阅读说明：本技术 一种双自对准接触的FinFET标准单元及其形成方法 (FinFET standard cell with double self-aligned contacts and forming method thereof ) 是由 李勇 于 2021-08-12 设计创作，主要内容包括：本发明涉及一种双自对准接触的FinFET标准单元,涉及半导体集成电路制造技术,双自对准接触的FinFET标准单元包括一个跨越扩散连接孔的自对准栅极接触和一个跨越栅极的自对准扩散连接孔接触,并在两自对准接触间包括一盖帽层,而实现两自对准接触间的隔离,如此可进一步减小有效鳍或虚拟鳍的尺寸,而进一步减小鳍式场效应晶体管标准单元的面积,并可防止相邻的M0A和M0P桥接在一起,而提高器件性能。(The invention relates to a FinFET standard cell with double self-aligned contacts, which relates to the semiconductor integrated circuit manufacturing technology, and comprises a self-aligned gate contact spanning a diffusion connecting hole and a self-aligned diffusion connecting hole contact spanning a gate, and a cap layer between the two self-aligned contacts, so that the isolation between the two self-aligned contacts is realized, the size of an effective fin or a dummy fin can be further reduced, the area of a FinFET standard cell can be further reduced, and adjacent M0A and M0P can be prevented from being bridged together, so that the device performance is improved.)

1. A dual self-aligned contact FinFET standard cell, comprising:

the semiconductor device comprises a semiconductor substrate, a first metal grid and two second metal grids, wherein the two second metal grids are adjacent to one side of the first metal grid;

a diffusion connecting hole and a diffusion connecting hole filling plug cap positioned above the diffusion connecting hole are arranged between the two second metal grids at intervals; the self-aligned grid electrode crossing the diffusion connecting hole is contacted with the two second metal grid electrodes, and the cover cap is filled across the diffusion connecting hole between the two second metal grid electrodes;

the self-aligned diffusion connecting holes crossing the grid are contacted, connected with the diffusion connecting holes positioned at two sides of the first metal grid and cross the first metal grid;

and the buffer layer side wall is positioned between the self-aligned gate contact crossing the diffusion connecting hole and the self-aligned diffusion connecting hole contact crossing the grid so as to isolate the self-aligned gate contact crossing the diffusion connecting hole from the self-aligned diffusion connecting hole contact crossing the grid.

2. The FinFET standard cell of claim 1, wherein the diffusion connection hole filling cap is made of an insulating material.

3. The dual self-aligned contact FinFET standard cell of claim 1, further comprising a layer of diffusion contact fill plug cap between the self-aligned diffusion contact across the gate and the buffer layer sidewall.

4. The dual self-aligned contact FinFET standard cell of claim 1, wherein the self-aligned gate contact across the diffusion connection hole and the self-aligned diffusion connection hole contact across the gate are tungsten or cobalt.

5. A method of forming the dual self-aligned contact FinFET standard cell of claim 1, comprising:

s11: forming metal gates of the FinFET standard units in double self-aligned contact, and performing a planarization process, wherein a first interlayer dielectric layer is arranged between every two adjacent metal gates;

s12: forming a buffer layer, wherein the buffer layer covers the metal grid and the first interlayer dielectric layer;

s13: removing the buffer layer and the first interlayer dielectric layer between the metal gates, and forming a conductive material in the removal area of the first interlayer dielectric layer and the buffer layer to form a diffusion connection hole;

s14: etching the filling plug of the diffusion connecting hole, removing part of the conductive material in the diffusion connecting hole by etching, and reserving part of the conductive material to form a hole on the rest conductive material;

s15: forming a cap layer, and carrying out a planarization process to fill the cap layer in the hole to form a diffusion connection hole filling plug cap;

s16: performing an etching process to remove part of the buffer layer on the first metal gate so that the top of the first metal gate is still covered by the rest of the buffer layer, removing the diffusion connecting hole filling plug cap on two sides of the first metal gate until the conductive material positioned below the diffusion connecting hole filling plug cap is exposed, and forming a first groove in the removal region of the buffer layer and the diffusion connecting hole filling plug cap;

s17: performing an etching process to remove part of the buffer layers on the two second metal gates adjacent to one side of the first metal gate until the second metal gate below the buffer layer is exposed, wherein a buffer layer side wall is still reserved on one side close to the first metal gate, part of the diffusion connecting hole filling plug cap positioned between the two second metal gates is removed, so that the rest of the diffusion connecting hole filling plug cap still covers the etched diffusion connecting hole, a second groove is formed in the removal region of the buffer layer and the diffusion connecting hole filling plug cap, and the first groove and the second groove are separated by the buffer layer side wall;

s18: and forming a conductive material, filling the conductive material in the first groove and the second groove, connecting the two second metal grids through the conductive material, connecting the etched diffusion connecting holes on the two sides of the first metal grid through the conductive material, and isolating the conductive material in the first groove and the second groove through the buffer layer side wall.

6. The method of claim 5, wherein forming the metal gate of the dual self-aligned contact FinFET standard cell comprises:

providing a semiconductor substrate, forming a plurality of fin bodies on the semiconductor substrate, wherein the plurality of fin bodies are arranged in parallel, and forming an insulating layer at the bottom of each fin body to isolate each fin body;

forming a plurality of polysilicon gate rows, wherein the polysilicon gate rows are arranged in parallel, the length directions of the polysilicon gate rows and the fin bodies are vertically arranged, pseudo gate structures are respectively formed in the crossed regions of the polysilicon gate rows and the fin bodies, source regions or drain regions are formed at two sides of the pseudo gate structures on the fin bodies, embedded epitaxial layers are formed in the source regions or the drain regions, and side walls are sequentially formed on the surfaces of the source regions or the drain regions;

forming a first interlayer dielectric layer, wherein the first interlayer dielectric layer fills the gaps among the polysilicon gate rows and the fin bodies on the semiconductor substrate and covers the dummy gate structure;

and removing the polysilicon gate at the pseudo gate structure, and forming a metal gate in the removal region of the polysilicon gate so as to form the metal gate of the FinFET standard unit with double self-aligned contacts.

7. The method of claim 5, wherein the buffer layer is formed by a deposition process.

8. The method of claim 5, wherein the buffer layer is the same material as the first interlevel dielectric layer.

9. The method of claim 5, wherein the cap layer is made of an insulating material.

10. The method of claim 5, wherein a diffusion connection hole filling plug cap remains on the sidewall of the first trench in step S16.

Technical Field

The invention relates to a semiconductor integrated circuit manufacturing technology, in particular to a FinFET standard cell with double self-aligned contacts.

Background

The finfet is a new cmos transistor named because the shape of the transistor is similar to a fin. By using this fin-like design, circuit control is improved, leakage current of the transistor is reduced, and the gate length of the transistor is shortened.

Referring to fig. 1, fig. 1 shows a schematic top view of a norfly fin field Effect Transistor (FinFET) standard cell. As shown in fig. 1, it may have a multi-layer structure, which includes, from bottom to top, a fin including an Active fin area and a dummy fin area, the dummy fin area separating two adjacent Active fin areas, wherein the Active fin area includes an Active fin 11(Active Fins), and the dummy fin area includes a dummy fin 12(dummy Fins). The finfet standard cell further includes a metal 0 layer, where the metal 0 layer further includes M0A14 and M0P 15, the active fins 11 of the active fin area are connected together with M0A14, and the M0a14 is connected to the metal layer 16 through a contact level layer.

The area a of the finfet standard cell shown in fig. 1 is cell.h cell.w, the width of the finfet standard cell is cell.w, and the length of the finfet standard cell is cell.h. With the development of semiconductor technology, device miniaturization is a development trend in the industry. In order to reduce the area of the standard cell of the finfet, a Double Diffusion Break (DDB) process is mainly changed to a Single Diffusion Break (SDB) process to reduce the size of the active fin 11 or the dummy fin 12. However, at least two dummy fins 12 must be located between two adjacent active fin regions, otherwise the distance d between the adjacent M0A14 and M0P 15 is too small to bridge the adjacent M0A14 and M0P 15, which affects the device performance, and therefore, it is difficult to reduce the area of the finfet standard cell.

Disclosure of Invention

The invention provides a FinFET standard cell with double self-aligned contacts, which comprises: the semiconductor device comprises a semiconductor substrate, a first metal grid and two second metal grids, wherein the two second metal grids are adjacent to one side of the first metal grid; a diffusion connecting hole and a diffusion connecting hole filling plug cap positioned above the diffusion connecting hole are arranged between the two second metal grids at intervals; the self-aligned grid electrode crossing the diffusion connecting hole is contacted with the two second metal grid electrodes, and the cover cap is filled across the diffusion connecting hole between the two second metal grid electrodes; the self-aligned diffusion connecting holes crossing the grid are contacted, connected with the diffusion connecting holes positioned at two sides of the first metal grid and cross the first metal grid; and the buffer layer side wall is positioned between the self-aligned gate contact crossing the diffusion connecting hole and the self-aligned diffusion connecting hole contact crossing the grid so as to isolate the self-aligned gate contact crossing the diffusion connecting hole from the self-aligned diffusion connecting hole contact crossing the grid.

Furthermore, the material of the diffusion connecting hole filling plug cap is an insulating material.

Furthermore, a layer of diffusion connecting hole filling plug cap is arranged between the self-aligned diffusion connecting hole contact crossing the grid and the buffer layer side wall.

Further, the self-aligned gate contact across the diffusion contact and the self-aligned diffusion contact across the gate are tungsten or cobalt.

The present application further provides a method for forming the above FinFET standard cell with dual self-aligned contacts, including: s11: forming metal gates of the FinFET standard units in double self-aligned contact, and performing a planarization process, wherein a first interlayer dielectric layer is arranged between every two adjacent metal gates; s12: forming a buffer layer, wherein the buffer layer covers the metal grid and the first interlayer dielectric layer; s13: removing the buffer layer and the first interlayer dielectric layer between the metal gates, and forming a conductive material in the removal area of the first interlayer dielectric layer and the buffer layer to form a diffusion connection hole; s14: etching the filling plug of the diffusion connecting hole, removing part of the conductive material in the diffusion connecting hole by etching, and reserving part of the conductive material to form a hole on the rest conductive material; s15: forming a cap layer, and carrying out a planarization process to fill the cap layer in the hole to form a diffusion connection hole filling plug cap; s16: performing an etching process to remove part of the buffer layer on the first metal gate so that the top of the first metal gate is still covered by the rest of the buffer layer, removing the diffusion connecting hole filling plug cap on two sides of the first metal gate until the conductive material positioned below the diffusion connecting hole filling plug cap is exposed, and forming a first groove in the removal region of the buffer layer and the diffusion connecting hole filling plug cap; s17: performing an etching process to remove part of the buffer layers on the two second metal gates adjacent to one side of the first metal gate until the second metal gate below the buffer layer is exposed, wherein a buffer layer side wall is still reserved on one side close to the first metal gate, part of the diffusion connecting hole filling plug cap positioned between the two second metal gates is removed, so that the rest of the diffusion connecting hole filling plug cap still covers the etched diffusion connecting hole, a second groove is formed in the removal region of the buffer layer and the diffusion connecting hole filling plug cap, and the first groove and the second groove are separated by the buffer layer side wall; s18: and forming a conductive material, filling the conductive material in the first groove and the second groove, connecting the two second metal grids through the conductive material, connecting the etched diffusion connecting holes on the two sides of the first metal grid through the conductive material, and isolating the conductive material in the first groove and the second groove through the buffer layer side wall.

Further, forming a metal gate of a FinFET standard cell with dual self-aligned contacts includes: providing a semiconductor substrate, forming a plurality of fin bodies on the semiconductor substrate, wherein the plurality of fin bodies are arranged in parallel, and forming an insulating layer at the bottom of each fin body to isolate each fin body; forming a plurality of polysilicon gate rows, wherein the polysilicon gate rows are arranged in parallel, the length directions of the polysilicon gate rows and the fin bodies are vertically arranged, pseudo gate structures are respectively formed in the crossed regions of the polysilicon gate rows and the fin bodies, source regions or drain regions are formed at two sides of the pseudo gate structures on the fin bodies, embedded epitaxial layers are formed in the source regions or the drain regions, and side walls are sequentially formed on the surfaces of the source regions or the drain regions; forming a first interlayer dielectric layer, wherein the first interlayer dielectric layer fills the gaps among the polysilicon gate rows and the fin bodies on the semiconductor substrate and covers the dummy gate structure; and removing the polysilicon gate at the pseudo gate structure, and forming a metal gate in the removal region of the polysilicon gate so as to form the metal gate of the FinFET standard unit with double self-aligned contacts.

Further, a buffer layer is formed using a deposition process.

Furthermore, the buffer layer and the first interlayer dielectric layer are made of the same material.

Furthermore, the cap layer is made of an insulating material.

Further, a layer of diffusion connection hole filling plug cap remains on the sidewall of the first groove in step S16.

Drawings

Fig. 1 is a top view of a NORFlash finfet standard cell.

Fig. 2-9 are cross-sectional views of a dual self-aligned contact FinFET standard cell in the formation of a device according to an embodiment of the present invention.

Detailed Description

The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

It is to be understood that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity, and the same reference numerals denote the same elements throughout. It will be understood that when an element or layer is referred to as being "on" …, "adjacent to …," "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on …," "directly adjacent to …," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Therefore, in no longer

A first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.

Spatial relationship terms such as "under …", "under …", "below", "under …", "above …", "above", and the like, may be used herein for ease of description to describe the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "below …" and "below …" can encompass both an orientation of up and down. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

The present application provides a method of reducing FinFET standard cell area for dual self-aligned contacts. Please refer to fig. 2 to fig. 9, which are schematic cross-sectional views of a FinFET standard cell with dual self-aligned contacts according to an embodiment of the present invention. The method comprises the following steps:

s11: forming metal gates of the FinFET standard units in double self-aligned contact, and performing a planarization process, wherein a first interlayer dielectric layer is arranged between every two adjacent metal gates;

specifically, as shown in fig. 2, a first interlayer dielectric layer 202 is disposed between adjacent metal gates 201.

Specifically, the metal gate of the FinFET standard cell for forming the double self-aligned contact comprises the following steps:

providing a semiconductor substrate 200, forming a plurality of fin bodies on the semiconductor substrate 200, wherein the plurality of fin bodies are arranged in parallel, and forming an insulating layer at the bottoms of the fin bodies to isolate the fin bodies;

forming a plurality of polysilicon gate rows, wherein the polysilicon gate rows are arranged in parallel, the length directions of the polysilicon gate rows and the fin bodies are vertically arranged, pseudo gate structures are respectively formed in the crossed regions of the polysilicon gate rows and the fin bodies, source regions or drain regions are formed at two sides of the pseudo gate structures on the fin bodies, embedded epitaxial layers are formed in the source regions or the drain regions, and side walls are sequentially formed on the surfaces of the source regions or the drain regions;

forming a first interlayer dielectric layer 202, wherein the first interlayer dielectric layer 202 fills the gaps between the polysilicon gate rows and the fin bodies on the semiconductor substrate and covers the dummy gate structure;

and removing the polysilicon gate at the pseudo gate structure, and forming a metal gate in the removal region of the polysilicon gate so as to form the metal gate of the FinFET standard unit with double self-aligned contacts.

S12: forming a buffer layer, wherein the buffer layer covers the metal grid and the first interlayer dielectric layer;

specifically, referring to fig. 3, the buffer layer 203 covers the metal gate 201 and the first interlayer dielectric layer 202.

In an embodiment, the buffer layer 203 is formed using a deposition process. In one embodiment, the buffer layer 203 is the same material as the first interlayer dielectric layer 202.

S13: removing the buffer layer and the first interlayer dielectric layer between the metal gates, and forming a conductive material in the removal area of the first interlayer dielectric layer and the buffer layer to form a diffusion connection hole;

as shown in fig. 4, the buffer layer 203 and the first interlayer dielectric layer 202 between the metal gates 201 are removed, and a conductive material is formed in the removed regions of the first interlayer dielectric layer 202 and the buffer layer 203 to form a diffusion connection hole 204;

s14: etching the filling plug of the diffusion connecting hole, removing part of the conductive material in the diffusion connecting hole by etching, and reserving part of the conductive material to form a hole on the rest conductive material;

as shown in fig. 5, the conductive material in the diffusion connection hole 204 is etched away to leave a portion of the conductive material, and a hole 205 is formed in the remaining conductive material.

S15: forming a cap layer, and carrying out a planarization process to fill the cap layer in the hole to form a diffusion connection hole filling plug cap;

as shown in fig. 6, a diffusion connection hole filling plug cap 206 is filled in the hole and the remaining conductive material forms an etched diffusion connection hole 204'.

In one embodiment, the cap layer is made of an insulating material.

S16: performing an etching process to remove part of the buffer layer on the first metal gate so that the top of the first metal gate is still covered by the rest of the buffer layer, removing the diffusion connecting hole filling plug cap on two sides of the first metal gate until the conductive material positioned below the diffusion connecting hole filling plug cap is exposed, and forming a first groove in the removal region of the buffer layer and the diffusion connecting hole filling plug cap;

as shown in fig. 7, a portion of the buffer layer on the first metal gate 2011 is removed, so that the top of the first metal gate 2011 is still covered by the remaining buffer layer 203', and the diffusion connection hole filling plug caps 206 on both sides of the first metal gate 2011 are removed until the conductive material under the diffusion connection hole filling plug caps 206 is exposed, so as to form a first recess 207 in the removed region of the buffer layer and the diffusion connection hole filling plug caps.

Specifically, in one embodiment, a layer of diffusion connection hole filling plug cap 206 remains on the sidewall of the first groove 207 in step S16.

S17: performing an etching process to remove part of the buffer layers on the two second metal gates adjacent to one side of the first metal gate until the second metal gate below the buffer layer is exposed, wherein a buffer layer side wall is still reserved on one side close to the first metal gate, part of the diffusion connecting hole filling plug cap positioned between the two second metal gates is removed, so that the rest of the diffusion connecting hole filling plug cap still covers the etched diffusion connecting hole, a second groove is formed in the removal region of the buffer layer and the diffusion connecting hole filling plug cap, and the first groove and the second groove are separated by the buffer layer side wall;

as shown in fig. 8, a portion of the buffer layer 203 on two second metal gates 2012 adjacent to one side of the first metal gate 2011 is removed until the second metal gate 2012 under the buffer layer is exposed, but a buffer layer sidewall 209 remains on a side close to the first metal gate 2011, a portion of the diffusion connection hole filling plug cap located between the two second metal gates 2012 is removed, so that the remaining diffusion connection hole filling plug cap 206 'still covers the etched diffusion connection hole 204', and a second recess 208 is formed in a removal region of the buffer layer and the diffusion connection hole filling plug cap, and the first recess is separated from the second recess 208 by the buffer layer sidewall 209.

S18: and forming a conductive material, filling the conductive material in the first groove and the second groove, connecting the two second metal grids through the conductive material, connecting the etched diffusion connecting holes on the two sides of the first metal grid through the conductive material, and isolating the conductive material in the first groove and the second groove through the buffer layer side wall.

As shown in fig. 9, the first and second grooves are filled with a conductive material 211, so that the two second metal gates 2012 are connected by the conductive material, the etched diffusion connection holes 204' on both sides of the first metal gate 2011 are connected by the conductive material 211, and the conductive material in the first and second grooves is isolated by the buffer sidewall 209.

In one embodiment, the conductive material is tungsten (W) or cobalt (Co).

Wherein the self-aligned gate contact 211 across the diffusion connection hole is formed of a conductive material that connects the two second metal gates 2012. Self-aligned diffusion contact 212 across the gate is formed of a conductive material that connects etched diffusion contact holes on both sides of first metal gate 2011.

Thus, a dual self-aligned contact FinFET standard cell is formed, wherein one is a self-aligned gate contact crossing over a diffusion connection hole, and the other is a self-aligned diffusion connection hole contact crossing over a gate, wherein after the diffusion connection hole is formed, the diffusion connection hole filling plug is etched, and a cap layer is formed in a hole formed by etching, so that the two self-aligned contacts are isolated, the size of an effective fin or a dummy fin can be further reduced, the area of the FinFET standard cell can be further reduced, and adjacent M0A and M0P can be prevented from being bridged together, so that the device performance is improved.

In an embodiment of the present invention, a dual self-aligned contact FinFET standard cell formed by the method for reducing the area of the dual self-aligned contact FinFET standard cell is also provided.

In one embodiment of the invention, a dual self-aligned contact FinFET standard cell is also provided. Specifically, please refer to fig. 9, which is a schematic cross-sectional view of a FinFET standard cell with dual self-aligned contacts according to an embodiment of the present invention, including: a semiconductor substrate 200, wherein a first metal gate 2011 and two second metal gates 2012 adjacent to one side of the first metal gate are formed on the semiconductor substrate 200; a diffusion connection hole 204 ' and a diffusion connection hole filling plug cap 206 ' positioned above the diffusion connection hole 204 ' are arranged between the two second metal gates 2012; a self-aligned gate contact 211 crossing the diffusion connection hole, connecting the two second metal gates 2012, and filling a plug cap 206' crossing the diffusion connection hole between the two second metal gates 2012; self-aligned diffusion contact 212 crossing the gate, connecting diffusion contact holes 204' on both sides of first metal gate 2011, and crossing first metal gate 2011; buffer layer spacers 209 are positioned between the self-aligned gate contact 211 crossing the diffusion contact and the self-aligned diffusion contact 212 crossing the gate to isolate the self-aligned gate contact 211 crossing the diffusion contact from the self-aligned diffusion contact 212 crossing the gate.

In one embodiment, the material of the diffusion connection hole filling plug cap 206' is an insulating material.

In one embodiment, a layer of diffusion connection hole filling plug cap 206 is further included between the self-aligned diffusion connection hole contact 212 across the gate and the buffer layer sidewall spacer 209.

In one embodiment, the self-aligned gate contact 211 across the diffusion connection hole and the self-aligned diffusion connection hole contact 212 across the gate are tungsten (W) or cobalt (Co).

Thus, the dual self-aligned contact FinFET standard cell includes a self-aligned gate contact crossing the diffusion connection hole and a self-aligned diffusion connection hole contact crossing the gate, and a cap layer is included between the two self-aligned contacts to realize the isolation between the two self-aligned contacts, thus further reducing the size of the effective fin or dummy fin, further reducing the area of the FinFET standard cell, and preventing adjacent M0A and M0P from bridging together, thereby improving the device performance.

In an embodiment of the present invention, a method for forming a dual self-aligned contact FinFET standard cell as shown in fig. 9 is also provided, which is the same as the above-mentioned method for reducing the area of the dual self-aligned contact FinFET standard cell, and is not repeated herein.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.