阅读说明：本技术 真空抽气系统 (Vacuum pumping system ) 是由 李想松 于 2021-09-28 设计创作，主要内容包括：本发明公开了一种真空抽气系统,包括罗茨真空泵、滑阀真空泵和变频器,所述罗茨真空泵具有进气口和出气口,所述滑阀真空泵借助第一真空管与所述罗茨真空泵的出气口连通,所述变频器与所述罗茨真空泵相连接,所述变频器用于控制所述罗茨真空泵中电机的转速由低转速向高转速转变且呈阶段性速率增加。通过变频器来控制罗茨真空泵中电机的转速,以给滑阀真空泵缓冲时间达到其预设压强,避免不稳定及负压过大的影响,且该真空抽气系统能增加抽速,缩短抽气时间,提高抽真空的速率及稳定性。(The invention discloses a vacuum pumping system which comprises a roots vacuum pump, a slide valve vacuum pump and a frequency converter, wherein the roots vacuum pump is provided with an air inlet and an air outlet, the slide valve vacuum pump is communicated with the air outlet of the roots vacuum pump by virtue of a first vacuum tube, the frequency converter is connected with the roots vacuum pump, and the frequency converter is used for controlling the rotation speed of a motor in the roots vacuum pump to be converted from low rotation speed to high rotation speed and to be increased in a staged rate. The rotating speed of the motor in the Roots vacuum pump is controlled through the frequency converter, so that the buffering time of the slide valve vacuum pump reaches the preset pressure, the unstable and overlarge negative pressure influence is avoided, the vacuum pumping system can increase the pumping speed, shorten the pumping time and improve the speed and stability of the pumping.)

1. A vacuum pumping system, comprising:

the roots vacuum pump is provided with an air inlet and an air outlet;

the slide valve vacuum pump is communicated with an air outlet of the Roots vacuum pump by virtue of a first vacuum pipe;

and the frequency converter is connected with the Roots vacuum pump and is used for controlling the rotation speed of a motor in the Roots vacuum pump to be changed from a low rotation speed to a high rotation speed and to be increased in a staged rate manner.

2. A vacuum pumping system as defined in claim 1, further comprising a bypass valve provided to the roots vacuum pump.

3. The vacuum pumping system of claim 1, wherein the low speed is 500-1000 rpm.

4. The vacuum pumping system of claim 1, wherein the high speed is 2000-3000 rpm.

5. A vacuum pumping system according to claim 1, wherein the increase rate is 100 rpm.

6. A vacuum pumping system as defined in claim 1, further comprising a second vacuum tube in communication with the inlet of the roots vacuum pump, the second vacuum tube being provided with a first valve.

7. A vacuum pumping system as claimed in claim 1, wherein the first vacuum tube is provided with a second valve.

Technical Field

The invention relates to the field of vacuum pumping, in particular to a vacuum pumping system.

Background

The coated glass generally adopts a magnetron sputtering coating production line to carry out, the magnetron sputtering coating technology needs to be carried out under the vacuum condition, in the process, a vacuum pumping system needs to be utilized to carry out vacuum pumping treatment on a vacuum coating cavity in magnetron sputtering coating equipment, a slide valve vacuum pump and a Roots vacuum pump are generally adopted to carry out vacuum pumping treatment on the vacuum coating cavity, but in order to avoid the influence of large negative pressure and motor overload on the slide valve vacuum pump caused by the fast vacuum pumping speed of the Roots vacuum pump, the slide valve vacuum pump is generally started to work for a period of time to reach preset pressure intensity, and then the Roots vacuum pump is started to work, so that the vacuum pumping time is delayed, the efficiency is low, and the process is unstable.

Therefore, it is desirable to provide a vacuum pumping system to solve the above-mentioned drawbacks.

Disclosure of Invention

The invention aims to provide a vacuum pumping system capable of improving the speed and stability of vacuum pumping.

In order to achieve the above object, the present invention discloses a vacuum pumping system comprising:

the roots vacuum pump is provided with an air inlet and an air outlet;

the slide valve vacuum pump is communicated with an air outlet of the Roots vacuum pump by virtue of a first vacuum tube;

the frequency converter is connected with the roots vacuum pump and is used for controlling the rotating speed of a motor in the roots vacuum pump to be changed from a low rotating speed to a high rotating speed and to be increased in stages.

Compared with the prior art, among the vacuum pumping system of this application, with the air inlet of roots vacuum pump and the vacuum coating chamber intercommunication among the magnetron sputtering coating equipment, when needs carry out the vacuum and bleed, start sliding valve vacuum pump and roots vacuum pump, converter control roots vacuum pump is in the low rotational speed stage, thereby avoid the faster vacuum pumping speed of roots vacuum pump to make sliding valve vacuum pump receive the big and motor overload's of negative pressure influence, along with the going on of work, the rotational speed of motor changes and is the stage nature increase by low-speed to high rotational speed in the converter control roots vacuum pump, and sliding valve vacuum pump reaches predetermined pressure, can not receive the big and motor overload's of negative pressure influence, thereby normal work, avoid starting first sliding valve vacuum pump work a period, start roots vacuum pump work again, improve the speed and the stability of evacuation.

Preferably, the vacuum pumping system further comprises a bypass valve arranged on the roots vacuum pump. The setting of bypass valve can avoid roots vacuum pump no-load to start, and after opening the bypass valve, roots vacuum pump starts after the certain time, closes the bypass valve, and roots vacuum pump's pressure rises gradually.

Preferably, the low speed is 500-.

Preferably, the high speed is 2000-3000 rpm.

Preferably, the rate of increase is 100 rpm.

Preferably, the vacuum pumping system further comprises a second vacuum tube communicated with the air inlet of the roots vacuum pump, and the second vacuum tube is provided with a first valve.

Preferably, the first vacuum tube is provided with a second valve.

Drawings

FIG. 1 is a schematic view of the vacuum pumping system of the present invention.

Description of the symbols:

a vacuum pumping system 100, a Roots vacuum pump 10, a slide valve vacuum pump 20, a first vacuum tube 30, a frequency converter 40, a bypass valve 50, a second vacuum tube 60, a first valve 70, a second valve 80

Detailed Description

In order to explain technical contents, structural features, and objects and effects of the present invention in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1, the present application discloses a vacuum pumping system 100, which includes a roots vacuum pump 10, a slide valve vacuum pump 20 and a frequency converter 40, wherein the roots vacuum pump 10 has an air inlet and an air outlet, the slide valve vacuum pump 20 is communicated with the air outlet of the roots vacuum pump 10 via a first vacuum tube 30, the frequency converter 40 is connected to the roots vacuum pump 10, and the frequency converter 40 is used for controlling the rotation speed of a motor in the roots vacuum pump 10 to change from a low rotation speed to a high rotation speed and to increase in a stepwise manner. The frequency converter 40 is used for controlling the rotating speed of the motor in the Roots vacuum pump 10 so as to give the slide valve vacuum pump 20 a buffering time to reach a preset pressure, and the influence of instability and overlarge negative pressure is avoided.

Referring to fig. 1, the vacuum pumping system 100 further includes a bypass valve 50 disposed in the roots vacuum pump 10, the bypass valve 50 is disposed to prevent the roots vacuum pump 10 from being started in an idle state, and after the bypass valve 50 is opened, the roots vacuum pump 10 is started for a certain time, the bypass valve 50 is closed, and the pressure of the roots vacuum pump 10 gradually rises.

Referring to FIG. 1, the low rotation speed is 500-1000rpm, such as 500rpm, 600rpm, 700rpm, 800rpm, 900rpm, 1000 rpm; the high rotation speed is 2000-3000rpm, such as 2000rpm, 2100rpm, 2200rpm, 2300rpm, 2400rpm, 2500rpm, 2600rpm, 2700rpm, 2800rpm, 2900rpm, 3000 rpm. The increasing speed from low rotating speed to high rotating speed is 100rpm to ensure the stability of air extraction. It should be noted that the ranges of the low rotation speed and the high rotation speed are not limited to the above, the frequency converter 40 controls the roots vacuum pump 10 to be in the low rotation speed stage or the lower working frequency stage, and when the slide valve vacuum pump 20 reaches the pressure, the frequency converter 40 also controls the roots vacuum pump 10 to be in the high rotation speed stage or the higher working frequency stage, so as to perform vacuum pumping normally and achieve rapid pumping.

Referring to fig. 1, the vacuum pumping system 100 further includes a second vacuum tube 60 communicated with the inlet of the roots vacuum pump 10, and the second vacuum tube 60 is provided with a first valve 70. The second vacuum tube 60 is communicated with a vacuum coating cavity in the magnetron sputtering coating equipment and is opened and closed through the first valve 70, so that the maintenance is convenient. Further, the first vacuum tube 30 is provided with a second valve 80, and the second valve 80 is opened and closed, so that the overhaul and the maintenance are further facilitated.

The working principle of the vacuum pumping system 100 of the present application is explained in detail below with reference to fig. 1:

the second vacuum tube 60 is communicated with the vacuum plating cavity in the magnetron sputtering coating equipment, when the vacuum plating cavity needs to be vacuumized, the first valve 70, the second valve 80 and the bypass valve 50 are opened, the Roots vacuum pump 10, the slide valve vacuum pump 20 and the frequency converter 40 are started, the slide valve vacuum pump 20 pumps air, the bypass valve 50 is closed after the Roots vacuum pump 10 is started for a certain time, the frequency converter 40 controls the Roots vacuum pump 10 to be in a low-rotating-speed stage, so that the influence of large negative pressure and motor overload on the slide valve vacuum pump 20 caused by the faster vacuum pumping speed of the Roots vacuum pump 10 is avoided, along with the working, the rotating speed of the motor in the Roots vacuum pump 10 is controlled by the frequency converter 40 to be changed from low rotating speed to high rotating speed and to be increased in a staged rate, and the slide valve vacuum pump 20 reaches a preset pressure at the moment and cannot be influenced by large negative pressure and motor overload, so that the Roots vacuum pump normally works, that is, when the sliding valve vacuum pump 20 reaches the preset pressure, the frequency converter 40 controls the roots vacuum pump 10 to be in the high-speed stage, and the two are combined to normally work, so that the pumping speed is increased, the pumping time is shortened, and the pumping speed and the stability are improved.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, therefore, the present invention is not limited by the appended claims.