阅读说明：本技术 温度传感器的安装构造体 (Temperature sensor mounting structure ) 是由 堂屋英宏 铃木贵之 柴田祐介 于 2020-03-23 设计创作，主要内容包括：本发明提供能够可靠地固定温度传感器并能够后安装于标准零部件的温度传感器的安装构造体。温度传感器(S)的安装构造体(1)安装于流体控制装置(X)的流路块(2)或流体控制设备(3),其中,该流体控制装置(X)包括：多个流路块,其在内部具备流体流路,并在至少一个面上具备所述流路的开口部；以及流体控制设备,其载置在该流路块上,该安装构造体(1)包括：矩形状的温度传感器安装片(10)；以及成对的夹持片(11、11),其从安装片(10)的相对的对边延伸设置。(The invention provides a mounting structure of a temperature sensor, which can reliably fix the temperature sensor and can be mounted on a standard component. A mounting structure (1) for a temperature sensor (S) is mounted on a flow path block (2) or a fluid control device (3) of a fluid control device (X), wherein the fluid control device (X) comprises: a plurality of flow path blocks each having a fluid flow path therein and having an opening of the flow path on at least one surface; and a fluid control device mounted on the flow path block, wherein the mounting structure (1) includes: a rectangular temperature sensor mounting piece (10); and a pair of holding pieces (11, 11) extending from opposite sides of the mounting piece (10).)

1. A mounting structure of a temperature sensor to be mounted on a flow path block of a fluid control device or a fluid control device, wherein the fluid control device comprises: a plurality of the flow path blocks each having a fluid flow path therein and having an opening of the flow path on at least one surface; and the fluid control device mounted on the flow path block, wherein the structure for mounting the temperature sensor includes:

a rectangular temperature sensor mounting piece; and

and a pair of clamping pieces extending from opposite sides of the mounting piece.

2. The temperature sensor-mounting structure according to claim 1, wherein the temperature sensor-mounting structure comprises a base member and a base member,

a stopper piece is provided so as to extend inward from the lower edge of at least one of the temperature sensor mounting piece and the holding piece.

3. The temperature sensor-mounting structure according to claim 1 or 2,

A bent portion bent inward is provided at an end edge of the clamping piece on the opposite side to the temperature sensor mounting piece.

4. The temperature sensor mounting structure according to any one of claims 1 to 3,

the surface of the temperature sensor mounting piece is covered with a band-shaped heating mechanism.

Technical Field

The present invention relates to a fluid control device used in a semiconductor manufacturing apparatus or the like, and more particularly to a mounting structure of a temperature sensor mounted on a fluid control device with a heating device.

Background

In recent years, fluid control apparatuses used in semiconductor manufacturing apparatuses, in which a plurality of types of fluid control devices are arranged in a plurality of rows and flow paths of the fluid control devices in adjacent rows are connected to each other at predetermined positions by device connection mechanisms, have been developed for integration of mass flow controllers, opening/closing valves, and the like without regard to connection.

In such an integrated fluid control device, a heating device may be required to prevent condensation, to prevent re-liquefaction when a fluid that is liquid at room temperature is gasified and flowed, or the like. As for such a fluid control device with a heating device, the following techniques are disclosed: strip-shaped planar heaters are arranged on both sides of at least 1 production line, and these planar heaters are held by a plurality of metal clips on the corresponding connector members (patent document 1).

A temperature sensor (e.g., a thermocouple) for temperature adjustment is attached to the fluid control device in which the heating device is disposed, so as to adjust the insufficient heating or the excessive heating.

In addition, conventionally, a temperature sensor for temperature adjustment is used by being attached with a tape to a flow path block on which a fluid control device is mounted, particularly, a flow path block on the downstream side of a mass flow controller that controls a flow rate.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 2002-267100

Disclosure of Invention

Problems to be solved by the invention

However, when the temperature sensor is mounted using a tape, the temperature sensor is not completely fixed, and is detached by external stress, which causes a problem that temperature control cannot be performed. Further, in order to firmly attach the temperature sensor, it is also conceivable to provide a screw hole for attaching and fixing the temperature sensor in the flow path block, but this is a special measure and causes a problem in terms of cost increase, generalization, and standardization.

The present invention has been made in view of the above problems, and an object thereof is to provide a mounting structure for a temperature sensor, which can reliably fix the temperature sensor and can be mounted on a standard component later.

Means for solving the problems

In order to solve the above problems, a mounting structure of a temperature sensor according to the present invention is mounted on a flow path block of an integrated fluid control device, the integrated fluid control device including: a plurality of the flow path blocks each having a fluid flow path therein and having an opening of the flow path on at least one surface; and a fluid control device mounted on the flow path block, wherein the structure for mounting the temperature sensor includes: a rectangular temperature sensor mounting piece; and a pair of clamping pieces extending from opposite sides of the mounting piece.

In this temperature sensor mounting structure, the pair of opposing sides extending from the mounting piece on which the temperature sensor is mounted sandwich the flow path block, and when a lifting force is applied in an upward direction, the clamping piece comes into contact with the fluid control device mounted on the flow path block, thereby effectively preventing the upward removal.

In this case, the stopper piece may be provided to extend inward from a lower edge of at least one of the temperature sensor mounting piece and the clamping piece. This allows the temperature sensor to be mounted on an upper block (fluid control device (flow rate controller, automatic on-off valve, etc.)) mounted on the flow path block (lower block).

In this case, the end edge of the clamping piece opposite to the temperature sensor mounting piece can be provided with a bent portion that is bent inward. The bent portion is prevented from hooking to a mounting surface of the flow path block on the side opposite to the temperature sensor, and from falling off even if a horizontal stress is applied to the mounting structure.

In the above case, the surface of the temperature sensor mounting sheet may be covered with a band-shaped heating means. By setting the mounting position of the temperature sensor to the mounting position of the heating mechanism, the falling off in the horizontal direction is more firmly prevented.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, it is possible to provide a mounting structure of a temperature sensor that can reliably fix the temperature sensor to a flow rate control device, particularly an integrated flow rate control device, and that can be post-mounted to a standard component.

Drawings

Fig. 1 is a perspective view showing an integrated flow rate control device before a temperature sensor mounting structure according to an embodiment of the present invention is mounted.

Fig. 2 is a perspective view showing the integrated flow rate control device to which the temperature sensor mounting structure is attached.

Fig. 3 is a perspective view showing a mounting structure of the temperature sensor, and (a) shows embodiment 1, (b) shows an example in which a bent portion is simply bent at a right angle, and (c) shows embodiment 2.

Fig. 4 is a perspective view showing a state in which the 2 nd embodiment of the temperature sensor mounting structure is mounted on the upper block.

Fig. 5 shows embodiment 3 of the temperature sensor mounting structure, in which (a) is a perspective view, (b) is a plan view, (c) is a plan view for explaining a process of mounting to a block, and (d) is a plan view showing a state after mounting to the block.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The following embodiments are merely preferable examples in nature, and the present invention is not intended to limit the scope of the application or the use thereof.

< embodiment 1 >

Fig. 1 to 3 show embodiment 1 of the temperature sensor mounting structure of the present invention.

[ fluid control device ]

The fluid control device 100 shown in fig. 1 includes: a plurality of fluid control devices 3A to 3G located at the upper stage; a plurality of flow path blocks 2 located at a lower stage, on which a plurality of fluid control devices 3A to 3G are mounted, and having fluid flow paths inside; a support member 4 that supports the plurality of flow path blocks 2; a heating mechanism H that heats the surfaces of the flow path block 2 and the fluid control devices 3A to 3G; a temperature sensor S that measures the temperature of the surface of the flow path block 2 or the fluid control devices 3A to 3G; and a temperature sensor mounting structure 1 for mounting the temperature sensor S to the flow path block 2 or the fluid control devices 3A to 3G.

The flow path block 2 and the fluid control devices 3A to 3G are 1 line, and 2 lines are shown in the illustrated example, but the number of lines is not limited to this, and the number of lines can be freely determined from 1 line to a plurality of lines depending on the device.

[ heating mechanism ]

The heating means H is in contact with the side surface of the flow path block 2, heats the temperature in the flow path to a predetermined temperature, raises the temperature of the gas (for example, hydrogen fluoride) flowing in through the inlet pipe, and prevents liquefaction of the gas liquefied at normal temperature.

The heating means H abutting against the side surface of the flow path block 2 is held and fixed by a clip 5. In the illustrated example, the height dimension of the heating mechanism H formed by the planar heater is the same as the height dimension of the flow path block 2 (lower block), but may have a height that covers the lower side of the fluid control devices 3A to 3G (upper block).

The clip 5 is formed by bending a thin plate material, so that the clamping portion 5A extends in the vertical direction and is parallel to the side surfaces of the flow path block 2 and the fluid control devices 3A to 3G. The coupling portion 5B extends along the width direction of the gas line and couples the pair of nip portions 5A.

As shown in fig. 1 to 2, the clip 5 attaches the mounting structure 1 of the temperature sensor and the heating mechanism H to the flow path block 2 and the fluid control devices 3A to 3G, and fixes the mounting structure 1 and the heating mechanism H in a sandwiched manner. Further, for example, a silicone sponge heat insulator may be disposed so as to cover the surface of the heating mechanism H and the upper surface of the block portion of the fluid controllers 3A to 3G, and these materials may be fixed by the clips 5.

[ temperature sensor ]

The temperature sensor S mounted on the mounting structure 1 of the temperature sensor transmits the measured temperature of the flow path block 2 or the fluid control devices 3A to 3G to a control device (not shown) that controls the fluid control devices 3A to 3G, and the control device can control the fluid control devices 3A to 3G based on the measured temperature and can issue a command to bring the devices to an emergency stop when the temperature deviates from a threshold value of a predetermined temperature. The temperature sensor S is not particularly limited, and a thermocouple is used in the present embodiment. In addition, a thermostat can be used as the temperature sensor S.

The temperature sensor mounting structure 1 is mounted on the flow path block 2 or the fluid control device 3, and includes a rectangular temperature sensor mounting piece 10 and a pair of holding pieces 11 extending from opposite sides 10a, 10a of the mounting piece 10.

In the present embodiment, the temperature sensor mounting piece 10 and the clamping pieces 11 and 11 are produced by bending 1 metal plate. By bending the metal plate, the clamping pieces 11 and 11 have elasticity to return to their original positions even when they are spread. The interval L between the clamping pieces 11, 11 (the width dimension of the temperature sensor mounting piece 10) is substantially the same as the width dimension of the mounted flow path block 2 or fluid control device 3. In general, the width dimension, particularly the width dimension of the flow path block 2, is standardized in the integrated fluid control device, and a plurality of kinds need not be prepared.

The opposite side 10a portions of the mounting piece 10 may be bent at right angles, and the holding pieces 11 and 11 may be formed as shown in fig. 3 (b), but in the present embodiment, as shown in fig. 3 (a), the width of the mounting piece 10 is slightly longer than the interval L between the holding pieces 11 and 11, and the holding pieces 11 and 11 are formed by bending the inside of the opposite side 10a portion at an acute angle and further bending the inside at a right angle to the mounting piece 10. This improves the elasticity by the bending process, and the flow path block 2 can be reliably clamped by the clamping pieces 11, 11. Even when the temperature sensor S is subjected to upward stress (drawing force), the upper edges of the clamping pieces 11 and 11 can be brought into contact with the bottom surface of the fluid control device 3 mounted on the adjacent flow path block 2, thereby preventing the temperature sensor S from coming off the flow path block.

The height direction dimensions of the mounting piece 10 and the clamping pieces 11, 11 may be the same as shown in fig. 3 (b), but the height direction dimension of the mounting piece 10 may be shorter than the height direction dimensions of the clamping pieces 11, 11 as shown in fig. 3 (a).

< embodiment 2 >

As shown in fig. 3 (c), the temperature sensor mounting structure 1 may be configured such that stopper pieces 12 and 13 extend inward from the lower edge of at least one of the temperature sensor mounting piece 10 and the clamping pieces 11 and 11. Preferably, the stopper pieces 12, 13 are also cut from 1 sheet of metal and formed by bending processing.

In the illustrated example, the stopper piece 12 is provided to extend from the temperature sensor mounting piece 10, and the stopper piece 13 is provided to extend from the clamping pieces 11 and 11. In particular, if there is no gap or level difference between the fluid control device 3 as the upper block and the upper surface of the flow path block 2 as the lower block, the stopper piece 13 formed to extend from the holding piece 11 cannot be used. Therefore, it is preferable to form only the stopper piece 12 extending from the temperature sensor mounting piece 10. By forming the stopper piece 12, as shown in fig. 4, when the temperature sensor S is mounted on the fluid control apparatus 3 (upper block), even when a stress (drawing force) directed upward is applied to the temperature sensor S, the stopper piece 12 abuts against the lower surface of the upper block, and the temperature sensor S can be prevented from coming out of the flow path block.

< embodiment 3 >

As shown in fig. 5 (a), the temperature sensor mounting structure 1 can have the end edges of the clamping pieces 11, 11 opposite to the temperature sensor mounting piece protrude inward. The shape of the protruding portion is not particularly limited, and in the present embodiment, the end edge is wound inward in an arc shape to form the protruding portion 11 a.

If the distance M between the projecting portions 11a, 11a is shorter than the distance L between the clamping pieces 11, the projecting portion 11a may be formed by bending only the edge.

When the fluid control device is attached to the flow path block 2 (lower block) or the fluid control device 3 (upper block), the holding pieces 11 and 11 (normally, the distance L between the holding pieces 11 and 11) are expanded to make the distance M between the protruding portions 11a and 11a equal to the width of the block, and the protruding portions 11a and 11a are slid while being in sliding contact with the side surfaces of the block (see (c) of fig. 5), and after passing over the side surfaces of the block, the protruding portions 11a and 11a are hooked on the opposing surfaces of the block by the elasticity of the holding pieces 11 and 11, so that not only when an upward stress (pulling force) is generated, but also when a horizontal stress is generated, the position of the temperature sensor S can be firmly fixed.

In the present embodiment, it is needless to say that the inside of the opposite side 10a described in embodiment 1 may be bent at an acute angle, or the stopper pieces 12 and 13 described in embodiment 2 may be formed.

Industrial applicability

As described above, the mounting structure of the temperature sensor according to the present invention can effectively prevent the temperature sensor mounted on the integrated fluid control device from coming off upward, and therefore, can be widely applied to the integrated fluid control device, and can be applied to mounting the temperature sensor on the existing integrated fluid control device.

Description of the reference numerals

1 temperature sensor mounting structure

10 temperature sensor mounting piece

11 clamping piece

12 stop sheet

13 stop sheet

2 flow path block (lower block)

3 fluid control device (Upper block)

4 support part

5 card clip

100 fluid control device

S temperature sensor

H heating mechanism