阅读说明：本技术 一种超高纯电子气体吸附剂的活化装置 (Activation device of ultra-high-purity electronic gas adsorbent ) 是由 李俊华 林坤 孟祥军 王少波 马朝选 于 2021-09-23 设计创作，主要内容包括：本发明提供了一种超高纯电子气体吸附剂的活化装置,包括两个支撑底座,支撑底座上有第一反应罐和第二反应罐；第一反应罐的上端面设有密封套环上固定有端盖,端盖与连接管之间设有密封机构；第一反应罐与密封套环之间设有支撑机构,第一反应罐内设有用于对吸附剂进行预处理活化的预处理机构,第一反应罐与第二反应罐之间设有用于对吸附剂原料补充的补充机构,补充机构内设有用于保持补充机构补充气体过程中密封的卡合机构,本发明通过第一反应罐内对吸附剂惰性状态反应,实现吸附剂在进行活化处理前,对吸附剂在进行活性处理之前保持高于惰性状态的温度与活性,便于后续对吸附剂进行活化处理过程。(The invention provides an activation device of an ultra-pure electronic gas adsorbent, which comprises two supporting bases, wherein a first reaction tank and a second reaction tank are arranged on the supporting bases; the upper end face of the first reaction tank is provided with a sealing lantern ring, an end cover is fixed on the sealing lantern ring, and a sealing mechanism is arranged between the end cover and the connecting pipe; the adsorbent activating device comprises a first reaction tank, a second reaction tank, a sealing lantern ring, a support mechanism, a pre-treatment mechanism, a supplementing mechanism and a clamping mechanism, wherein the support mechanism is arranged between the first reaction tank and the sealing lantern ring, the pre-treatment mechanism is arranged in the first reaction tank and used for pre-treating and activating an adsorbent, the supplementing mechanism is arranged between the first reaction tank and the second reaction tank and used for supplementing raw materials of the adsorbent, and the clamping mechanism is arranged in the supplementing mechanism and used for keeping the supplementing mechanism sealed in the gas supplementing process.)

1. An activation device of an ultra-high-purity electronic gas adsorbent is characterized by comprising two supporting bases (1), wherein a first reaction tank (2) is fixedly connected to one of the supporting bases (1), and a second reaction tank (19) is fixedly connected to the other supporting base (1);

a sealing sleeve ring (3) is arranged on the upper end face of the first reaction tank (2), an end cover is fixedly connected to the upper end face of the sealing sleeve ring (3), a connecting pipe (7) penetrates through the center of the end cover in a sliding manner, and a sealing mechanism for limiting and maintaining sealing in the sliding process of the connecting pipe (7) is arranged between the end cover and the connecting pipe (7);

be equipped with between first retort (2) and the sealed lantern ring (3) and be used for spacing with the supporting mechanism who supports the sealed lantern ring (3), be equipped with in first retort (2) and be used for carrying out the preliminary treatment mechanism of activation to the adsorbent, be equipped with between first retort (2) and second retort (19) and be used for the supplementary mechanism to the adsorbent raw materials replenishment, be equipped with in the supplementary mechanism and be used for keeping supplementary mechanism make-up gas sealed block mechanism in-process.

2. The activation device for the ultra-high purity electronic gas adsorbent according to claim 1, wherein the sealing mechanism comprises a limiting blind pipe fixedly connected to the lower end face of the end cover, a plurality of gas inlets (27) are circumferentially and uniformly opened on the side wall of the limiting blind pipe, a plurality of buffer rods (28) are fixedly connected to the inner bottom face of the limiting blind pipe uniformly, a movable blocking plate (29) is sleeved on the buffer rods (28), and the top ends of the buffer rods (28) extend into the connecting pipe (7).

3. The activation device for the ultra-high-purity electronic gas adsorbent according to claim 1, wherein the support mechanism comprises a retaining ring (6) fixedly connected to a side wall of the first reaction tank (2), a plurality of limiting rods (8) are fixedly connected to a lower end surface of the sealing sleeve ring (3) circumferentially and uniformly, a plurality of limiting grooves (4) are formed in the side wall of the first reaction tank (2) circumferentially, the limiting grooves (4) extend into the retaining ring (6), and the limiting rods (8) are slidably connected in the limiting grooves (4).

4. The activation device for the ultra-high purity electronic gas adsorbent according to claim 1, wherein the pre-treatment mechanism comprises a mixing tube (22) fixedly connected to the inner side wall of the first reaction tank (2), the side wall of the mixing tube (22) is circumferentially provided with a plurality of air inlet grid grooves (23), the right side wall of the first reaction tank (2) is fixedly connected with a branch tube (24), a transition tube (25) is arranged below the mixing tube (22), the inner bottom of the first reaction tank (2) is fixedly connected with a heating groove (26), and the right side wall of the heating groove (26) is provided with a connector which penetrates through the first reaction tank (2).

5. The activation apparatus for an ultra-high-purity electronic gas adsorbent according to claim 1, wherein the replenishment mechanism comprises a delivery pipe (11) having two fixed ends respectively fixedly connected between the first reaction tank (2) and the second reaction tank (19), a support sleeve (12) is sleeved on a side wall of the delivery pipe (11), a gap is formed on an upper end surface of the support sleeve (12), a communicating pipe (13) is fixedly connected to an upper end surface of the delivery pipe (11), and an adjusting turntable (14) is fixedly connected to a side wall of the communicating pipe (13).

6. The activation device for the ultra-high-purity electronic gas adsorbent according to claim 1, wherein the engaging mechanism comprises a lower engaging tube (15) rotatably connected to the upper end surface of the communicating tube (13), an upper engaging tube (16) is slidably connected to the lower engaging tube (15), a plurality of engaging grooves (18) are uniformly circumferentially formed in the side wall of the lower engaging tube (15), a plurality of engaging plates (17) are fixedly connected to the side wall of the upper engaging tube (16) circumferentially, and the engaging plates (17) are engaged with the engaging grooves (18).

7. The activation apparatus for ultra-high-purity electronic gas adsorbent according to claim 1, wherein the side walls of the front ends of the first reaction tank (2) and the second reaction tank (19) are fixedly connected with a control panel (9).

8. The activation apparatus for ultra-high-purity electronic gas adsorbent according to claim 1, wherein a motor base (20) is fixedly connected to the second reaction tank (19), a transmission motor (21) is fixedly connected to the inside of the motor base (20), a stirrer is arranged in the second reaction tank (19), and a rotating shaft of the stirrer is fixedly connected to a transmission shaft of the transmission motor (21).

9. The activation apparatus for ultra-high-purity electronic gas adsorbent as claimed in claim 1, wherein said first reaction tank (2) and said second reaction tank (19) are provided with observation windows (10) on their side walls.

Technical Field

The invention belongs to the technical field of gas adsorbent activating devices, and particularly relates to an activating device for an ultra-high-purity electronic gas adsorbent.

Background

The electronic gas is special gas for producing semiconductors and related electronic products, and has a wide application range. In the production links of electronic industries such as integrated circuits, flat panel display devices, solar energy and the like, almost every step and every link from chip production to packaging of the final device can not be separated from electronic gas, so that the electronic gas can be called as 'blood' in electronic manufacturing. The cost of electronic gas only accounts for 5% -6% of the total cost of IC materials, but even if a specific impurity exceeds the standard, serious defects of products can be caused, and even the whole production line is polluted or scrapped due to the diffusion of unqualified gas. Therefore, the quality of the electronic gas greatly determines the performance of the semiconductor device, and the quality of the semiconductor device is greatly improved by one order of magnitude.

The existing adsorbents have certain active life, and after the service life is over, the high-purity electronic gas cannot be continuously adsorbed and restrained, so that the adsorbents can be recycled for multiple times after being activated; in addition, when the existing adsorbent activating device is used, the reaction states of raw materials in the activating agent are different, the uniformity of the activity of the activating agent cannot be realized in the actual activating treatment process, the recycling of the activating agent is also influenced, and the waste of resources and the increase of the production cost are caused.

Disclosure of Invention

The present invention is directed to an activation apparatus for an ultra-high purity electron gas adsorbent, which solves the above-mentioned problems of the prior art.

In order to solve the technical problems, the invention adopts the technical scheme that: an activation device of an ultra-high-purity electronic gas adsorbent comprises two supporting bases, wherein a first reaction tank is fixedly connected to one of the supporting bases, and a second reaction tank is fixedly connected to the other supporting base;

a sealing sleeve ring is arranged on the upper end face of the first reaction tank, an end cover is fixedly connected to the upper end face of the sealing sleeve ring, a connecting pipe penetrates through the center of the end cover and is connected in a sliding manner, and a sealing mechanism used for limiting and keeping sealing in the sliding process of the connecting pipe is arranged between the end cover and the connecting pipe;

be equipped with between first retort and the sealed lantern ring and be used for spacing with the supporting mechanism who supports the sealed lantern ring, be equipped with in the first retort and be used for carrying out the preliminary treatment mechanism of activation to the adsorbent, be equipped with between first retort and the second retort and be used for the complementary mechanism to the adsorbent raw materials replenishment, be equipped with in the complementary mechanism and be used for keeping complementary mechanism make-up gas in-process sealed block mechanism.

Further, sealing mechanism includes the spacing blind pipe of fixed connection terminal surface under the end cover, a plurality of air inlets have been seted up to circumference is even on the lateral wall of spacing blind pipe, a plurality of buffer rods of the even fixedly connected with of interior bottom surface of spacing blind pipe, the cover is equipped with the removal closure plate on the buffer rod, the top of buffer rod extends to in the connecting tube.

Further, the supporting mechanism comprises a supporting ring fixedly connected to the side wall of the first reaction tank, a plurality of limiting rods fixedly connected to the lower end face of the sealing sleeve ring in the circumferential direction are uniform, a plurality of limiting grooves are formed in the circumferential direction of the side wall of the first reaction tank, the limiting grooves extend into the supporting ring, and the limiting rods are connected to the limiting grooves in a sliding mode.

Further, preliminary treatment mechanism includes the hybrid tube of fixed connection on the inside wall of first retort, a plurality of air inlet grid grooves have been seted up to the lateral wall circumference of hybrid tube, fixedly connected with bleeder on the right side lateral wall of first retort, the below of hybrid tube is equipped with the transition pipe, the interior bottom fixedly connected with heating tank of first retort, be equipped with the connector on the right side lateral wall of heating tank, the connector runs through first retort.

Further, supplementary mechanism is including solid both ends respectively the conveyer pipe of fixed connection between first retort and second retort, the cover is equipped with support sleeve on the lateral wall of conveyer pipe, support sleeve's up end is equipped with the breach, the up end fixedly connected with communicating pipe of conveyer pipe, fixedly connected with adjusts the carousel on the lateral wall of communicating pipe.

Further, block mechanism is including rotating the lower cooperation pipe of connection on communicating pipe up end, the intraductal sliding connection of cooperation has last cooperation pipe down, a plurality of block grooves have evenly been seted up to the lateral wall circumference of cooperation pipe down, the lateral wall circumference fixedly connected with a plurality of block boards of going up the cooperation pipe, the block board cooperatees with block groove.

Furthermore, the front end side walls of the first reaction tank and the second reaction tank are fixedly connected with a control panel.

Further, fixedly connected with motor cabinet on the second retort, fixedly connected with drive motor in the motor cabinet, be equipped with the agitator in the second retort, the axis of rotation fixed connection drive motor's of agitator defeated axle.

Furthermore, the side walls of the first reaction tank and the second reaction tank are provided with observation windows.

Compared with the prior art, the invention has the following advantages:

1. through the reaction of the inert state of the adsorbent in the first reaction tank, the inertness of the internal raw materials is unified before the adsorbent is activated, and the activity of the adsorbent in the activation treatment process is ensured to be the same.

2. By utilizing the pretreatment and the preheating treatment, the temperature and the activity of the adsorbent in a state higher than the inert state are kept before the activation treatment is carried out on the adsorbent, so that the subsequent activation treatment process of the adsorbent is facilitated.

3. Through setting up the transition pipe, utilize the flow characteristic of adsorbent, the mode that will activate the raw materials and circulate through pipeline and mix with the adsorbent, promote the mixing rate and the mixed effect of adsorbent and active ingredient, finally cooperate the agitator to ensure the intensive mixing of adsorbent and raw materials.

Drawings

FIG. 1 is a front view of the overall structure of the present invention;

FIG. 2 is a schematic sectional view of a first reaction tank according to the present invention;

FIG. 3 is a schematic structural view of a sealing mechanism according to the present invention;

FIG. 4 is a schematic view of the air inlet distribution of the present invention;

fig. 5 is an enlarged view of a structure shown in fig. 2.

In the figure: the device comprises a support base 1, a first reaction tank 2, a sealing sleeve ring 3, a limiting groove 4, a limiting plate 5, a butting ring 6, a connecting pipe 7, a limiting rod 8, a control panel 9, an observation window 10, a conveying pipe 11, a supporting sleeve 12, a communicating pipe 13, a regulating turntable 14, a lower matching pipe 15, an upper matching pipe 16, a clamping plate 17, a clamping groove 18, a mixing tank 19, an installation base 20, a transmission motor 21, a mixing pipe 22, an air inlet grid groove 23, a branch pipe 24, a transition pipe 25, a heating groove 26, an air inlet 27, a buffer rod 28 and a movable blocking plate 29.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1 to 5, the present invention provides a technical solution: an activation device of ultra-high purity electronic gas adsorbent comprises two supporting bases 1, wherein a first reaction tank 2 is fixedly connected to one supporting base 1, and a second reaction tank 19 is fixedly connected to the other supporting base 1;

the upper end face of the first reaction tank 2 is provided with a sealing sleeve ring 3, the upper end face of the sealing sleeve ring 3 is fixedly connected with an end cover, the center of the end cover is connected with a connecting pipe 7 in a penetrating and sliding mode, and a sealing mechanism used for limiting and keeping sealing in the sliding process of the connecting pipe 7 is arranged between the end cover and the connecting pipe 7.

Sealing mechanism includes the spacing blind pipe of fixed connection terminal surface under the end cover, spacing blind pipe is in the same place with connecting pipe 7 each other lock-joint, a plurality of air inlets 27 have been seted up to circumference is even on the lateral wall of spacing blind pipe, a plurality of buffer rods 28 of the even fixedly connected with of interior bottom surface of spacing blind pipe, the cover is equipped with the removal closure plate 29 on the buffer rod 28, plugs up spacing blind pipe through the pressure spring, the top of buffer rod 28 extends to in the connecting pipe 7.

And a supporting mechanism for limiting and supporting the sealing lantern ring 3 is arranged between the first reaction tank 2 and the sealing lantern ring 3.

The supporting mechanism comprises a supporting ring 6 fixedly connected to the side wall of the first reaction tank 2, a plurality of limiting rods 8 fixedly connected to the lower end face of the sealing sleeve ring 3 in the circumferential direction uniformly, a plurality of limiting grooves 4 are formed in the circumferential direction of the side wall of the first reaction tank 2, the limiting grooves 4 extend into the supporting ring 6, and the limiting rods 8 are connected into the limiting grooves 4 in a sliding mode.

Be equipped with the preliminary treatment mechanism that is used for carrying out the preliminary treatment activation to the adsorbent in first retort 2, preliminary treatment mechanism includes mixing tube 22 of fixed connection on 2 inside walls of first retort, a plurality of air inlet grid grooves 23 have been seted up to mixing tube 22's lateral wall circumference, fixedly connected with bleeder 24 on the right side lateral wall of first retort 2, the below of mixing tube 22 is equipped with transition pipe 25, the interior bottom fixedly connected with heating bath 26 of first retort 2, be equipped with the connector on the right side lateral wall of heating bath 26, the connector runs through first retort 2.

Be equipped with between first retort 2 and the second retort 19 and be used for the supplementary mechanism to the adsorbent raw materials supplementarily, supplementary mechanism includes both ends difference fixed connection conveyer pipe 11 between first retort 2 and the second retort 19, the cover is equipped with support sleeve 12 on conveyer pipe 11's the lateral wall, support sleeve 12's up end is equipped with the breach, conveyer pipe 11's up end fixedly connected with communicating pipe 13, fixedly connected with adjusts carousel 14 on communicating pipe 13's the lateral wall.

The gas replenishing device is characterized in that a clamping mechanism used for keeping the gas replenishing process of the replenishing mechanism sealed is arranged in the replenishing mechanism, the clamping mechanism comprises a lower matching pipe 15 which is rotatably connected to the upper end face of a communicating pipe 13, an upper matching pipe 16 is slidably connected in the lower matching pipe 15, a plurality of clamping grooves 18 are uniformly formed in the circumferential direction of the side wall of the lower matching pipe 15, a plurality of clamping plates 17 are fixedly connected to the circumferential direction of the side wall of the upper matching pipe 16, and the clamping plates 17 are matched with the clamping grooves 18.

In order to facilitate control, the side walls of the front ends of the first reaction tank 2 and the second reaction tank 19 are fixedly connected with control panels 9, and the control panels adopt the existing electric control technology.

Fixedly connected with motor cabinet 20 on the second retort 19, fixedly connected with drive motor 21 in the motor cabinet 20, be equipped with the agitator in the second retort 19, the axis of rotation fixed connection drive motor 21's of agitator output shaft.

All be equipped with observation window 10 on the lateral wall of first retort 2 and second retort 19, observe first retort 2 and the 19 internal conditions of second retort through observation window 10.

In summary, when the adsorbent is used, the adsorbent is first conveyed into the connecting pipe 7 through the conveying pipeline, the connecting pipe 7 is pressed downward, the movable blocking plate 29 is driven to pass through and slide downward by the plurality of buffer rods 28, and in an initial state, the movable blocking plate 29 is bounced to block the air inlet 27 under the action of the spring force.

After the movable blocking plate 29 is separated from the position of the air inlet 27, due to the extrusion and the liquidity of the adsorbent, gas impurities contained in the adsorbent are extruded out and are discharged through the upper opening of the connecting pipe 7, the adsorbent enters from the connecting pipe 7 and downwards extrudes the movable blocking plate 29, the air inlet 27 is opened, the gas is contacted with the adsorbent, and in the process, the sealing lantern ring 3 is abutted against the abutting ring 6 to keep the air tightness of the upper end part of the first reaction tank 2;

in the process, the limiting rod 8 is matched with the limiting groove 4, the sealing lantern ring 3 is fixed on the first reaction tank 2, then the branch pipe 24 is utilized to inject reaction gas into the first reaction tank 2, the reaction gas is contacted with the adsorbent through the gas inlet grid groove 23 and the transition pipe 25 on the mixing pipe 22 in sequence, the adsorbent is kept in an inert unified state, the process can be observed through the observation window 10, and the conveying amount of the reaction gas is controlled;

then the adsorbent enters the inner bottom of the first reaction tank 2, a certain amount of activated gas is injected by using the branch pipe 24 while the heating tank 26 heats the adsorbent, the activity of the adsorbent in a state higher than that in an inert state is kept, the subsequent activation treatment process of the adsorbent is facilitated, then raw materials required for activation are added into the conveying pipe 11 by using the connection of the lower matching pipe 15 and the upper matching pipe 16, the raw materials are injected into the second reaction tank 19 along with the flowing of the adsorbent, and then the stirrer is driven by using the transmission motor 21 to mix and stir the adsorbent.

The invention also provides an activation system of the ultra-high-purity electronic gas adsorbent, which comprises the following modes:

s1, separating impurities: separating gas impurities from activation by utilizing different densities of the adsorbent and impurity gas, and then placing the adsorbent for later use;

s2, reaction adjustment: injecting related reaction gas into the adsorbent to ensure that the inert reactions of the adsorbent in the container reach consistency, and preventing the adsorbent from being different in inert state, and after the subsequent activation treatment process is carried out, the expressed activation degrees are different to influence the normal use of the adsorbent;

s3, preprocessing: the adsorbent utilizes the even flow characteristic of adsorbent at the in-process of pouring into activation device, pours into pretreatment gas into adsorbent flow environment into, carries out the preliminary treatment activation to the adsorbent under the inert condition, for subsequent activation provides the condition, cooperates heating device to carry out preheating treatment to the adsorbent simultaneously:

s4, injecting ingredients: a conveying pipeline is constructed between the two reaction tanks by utilizing the fluidity of the adsorbent in the transfer process after pretreatment, the uniformity in the raw material adding process is ensured by utilizing the uniform fluidity of the adsorbent in a liquid state, injected component gas is continuously added into the circulating pipeline, then the adsorbent flows into the second reaction tank 19 along with the component gas, and then the next step is carried out.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.