阅读说明：本技术 一种石英管校直装置及校直方法 (Quartz tube straightening device and method ) 是由 何求 耿健 吴然红 杨军 于 2021-07-19 设计创作，主要内容包括：本发明公开了一种石英管校直装置及校直方法,包括：夹持机构,用于装夹石英管一端并使其沿轴线转动；托举机构,所述托举机构设置在石英管远离夹持机构的一端,用于托举石英管并保证石英管沿轴向延伸；校直机构,所述校直机构滑动设置在夹持机构和托举机构之间,所述校直机构上设有供石英管通过的第一校直孔。本发明保证石英管沿直线延伸；对石英管进行有效校直；监测校直孔内两端压力控制校直速度,避免损坏产品的同时保证校直的高效；适配不同管径和长度的石英管；操作简单,校直效果稳定。(The invention discloses a quartz tube straightening device and a straightening method, which comprise the following steps: the clamping mechanism is used for clamping one end of the quartz tube and enabling the quartz tube to rotate along the axis; the lifting mechanism is arranged at one end of the quartz tube, which is far away from the clamping mechanism, and is used for lifting the quartz tube and ensuring that the quartz tube extends along the axial direction; the straightening mechanism is arranged between the clamping mechanism and the lifting mechanism in a sliding mode, and a first straightening hole for the quartz tube to pass through is formed in the straightening mechanism. The invention ensures that the quartz tube extends along a straight line; effectively straightening the quartz tube; the pressure at the two ends in the straightening hole is monitored to control the straightening speed, so that the product is prevented from being damaged, and the high efficiency of straightening is ensured; adapting to quartz tubes of different tube diameters and lengths; the operation is simple, and the straightening effect is stable.)

1. A quartz tube straightening device is characterized by comprising:

the clamping mechanism (1) is used for clamping one end of the quartz tube and enabling the quartz tube to rotate along the axis;

the lifting mechanism (2) is arranged at one end, far away from the clamping mechanism (1), of the quartz tube and is used for lifting the quartz tube and ensuring that the quartz tube extends along the axial direction;

straightening mechanism (3), straightening mechanism (3) slide to set up between fixture (1) and lifting mechanism (2), be equipped with on straightening mechanism (3) and supply first alignment hole (311) that the quartz capsule passes through.

2. The quartz tube straightening device according to claim 1, wherein the lifting mechanism (2) comprises a guide mechanism and a lifting mounting frame (21) slidably arranged on the guide mechanism, two rollers with adjustable axial distance are rotatably arranged on the lifting mounting frame (21), the axes of the two rollers are arranged in parallel, and a space for the quartz tube to extend through is formed between the curved surfaces of the rollers.

3. The quartz tube straightening device according to claim 2, wherein the lifting mechanism (2) further comprises a screw rod transmission mechanism, and the lifting mounting frame (21) is connected with the screw rod transmission mechanism.

4. A quartz tube straightening device according to claim 2, characterized in that the lifting and mounting frame (21) is provided with a second straightening hole (221) for the quartz tube to pass through.

5. The quartz tube straightening device according to claim 4, further comprising a second round straightening member (22), wherein the second straightening hole (221) is coaxially formed in the second straightening member (22), a plurality of straightening mounting plates (23) are arranged on the lifting mounting frame (21), and the straightening mounting plates (23) are detachably connected with each other to form a space for clamping the second straightening member (22).

6. The quartz tube straightening device according to claim 1, wherein pressure sensors are arranged on the inner walls of the two ends of the first straightening hole (31).

7. A method for straightening a quartz tube according to any one of claims 1 to 6, characterized in that it comprises the following steps:

clamping one end of a quartz tube on the clamping mechanism (1), and arranging the other end of the quartz tube on the lifting mechanism (2) after the other end of the quartz tube passes through the first straightening hole (311);

the control clamping mechanism (1) drives the quartz tube to rotate, after the quartz tube is precisely burned to be softened, the control straightening mechanism (3) moves back and forth along the length direction of the quartz tube, and the inner wall of the first straightening hole (311) acts on the outer wall of the quartz tube to straighten the quartz tube.

8. The method for straightening the quartz tube according to claim 7, wherein the other end of the quartz tube passes through the first straightening hole (31) and then passes through the second straightening hole (221) in the step a, the straightening mechanism and the second straightening member with different diameters are replaced according to the diameter of the quartz tube, and the distance between the rollers is adjusted to ensure that the quartz tube can extend between the rollers along the length direction.

9. The method for straightening the quartz tube according to claim 7, wherein the straightening is completed when the inner walls of the two ends of the first straightening hole (311) are pressed uniformly.

10. The method as claimed in claim 7, wherein in the step b, the moving speed of the straightening mechanism is inversely related to the pressure at the end corresponding to the moving direction during the moving of the straightening mechanism.

Technical Field

The invention relates to the technical field of quartz processing, in particular to a quartz tube straightening device and a straightening method.

Background

With the rapid development of the IC industry, the semiconductor device manufacturing industry is becoming mature, and the demand for quartz glass products as important component products in semiconductor devices is increasing. Because the quartz glass has a series of characteristics of high hardness, high purity, low thermal expansion coefficient, electric insulation and the like, the processing technology of the quartz glass is very strict. Wherein quartz capsule, stick type product need carry out the smart alignment of burning usually, prior art is usually for adorning the clamp respectively with quartz capsule both ends and rotate on the chuck, observe the position that the crookedness is unusual through the human eye and carry out the smart softening of burning, and provide the aligning power and carry out the alignment, because most alignment operations are traditional manual operation, the smart qualification rate of burning and efficiency are general low on the contrary, and require comparatively high to operating personnel's skill level, the alignment required time is long, quartz capsule smart alignment of burning is yielding, the alignment is inefficient, thereby cause manufacturing cost height and unstable quality.

For example, the chinese patent document discloses "an extension and straightening device for quartz rods and an extension and straightening method thereof", which is published under the publication number CN113024094A, and includes a chuck assembly and a straightening assembly. The chuck assembly is used for clamping and extending the quartz bar. The straightening assembly comprises a straightening piece, a tension sensor and a driving piece. The straightening piece is used for straightening the part of the quartz rod with abnormal bow. The tension sensor is arranged on the straightening piece and used for collecting the tension value of the quartz bar in the straightening process. The driving piece is connected with the straightening piece, and the driving piece is used for driving the straightening piece to move towards the abnormal part of the bow degree on the quartz bar in the extending process until the tension value acquired by the tension sensor falls into the range of the preset tension value and is maintained stable. The application also provides an extension straightening method using the extension straightening device. The quartz rod straightening machine has the disadvantages that the two ends of the quartz rod are clamped by the chuck component, the other end of the quartz rod stretches the softened quartz rod through the chuck, the quartz rod can be gradually thinned, the deformation of a quartz product is caused, and the quartz rod straightening machine is not suitable for straightening on the premise of ensuring that the pipe diameter is unchanged.

Disclosure of Invention

The invention aims to solve the problems of long straightening time, low efficiency and unstable quality in the prior art, and provides a quartz tube straightening device and a straightening method, which are simple to operate, high in straightening efficiency and stable in straightening effect.

In order to achieve the purpose, the invention adopts the following technical scheme:

a quartz tube straightening apparatus, comprising:

the clamping mechanism is used for clamping one end of the quartz tube and enabling the quartz tube to rotate along the axis;

the lifting mechanism is arranged at one end of the quartz tube, which is far away from the clamping mechanism, and is used for lifting the quartz tube and ensuring that the quartz tube extends along the axial direction;

the straightening mechanism is arranged between the clamping mechanism and the lifting mechanism in a sliding mode, and a first straightening hole for the quartz tube to pass through is formed in the straightening mechanism.

The quartz tube clamp is characterized in that a clamping mechanism is arranged at one end of the quartz tube for fixing and clamping and driving the quartz tube to rotate so as to ensure that the quartz tube can be uniformly and precisely burnt and softened along the circumferential direction, and a heat source for precise burning does not need to rotate around the quartz tube along the circumferential direction; the lifting mechanism is arranged to lift and support the other end of the quartz tube, so that the axes of the two ends of the quartz tube are overlapped, the length of the quartz tube after being softened and straightened is extended to a certain extent, the lifting mechanism plays a role in guiding the quartz tube during straightening, and the extended quartz tube is ensured to extend along a straight line; the straightening mechanism is provided with a first straightening hole, the axis of the first straightening hole coincides with the axes of the two ends of the quartz tube, the aperture of the first straightening hole is slightly larger than the diameter of the quartz tube, the quartz tube can penetrate through the first straightening hole before being straightened, after the quartz tube is precisely burnt and softened, the straightening mechanism moves back and forth between the two ends of the quartz tube to drive the first straightening hole to move along a straight line, and the inner wall of the first straightening hole applies straightening force to the bent part of the quartz tube to straighten the bent part of the quartz tube in the moving process.

Preferably, the lifting mechanism comprises a guide mechanism and a lifting mounting frame arranged on the guide mechanism in a sliding manner, two rollers with adjustable axial distance are rotatably arranged on the lifting mounting frame, the axial distances of the two rollers are arranged in parallel, and a space for the quartz tube to extend through is formed between the curved surfaces of the rollers.

The circumferential curved surfaces of the rollers are used for being attached to the outer wall of the quartz tube, and the distance between the curved surfaces of the rollers is set to be wide enough, so that the quartz tube is not clamped by the rollers on two sides during extension and can pass through the space between the rollers; but not too wide to ensure that the quartz tube does not fluctuate during extension and can extend along a straight line. The gyro wheel can set up and arrange from top to bottom, and the bottom gyro wheel axle center is fixed on lifting the mounting bracket, and the top gyro wheel can be adjusted from top to bottom, and the bottom gyro wheel can also play the supporting role this moment, and the gyro wheel is preferred to be made by the stone mill.

Preferably, the lifting mechanism further comprises a screw rod transmission mechanism, and the lifting mounting frame is connected with the screw rod transmission mechanism.

The position of the lifting mechanism in the length direction of the quartz tube is accurately adjusted through the screw rod transmission mechanism so as to be suitable for straightening quartz tubes with different lengths.

Preferably, the lifting mounting frame is provided with a second straightening hole for the quartz tube to pass through.

The quartz tube is further ensured to extend along a straight line on the lifting mechanism by arranging the second straightening hole.

Preferably, still include circular shape second alignment piece, the second hole of straightening is coaxial to be located in the second alignment piece, lifting is equipped with a plurality of alignment mounting panels on the mounting bracket, can dismantle the connection between the alignment mounting panel and form the space that is used for pressing from both sides tight second alignment piece.

Second alignment member demountable installation is applicable to the quartz capsule of different diameters through the second alignment member of changing different apertures on the alignment mounting panel, can be equipped with V type groove on the alignment mounting panel and be used for spacing circular shape second alignment member, and the graphite material is preferably used to the second alignment member, avoids causing the damage to the quartz product.

Preferably, pressure sensors are arranged on the inner walls of the two ends of the first straightening hole.

Through the monitoring to the different position pressures of first alignment downthehole wall, can help automatic acquisition quartz capsule bending degree and the present moving direction of alignment mechanism, the convenient automatic control to alignment mechanism. For example, when the straightening mechanism moves to the right side, the right end of the inner wall of the first straightening hole is firstly contacted with the quartz tube, when the bending degree of the quartz tube is larger, the pressure applied to the right end of the inner wall is larger, and the left end is straightened through the first straightening hole, so that the bending degree is reduced, and the pressure is smaller. After moving and straightening for many times, the pressures at the two ends tend to be consistent.

A quartz tube straightening method comprises the following steps:

clamping one end of a quartz tube on a clamping mechanism, and arranging the other end of the quartz tube on a lifting mechanism after the other end of the quartz tube passes through a first straightening hole;

the control fixture drives the quartz tube to rotate, after the quartz tube is softened by fine firing, the straightening mechanism is controlled to reciprocate along the length direction of the quartz tube, and the inner wall of the first straightening hole acts on the outer wall of the quartz tube to be straightened.

The method is simple to operate and efficient in alignment.

Preferably, in the step a, the other end of the quartz tube passes through the first straightening hole and then passes through the second straightening hole, the straightening mechanism and the second straightening piece with different apertures are replaced according to the diameter of the quartz tube, and the distance between the rollers is adjusted to ensure that the quartz tube can extend between the rollers along the length direction.

Ensuring the linear extension of the quartz tube and enlarging the application range of the quartz tube.

Preferably, when the pressure applied to the inner walls of the two ends of the first alignment hole is consistent, the alignment is completed.

The controller is used for monitoring the pressure of the inner walls at the two ends, when the pressure difference between the two ends is smaller than a certain value, and the change tends to be stable, the fact that the acting force of the two ends of the inner wall of the first straightening hole on the quartz tube tends to be consistent indicates that the bending degree of the quartz tube is reduced and does not change any more.

Preferably, in the step b, during the movement of the straightening mechanism, the moving speed of the straightening mechanism is negatively correlated with the pressure at one end of the straightening mechanism corresponding to the moving direction.

The pressure of the inner wall at one end of the moving direction is larger, the bending degree of the quartz tube is higher, the moving speed of the straightening mechanism is reduced, the stable application of straightening force is guaranteed, the phenomenon that the quartz tube is excessively large due to excessively high impulse is avoided, and when the pressure is smaller, namely the bending degree is smaller, the straightening efficiency is guaranteed by accelerating the moving speed of the straightening mechanism.

Therefore, the invention has the following beneficial effects: (1) the roller is arranged to support the quartz tube and play a role in guiding, so that the quartz tube is ensured to extend along a straight line; (2) the quartz tube is effectively straightened through the first straightening hole which is arranged to move back and forth; (3) the straightening speed is controlled by monitoring the pressure at the two ends in the straightening hole, so that the product is prevented from being damaged, and the straightening efficiency is ensured; (4) quartz tubes with different tube diameters are adapted through adjusting the distance between the rollers and different straightening apertures, and the quartz tubes with different lengths are adapted through adjusting the horizontal position of the lifting mechanism; (5) the operation is simple, and the straightening effect is stable.

Drawings

FIG. 1 is a schematic diagram of an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of the lifting mechanism of the present invention.

Detailed Description

The invention is further described with reference to the following detailed description and accompanying drawings.

Example 1

As shown in fig. 1, a straightening apparatus for a quartz tube includes:

the height adjusting device comprises a workbench 5, wherein the bottom of the workbench 5 is provided with a height adjusting foot, and two horizontal guide posts 41 are arranged on the workbench 5 along the length direction;

the clamping mechanism 1 is arranged at one end of the workbench 5 and used for clamping one end of a quartz tube and enabling the quartz tube to rotate along an axis, the clamping mechanism 1 comprises a three-jaw chuck 11, a spindle box 12 and a first motor 13, the first motor 13 drives a spindle in the spindle box 12 to rotate so as to drive the three-jaw chuck 11 to rotate, and jaws of the chuck are made of graphite;

the lifting mechanism 2 is arranged on the guide posts 41 in a sliding mode, is arranged at one end, far away from the clamping mechanism 1, of the quartz tube and is used for lifting the quartz tube and ensuring the quartz tube to extend along the axial direction, the lifting mechanism 2 comprises a screw rod transmission mechanism and a lifting mounting frame 21 arranged on the guide posts 41 in a sliding mode, the screw rods 4 are arranged in parallel with the guide posts 41 and are arranged between the two guide posts 41, the second motor 42 drives the screw rods 4 to rotate through a belt, and the screw rods 4 drive the lifting mounting frame 21 to move along the guide posts 41 through rotation; as shown in fig. 2, two rollers made of graphite are rotatably arranged on the lift mounting frame 21, the two rollers are arranged up and down, the axes of the two rollers are arranged in parallel, the roller at the bottom is a reference roller 24, the roller at the top is a follow-up roller 25, the height of the follow-up roller 25 is adjusted by rotating an adjusting hand wheel 27 arranged at the top of the lift mounting frame 21, so as to adjust the distance between the curved surfaces of the two rollers, a space for the quartz tube to extend through is formed between the circumferential curved surfaces of the two rollers, the central axis of the space is overlapped with the central axis of the three-jaw chuck 11, the other ends of the rotating shafts of the reference roller 24 and the follow-up roller 25 are both provided with linkage gears 26 with the same diameter, and the two linkage gears 26 are meshed, so as to ensure that the rotating speeds of the reference roller 24 and the follow-up roller 25 are the same; two straightening mounting plates 23 are arranged on two sides, close to and far away from the clamping mechanism 1, of the lifting mounting frame 21, one straightening mounting plate 23 is fixedly arranged on the lifting mounting frame 21, the other straightening mounting plate is detachably connected with the straightening mounting plate 23 through bolts, clamping grooves are formed in one sides, opposite to the two straightening mounting plates 23, of the two clamping grooves, a clamping space used for clamping the second straightening piece 22 is formed in a surrounding mode, the clamping grooves can be arc grooves or V-shaped grooves and the like, the second straightening piece 22 is a circular graphite piece, a second straightening hole 221 is formed in the second straightening piece 22, and the central axis of the second straightening hole 221 is coincident with the central axis of the three-jaw chuck;

straightening mechanism 3, straightening mechanism 3 slide to set up between fixture 1 and lifting mechanism 2, and straightening mechanism 3 is including sliding the alignment board 32 that sets up on guide post 41, can dismantle through the bolt on the alignment board 32 and be connected with first straightening 31 of circular shape, and first straightening 31 is made for graphite, is equipped with first alignment hole 311 in the first straightening 31, and first alignment hole 311 axis coincides with three-jaw chuck 11 axis.

Example 2

The quartz tube straightening device has the same structure as that of the embodiment 1, and is characterized by further comprising a servo lead screw transmission mechanism for driving and controlling the moving speed of a straightening plate 31, and two annular pressure sensors are respectively arranged at two ends of the inner wall of a first straightening hole 311 along the circumferential direction.

The straightening plate 31 is automatically controlled compared to embodiment 1.

Example 3

A quartz tube straightening method comprises the following steps:

a1. replacing a first straightening piece 31 and a second straightening piece 22 which are suitable (the aperture is slightly larger than the outer diameter of the quartz tube) according to the size of the quartz tube 6, clamping one end of the quartz tube on the three-jaw chuck 11, moving the straightening plate 31 to any end, and placing the other end of the quartz tube on the reference roller 24 after sequentially passing through the first straightening hole 311 and the second straightening hole 221;

a2. the first motor 42 is driven to adjust the position of the lifting mechanism 2 according to the length of the quartz tube, so that the quartz tube as long as possible can be straightened;

a3. the height of the follow-up roller 25 is adjusted by rotating the adjusting hand wheel 27, so that the quartz tube is not clamped by the upper and lower rollers, can pass through the space between the rollers, does not fluctuate during extension and can extend along a straight line;

b1. the first motor 13 drives the three-jaw chuck 11 to drive the quartz tube to rotate, after the quartz tube is uniformly and precisely burned and softened, the straightening mechanism 3 is controlled to reciprocate along the length direction of the quartz tube, the inner wall of the first straightening hole 311 acts on the outer wall of the quartz tube to straighten, when the straightening plate 31 moves rightwards, when the pressure on the right side is large, the moving speed of the straightening plate is reduced, and when the pressure on the right side is gradually reduced, the moving speed of the straightening plate is increased; when the straightening plate moves leftwards for straightening, the moving speed of the straightening plate is related to the pressure on the left side, and when the pressures on the inner walls of the two ends of the first straightening hole 311 are consistent (the difference between the two pressures is smaller than a set value in a set time period), the straightening is finished.

The pressure of the inner wall of one end of the first straightening hole in the moving direction is larger, which indicates that the bending degree of the quartz tube on the contact side is higher, the smooth application of the straightening force is ensured by reducing the moving speed of the straightening mechanism, the phenomenon that the quartz tube becomes too large due to too high impulse is avoided, and when the pressure is smaller, namely the bending degree is smaller, the moving speed of the straightening mechanism is accelerated to ensure the straightening efficiency; when the reference roller and the follow-up roller rotate, the coaxial linkage gears are driven to rotate, the rotation speeds of the linkage gears with the same diameter are the same, the rotation speeds of the two rollers are ensured to be the same, the relative speeds of the upper surface and the lower surface of the quartz tube and the rollers are avoided, and the surface of the quartz tube is protected from being damaged; the quartz tubes with different apertures and lengths can be effectively aligned, and the product is not easy to deform and damage.