚀ITO的有机酸对公共电极材料层101-1进行湿法刻蚀形成公共电极101。 本领域技术人员应理解,形成的公共电极与阵列基板中的阵列排布的所有子像素对应的一整块电极,因此称为公共电极。在本发明的实施例中,第一孔隙限定薄膜晶体管的边界区域。第一孔隙将待形成的薄膜晶体管与该子像素的像素电极和像素电极下方的公共电极间隔开,从而降低源漏极与像素电极和对应的公共电极的耦合电容。 公共电极101的示意性俯视图如图6所示,其中,大的虚线框示出像素电极对应区域的边界,小的虚线框示出薄膜晶体管对应区域的边界,小实线框示出公共电极的第一孔隙的边界,小的实线框的实线与小的虚线框的虚线之间为公共电极101的第一孔隙的俯视图示,这样的设计将薄膜晶体管与公共电极不重叠,可以减少公共电极与薄膜晶体管上的栅极和源漏极之间的耦合电容。当然,本领域技术人员应理解,这仅是示意性的,并不旨在限制薄膜晶体管的具体形状和位置,在具体实施例中薄膜晶体管也可以为其他形状,只要能够满足间隔开薄膜晶体管与该子像素的像素电极和像素电极下方的公共电极的功能即可。 因为在本示例中将要形成遮光部,在形成公共电极101后,参照图7所示,对第二光刻胶层103进行第一次灰化处理去除第二区域形成第二光刻胶子层103-1。参照图8所示,基于第二光刻胶子层103-1对遮光子层102-2进行湿法刻蚀形成遮光部102,遮光部102包括第一遮光部,第一遮光部在基板100上的正投影覆盖将要形成的薄膜晶体管的沟道区在基板上的正投影。具体地,当遮光层102-1的材料为Cu时,可以采用刻蚀Cu的有机酸对遮光子层102-2进行湿法刻蚀;刻蚀后可以进行烘烤对第二光刻胶子层103-1进行固化,同时对公共电极进行结晶化,稳定公共电极的结构。 可见,通过对第二光刻胶层103进行灰化处理可以去除第二区域,从而以该第二光刻胶子层103-1所保留的光刻胶为阻挡刻蚀掉需要去除的遮光材料。本领域技术人员可以理解,可以根据湿法刻蚀的侧蚀量和灰化的内缩性质合理设置第二区域的尺寸使得形成的遮光部102可以对待形成的薄膜晶体管的沟道区形成良好的遮光效果。 在本实施例中,通过以第二光刻胶层为遮挡湿法刻蚀遮光层和公共电极材料层形成公共电极,并以第二光刻胶子层为遮挡湿法刻蚀遮光子层形成遮光部,使得仅需要对第一光刻胶层进行一次图案化即可以形成公共电极材料成和遮光部,减少了两块掩模版,简化了工艺步骤。 另外,本示例中,在第二光刻胶层103中,开口设置在第一区域中,形成的遮光部102被分成了两部分,即,遮光部102包括第一遮光部和第二遮光部,第一遮光部与待形成的沟道区对应,第二遮光部在基板100上的正投影位于第一孔隙在基板100上的正投影与待形成的像素电极在基板上的正投影之间。通过该设置,第二遮光部能够降低薄膜晶体管的源漏极与公共电极101之间的耦合电容。本领域技术人员应理解,本发明并不限于此,在不考虑降低耦合电容的情况下,开口也可以设置在第一区域与第二区域之间。 更进一步地,在本示例中,因为湿法刻蚀后的遮光部102小于其上覆盖的第二光刻胶子层103-1,当上大下小时,后续形成的结构层易导致底切断裂问题。因此,参照图9所示,在形成遮光部102后,对第二光刻胶子层103-1进行第二次灰化处理使得第二光刻胶子层内缩为在基板100上的正投影落在遮光部102在基板100上的正投影内,从而避免底切断裂问题。 在本发明的实施例中,不必去除剩余的光刻胶103-3,保留剩余的光刻胶103-3可以进一步降低源漏极与公共电极之间的耦合电容。 之后,参照图10所示,在剩余的光刻胶103-3上形成第一缓冲层104。可选地,第一缓冲层104包括第一缓冲子层和形成在第一缓冲子层远离基板一侧的第二缓冲子层。较为优选地,第一缓冲子层的材料为氮化硅(SiNx),第二缓冲子层的材料为二氧化硅(SiO2),因为SiNx相较于SiO2能更好的阻挡基板中的碱离子,防止其扩散到金属氧化物中对其电学特性产生不良的影响。 接下来,参照图11所示,在步骤S2中,在第一缓冲层104上形成金属氧化物层,并对金属氧化物层进行图案化形成第一金属氧化物子层和第二金属氧化物子层。其中,金属氧化物层的材料可以为IGZO。 在步骤S3中,参照图12所示,在第一金属氧化物子层上形成栅极绝缘层107和覆盖栅极绝缘层的栅极106。具体地,在第一金属氧化物子层上形成栅极绝缘层107,并在栅极绝缘层107上形成栅极106,栅极106覆盖栅极绝缘层107。栅极的材料包括铝、钛、钴等金属或者合金材料。栅绝缘层可以采用氧化硅、氮化硅或者氮氧化硅等无机绝缘材料。其中,栅极106在基板100上的正投影部分覆盖第一金属氧化物子层在基板上的正投影。 在步骤S4中,参照图13所示,对第一金属氧化物子层和第二金属氧化物子层进行导体化,第一金属氧化物子层被栅极覆盖的部分作为沟道区。也就是说,第一金属氧化物子层中被栅极106覆盖的区域未被导体化,仍未半导体,作为沟道区,未被覆盖的区域因没有遮挡而被导体化,作为与源漏极接触的辅助金属;第二金属氧化物子层形成像素电极105。需要说明的是,图13在剖视图中仅示出一个像素电极105和与之对应的待形成的薄膜晶体管部分,图中像素电极105示出多个部分是因为像素电极为镂空图案,剖视图中截取为多个中断的部分,镂空图案可以为鱼鳞形、马字形等,本申请不作具体限制。 在步骤S5中,参照图14所示,形成覆盖栅极106的层间绝缘层108,层间绝缘层108可以采用氧化硅、氮化硅或者氮氧化硅等无机绝缘材料,制备方法可以为通过沉积在栅极上形成层间绝缘层材料层,并对其进行图案化露出第一金属氧化物子层中与辅助金属对应的区域。 在步骤S6中,参照图14所示,在所述层间绝缘层108上形成源漏极109以形成薄膜晶体管。源漏极109的材料可以Ag、Al、Mo等金属或其合金中的一种,当然本发明并不旨在进行限制。 可选地,参照图15所示,在形成源漏极109以形成薄膜晶体管的步骤中,还可以包括在形成的源漏极109上形成第二缓冲层110,并对第二缓冲层图案化露出像素电极105以形成薄膜晶体管。其中,第二缓冲层110包括第三缓冲子层和形成在第三缓冲子层远离基板一侧的第四缓冲子层,第三缓冲子层的材料为SiO2,第四缓冲子层的材料为SiNx。因为SiNx相较于SiO2具有更有的阻水性,相对于SiO2设置在顶层可以阻挡外部水汽对器件的侵蚀,保证薄膜晶体管的性能。 需要说明的是,本领域技术人员应理解,参照图16所示,若在形成第二缓冲层时未图案化层间绝缘层露出像素电极105,则在对第二缓冲层图案化露出像素电极105以形成薄膜晶体管的步骤中也隐含包括了图案化对层间绝缘层一并图案化从而露出像素电极105的细化步骤,在此不再赘述。 进一步可选地,参照图17所示,在层间绝缘层108上形成源漏极以形成薄膜晶体管进一步包括:对像素电极105进行导体化,也就是对像素电极105进行二次导体化,二次导体化后的像素电极105-2能够具有进一步提升的透过率,同时可以进一步降低电阻率,具有更优良的金属特性。 在本发明的实施例中,通过以同一层金属氧化物材料形成第一金属氧化物子层和第二氧化物子层的金属氧化物子层,并在第一金属氧化物子层上形成栅极,以栅极为阻挡对第一金属氧化物子层和第二金属氧化物子层进行导体化,从而形成沟道区和像素电极。在本发明中,仅需要图案化一次,即可以形成沟道区和像素电极,减少了掩模版图案化工序,简化了工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高了产品的市场竞争力,具有广泛的应用前景。 此外,在通过以第二光刻胶层为阻挡,以逐步湿法刻蚀的方式形成公共电极,并在需要时利用灰化处理和湿法刻蚀形式遮光部,进一步减少了掩模版的数量。对于需要形成遮光部的示例来说,相较于现有技术中采用干法刻蚀的方法,可以减少两个掩模版。从而进一步简化了工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高产品的市场竞争力。 相应于阵列基板的制作方法,本发明的实施例还提供了一种阵列基板,该阵列基板由以上制作方法制作而成,阵列基板包括阵列排布的多个子像素和驱动各子像素的薄膜晶体管,其中,薄膜晶体管的沟道区为金属氧化物,像素电极为导体化的金属氧化物,薄膜晶体管的沟道区与像素电极同层设置。 在本实施例中,通过以金属氧化物形成的薄膜晶体管的沟道区和以导体化的金属氧化物形成的像素电极,并且薄膜晶体管的沟道区与像素电极同层设置,该结构使得可以减少掩模版的数量,简化工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高产品的市场竞争力,具有广泛的应用前景。 相应于阵列基板,本发明的实施例还提供一种显示面板,包括上文所述的阵列基板。 由于本申请实施例提供的显示面板中包括的阵列基板与上述几种实施例提供的阵列基板相对应,因此在前实施方式也适用于本实施例,在本实施例中不再详细描述。 在本实施例中,显示面板可以应用于手机、平板电脑、电视机、显示器、笔记本电脑、车载显示器、数码相框或导航仪等任何具有显示功能的产品或部件,通过加载显示面板,使得显示装置可以降低生产成本,具有更强的市场竞争力。 本发明针对目前现有的问题,制定一种阵列基板及其制作方法、以及显示面板,并通过利用金属氧化物层图案化形成第一金属氧化物子层和第二金属氧化物子层,并对第一金属氧化物子层和第二金属氧化物子层进行导体化将第一金属氧化物子层中被栅极遮挡而未被导体化的部分作为沟道区,将导体化的第二金属氧化层子层作为像素电极,使得通过一层金属氧化物层经过一次图案化形成沟道区和像素电极,简化了工艺步骤,降低了工艺复杂度,从而降低了生产成本,提高了产品的市场竞争力,具有广泛的应用前景。 显然,本发明的上述实施例仅仅是为清楚地说明本发明所作的举例,而并非是对本发明的实施方式的限定,对于本领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动,这里无法对所有的实施方式予以穷举,凡是属于本发明的技术方案所引伸出的显而易见的变化或变动仍处于本发明的保护范围之列。