Method for operating a processing device, processing device and use of a processing device

文档序号:231533 发布日期:2021-11-09 浏览:17次 中文

阅读说明:本技术 用于运行处理设备的方法、处理设备和处理设备的应用 (Method for operating a processing device, processing device and use of a processing device ) 是由 于尔根·韦舍克 奥利弗·萨奥尔 托拜厄斯·霍夫曼 于 2020-03-20 设计创作,主要内容包括:本发明涉及一种用于运行处理设备的方法,借助其能实现优化的工件处理,本发明提出,用于运行处理设备的方法包括:将工件引导穿过填充有处理介质的、用于处理工件的处理池;在从处理池中引出工件期间和/或之后,利用冲洗介质冲刷工件;由处理介质得到冲洗介质,其中冲洗介质借助回收装置优选地通过对处理介质进行过滤、尤其是纳米过滤来得到。(The invention relates to a method for operating a processing plant, by means of which an optimized workpiece processing can be achieved, and provides that the method for operating the processing plant comprises: directing the workpiece through a treatment bath filled with a treatment medium for treating the workpiece; flushing the workpiece with a flushing medium during and/or after the extraction of the workpiece from the treatment basin; the rinsing medium is obtained from the treatment medium, wherein the rinsing medium is obtained by means of a recovery device, preferably by filtering, in particular nanofiltration, of the treatment medium.)

1. A method for operating a processing device (100), comprising:

-guiding a workpiece (104) through a treatment bath (108) filled with a treatment medium (110) for treating the workpiece (104);

flushing the workpiece (104) with a flushing medium (114) during and/or after the workpiece is withdrawn from the treatment basin (108),

characterized in that the rinsing medium (114) is obtained from the treatment medium (110).

2. Method according to claim 1, characterized in that the rinsing medium (114) is obtained by filtering, in particular nanofiltration, the treatment medium (110).

3. The method according to claim 2, characterized in that the treatment medium (110) is separated into a permeate and a retentate by filtration, in particular nanofiltration, and that the permeate is used as a flushing medium (114), in particular without a further treatment of the permeate in connection with filtration.

4. The method according to claim 2 or 3, characterized in that the treatment medium (110) is separated into a permeate and a retentate by filtration, in particular nanofiltration, and the permeate is used as a rinsing medium (114), wherein at least about 50%, in particular at least about 75%, preferably at least about 95%, of the substances required for treating the workpiece (104) are separated from the treatment medium (110) during filtration, wherein the substances required for treating the workpiece (104) preferably comprise one or more of the following substances: at least one organoalkoxysilane and/or at least one hydrolysate and/or condensation product thereof, at least one zirconium compound, titanium compound and/or hafnium compound, manganese ions, copper ions and/or fluorides, in particular free fluorides.

5. The method according to any one of claims 1 to 4, wherein the treatment medium (110) forms a layer and comprises as a layer-forming component at least one zirconium compound, titanium compound and/or hafnium compound, in particular at least one zirconium compound, and at least one organoalkoxysilane and/or at least one hydrolysis and/or condensation product thereof, and/or wherein the treatment medium is or forms a zirconium oxide-based thin-layer system.

6. The method according to one of claims 1 to 5, characterized in that an epoxy resin and/or a phenolic resin for producing and/or forming a coating is obtained by means of the treatment medium (110) and/or the workpiece (104) is provided with a layer comprising or formed by an epoxy resin and/or a phenolic resin by means of the treatment medium (110).

7. The method according to any one of claims 1 to 6, wherein the pH value of the treatment medium (110) before its filtration, in particular nanofiltration, is at least about 4, in particular at least about 4.5, preferably at least about 5.

8. The method according to any one of claims 1 to 7, characterized in that the pH value of the treatment medium (110) before its filtration, in particular nanofiltration, is at most about 6, in particular at most about 5.5, preferably at most about 5.

9. The method according to any one of claims 1 to 8, characterized in that the pH value of the rinsing medium (114) before its application onto the workpiece (104) is at least 4, in particular at least 4.5, preferably at least 5.

10. Method according to any one of claims 1 to 9, characterized in that the water equivalent of the membrane used for filtration, in particular nanofiltration, is at most about 50l/m2h. In particular at most about 35l/m2h。

11. A processing apparatus (100) for processing a workpiece (104), wherein the processing apparatus (100) comprises:

a treatment basin (108) filled or fillable with a treatment medium (110) for treating the workpiece (104);

a flushing device (112) for applying a flushing medium (114) to the workpiece (104);

a recovery device (116) for obtaining a rinsing medium (114) from the treatment medium (110), wherein the rinsing medium (114) can be obtained by means of the recovery device (116), preferably by filtering, in particular nanofiltration, of the treatment medium (110).

12. Treatment apparatus (100) according to claim 11, characterized in that the treatment apparatus (100) comprises two pump devices (124) for driving the treatment medium (110) and/or the flushing medium (114) in series, wherein an intermediate filter device (120), in particular a candle filter, is arranged between the two pump devices (124), and wherein at least one pump device (124) can be controlled and/or adjusted by means of a control device in such a way that an increasing pressure drop in the intermediate filter device (120) is compensated for, which pressure drop is caused by an increasing degree of loading of the intermediate filter device (120) with increasing operating time.

13. The processing apparatus (100) according to claim 11 or 12, characterized in that the recovery device (116) comprises one or more membrane modules (122) for filtering, in particular nanofiltration, the processing media (110), wherein the membrane modules (122) are in particular traversable by the processing media (110) in a parallel manner to each other.

14. The treatment apparatus (100) according to any one of claims 11 to 13, wherein the recovery device (116) comprises one or more membrane modules (122) for filtering, in particular nanofiltration, the treatment medium (110), wherein the membrane modules (122) each comprise one or more thin film composite membranes, preferably having an active separation layer consisting of polyamide and/or a MWCO (molecular weight cut-off) of at least 100 Da.

15. The processing plant (100) according to any of claims 11 to 14, wherein the recovery device (116) comprises only one pressure tube stage.

16. The processing apparatus (100) according to any of claims 11 to 15, wherein the recovery device (116) comprises a pre-treatment device (118) arranged upstream of one or more membrane modules (122) of the recovery device (116) with reference to the flow direction of the processing medium (110), wherein the pre-treatment device (118) comprises a segregation device for segregating the particulate content of the processing medium (110).

17. Use of the processing device (100) according to any of claims 11 to 16 for performing the method according to any of claims 1 to 10.

Technical Field

The invention relates to a processing device, a method for operating a processing device, and a use of a processing device, in particular for processing workpieces.

Background

The treatment device can be used, for example, for coating in workpiece processing. The processing apparatus may be, for example, an apparatus for performing zinc phosphate processing on a workpiece, particularly a vehicle body.

A processing device for processing workpieces is known, for example, from DE 10142933 a 1.

Disclosure of Invention

The object of the present invention is to provide a method for operating a processing device, a processing device and a use of a processing device, in which an optimized workpiece processing can be achieved.

According to the invention, this object is achieved by the features of the independent claims.

Preferably, the method for operating a processing plant comprises:

directing the workpiece through a treatment bath filled with a treatment medium for treating the workpiece;

during and/or after the removal of the workpiece from the treatment bath, the workpiece is flushed with a rinsing medium.

In this operation of the treatment plant, a large amount of flushing medium may accumulate, which is not allowed to be introduced into the treatment basin, but nevertheless has the treatment medium and therefore has to be recovered or disposed of in a complicated manner as far as possible. In addition, in such an operation of the treatment system, in the case of a treatment medium which adheres to the workpiece and is transported out of the treatment bath together with the workpiece, a large amount of the treatment medium may be consumed.

It may therefore be advantageous to obtain the rinsing medium from the treatment medium.

In one embodiment of the invention, it can be provided that the rinsing medium is obtained by filtration, in particular nanofiltration, of the treatment medium.

Preferably, the treatment medium is separated into permeate and retentate by filtration, in particular nanofiltration. The permeate can be used, for example, as a flushing medium, especially without a further treatment of the permeate in connection with the filtration.

Furthermore, it can be provided that the treatment medium is separated into a permeate and a retentate by filtration, in particular nanofiltration, and that the permeate is used as a rinsing medium, wherein at least about 50%, in particular at least about 75%, preferably at least about 95%, of the substances required for treating the workpiece are separated from the treatment medium during the filtration. Preferably, the substances, in particular the layer-forming components, required for processing the workpiece comprise one or more of the following: at least one organoalkoxysilane and/or at least one hydrolysate and/or condensation product thereof, at least one zirconium compound, titanium compound and/or hafnium compound, manganese ions, copper ions and/or fluorides, in particular free fluorides.

The organoalkoxysilanes have at least two hydrolyzable alkoxy groups per molecule and at least one organic, non-hydrolyzable group, wherein the alkoxy groups are each linked via a siloxane bond and the non-hydrolyzable groups are each linked via a silicon-carbon bond.

Advantageously, the treatment medium can form a layer and comprise, as a layer-forming component, one or more of the following substances: at least one organoalkoxysilane and/or at least one hydrolysate and/or condensation product thereof, at least one zirconium compound, titanium compound and/or hafnium compound, manganese ions, copper ions and/or fluorides, in particular free fluorides.

It can be particularly advantageous if the treatment medium forms a layer and comprises as layer-forming components at least one zirconium compound, titanium compound and/or hafnium compound, in particular at least one zirconium compound, and at least one organoalkoxysilane and/or at least one hydrolysis and/or condensation product thereof, so that and/or wherein the treatment medium is or forms a zirconium oxide-based thin-layer system.

The workpiece is treated, in particular coated.

Advantageously, the epoxy resin and/or the phenolic resin used for producing and/or forming the coating can be obtained by means of a treatment medium.

Alternatively or additionally, it can be provided that the workpiece is provided with a layer comprising or formed from an epoxy resin and/or a phenolic resin by means of a treatment medium.

In particular, a layer formed of or including an amine-modified epoxy resin (polyepoxide) may be formed.

In the case of a rinsing medium which is to be obtained from the treatment medium and which comprises in particular one or more of the substances described above, it can be advantageous for an optimized filtration, in particular nanofiltration, for the pH of the treatment medium before its filtration, in particular nanofiltration, to be adapted in particular to the membrane used for the filtration, in particular nanofiltration.

In particular, the pH is at least 4, such as at least 4.5, preferably at least 5. Alternatively or additionally, it can be provided that the pH is at most about 6, in particular at most about 5.5, preferably at most about 5.

It can also be advantageous if the pH of the rinsing medium before its application to the workpiece is at least 3, for example at least 3.5, also for example at least 4, in particular at least 4.5, preferably at least 5. In particular, an efficient flushing effect can thereby be achieved. Preferably, subsequent reactions of the treatment medium adhering to the workpiece can thus also be prevented rapidly.

Membranes are used in particular for obtaining a rinsing medium from a treatment medium. Preferably, forThe water equivalent of the filtration, especially nanofiltration, membrane is at most about 50l/m2h. In particular a maximum of about 35l/m2h。

Preferably, a plurality of membranes for filtration, in particular nanofiltration, are provided, which can be traversed in particular parallel to one another by the treatment medium in order to obtain a rinsing medium.

In particular, a processing apparatus for processing a workpiece is a processing apparatus for coating a workpiece.

Preferably, the processing apparatus comprises:

a treatment tank filled or fillable with a treatment medium for treating the workpiece;

a flushing device for applying a flushing medium to the workpiece;

a recovery device for obtaining the rinsing medium from the treatment medium, wherein the rinsing medium can be obtained by means of the recovery device, preferably by filtering, in particular nanofiltration, of the treatment medium.

Preferably, the processing device has one or more of the features and/or advantages described in connection with the method.

Preferably, the treatment device comprises two pump devices connected in series for driving the treatment medium and/or the flushing medium.

Preferably, an intermediate filter device, in particular a candle filter and/or a gravel filter and/or a glass bead filter and/or a cartridge filter (polizifillter), is arranged between the two pump devices. Preferably, the pore size of such a filter device is at most about 20 μm, such as at most about 10 μm, such as at most about 1 μm.

Preferably, the at least one pump device can be controlled and/or regulated by means of the control device of the treatment plant in such a way that an increased pressure drop in the intermediate filter device, which is caused by an increasing degree of loading of the intermediate filter device with increasing operating time, is compensated. In particular, for this purpose, at least one pump device can be triggered by means of a frequency converter.

In particular, the pressure drop can be ascertained by means of a sensor device.

Advantageously, the recovery device can comprise a plurality of membrane modules for filtering, in particular nanofiltration, of the treatment medium. Preferably, the membrane modules can be traversed parallel to one another by the treatment medium.

Preferably, the at least one pump device can be controlled and/or regulated by means of the control device of the treatment plant in such a way that an increased pressure drop in the one or more membrane modules, which pressure drop is caused by an increased degree of loading of the one or more membrane modules with increasing operating time, is compensated. In particular, for this purpose, at least one pump device can be triggered by means of a frequency converter.

Advantageously, the recovery device may comprise only one pressure tube stage (Druckrohrstufe).

Preferably, the recovery device comprises a pre-treatment device arranged upstream of one or more membrane modules of the recovery device with respect to the flow direction of the treatment medium. Preferably, the pre-treatment means comprises segregation means for segregating particulate content material of the treatment medium.

In particular, the processing device according to the invention is adapted to perform the method according to the invention.

The invention therefore also relates to a processing device, in particular a processing device according to the invention, for carrying out a method, in particular an application of a method according to the invention.

In particular, a thin layer can be applied to the workpiece by means of this method. Such a thin layer can be obtained, for example, by means of a zirconia-based thin layer system.

For example, silicone from the company kemantel (Chemetall) can be provided as the process medium for forming the layer.

When coating workpieces in the thin-film method, it can be disadvantageous to continue the coating process on the workpiece surface after the workpiece has been removed from the treatment medium. Attached liquid film and/or so-called hanging flow(which for example may overflow from the workpiece gap and/or flow over the workpiece surface) may lead to laminationAnd/or so-called hang markers. This may be manifested as considerable mass loss and/or coating defects which must be laboriously repaired in a subsequent working step.

Provision can therefore be made for the workpieces to be flushed, for example, with water, preferably deionized water (demineralized water), as they leave the treatment bath and/or after they leave the treatment bath.

The rinsing medium for rinsing the workpiece can be introduced into the treatment bath, for example, or can be received in another way.

If the rinsing medium is introduced into the treatment basin, the rinsing medium causes, for example, a dilution of the treatment medium or an otherwise influencing of the composition of the treatment medium. This can be compensated, for example, by continuously changing the treatment medium in the treatment bath, in particular by disposing of or recycling bath overflows of the treatment bath, in order to remove undesired reaction products from the bath and to avoid the build-up of non-stratified components in the bath.

However, this can lead to a large consumption of the treatment medium and/or high recycling costs as the quantity of flushing medium increases. Furthermore, the treatment medium can be enriched with undesirable substances, for example non-layering components, in particular nitrates, which can only be removed laboriously from the treatment medium.

A number of advantages are now obtained in the case of flushing medium obtained from the treatment medium. In particular, the amount of rinsing medium can be independent of the amount of treatment medium transported out of the treatment basin, discharged and/or disposed of.

The amount of rinsing medium used to flush the workpiece can be significantly increased without diluting or otherwise damaging the process medium.

Furthermore, it is not necessary to separately recover or dispose of the processing medium discharged from the processing bath due to the work.

In particular, it is thus possible to discharge less waste water from the workpiece treatment process and correspondingly to supply less fresh water, as a result of which resource-saving and cost-effective operation can be achieved.

Preferably, the permeate for flushing the workpiece is generated from the treatment medium by means of nanofiltration. Preferably, the retentate, in particular the concentrate of the treatment medium, is directed back into the treatment basin.

In particular, the retentate contains the layering component of the treatment medium. Preferably, the concentration of the layer-forming components in the treatment medium can thus be kept at least approximately constant.

In particular, it is possible to vary from 1 to 3l/m depending on the number and size of the pieces2The amount of the workpiece surface is set as the amount of the rinsing medium.

In particular, the membranes of the membrane module are thin film composite membranes, for example having an active separation layer consisting of polyamide and/or having a MWCO (molecular weight cut-off) in the range of at least about 100Da, for example at least about 150Da, preferably at most about 400Da, for example at most about 300 Da.

Surprisingly, thin-film composite membranes, in particular preferably with an active separating layer consisting of polyamide and/or an MWCO of at least 100Da, are suitable in the case of the zirconia-based thin-layer systems used to obtain the flushing medium.

The nanofiltration membrane may be, for example, NF270 of the dow chemical company and/or Desal HL of the suez company. In particular, the membrane is characterized by a MgSO preferably retaining at least about 90%, e.g., at least about 95% or at least about 97%4And (3) solution.

Preferably, the separation of the layered components of the treatment medium is achieved by means of nanofiltration without complete deionization of the treatment medium.

Preferably, the layered components of the treatment medium, in particular the at least one organoalkoxysilane and/or at least one hydrolysis and/or condensation product thereof, the at least one zirconium compound, titanium compound and/or hafnium compound, the manganese ions, the copper ions and/or fluorides, in particular the free fluorides, are retained up to at least about 50%, preferably at least about 70%, in particular at least about 90%, and/or up to about 99%, in particular up to about 98%, in order to avoid, in particular, subsequent reactions on the workpiece.

Excessive deionization of the treatment medium may lead to an excessive amount of permeateAcidification and thus over-acidification of the flushing medium. In particular, this may cause pH-induced detachment of the coating on the workpieceAnd/or the formation of rust, especially on the steel surface, which is to be avoided, of course.

In particular, the membrane is designed to avoid excessive pH changes in the acidic range and also to ensure sufficient retention of the layering components.

In particular, so-called organic soiling can occur when the treatment medium comprises, in addition to inorganic components (for example at least one zirconium compound, titanium compound and/or hafnium compound, manganese ions, copper ions and/or fluorides, in particular free fluorides), also organic components (for example at least one organoalkoxysilane and/or at least one hydrolysis and/or condensation product thereof). In particular, this situation may occur when the Flux (Flux) or the permeate volume flow, also referred to as "water equivalent", is increased.

When the flux or permeate volume flow is below a certain limit value, for example below 50l/m2h. In particular at most about 35l/m2At h, the flux reduction associated with organic fouling is preferably so small that the chemical decontamination cycle for decontaminating the membrane is weeks or even months. Thus, low-maintenance and efficient operation can be achieved.

Preferably, the Fouling potential (Fouling-potential) of the fluid volume flow (treatment medium flow) supplied to the membrane can be reduced by means of the pretreatment device. In particular, the fouling potential is expressed as a colloid index (KI) or a Sludge Density Index (SDI), wherein preferably values of less than 8, for example less than 5, in particular less than 3, are achieved.

If chemical cleaning is required, a weakly alkaline or weakly acidic rinse may be specified in particular in order to remove residual deposits from the membrane.

Preferably, the treatment medium is pre-treated before being supplied to the membrane, in particular for separating the particulate content. In particular, existing immersion bath maintenance equipment, for example for removing etching sludge and/or precipitation sludge from the treatment medium, can thus preferably be used.

The pretreatment device may comprise, for example, a chamber filter press, a gravel filter, and/or a glass bead filter. In particular, the capacity of the pretreatment device is adapted to the capacity of the membrane module or modules, in particular in order to ensure a constant volume flow at the membrane module or modules.

For example, when retrofitting existing treatment plants, bag filters with reduced particle retention are provided therein, which can be replaced, for example, by fully automatic gravel filters or glass bead filters. In particular, two containers are provided in each case, one of which is operated in the filtration mode and the other in the backwash mode or the standby mode.

Preferably, the treatment medium is not saturated in the state provided for treating the workpiece, in particular in view of the deposits that may occur.

Preferably, the treatment medium can be concentrated to a concentration factor of at least 3, in particular at least 4, without causing sedimentation. Then, in particular, one part of concentrate/retentate is derived from at least three or at least four parts of treatment medium. Accordingly, at least two or at least three permeate portions are provided as the flushing medium.

Thus, the water recovery (wrc) is, for example, at least about 60%, such as at least about 75%.

Drawings

Other preferred features and/or advantages of the invention are described in the following description and the accompanying drawings of the embodiments.

In the drawings:

FIG. 1 shows a schematic view of a treatment apparatus in which a conventional flushing device is provided; and

fig. 2 shows a schematic view of the treatment plant corresponding to fig. 1, in which a recovery device for the rinsing medium from the treatment medium is provided.

Identical or functionally equivalent elements are provided with the same reference symbols in all the figures.

Detailed Description

A first embodiment of a treatment plant, indicated as a whole with 100 in fig. 1, is, for example, an immersion treatment plant 102 for treating workpieces 104.

The workpiece 104 is, for example, a vehicle body 106.

In particular, a protective layer, for example an anti-corrosion protective layer, or other coating can be applied to the workpiece 104 by means of the treatment device 100.

For this purpose, the treatment device 100 comprises a treatment bath 108 which is filled with a treatment medium 110 and into which the workpieces 104 can be immersed.

In particular, the treatment medium 110 is a thin-film system for coating the workpiece 104.

In particular, the thin-film system is a zirconia-based thin-film system.

In the case of the removal of the workpiece 104 from the treatment bath 108, in particular with such a thin-film system, it is now possible to continue the coating of the workpiece 104 in the region in which the treatment medium 110 also adheres to the workpiece 104, for example in the form of drops or a curtain, at the surface of the workpiece 104.

Thereby possibly affecting the coating quality.

The treatment device 100 therefore preferably comprises a flushing device 112, by means of which a flushing medium 114 can be applied to the workpiece 104.

In particular, the rinsing medium 114 can remove the treatment medium 110 from the workpiece 104 immediately, so that the coating process is stopped immediately after the workpiece 104 is removed from the treatment bath 108.

A mixture of rinsing medium 114 and treatment medium 110 can therefore accumulate, which mixture, depending on the composition of treatment medium 110 and/or rinsing medium 114, must be disposed of or recycled in a complex manner as far as possible.

If the rinsing medium 114 is simply introduced into the treatment basin 108 together with the treatment medium 110 rinsed off from the workpiece 104, this may lead to dilution of the treatment medium 110 or to the formation of other chemically different components of the treatment medium 110, which may affect the treatment progress.

The second embodiment of the treatment device 100 shown in fig. 2 therefore preferably comprises a recovery device 116, by means of which the rinsing medium 114 can be obtained from the treatment medium 110.

In particular, the material-wise separation (separierbar) of the treatment medium 110 can be carried out by means of the recovery device 116, in order to separate in particular the layered components of the treatment medium 110. The treatment medium 110, from which the applied components have been removed at least substantially completely, can then be used as a rinsing medium 114.

The two fractions separated from each other by the recovery device 116 can be collected in the treatment basin 108, thereby achieving a substantially constant composition of the treatment medium 110 in the treatment basin 108.

Preferably, the recovery device 116 includes a pre-treatment device 118 and/or an intermediate filtration device 120.

In particular, particulate constituents, such as suspended matter, for example, can be separated from the treatment medium 110 by means of the pretreatment device 118 and/or the intermediate filter device 120.

One or more membrane modules 122 of the recovery device 116, which separate the liquid fraction used as rinsing medium 114 from the treatment medium 110, are preferably protected from coarse dirt by means of the pretreatment device 118 and/or the intermediate filtration device 120.

Preferably, the recovery device 116 includes a plurality of pump devices 124.

In particular, the pump device 124 is arranged upstream of the pretreatment device 118 and/or the intermediate filtration device 120.

Further pump devices 124 may be arranged downstream of the pretreatment device 118 and/or the intermediate filtration device 120 and/or upstream of one or more membrane modules 122.

Finally, a pump device 124 may be provided, for example, downstream of one or more membrane modules 122.

In particular, the pump device 124 can be controlled and/or regulated based on the pressure differential upstream and downstream of the one or more membrane modules 122.

In particular, a varying pressure difference in one or more membrane modules 122 due to dirt variations can be compensated for by means of the pump device 124. This makes it possible to reliably provide a predefined quantity of flushing medium.

Preferably, a continuous, low maintenance and efficient process operation is achieved in the embodiment of the process plant 100 shown in fig. 2.

In particular, only a small amount of additional treatment medium 110, for example a liquid such as deionized water, and/or a coated component of the treatment medium 110 is required, for example by means of the supply device 126, in order to maintain a continuous treatment operation.

In order for the recovery device 116 to reliably provide the medium used as flushing medium 114, it may be advantageous to maintain a predefined pH range of the treatment medium 110 and/or the flushing medium 114. In particular, the nanofiltration membrane may be provided as a membrane in one or more membrane modules 122, which enables a pH of at least 4, such as at least 4.5, of the rinsing medium 114 with a pH of the treatment medium 110, such as between about 4 and 5, and a retention of the layered components of the treatment medium 110 of at least about 60%, such as at least about 90%, in particular about 98%.

In particular, by maintaining the mentioned pH range, the rinsing medium 114 can be prevented from loosening or otherwise damaging the coating adhering to the workpiece 104.

Preferably, the recovery device 116 is designed and dimensioned such that only one pressure tube stage is provided. Preferably, the costs for chemical flushing can thereby be reduced. In particular, a fully automatic operation of the recovery device 116 can be achieved.

The second embodiment of the treatment device 100 shown in fig. 2 corresponds in terms of structure and function to the embodiment shown in fig. 1, so that reference is made to the preceding description thereof. In other (not shown) embodiments, any combination of features of the embodiments described hereinbefore, if necessary in combination with one or more features of the preamble of the description, may be provided.

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