Mycotoxin detection device based on magnetostrictive biosensing and detection method thereof

文档序号:1887629 发布日期:2021-11-26 浏览:21次 中文

阅读说明:本技术 基于磁致伸缩生物传感的真菌毒素检测装置及其检测方法 (Mycotoxin detection device based on magnetostrictive biosensing and detection method thereof ) 是由 赵志科 吴才章 胡良 卫黄河 黄文昊 于 2021-08-13 设计创作,主要内容包括:基于磁致伸缩生物传感的真菌毒素检测装置,包括待检测液体密封容器、蠕动泵、微控制系统、上位机、级联式真菌毒素测试容器和废液收集器,待检测液体密封容器内存放未知真菌毒素液体或已知真菌毒素液体,级联式真菌毒素测试容器内设置有若干个左右间隔的测试腔,待检测液体密封容器、蠕动泵、各个测试腔和废液收集器通过导管和双向直通变径快插接头依次串联连接,各个测试腔内均设置有磁致伸缩传感器,微控制系统分别与蠕动泵、上位机和各个磁致伸缩传感器信号连接。本发明设计科学,利用抗原抗体特异性结合的专一性,建立在相同条件下真菌毒素类型/浓度与磁致伸缩微悬臂梁谐振频率信号偏移值之间的对应关系,实现对多种真菌毒素浓度的同时检测。(The mycotoxin detection device based on magnetostrictive biosensing comprises a liquid sealed container to be detected, a peristaltic pump, a micro control system, an upper computer, a cascade type mycotoxin test container and a waste liquid collector, wherein unknown mycotoxin liquid or known mycotoxin liquid is stored in the liquid sealed container to be detected, a plurality of test cavities which are spaced left and right are arranged in the cascade type mycotoxin test container, the liquid sealed container to be detected, the peristaltic pump, each test cavity and the waste liquid collector are sequentially connected in series through a conduit and a bidirectional straight-through reducing quick-plug connector, each test cavity is internally provided with a magnetostrictive sensor, and the micro control system is respectively in signal connection with the peristaltic pump, the upper computer and each magnetostrictive sensor. The invention has scientific design, establishes the corresponding relation between the type/concentration of mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever under the same condition by utilizing the specificity of antigen-antibody specific binding, and realizes the simultaneous detection of various mycotoxin concentrations.)

1. Mycotoxin detection device based on magnetostrictive biosensing, which is characterized in that: the device comprises a liquid sealed container to be detected, a peristaltic pump, a micro-control system, an upper computer, a cascade type mycotoxin test container and a waste liquid collector, wherein unknown mycotoxin liquid or known mycotoxin liquid is stored in the liquid sealed container to be detected, a liquid injector with a one-way valve is arranged at the top of the liquid sealed container to be detected, a plurality of test cavities which are spaced left and right are arranged in the cascade type mycotoxin test container, the liquid sealed container to be detected, the peristaltic pump, each test cavity and the waste liquid collector are sequentially connected in series through a conduit and a bidirectional straight-through reducing quick plug connector, a flow stopping valve is arranged on the conduit connected with the waste liquid collector, a magnetostrictive sensor is arranged in each test cavity, and the micro-control system is respectively in signal connection with the peristaltic pump, the upper computer and each magnetostrictive sensor.

2. The magnetostrictive biosensing-based mycotoxin detection device as defined in claim 1, wherein: the micro control system comprises a microcontroller, keys, a display screen, a function generator and a signal power amplifier, wherein the microcontroller is respectively in signal connection with the upper computer, the peristaltic pump, each magnetostrictive sensor, the keys, the display screen, the function generator and the signal power amplifier.

3. The magnetostrictive biosensing-based mycotoxin detection device as defined in claim 2, wherein: the cascaded mycotoxin test container comprises a glass wafer, and the test cavities which are spaced left and right are processed on the glass wafer through a microfluidic processing method.

4. The magnetostrictive biosensing-based mycotoxin detection device as defined in claim 3, wherein: the magnetostrictive sensor comprises a magnetostrictive micro-cantilever beam, a planar excitation coil and a planar induction coil, wherein the magnetostrictive micro-cantilever beam is fixedly arranged in one test cavity, a magnetostrictive film is arranged on the magnetostrictive micro-cantilever beam, a specific toxin antibody is coated on the surface of the magnetostrictive film, the planar excitation coil and the planar induction coil are respectively and fixedly connected to glass wafers on the front side and the rear side of the test cavity, a signal power amplifier is in signal connection with the planar excitation coil, the planar excitation coil is in signal connection with the magnetostrictive film, the magnetostrictive film is in signal connection with the planar induction coil, and the planar induction coil is in signal connection with a microcontroller through a resonance detection circuit.

5. The method of claim 4, wherein the step of detecting the mycotoxin detection device based on magnetostrictive biosensing comprises the steps of: the method specifically comprises the following steps:

determining the optimal resonance frequency of the magnetostrictive micro-cantilever, establishing a corresponding relation between the type/concentration of mycotoxin and the signal deviation value of the resonance frequency of the magnetostrictive micro-cantilever under the same condition, and establishing standards for detecting mycotoxins of different types/concentrations;

secondly, configuring the number of cascaded mycotoxin test containers and magnetostrictive sensors according to the requirement on specific mycotoxin detection, injecting liquid (containing a plurality of mycotoxins) to be detected into each test cavity through a peristaltic pump under the drive of a control instruction of a microcontroller, recording the resonant frequency value of each magnetostrictive micro-cantilever by the microcontroller after 30min, and judging that the liquid to be detected contains corresponding mycotoxins if the resonant frequency of the magnetostrictive micro-cantilever in a certain test cavity deviates; according to the concentration of the corresponding relation between the type/concentration of the mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever beam, which is established in advance, the corresponding mycotoxin concentration in the liquid to be detected is determined, and the concentration of various mycotoxins is detected at the same time;

and thirdly, recording the detected resonance signal data in real time through the microcontroller and transmitting the recorded data to an upper computer, and printing the recorded data on a portable computer to form a detection report.

6. The method of claim 5, wherein the step of detecting the mycotoxin detection device based on magnetostrictive biosensing comprises the steps of: the step (one) is specifically as follows: injecting specific liquid (without mycotoxin) into a liquid sealed container to be detected through a liquid injector, closing a flow stopping valve, starting a peristaltic pump, controlling the peristaltic pump by a microcontroller to inject the specific liquid into each test cavity, closing the peristaltic pump, adjusting and determining the signal type, the excitation frequency and the power of a power amplifier of a function generator according to an optimal resonance frequency algorithm obtained in the microcontroller to realize system parameter calibration, sending a control command of the microcontroller through a key or an upper computer, controlling the function generator by the microcontroller to generate an alternating excitation signal, applying the alternating excitation signal to a planar excitation coil after passing through a signal power amplifier, generating an alternating magnetic field by the planar excitation coil, generating periodic deformation in the alternating magnetic field by a magnetostrictive film coated with a specific toxin antibody, forcing vibration of a magnetostrictive micro cantilever beam, and when the frequency of the alternating magnetic field is equal to the resonant frequency of the magnetostrictive film, the deformation of the magnetostrictive film is maximum, the magnetostrictive micro-cantilever beams generate resonance, resonance signals of the magnetostrictive micro-cantilever beams are transmitted to the plane induction coil, the plane induction coil transmits the resonance signals to the microcontroller through the resonance detection circuit, the microcontroller processes the resonance signals to obtain the resonance frequency of the magnetostrictive micro-cantilever beams, the optimal resonance frequency of the magnetostrictive micro-cantilever beams is determined, the optimal resonance frequency is displayed on a display screen, the stop valve is opened, specific liquid in each test cavity flows into the waste liquid collector, on the basis, standard reagents with different types/concentrations of mycotoxin are respectively injected into each test cavity through the peristaltic pump, the deviation values of the resonance frequency signals of the magnetostrictive micro-cantilever beams are respectively measured, and the corresponding relation between the type/concentration of the mycotoxin and the deviation value of the resonance frequency signals of the magnetostrictive micro-cantilever beams under the same condition is established, establishing standards for detecting mycotoxins with different types/concentrations, discharging the liquid to be detected into a waste liquid collector after the detection is finished, and cleaning the liquid sealed container to be detected and each test cavity by using clear water.

Technical Field

The invention relates to the technical field of mycotoxin detection, in particular to a device and a method for detecting mycotoxin based on magnetostrictive biosensing.

Background

During the storage of the grains, the grains are easy to mildew due to various bacteria, mold and other microbes carried in the grains and the grain storage environment, and the microbes are metabolized to generate various mycotoxins with extremely strong toxicity and carcinogenicity, so that the storage safety of the grains is greatly damaged. The direct loss of the food pollution caused by the mycotoxin is over 680 billion yuan every year, and the reason is that the mycotoxin pollution of stored food cannot be found in time. Although the existing mycotoxin detection device and method can obtain high mycotoxin detection precision, the existing mycotoxin detection device and method generally needs large-scale instruments and professionals, is complex in detection process, long in detection time, large in standard reagent consumption, high in single detection cost and difficult to meet the requirement for on-site rapid detection of grain depots. Therefore, a new detection theory and method which have low cost and high precision and are suitable for the requirement of rapid detection of the mycotoxin in the grain depot site are urgently needed to be researched.

Disclosure of Invention

The invention aims to provide a mycotoxin detection device based on magnetostrictive biosensing and a detection method thereof.

In order to achieve the purpose, the invention adopts the following technical scheme:

a mycotoxin detection device based on magnetostrictive biosensing comprises a liquid sealed container to be detected, a peristaltic pump, a micro-control system and an upper computer, the device comprises a cascade type mycotoxin test container and a waste liquid collector, unknown mycotoxin liquid or known mycotoxin liquid is stored in the liquid sealed container to be tested, a liquid injector with a one-way valve is arranged at the top of the liquid sealed container to be tested, a plurality of test cavities which are spaced left and right are arranged in the cascade type mycotoxin test container, the liquid sealed container to be tested, a peristaltic pump, each test cavity and the waste liquid collector are sequentially connected in series through a guide pipe and a bidirectional straight-through reducing quick-insertion connector, a stop valve is arranged on the guide pipe connected with the waste liquid collector, each test cavity is internally provided with a magnetostrictive sensor, and a micro-control system is respectively in signal connection with the peristaltic pump, an upper computer and each magnetostrictive sensor.

The micro control system comprises a microcontroller, keys, a display screen, a function generator and a signal power amplifier, wherein the microcontroller is respectively in signal connection with the upper computer, the peristaltic pump, each magnetostrictive sensor, the keys, the display screen, the function generator and the signal power amplifier.

The cascaded mycotoxin test container comprises a glass wafer, and the test cavities which are spaced left and right are processed on the glass wafer through a microfluidic processing method.

The magnetostrictive sensor comprises a magnetostrictive micro-cantilever beam, a planar excitation coil and a planar induction coil, wherein the magnetostrictive micro-cantilever beam is fixedly arranged in one test cavity, a magnetostrictive film is arranged on the magnetostrictive micro-cantilever beam, a specific toxin antibody is coated on the surface of the magnetostrictive film, the planar excitation coil and the planar induction coil are respectively and fixedly connected to glass wafers on the front side and the rear side of the test cavity, a signal power amplifier is in signal connection with the planar excitation coil, the planar excitation coil is in signal connection with the magnetostrictive film, the magnetostrictive film is in signal connection with the planar induction coil, and the planar induction coil is in signal connection with a microcontroller through a resonance detection circuit.

The detection method of the mycotoxin detection device based on magnetostrictive biosensing specifically comprises the following steps:

determining the optimal resonance frequency of the magnetostrictive micro-cantilever, establishing a corresponding relation between the type/concentration of mycotoxin and the signal deviation value of the resonance frequency of the magnetostrictive micro-cantilever under the same condition, and establishing standards for detecting mycotoxins of different types/concentrations;

secondly, configuring the number of cascaded mycotoxin test containers and magnetostrictive sensors according to the requirement on specific mycotoxin detection, injecting liquid (containing a plurality of mycotoxins) to be detected into each test cavity through a peristaltic pump under the drive of a control instruction of a microcontroller, recording the resonant frequency value of each magnetostrictive micro-cantilever by the microcontroller after 30min, and judging that the liquid to be detected contains corresponding mycotoxins if the resonant frequency of the magnetostrictive micro-cantilever in a certain test cavity deviates; determining the corresponding mycotoxin concentration in the liquid to be detected according to the corresponding relation between the type/concentration of mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever, which is established in advance, so as to realize the simultaneous detection of various mycotoxin concentrations;

and thirdly, recording the detected resonance signal data in real time through the microcontroller and transmitting the recorded data to an upper computer, and printing the recorded data on a portable computer to form a detection report.

The step (one) is specifically as follows: injecting specific liquid (without mycotoxin) into a liquid sealed container to be detected through a liquid injector, closing a flow stopping valve, starting a peristaltic pump, controlling the peristaltic pump by a microcontroller to inject the specific liquid into each test cavity, closing the peristaltic pump, adjusting and determining the signal type, the excitation frequency and the power of a power amplifier of a function generator according to an optimal resonance frequency algorithm obtained in the microcontroller to realize system parameter calibration, sending a control command of the microcontroller through a key or an upper computer, controlling the function generator by the microcontroller to generate an alternating excitation signal, applying the alternating excitation signal to a planar excitation coil after passing through a signal power amplifier, generating an alternating magnetic field by the planar excitation coil, generating periodic deformation in the alternating magnetic field by a magnetostrictive film coated with a specific toxin antibody, forcing vibration of a magnetostrictive micro cantilever beam, and when the frequency of the alternating magnetic field is equal to the resonant frequency of the magnetostrictive film, the deformation of the magnetostrictive film is maximum, the magnetostrictive micro-cantilever beams generate resonance, resonance signals of the magnetostrictive micro-cantilever beams are transmitted to the plane induction coil, the plane induction coil transmits the resonance signals to the microcontroller through the resonance detection circuit, the microcontroller processes the resonance signals to obtain the resonance frequency of the magnetostrictive micro-cantilever beams, the optimal resonance frequency of the magnetostrictive micro-cantilever beams is determined, the optimal resonance frequency is displayed on a display screen, the stop valve is opened, specific liquid in each test cavity flows into the waste liquid collector, on the basis, standard reagents with different types/concentrations of mycotoxin are respectively injected into each test cavity through the peristaltic pump, the deviation values of the resonance frequency signals of the magnetostrictive micro-cantilever beams are respectively measured, and the corresponding relation between the type/concentration of the mycotoxin and the deviation value of the resonance frequency signals of the magnetostrictive micro-cantilever beams under the same condition is established, establishing standards for detecting mycotoxins with different types/concentrations, discharging the liquid to be detected into a waste liquid collector after the detection is finished, and cleaning the liquid sealed container to be detected and each test cavity by using clear water.

Compared with the prior art, the invention has outstanding substantive characteristics and remarkable progress, and particularly, the invention utilizes the specificity of antigen-antibody specific binding to arrange a plurality of test cavities, a magnetostrictive sensor is arranged in each test cavity, a magnetostrictive film is arranged on a magnetostrictive micro-cantilever of the magnetostrictive sensor, the surface of the magnetostrictive film is coated with a specific toxin antibody, firstly, the optimal resonance frequency of the magnetostrictive micro-cantilever is determined, the corresponding relation between the type/concentration of mycotoxin and the signal deviation value of the resonance frequency of the magnetostrictive micro-cantilever under the same condition is established, the standard of mycotoxin detection of different types/concentrations is established, liquid (containing a plurality of mycotoxins) to be detected is injected into each test cavity through a peristaltic pump, and after 30min, a microcontroller records the resonance frequency value of each magnetostrictive micro-cantilever, if the resonant frequency of the magnetostrictive micro-cantilever beam in a certain test cavity deviates, judging that the liquid to be detected contains corresponding mycotoxin; and determining the corresponding mycotoxin concentration in the liquid to be detected according to the corresponding relation between the type/concentration of the mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever, which is established in advance, so as to realize the simultaneous detection of various mycotoxin concentrations.

The invention has scientific design, establishes the corresponding relation between the type/concentration of mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever under the same condition by utilizing the specificity of antigen-antibody specific binding, and realizes the simultaneous detection of various mycotoxin concentrations.

Drawings

Fig. 1 is a schematic view of the overall device structure of the present invention.

Fig. 2 is a control block diagram of each component of the present invention.

FIG. 3 is a block diagram of the working principle of the simultaneous detection of aflatoxin B1, zearalenone, ochratoxin, fumonisin and deoxynivalenol in the present invention.

Detailed Description

The embodiments of the present invention are further described below with reference to the drawings.

As shown in fig. 1-3, the mycotoxin detecting device based on magnetostrictive biosensing comprises a liquid sealed container 1 to be detected, a peristaltic pump 2, a micro control system 3, an upper computer 4, a cascade type mycotoxin testing container 5 and a waste liquid collector 6, wherein unknown mycotoxin liquid or known mycotoxin liquid is stored in the liquid sealed container 1 to be detected, a liquid injector 7 with a one-way valve is arranged at the top of the liquid sealed container 1 to be detected, a plurality of testing cavities 8 which are spaced left and right are arranged in the cascade type mycotoxin testing container 5, the liquid sealed container 1 to be detected, the peristaltic pump 2, each testing cavity 8 and the waste liquid collector 6 are sequentially connected in series through a guide pipe 9 and a bidirectional straight-through reducing quick-plug connector 10, a stop valve 11 is arranged on the guide pipe 9 connected with the waste liquid collector 6, and a magnetostrictive sensor is arranged in each testing cavity 8, the micro control system 3 is respectively connected with the peristaltic pump 2, the upper computer 4 and each magnetostrictive sensor through signals.

The micro-control system 3 comprises a micro-controller 12, keys 13, a display screen 14, a function generator 15 and a signal power amplifier 16, wherein the micro-controller 12 is in signal connection with the upper computer 4, the peristaltic pump 2, each magnetostrictive sensor, the keys 13, the display screen 14, the function generator 15 and the signal power amplifier 16 respectively.

The cascaded mycotoxin test containers 5 comprise glass wafers on which the test chambers 8, which are spaced left and right, are machined by a microfluidic machining method.

The magnetostrictive sensor comprises a magnetostrictive micro-cantilever beam 17, a planar excitation coil 18 and a planar induction coil 19, wherein the magnetostrictive micro-cantilever beam 17 is fixedly arranged in one test cavity 8, a magnetostrictive film is arranged on the magnetostrictive micro-cantilever beam 17, a specific toxin antibody is coated on the surface of the magnetostrictive film, the planar excitation coil 18 and the planar induction coil 19 are respectively and fixedly connected to glass wafers on the front side and the rear side of the test cavity 8, a signal power amplifier 16 is in signal connection with the planar excitation coil 18, the planar excitation coil 18 is in signal connection with the magnetostrictive film, the magnetostrictive film is in signal connection with the planar induction coil 19, and the planar induction coil 19 is in signal connection with a microcontroller 12 through a resonance detection circuit 20.

The detection method of the mycotoxin detection device based on magnetostrictive biosensing specifically comprises the following steps:

firstly, determining the optimal resonance frequency of the magnetostrictive micro-cantilever 17, establishing the corresponding relation between the type/concentration of mycotoxin and the signal deviation value of the resonance frequency of the magnetostrictive micro-cantilever 17 under the same condition, and establishing the standard for detecting mycotoxin with different types/concentrations;

secondly, configuring the number of cascaded mycotoxin test containers 5 and magnetostrictive sensors according to the requirement on specific mycotoxin detection, injecting liquid (containing various mycotoxins) to be detected into each test cavity 8 through a peristaltic pump 2 under the drive of a control instruction of a microcontroller 12, recording the resonant frequency value of each magnetostrictive micro-cantilever beam 17 by the microcontroller 12 after 30min, and judging that the liquid to be detected contains corresponding mycotoxins if the resonant frequency of the magnetostrictive micro-cantilever beam 17 in a certain test cavity 8 deviates; according to the pre-established corresponding relation between the type/concentration of the mycotoxin and the deviation value of the resonant frequency signal of the magnetostrictive micro-cantilever beam 17, determining the corresponding concentration of the mycotoxin in the liquid to be detected, and realizing the simultaneous detection of the concentrations of various mycotoxins;

thirdly, the detected resonance signal data is recorded in real time and transmitted to the upper computer 4 through the microcontroller 12, and a detection report is formed by printing on the portable computer.

The step (one) is specifically as follows: injecting specific liquid (without mycotoxin) into a liquid sealed container 1 to be detected through a liquid injector 7, closing a check valve 11, starting a peristaltic pump 2, controlling the peristaltic pump 2 by a microcontroller 12 to inject the specific liquid into each test cavity 8, closing the peristaltic pump 2, adjusting and determining the signal type, the excitation frequency and the power of a power amplifier of a function generator 15 according to an optimal resonance frequency algorithm obtained in the microcontroller 12 to realize system parameter calibration, sending a control command of the microcontroller 12 through a key 13 or an upper computer 4, controlling the function generator 15 by the microcontroller 12 to generate an alternating excitation signal, applying the alternating excitation signal to a planar excitation coil 18 after passing through a signal power amplifier 16, generating an alternating magnetic field by the planar excitation coil 18, generating periodic deformation in the alternating magnetic field by a magnetostrictive film coated with specific toxin antibodies, and forcing vibration of a magnetostrictive micro cantilever beam 17, when the alternating magnetic field frequency is equal to the resonance frequency of the magnetostrictive film, the deformation amount of the magnetostrictive film is the largest, the magnetostrictive micro-cantilever beam 17 generates resonance, a resonance signal of the magnetostrictive micro-cantilever beam 17 is transmitted to the plane induction coil 19, the plane induction coil 19 transmits the resonance signal to the microcontroller 12 through the resonance detection circuit 20, the microcontroller 12 processes the resonance signal to obtain the resonance frequency of the magnetostrictive micro-cantilever beam 17, thus the optimal resonance frequency of the magnetostrictive micro-cantilever beam 17 is determined and displayed on the display screen 14, the flow stop valve 11 is opened to enable specific liquid in each test cavity 8 to flow into the waste liquid collector 6, on the basis, standard reagents with different types/concentrations of mycotoxin are respectively injected into each test cavity 8 through the peristaltic pump 2, and the deviation value of the resonance frequency signal of the magnetostrictive micro-cantilever beam 17 is respectively measured, establishing a corresponding relation between the type/concentration of mycotoxin and a resonance frequency signal deviant of the magnetostrictive micro-cantilever beam 17 under the same condition, establishing standards for detecting mycotoxins of different types/concentrations, discharging the tested liquid into a waste liquid collector 6 after the test is finished, and cleaning the liquid sealed container 1 to be detected and each test cavity 8 by using clean water.

Taking aflatoxin B1, zearalenone, ochratoxin, fumonisin and deoxynivalenol for simultaneous detection as an example, five test chambers 8 are arranged, magnetostrictive films on magnetostrictive micro cantilevers 17 in the five test chambers 8 are respectively coated with aflatoxin B1 antibody, zearalenone antibody, ochratoxin antibody, fumonisin antibody and deoxynivalenol antibody, five liquids containing aflatoxin B1, zearalenone, ochratoxin, fumonisin and deoxynivalenol are mixed and stirred and then injected into a liquid sealed container 1 to be detected through a liquid injector 7, mixed solutions of the five liquids are sequentially conveyed into the five test chambers 8 at intervals through a peristaltic pump 2, after 30min, the microcontroller 12 records the resonant frequency value of each magnetostrictive micro cantilever 17, when the resonant frequency of the magnetostrictive micro-cantilever beam 17 in the corresponding test cavity 8 shifts, the concentration of the five mycotoxins can be detected simultaneously by comparing the detection standards of different types/concentrations of mycotoxins.

Due to the specificity of the specific binding of the antigen and the antibody, the liquid to be detected does not have mutual coupling interference when flowing through each magnetostrictive micro-cantilever beam 17, so that the simultaneous detection of various mycotoxins can be realized, and the field detection efficiency is improved.

The coating of the specific toxin antibody on the surface of the magnetostrictive film is realized by adopting a covalent fixation method, which is favorable for improving the binding force between the mycotoxin antibody and the surface of the magnetostrictive film, realizing ordered fixation and ensuring that all antibodies have immunological activity, and in order to prevent the nonspecific binding of mycotoxin, bovine serum albumin is fixed on the surface of the magnetostrictive film to be used as a blocking agent;

the magnetostrictive film is prepared by selecting a material with a magnetostrictive function, and the preparation process of the magnetostrictive film comprises the following steps: firstly, polishing by fine sand paper to enable the magnetostrictive diaphragm to reach a specific thickness; processing the material into a preset size by adopting a micro cutting saw; thirdly, ultrasonically cleaning the magnetostrictive diaphragm by pure methanol for 30 minutes to remove grease or debris possibly generated by processing on the surface of the magnetostrictive diaphragm; fourthly, drying by adopting nitrogen; performing magnetron sputtering on the magnetostrictive diaphragm by using a high-vacuum magnetron sputtering coating machine to coat a Gr layer with the thickness of 20nm on the surface of the magnetostrictive diaphragm; sixthly, plating an Au layer with the thickness of 20nm on the basis of the Gr layer by adopting a magnetron sputtering method; seventhly, repeatedly, ensuring that the surface of the magnetostrictive film is coated with a Gr layer and an Au layer.

The above embodiments are merely to illustrate rather than to limit the technical solutions of the present invention, and although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that; modifications and equivalents may be made thereto without departing from the spirit and scope of the invention and it is intended to cover in the claims the invention as defined in the appended claims.

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