阅读说明：本技术 平行度测量装置及平行度测量方法 (Parallelism measuring device and parallelism measuring method ) 是由 张强 郑红 于 2021-09-10 设计创作，主要内容包括：本申请涉及一种平行度测量装置及平行度测量方法,平行度测量装置包括：主壳体,包括在第一方向上相对设置的第一表面和第二表面,第一表面和第二表面相互平行；至少两个重力传感单元,安装于主壳体内,至少两个重力传感单元沿垂直于第一方向的第二方向彼此间隔排布；平行度获取模块,与每个重力传感单元通信连接,平行度获取模块被配置为用于获取重力传感单元的检测数据,并根据检测数据计算获得与第一表面和第二表面分别对应的待检测面之间的平行度。由于上述平行度测量装置可自动、反复测量第一待检测面和第二待检测面的平行度,因此具有较高的检测效率,并有效降低了检测成本。(The application relates to a parallelism measuring device and a parallelism measuring method, wherein the parallelism measuring device comprises: a main housing including first and second surfaces oppositely disposed in a first direction, the first and second surfaces being parallel to each other; the gravity sensing units are arranged in the main shell and are arranged at intervals along a second direction perpendicular to the first direction; and the parallelism acquisition module is in communication connection with each gravity sensing unit and is configured to be used for acquiring the detection data of the gravity sensing units and calculating and acquiring the parallelism between the to-be-detected surfaces respectively corresponding to the first surface and the second surface according to the detection data. The parallelism measuring device can automatically and repeatedly measure the parallelism of the first surface to be detected and the second surface to be detected, so the parallelism measuring device has higher detection efficiency and effectively reduces the detection cost.)

1. A parallelism measuring apparatus, characterized by comprising:

a main housing including a first surface and a second surface oppositely disposed in a first direction, the first surface and the second surface being parallel to each other;

the at least two gravity sensing units are arranged in the main shell and are arranged at intervals along a second direction perpendicular to the first direction; and

the parallelism acquisition module is in communication connection with each gravity sensing unit and is configured to acquire detection data of the gravity sensing units and calculate and acquire parallelism between to-be-detected surfaces respectively corresponding to the first surface and the second surface according to the detection data;

wherein the detection data is the acceleration of the parallelism measuring apparatus at the position where the gravity sensing unit is located.

2. The parallelism measuring device according to claim 1, wherein the parallelism obtaining module is further configured to calculate an inclination angle of the parallelism measuring device at the position of the gravity sensing unit according to the detection data, and calculate the parallelism between the to-be-detected surfaces corresponding to the first surface and the second surface according to the inclination angles of all the gravity sensing units.

3. The parallelism measuring apparatus according to claim 1, further comprising a display panel mounted on the main housing and communicatively connected to the parallelism acquisition module;

the display panel is used for displaying the detection data.

4. The parallelism measuring apparatus according to claim 1, further comprising a buffer mechanism provided on one side of the first surface of the main casing;

the buffer mechanism is configured to be capable of being deformed in the first direction by an external force.

5. The parallelism measuring apparatus according to claim 4, wherein the buffer mechanism comprises a plurality of buffer units, each of which is arranged on one side of the first surface at a distance from each other in the second direction, and each of which is configured to be capable of being deformed in the first direction by an external force.

6. The parallelism measuring apparatus according to any one of claims 1 to 5, further comprising an adsorption mechanism provided on one side of the first surface of the main casing;

the adsorption mechanism is used for adsorbing the surface to be detected so as to enable the parallelism measuring device to be jointed with the surface to be detected.

7. The parallelism measuring apparatus according to claim 6, wherein the attracting mechanism comprises a magnet or a suction cup.

8. The parallelism measuring apparatus according to claim 1, further comprising a control switch mounted on the main housing and communicatively connected to the parallelism acquisition module;

the control switch is used for controlling the parallelism acquisition module to be switched on or switched off.

9. The parallelism measuring apparatus according to claim 1, further comprising a power supply module installed in the main housing and electrically connected to the gravity sensing unit and the parallelism acquisition module;

the power supply module is used for providing power for the gravity sensing unit and the parallelism acquisition module.

10. A parallelism measuring method using the parallelism measuring apparatus according to any one of claims 1 to 9, comprising the steps of:

placing the parallelism measuring device on a first surface to be detected, wherein the first surface of the parallelism measuring device faces the first surface to be detected;

the parallelism measuring device moves towards a second surface to be detected along with the first surface to be detected until the second surface of the parallelism measuring device is attached to the second surface to be detected;

acquiring detection data of the gravity sensing units in the moving process, and calculating and obtaining the parallelism of the first surface to be detected and the second surface to be detected according to the detection data;

wherein the detection data is the acceleration of the parallelism measuring apparatus at the position where the gravity sensing unit is located.

Technical Field

The invention relates to the technical field of display panel manufacturing, in particular to a parallelism measuring device and a parallelism measuring method.

Background

In the process of the display panel, a bonding device is generally used to perform processes such as bonding and pressing, 3D bonding, and polarizer attachment. In the laminating process, the parallelism of the pressure head and the platform directly influences the laminating effect, and if the distance between the pressure head and the platform is the same everywhere, the parallelism of the upper laminating platform and the lower laminating platform is very good, so that the laminating effect is good; if the separation of some regions of the indenter and platform is much greater than the separation of another region, it indicates that the indenter and platform are less parallel. When the pressure head and the platform are poor in parallelism, attaching bubbles can be formed between materials attached to each other, and the quality of the display panel is unqualified.

Therefore, in order to ensure the yield of the bonding process, the parallelism between the indenter and the stage needs to be detected before the bonding process. In the existing process, an operator manually adjusts the parallelism between a pressure head and a platform by using a pressure sensing paper, and the adjusting mode is time-consuming and labor-consuming.

Disclosure of Invention

In view of the above, it is necessary to provide a parallelism measuring apparatus and a parallelism measuring method that can solve the problem that adjustment of parallelism between a ram and a table is time-consuming and labor-consuming.

According to an aspect of the present application, there is provided a parallelism measuring apparatus, comprising:

a main housing including a first surface and a second surface oppositely disposed in a first direction, the first surface and the second surface being parallel to each other;

the at least two gravity sensing units are arranged in the main shell and are arranged at intervals along a second direction perpendicular to the first direction; and

the parallelism acquisition module is in communication connection with each gravity sensing unit and is configured to acquire detection data of the gravity sensing units and calculate and acquire parallelism between to-be-detected surfaces respectively corresponding to the first surface and the second surface according to the detection data;

wherein the detection data is the acceleration of the parallelism measuring apparatus at the position where the gravity sensing unit is located.

In one embodiment, the parallelism acquisition module is further configured to calculate an inclination angle of the parallelism measuring apparatus at the position of the gravity sensing unit according to the detection data, and calculate the parallelism between the to-be-detected surfaces corresponding to the first surface and the second surface according to the inclination angles of all the gravity sensing units.

In one embodiment, the parallelism measuring device further comprises a display panel, wherein the display panel is mounted on the main housing and is in communication connection with the parallelism acquisition module;

the display panel is used for displaying the detection data.

In one embodiment, the parallelism measuring device further comprises a buffer mechanism, and the buffer mechanism is arranged on one side of the first surface of the main shell;

the buffer mechanism is configured to be capable of being deformed in the first direction by an external force.

In one embodiment, the buffer mechanism includes a plurality of buffer units, each of the buffer units is arranged on one side of the first surface at intervals along the second direction, and each of the buffer units is configured to be capable of generating recoverable deformation along the first direction under the action of external force.

In one embodiment, the parallelism measuring device further comprises an adsorption mechanism, and the adsorption mechanism is arranged on one side of the first surface of the main shell;

the adsorption mechanism is used for adsorbing the surface to be detected so as to enable the parallelism measuring device to be jointed with the surface to be detected.

In one embodiment, the suction mechanism comprises a magnet or a suction cup.

In one embodiment, the parallelism measuring device further comprises a control switch, wherein the control switch is mounted on the main shell and is in communication connection with the parallelism acquisition module;

the control switch is used for controlling the parallelism acquisition module to be switched on or switched off.

In one embodiment, the parallelism measuring device further comprises a power supply module, wherein the power supply module is installed in the main shell and is electrically connected with the gravity sensing unit and the parallelism acquisition module;

the power supply module is used for providing power for the gravity sensing unit and the parallelism acquisition module.

According to another aspect of the present application, there is provided a parallelism measuring method using the parallelism measuring apparatus described above, including the steps of:

placing the parallelism measuring device on a first surface to be detected, wherein the first surface of the parallelism measuring device faces the first surface to be detected;

the parallelism measuring device moves towards a second surface to be detected along with the first surface to be detected until the second surface of the parallelism measuring device is attached to the second surface to be detected;

acquiring detection data of the gravity sensing units in the moving process, and calculating and obtaining the parallelism of the first surface to be detected and the second surface to be detected according to the detection data;

wherein the detection data is the acceleration of the parallelism measuring apparatus at the position where the gravity sensing unit is located.

According to the parallelism measuring device and the levelness measuring method, the parallelism of the two surfaces to be detected is measured by utilizing the gravity sensing principle, the measuring efficiency and the accuracy are higher, and compared with the prior art that sensing paper needs to be used for repeated measurement, the production consumable cost is reduced.

Drawings

FIG. 1 is a schematic diagram of a parallelism measuring apparatus according to an embodiment of the invention;

FIG. 2 is a schematic diagram of the internal structure of the parallelism measuring apparatus shown in FIG. 1;

FIG. 3 is a schematic structural diagram of a parallelism measuring apparatus according to an embodiment of the invention;

FIG. 4 is a schematic structural diagram of a parallelism measuring apparatus according to another embodiment of the invention;

fig. 5 is a flowchart illustrating a parallelism measuring method according to an embodiment of the invention.

Description of reference numerals:

100. a parallelism measuring device; 110. a main housing; 120. a gravity sensing unit; 130. a display panel; 140. a control switch; 150. a power supply module; 160. a buffer mechanism; 170. an adsorption mechanism; 200. a platform; 300. and (4) pressing head.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As described in the background art, in order to ensure the good bonding yield of the bonding equipment, the existing process is to manually adjust the parallelism between a pressure head and a platform by an operator, and the specific process of the adjusting step is as follows:

first, a pressure-sensitive paper (a paper which shows color when pressed) is placed on the surface of a product and placed on a stage. Then, the pressure head and the platform are controlled to move relatively to apply pressure to the sensing paper, after the pressing is completed, the sensing paper is taken down, and an operator observes the uniformity of the color changing part of the sensing paper by naked eyes. If the color change of each area of the induction paper is uniform, the parallelism is good; if the color change uniformity of the induction paper is poor, the flatness difference between the pressure head and the platform is represented, so that the inclination angle of the pressure head is adjusted, and the adjusting steps are repeated until good parallelism is obtained.

Therefore, the method for adjusting the parallelism is time-consuming and labor-consuming, the experience requirement of a modulator staff is high, at least one piece of sensing paper needs to be consumed in the whole adjusting process, and the sensing paper is a consumable material with high price, so that the production cost is increased.

Based on the above technical problem, the embodiment of the present application provides a parallelism measuring apparatus 100, where the parallelism measuring apparatus 100 is used to measure the parallelism of two oppositely disposed surfaces to be detected. The following describes a structure of the parallelism measuring apparatus 100 in the present application, taking an example in which the parallelism measuring apparatus 100 is applied to a laminating apparatus. The following embodiments are merely exemplary and do not limit the technical scope of the present application. It is understood that, in other embodiments, the parallelism measuring apparatus 100 can also be applied to other apparatuses requiring parallelism detection, and is not limited herein.

As shown in fig. 1 and fig. 2, the laminating apparatus includes a platform 200 and a pressing head 300, which are oppositely disposed, a side surface of the platform 200 facing the pressing head 300 is a first surface to be detected, a side surface of the pressing head 300 facing the platform 200 is a second surface to be detected, the pressing head 300 and/or the platform 200 can be driven by a driving device to relatively move so as to approach or separate from each other, and the parallelism measuring device 100 is used for detecting the parallelism between the first surface to be detected and the second surface to be detected.

The parallelism measuring apparatus 100 includes a main housing 110, at least two gravity sensing units 120, and a parallelism obtaining module, where the at least two gravity sensing units 120 and the parallelism obtaining module are both installed in the main housing 110, and the parallelism obtaining module is in communication connection with each gravity sensing unit 120, and the parallelism obtaining module can obtain detection data of each gravity sensing unit 120, and calculate and obtain parallelism between a first to-be-detected surface and a second to-be-detected surface corresponding to the first surface and the second surface, respectively, according to the detection data.

The gravity sensing unit 120 is a gravity sensor, and the detected data is the acceleration of the parallelism measuring apparatus 100 at the position of the gravity sensing unit 120. The gravity sensing unit 120 may convert the acceleration change due to gravity into an electrical signal using a characteristic of crystal deformation due to acceleration inside thereof.

The parallelism measuring apparatus 100 is first attached to the first surface of the platform 200, and then can be lifted along with the platform 200 until the parallelism measuring apparatus is attached to the second surface of the indenter 300. When the first surface to be detected and the second surface to be detected are not in a parallel state, the parallelism measuring device 100 tilts in the process of being attached to the second surface to be detected, at least one gravity sensing unit 120 measures the acceleration existing in the tilting process, the parallelism acquisition module acquires the acceleration acquired by the gravity sensing unit 120 and calculates the tilt angle of the parallelism measuring device 100 at the position of the gravity sensing unit 120 according to the acceleration, further the tilt angle of the second surface to be detected relative to the first surface to be detected is acquired according to the tilt angles of all the gravity sensing units 120, and finally the parallelism of the first surface to be detected and the second surface to be detected is acquired through calculation.

Further, the relationship between the acceleration value obtained by the gravity sensing unit 120 and the gravity acceleration is: a ═ arcsin (x/g), where x denotes an acceleration value, g denotes a gravitational acceleration value, and α denotes a tilt angle. Therefore, the tilt angle of the parallelism measuring apparatus 100 at the position where the gravity sensing unit 120 is located can be calculated from the acceleration value obtained by the gravity sensing unit 120.

The parallelism measuring device 100 can automatically and repeatedly measure the parallelism of the first surface to be detected and the second surface to be detected, so that the parallelism measuring device has higher detection efficiency and detection accuracy, and effectively reduces the detection cost.

Specifically, the main housing 110 is substantially a cube-shaped structure, a height direction of the main housing 110 is a first direction (e.g., X direction in fig. 1), a length direction of the main housing 110 is a second direction (e.g., Y direction in fig. 1), a width direction of the main housing 110 is a third direction, and the first direction, the second direction and the third direction intersect with each other two by two. In a preferred embodiment, the first direction, the second direction and the third direction are perpendicular to each other. Further, the main housing 110 includes a first surface and a second surface that are oppositely disposed in the first direction, and the first surface and the second surface are parallel to each other. When taking a parallelism measurement, one of the first and second surfaces faces the platform 200 and the other of the first and second surfaces faces the indenter 300.

At least two gravity sensing units 120 are installed in the main housing 110, and the at least two gravity sensing units 120 are spaced apart from each other along the second direction. It is understood that the number of the gravity sensing units 120 is not limited, and may be set according to the length of the main housing 110 in the second direction and the detection requirement.

Thus, the gravity sensing units 120 are located at different positions of the main housing 110 in the second direction, when the first surface to be detected and the second surface to be detected are not in a parallel state, the motion states of the gravity sensing units 120 at different positions in the parallelism measuring apparatus 100 moving between the first surface to be detected and the second surface to be detected are different, the gravity sensing unit 120 located in the area with the smaller distance between the first surface to be detected and the second surface to be detected first stops moving, and the gravity sensing unit 120 located in the area with the larger distance between the first surface to be detected and the second surface to be detected lags behind the stopping movement, so the parallelism of the first surface to be detected and the second surface to be detected is calculated by the detection data of the gravity sensing unit 120 corresponding to the parallelism acquiring module.

In some embodiments, the parallelism measuring apparatus 100 further includes a display panel 130, the display panel 130 is mounted on one side of the main housing 110 in the third direction, and the display panel 130 is in communication with the parallelism acquisition module and is used for displaying the detection data of each gravity sensing unit 120. In this way, the operator can intuitively acquire the detection data of each gravity sensing unit 120 through the display panel 130.

Specifically, in an embodiment, the display panel 130 extends lengthwise along the second direction, the display panel 130 includes a plurality of display regions sequentially arranged along the second direction, the number of the display regions is the same as that of the gravity sensing units 120, and each display region correspondingly displays the detection data of one gravity sensing unit 120. It can be understood that the size and the arrangement of the display panel 130 are not limited, and the display panel 130 can be arranged according to the requirement to meet different requirements, and the display panel 130 can also be used for displaying other data such as parallelism.

In some embodiments, the parallelism measuring apparatus 100 further comprises a control switch 140, the control switch 140 is mounted on the main housing 110 and is communicatively connected to the parallelism acquisition module, and the control switch 140 is used for controlling the operating state of the parallelism acquisition module. Specifically, the parallelism measuring apparatus 100 can be controlled to be turned on or off by controlling the on/off of the control switch 140, and the parallelism measuring apparatus 100 starts the measuring operation after the parallelism measuring apparatus 100 is switched from the off state to the on state. When the parallelism measuring apparatus 100 is switched from the on state to the off state, the parallelism measuring apparatus 100 stops the measurement.

In some embodiments, the parallelism measuring apparatus 100 further includes a power supply module 150, the power supply module 150 is mounted in the main housing 110 and electrically connected to the gravity sensing unit 120 and the parallelism acquisition module, and the power supply module 150 is used for supplying power to the gravity sensing unit 120 and the parallelism acquisition module. It is possible to connect, in particular in an embodiment, the power supply module 150 comprises a rechargeable battery, thereby making the use of the parallelism detecting apparatus more convenient. In other embodiments, the power module 150 includes a replaceable battery, and the power module 150 may be directly connected to an external power source.

In some embodiments, the parallelism measuring apparatus 100 further includes a buffer mechanism 160, the buffer mechanism 160 is disposed on one side of the first surface of the main housing 110, and the buffer mechanism 160 is configured to be capable of being deformed in a first direction by an external force, so as to provide a movement margin for the main housing 110. Thus, when detecting the parallelism of the first to-be-detected surface and the second to-be-detected surface which are not parallel, one end of the buffer mechanism 160 which rises along with the first to-be-detected surface first contacts the second to-be-detected surface, and the buffer mechanism 160 generates compression deformation along with the continuous rising of the first to-be-detected surface, so that the other end of the buffer mechanism 160 gradually contacts the second to-be-detected surface until the buffer mechanism 160 is completely attached to the second to-be-detected surface.

Specifically, in some embodiments, the buffer mechanism 160 includes a plurality of buffer units made of springs, each of the buffer units is arranged at a distance from each other along the second direction on one side of the first surface, and each of the buffer units is configured to be capable of being deformed in a restorable manner along the first direction under an external force, thereby providing a good buffer effect for each position of the main housing 110. It is understood that in other embodiments, the damping mechanism 160 may be formed of other elastically deformable structures.

Referring to fig. 2 and 3, in some embodiments, the parallelism measuring apparatus 100 further includes an adsorbing mechanism 170, the adsorbing mechanism 170 is disposed on one side of the first surface of the main housing 110, and the adsorbing mechanism 170 is configured to adsorb the surface to be detected so that the parallelism measuring apparatus 100 is bonded to the surface to be detected, so that the parallelism measuring apparatus 100 is fixedly connected to the surface to be detected, and the parallelism measuring apparatus 100 is prevented from moving in a direction perpendicular to the first direction during the measurement process.

Specifically, in some embodiments, the adsorption mechanism 170 is formed of a bar-shaped magnet extending from one end of the main housing 110 to the other end of the main housing 110 in the second direction. In other embodiments, the suction mechanism 170 includes a plurality of vacuum cups spaced apart from one another along the second direction. It is understood that in other embodiments, other structures having a suction function may be used to form the suction mechanism 170.

Specifically, in one embodiment, the parallelism measuring apparatus 100 includes both the buffer mechanism 160 and the absorption mechanism 170. The buffer mechanism 160 includes a plurality of buffer units formed of springs, and the plurality of buffer units are arranged on the first surface at intervals in the second direction. The adsorption mechanism 170 is formed by a bar-shaped magnet, the adsorption mechanism 170 is connected to one side of the plurality of springs away from the first surface, and the adsorption mechanism 170 extends from one end of the main housing 110 to the other end along the second direction.

In another embodiment, the parallelism measuring apparatus 100 only includes the adsorption mechanism 170, the adsorption mechanism 170 includes a plurality of vacuum chucks, the vacuum chucks can be restored to deform under the action of external force, and the chucks can play a role in buffering while playing a role in adsorption, so that no additional buffering structure is needed.

As shown in fig. 5, the present application also provides a parallelism measuring method using the parallelism measuring apparatus 100 described above, including the steps of:

s110: the parallelism measuring apparatus 100 is placed on a first surface to be detected, and the first surface of the parallelism measuring apparatus 100 faces the first surface to be detected.

Specifically, the parallelism detecting device is placed on a first surface to be detected and adsorbed on the first surface to be detected through the adsorbing mechanism 170, the second surface to be detected is located above the first surface to be detected, the first surface faces the first surface to be detected, and the second surface faces the second surface to be detected.

S120: the parallelism measuring apparatus 100 moves toward the second surface to be detected following the first surface to be detected until the second surface of the parallelism measuring apparatus 100 is attached to the second surface to be detected.

Specifically, the first surface to be detected pushes the parallelism measuring device 100 to move toward the second surface to be detected along the first direction under the driving of the driving device, one end of the parallelism measuring device 100 first contacts the second surface to be detected, the buffer mechanism 160 is gradually compressed along with the continuous rising of the first surface to be detected, and the second surface of the parallelism measuring device 100 is completely attached to the second surface to be detected.

S130: the detection data of the gravity sensing unit 120 of the parallelism measuring apparatus 100 during the movement is acquired.

Specifically, when the parallelism measuring apparatus 100 moves upward along with the first object to be detected, an acceleration is generated, the gravity sensing unit 120 obtains the detection data and sends the detection data to the parallelism acquisition module, and the parallelism acquisition module can display the detection data acquired by each gravity sensing unit 120 through the display module.

S140: and calculating the parallelism of the first surface to be detected and the second surface to be detected according to the detection data.

Specifically, the parallelism acquisition module can calculate the parallelism of the first surface to be detected and the second surface to be detected according to the detection data sent by the gravity sensing unit 120, and the operator can adjust the inclination angle of the first surface to be detected and/or the second surface to be detected according to the parallelism data. The detected data is the acceleration of the parallelism measuring apparatus 100 at the position of the gravity sensing unit 120.

According to the levelness measuring device and the levelness measuring method, the parallelism of the two surfaces to be detected is measured by utilizing the gravity sensing principle, the measuring efficiency and the accuracy are higher, and compared with the prior art that sensing paper needs to be used for repeated measurement, the cost of production consumables is reduced.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.