阅读说明：本技术 用于对准光学元件的致动器装置和方法、光学组装件和投射曝光设备 (Actuator device and method for aligning an optical element, optical assembly and projection exposure apparatus ) 是由 B.普尼尼 于 2020-01-24 设计创作，主要内容包括：本发明涉及一种用于对准投射曝光设备(100、200、400)的光学元件(2)的致动器装置(3),致动器装置(3)包括轴(9),轴(9)的第一端部分(9.1)通过接合件(10)在载体结构(5)的基点(11)可偏转地悬置且其第二端部分(9.2)固定到光学元件(2)。提供至少一个致动器单元(7),其具有固定到轴(9)的平移器(12)和出于达到向轴(9)施加偏转力(F-(A))的目的而机械连接到载体结构(5)的定子(13)以便使轴(9)从中间位置(M)径向偏转。另外,提供补偿装置(16),其配置成独立于偏转力(F-(A))向轴(9)施加补偿力(F-(K)),补偿力(F-(k))取决于轴(9)从中间位置(M)的偏转而增加,补偿力抵消由光学元件(2)的重量(F-(G))引起的、在中间位置(M)的方向上作用在轴(9)上的恢复力(F-(R))。(The invention relates to an actuator device (3) for aligning an optical element (2) of a projection exposure apparatus (100, 200, 400), the actuator device (3) comprising a shaft (9), a first end portion (9.1) of the shaft (9) being deflectably suspended at a base point (11) of a carrier structure (5) by means of a joint (10) and a second end portion (9.2) thereof being fixed to the optical element (2). At least one actuator unit (7) is provided, having a translator (12) fixed to the shaft (9) and a drive shaftTo achieve the application of a deflecting force (F) to the shaft (9) A ) Is mechanically connected to the stator (13) of the carrier structure (5) in order to radially deflect the shaft (9) from the intermediate position (M). In addition, a compensation device (16) is provided, which is configured to be independent of the deflection force (F) A ) Applying a compensating force (F) to the shaft (9) K ) Compensating force (F) k ) The compensation force is increased depending on the deflection of the shaft (9) from the middle position (M) and is counteracted by the weight (F) of the optical element (2) G ) Induced restoring force (F) acting on the shaft (9) in the direction of the intermediate position (M) R )。)