Silicon chip cutting machine with cutting fluid recovery function

文档序号:1930045 发布日期:2021-12-07 浏览:16次 中文

阅读说明:本技术 一种带有切削液回收功能的硅片切割机 (Silicon chip cutting machine with cutting fluid recovery function ) 是由 张耀 黄慧媛 齐申 屈恒 于 2021-08-10 设计创作,主要内容包括:本发明涉及切割机领域,具体是一种带有切削液回收功能的硅片切割机,包括用于收集切削液的导流板,导流板一侧设有导流槽,导流槽的出口端设有用于切削液回收的初级过滤机构,初级过滤机构用于过滤掉切削液中的颗粒状杂物,初级过滤机构的下方设有切削液回收的次级过滤机构,次级过滤机构用于过滤掉切削液粉末状杂物且初级过滤机构与次级过滤机构之间通过快拆机构连接;切削液从导流板和导流槽流入至塔筒内,切削液中能通过溢流孔的碎屑物直接落入至箱体内,未能透过溢流孔的碎屑物过滤在螺旋叶上,此时实现对切削液的初级过滤,即将切削液中的大颗粒碎屑物过滤掉。(The invention relates to the field of cutting machines, in particular to a silicon wafer cutting machine with a cutting fluid recovery function, which comprises a guide plate for collecting cutting fluid, wherein a guide groove is formed in one side of the guide plate, a primary filtering mechanism for recovering the cutting fluid is arranged at the outlet end of the guide groove, the primary filtering mechanism is used for filtering granular impurities in the cutting fluid, a secondary filtering mechanism for recovering the cutting fluid is arranged below the primary filtering mechanism, the secondary filtering mechanism is used for filtering powdery impurities in the cutting fluid, and the primary filtering mechanism is connected with the secondary filtering mechanism through a quick-release mechanism; cutting fluid flows into a tower section of thick bamboo from guide plate and guiding gutter in, can directly fall into to the box through the clastics of overflow hole in the cutting fluid, and the clastics that can not see through the overflow hole filters on the helical blade, realizes the primary filtration to the cutting fluid this moment, is about to filter the large granule clastics in the cutting fluid.)

1. The utility model provides a silicon chip cutting machine with cutting fluid retrieves function which characterized in that: including guide plate (1) that is used for collecting the cutting fluid, guide plate (1) one side is equipped with guiding gutter (2), and the exit end of guiding gutter (2) is equipped with the elementary filtering mechanism who is used for the cutting fluid to retrieve, and elementary filtering mechanism is arranged in filtering the graininess debris in the cutting fluid, and elementary filtering mechanism's below is equipped with the secondary filtering mechanism that the cutting fluid was retrieved, and secondary filtering mechanism is used for filtering cutting fluid powder form debris and is connected through quick detach mechanism between elementary filtering mechanism and the secondary filtering mechanism.

2. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 1, characterized in that: the primary filtering mechanism comprises a first motor (3), a tower drum (4) and spiral blades (5); the lower extreme of tower section of thick bamboo (4) is connected in secondary filter mechanism and is connected tower section of thick bamboo (4) through quick detach mechanism, and U-shaped frame rigid coupling motor (3) are passed through to the upper end of tower section of thick bamboo (4), and output rigid coupling spiral leaf (5) of motor (3), the edge of spiral leaf (5) closely cooperates with the inside wall of tower section of thick bamboo (4), offers a plurality of overflow holes (6) on spiral leaf (5), and overflow hole (6) are according to from the top down order, and the diameter of overflow hole (6) reduces gradually.

3. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 1, characterized in that: the secondary filtering mechanism comprises a box body (7), a second motor (8), a conveying belt (9), a collecting box (10) and a liquid discharge pipe (11); through-hole (12) are seted up to the terminal surface of box (7), through-hole (12) and tower section of thick bamboo (4) coaxial intercommunication, the below of through-hole (12) is conveyer belt (9), conveyer belt (9) are the area body of the many honeycomb holes in surface, and honeycomb holes's aperture is less than the diameter of spiral leaf (5) lower extreme overflow hole (6), conveyer belt (9) are driven by No. two motor (8) in the box (7) outside, the head end below of conveyer belt (9) is fluid-discharge tube (11), fluid-discharge tube (11) communicate in the collection silo of conveyer belt (9) below, the terminal below of conveyer belt (9) is collecting box (10).

4. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 1, characterized in that: quick detach mechanism includes extension spring (13), fixed pin (14), connecting plate (15) and spring (16), and spout (17) are seted up to the last face symmetry of box (7), and locating hole (18) are seted up to spout (17) inboard, and fixed orifices (19) that set up on locating hole (18) and connecting plate (15) are embedded to have fixed pin (14), and the tip of fixed pin (14) passes through extension spring (13) to be connected on connecting plate (15).

5. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 3, characterized in that: the upper end outer ring of the tower tube (4) is symmetrically provided with fixing blocks (20), the fixing blocks (20) are provided with clamping grooves, and the end parts of the U-shaped frames are embedded in the clamping grooves.

6. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 4, characterized in that: a lifting plate (21) is arranged between two adjacent fixing pins (14), and the end part of the lifting plate (21) is fixedly connected with the end part of the fixing pin (14).

7. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 3, characterized in that: the material collecting groove is in a slope shape, and the lower part of the collecting groove is communicated with a liquid discharge pipe (11).

8. The silicon wafer cutting machine with the cutting fluid recovery function according to claim 3, characterized in that: the lower end of the rotating shaft of the spiral blade (5) is erected on the inner side wall of the lower end of the tower barrel (4) through a supporting rod (22), and the rotating shaft of the spiral blade (5) is rotatably connected to the supporting rod (22).

Technical Field

The invention relates to the field of cutting machines, in particular to a silicon wafer cutting machine with a cutting fluid recovery function.

Background

China is in a mature stage in a photovoltaic solar technology, in order to develop pollution-free energy, a large amount of silicon wafers are used in a photovoltaic solar production process, the silicon wafers are cut into sheets by a silicon wafer cutting machine, a device for recovering cutting fluid is absent on the existing silicon wafer cutting machine equipment, the silicon wafer cutting fluid is used as an auxiliary material consumable product which must be used in the silicon wafer cutting process, and the cutting fluid cannot be effectively recovered and reused every year, so that a large amount of cutting fluid is wasted.

Disclosure of Invention

In order to make up for the prior art, the invention provides a silicon wafer cutting machine with a cutting fluid recovery function.

The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to a silicon wafer cutting machine with a cutting fluid recovery function, which comprises a guide plate for collecting cutting fluid, wherein a guide groove is formed in one side of the guide plate, a primary filtering mechanism for recovering the cutting fluid is arranged at the outlet end of the guide groove, the primary filtering mechanism is used for filtering granular impurities in the cutting fluid, a secondary filtering mechanism for recovering the cutting fluid is arranged below the primary filtering mechanism, the secondary filtering mechanism is used for filtering powdery impurities in the cutting fluid, and the primary filtering mechanism is connected with the secondary filtering mechanism through a quick-release mechanism.

Preferably, the primary filtering mechanism comprises a first motor, a tower and a spiral blade; the lower end of the tower barrel is connected with the secondary filtering mechanism through the quick-release mechanism and is connected with the tower barrel, the upper end of the tower barrel is fixedly connected with a motor through a U-shaped frame, the output end of the motor is fixedly connected with a spiral blade, the edge of the spiral blade is tightly matched with the inner side wall of the tower barrel, a plurality of overflow holes are formed in the spiral blade, and the diameters of the overflow holes are gradually reduced from top to bottom; cutting fluid flows into to a tower section of thick bamboo in from guide plate and guiding gutter, and the electronic spiral leaf of a motor rotates, rotates the in-process and stirs cutting fluid, stirs and filters, firstly improves filtration efficiency, secondly prevents that the junk from blockking up the overflow hole, and the junk that can pass through the overflow hole in the cutting fluid directly falls into to the box in, fails to see through the junk of overflow hole and filters on the spiral leaf, realizes the primary filter to cutting fluid this moment, is about to filter the large granule junk in the cutting fluid.

Preferably, the secondary filtering mechanism comprises a box body, a second motor, a conveying belt, a collecting box and a liquid discharge pipe; the end face of the box body is provided with a through hole, the through hole is coaxially communicated with the tower barrel, a conveying belt is arranged below the through hole, the conveying belt is a belt body with a plurality of honeycomb holes on the surface, the aperture of the honeycomb holes is smaller than the diameter of an overflow hole at the lower end of the spiral blade, the conveying belt is driven by a second motor arranged outside the box body, a liquid discharge pipe is arranged below the head end of the conveying belt, the liquid discharge pipe is communicated with a material collecting groove below the conveying belt, and a collecting box is arranged below the tail end of the conveying belt; cutting fluid and the bits thing through the overflow opening flow in to the conveyer belt line through the through-hole, then the conveyer belt carries out secondary filter to the cutting fluid, secondary filtration promptly, and cutting fluid infiltration conveyer belt drops in the groove that gathers materials, fails to carry into to the collecting box in through the bits thing of honeycomb holes on the conveyer belt, realizes the collection to the bits thing, and secondary filterable cutting fluid passes through the fluid-discharge tube and discharges, concentrates to collect the back and is carrying out the chemical precipitation and filter, reduces the filterable pressure of chemical precipitation.

Preferably, the quick-release mechanism comprises a tension spring, a fixed pin, a connecting plate and a spring, sliding chutes are symmetrically formed in the upper plate surface of the box body, positioning holes are formed in the inner sides of the sliding chutes, the fixed pin is embedded in the positioning holes and the fixing holes formed in the connecting plate, and the end part of the fixed pin is connected to the connecting plate through the tension spring; after the bits thing in the tower is collected to fill up, need empty the discharge with the bits thing, through quick detach mechanism, take off a tower section of thick bamboo from the box, lift the fixed pin, the fixed pin breaks away from behind the fixed orifices, then promote the connecting plate, connecting plate extrusion spring, treat that the fixed pin is with the fixed orifices in the outside is for it, release the fixed pin, the fixed pin passes through the extension spring embedding in this fixed orifices, this moment a tower section of thick bamboo is in automatic status, take off a tower section of thick bamboo, the bits thing in the tower section of thick bamboo of empting, so that the spiral leaf can effectively filter the cutting fluid once more.

Preferably, the outer ring of the upper end of the tower barrel is symmetrically provided with fixed blocks, the fixed blocks are provided with clamping grooves, and the end parts of the U-shaped frames are embedded in the clamping grooves; the U-shaped frame is embedded in the clamping groove on the fixing block, so that the spiral blade can be conveniently taken out, and the spiral blade can be cleaned more cleanly and thoroughly.

Preferably, a lifting plate is arranged between two adjacent fixing pins, and the end part of the lifting plate is fixedly connected with the end part of the fixing pin; through carrying the arm-tie, carrying the fixed pin of tower section of thick bamboo with one side simultaneously and lifting, then promoting and carrying the arm-tie for the connecting plate slides and extrudees the spring, makes things convenient for the dismantlement of tower section of thick bamboo to take off.

Preferably, the material collecting groove is in a slope shape, and the lower part of the collecting groove is communicated with the liquid discharge pipe; the cutting fluid after secondary filtration concentrates along the slope of groove of collecting to flow into in the drain pipe, the collection of the cutting fluid of being convenient for prevents simultaneously that the inslot of collecting from sinking the bottom chip thing.

Preferably, the lower end of the rotating shaft of the spiral blade is erected on the inner side wall of the lower end of the tower barrel through a support rod, and the rotating shaft of the spiral blade is rotatably connected to the support rod; the lower extreme of spiral leaf pivot passes through the bracing piece and rotates to be connected in the inside wall of a tower section of thick bamboo, guarantees the rotational stability of spiral leaf.

The invention has the advantages that:

1. cutting fluid flows into the tower barrel from the guide plate and the guide groove, the first motor drives the spiral blade to rotate, the cutting fluid is stirred and filtered in the rotating process, the filtering efficiency is improved, debris is prevented from blocking the overflow hole, the cutting fluid can directly fall into the box body through the debris of the overflow hole, the debris which cannot penetrate through the overflow hole is filtered on the spiral blade, and primary filtering of the cutting fluid is realized at the moment, namely large-particle debris in the cutting fluid is filtered;

2. cutting fluid and the bits thing through the overflow opening flow in to the conveyer belt line through the through-hole, then the conveyer belt carries out secondary filter to the cutting fluid, secondary filtration promptly, and cutting fluid infiltration conveyer belt drops in the groove that gathers materials, fails to carry into to the collecting box in through the bits thing of honeycomb holes on the conveyer belt, realizes the collection to the bits thing, and secondary filterable cutting fluid passes through the fluid-discharge tube and discharges, concentrates to collect the back and is carrying out the chemical precipitation and filter, reduces the filterable pressure of chemical precipitation.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.

FIG. 1 is a perspective view of a first embodiment;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a sectional view of the first embodiment;

FIG. 4 is a perspective view of a baffle according to a second embodiment;

in the figure: the device comprises a guide plate 1, a guide groove 2, a first motor 3, a tower barrel 4, a spiral blade 5, an overflow hole 6, a box body 7, a second motor 8, a conveying belt 9, a collecting box 10, a liquid discharge pipe 11, a through hole 12, a tension spring 13, a fixing pin 14, a connecting plate 15, a spring 16, a sliding groove 17, a positioning hole 18, a fixing hole 19, a fixing block 20, a lifting plate 21, a supporting rod 22 and a connecting lug 23.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The first embodiment is as follows:

referring to fig. 1-3, a silicon wafer cutting machine with cutting fluid recovery function comprises a guide plate 1 for collecting cutting fluid, a guide groove 2 is arranged on one side of the guide plate 1, a primary filtering mechanism for recovering the cutting fluid is arranged at the outlet end of the guide groove 2, the primary filtering mechanism is used for filtering granular impurities in the cutting fluid, a secondary filtering mechanism for recovering the cutting fluid is arranged below the primary filtering mechanism, the secondary filtering mechanism is used for filtering powdery impurities in the cutting fluid, and the primary filtering mechanism is connected with the secondary filtering mechanism through a quick-release mechanism.

The primary filtering mechanism comprises a first motor 3, a tower barrel 4 and spiral blades 5; the lower end of the tower barrel 4 is connected with the secondary filtering mechanism through a quick-release mechanism and is connected with the tower barrel 4, the upper end of the tower barrel 4 is fixedly connected with a first motor 3 through a U-shaped frame, the output end of the first motor 3 is fixedly connected with a spiral blade 5, the edge of the spiral blade 5 is tightly matched with the inner side wall of the tower barrel 4, a plurality of overflow holes 6 are formed in the spiral blade 5, and the diameters of the overflow holes 6 are gradually reduced according to the sequence from top to bottom of the overflow holes 6; cutting fluid flows into to a tower section of thick bamboo 4 in from guide plate 1 and guiding gutter 2, and 3 electronic spiral leaves of a motor 5 rotate, rotate the in-process and stir cutting fluid, stir and filter, firstly improve filtration efficiency, secondly prevent that the debris from blockking up overflow hole 6, can directly fall into to the box 7 in the debris that can pass through overflow hole 6 in the cutting fluid, the debris that fails to see through overflow hole 6 filters on spiral leaf 5, realize the primary filter to the cutting fluid this moment, be about to the large granule debris in the cutting fluid filter.

The secondary filtering mechanism comprises a box body 7, a second motor 8, a conveying belt 9, a collecting box 10 and a liquid discharge pipe 11; a through hole 12 is formed in the end face of the box body 7, the through hole 12 is coaxially communicated with the tower barrel 4, a conveying belt 9 is arranged below the through hole 12, the conveying belt 9 is a belt body with a plurality of honeycomb holes on the surface, the aperture of each honeycomb hole is smaller than the diameter of an overflow hole 6 at the lower end of the spiral blade 5, the conveying belt 9 is driven by a second motor 8 outside the box body 7, a liquid discharge pipe 11 is arranged below the head end of the conveying belt 9, the liquid discharge pipe 11 is communicated with a material collecting groove below the conveying belt 9, and a collecting box 10 is arranged below the tail end of the conveying belt 9; cutting fluid and the junk through overflow hole 6 flow in to conveyer belt 9 line through-hole 12, then conveyer belt 9 carries out secondary filter to the cutting fluid, secondary filters promptly, and cutting fluid infiltration conveyer belt 9 drops in the groove that gathers materials, fails to be brought into collecting box 10 through the junk of honeycomb holes on conveyer belt 9 in, realizes the collection to the junk, and secondary filterable cutting fluid passes through fluid-discharge tube 11 and discharges, concentrates and collects the back and is carrying out the chemical precipitation and filter, reduces the filterable pressure of chemical precipitation.

The quick release mechanism comprises a tension spring 13, a fixed pin 14, a connecting plate 15 and a spring 16, sliding chutes 17 are symmetrically formed in the upper plate surface of the box body 7, positioning holes 18 are formed in the inner sides of the sliding chutes 17, the fixed pin 14 is embedded in the positioning holes 18 and a fixing hole 19 formed in the connecting plate 15, and the end part of the fixed pin 14 is connected to the connecting plate 15 through the tension spring 13; after the chips in the tower are fully collected, the chips need to be dumped and discharged, the tower barrel 4 is taken down from the box body 7 through the quick-release mechanism, the fixing pin 14 is lifted up, the fixing pin 14 is separated from the fixing hole 19, then the connecting plate 15 is pushed, the connecting plate 15 extrudes the spring 16, when the fixing pin 14 is aligned with the fixing hole 19 on the outer side, the fixing pin 14 is released, the fixing pin 14 is embedded into the fixing hole 19 through the tension spring 13, the tower barrel 4 is in an automatic state at the moment, the tower barrel 4 is taken down, the chips in the tower barrel 4 are dumped, and the spiral blade 5 can effectively filter the cutting fluid again.

The outer ring of the upper end of the tower barrel 4 is symmetrically provided with fixing blocks 20, the fixing blocks 20 are provided with clamping grooves, and the end parts of the U-shaped frames are embedded in the clamping grooves; u-shaped frame is embedded in the draw-in groove on the fixed block 20, is convenient for take out of helical blade 5 for helical blade 5 goes up the clearance more totally thoroughly.

A lifting plate 21 is arranged between two adjacent fixing pins 14, and the end part of the lifting plate 21 is fixedly connected with the end part of the fixing pin 14; through the lifting plate 21, the fixing pins 14 on the same side of the tower 4 are lifted at the same time, and then the lifting plate 21 is pushed, so that the connecting plate 15 slides and presses the spring 16, and the tower 4 is convenient to detach and take down.

The collecting groove is in a slope shape, and the lower part of the collecting groove is communicated with the liquid discharge pipe 11; the cutting fluid after secondary filtration concentrates along the slope of collecting groove and flows into in the fluid-discharge tube 11, the collection of the cutting fluid of being convenient for prevents simultaneously that collecting groove is interior to sink the bottom junk.

The lower end of the rotating shaft of the spiral blade 5 is erected on the inner side wall of the lower end of the tower barrel 4 through a support rod 22, and the rotating shaft of the spiral blade 5 is rotatably connected to the support rod 22; the lower extreme of spiral leaf 5 pivot is rotated through bracing piece 22 and is connected in the inside wall of tower section of thick bamboo 4, guarantees the rotational stability of spiral leaf 5.

Example two:

referring to fig. 4, a first comparative example is another embodiment of the present invention, in which a connection lug 23 is disposed on an edge of a flow guide plate 1, the flow guide plate 1 is fixedly connected below a silicon wafer cutting machine through the connection lug 23, and the connection lug 23 facilitates fixing of the flow guide plate 1.

The working principle is as follows: cutting fluid flows into a tower barrel 4 from a guide plate 1 and a guide groove 2, a motor 3 drives a spiral blade 5 to rotate, the cutting fluid is stirred and filtered in the rotating process, the filtering efficiency is improved, debris is prevented from blocking an overflow hole 6, the debris in the cutting fluid can directly fall into a box body 7 through the overflow hole 6, the debris which cannot penetrate through the overflow hole 6 is filtered on the spiral blade 5, and primary filtering of the cutting fluid is realized at the moment, namely large-particle debris in the cutting fluid is filtered;

cutting fluid and the junk through overflow hole 6 flow in to conveyer belt 9 line through-hole 12, then conveyer belt 9 carries out secondary filter to the cutting fluid, secondary filters promptly, and cutting fluid infiltration conveyer belt 9 drops in the groove that gathers materials, fails to be brought into collecting box 10 through the junk of honeycomb holes on conveyer belt 9 in, realizes the collection to the junk, and secondary filterable cutting fluid passes through fluid-discharge tube 11 and discharges, concentrates and collects the back and is carrying out the chemical precipitation and filter, reduces the filterable pressure of chemical precipitation.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.

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