阅读说明：本技术 一种长条形光学玻璃多面图形化光学镀膜加工工艺 (Strip-shaped optical glass multi-surface graphical optical coating processing technology ) 是由 吴岳 韩威风 李涛 于 2021-08-20 设计创作，主要内容包括：本发明公开了一种长条形光学玻璃多面图形化光学镀膜加工工艺。本发明工艺选用保护油墨采用丝印方式搭配镀膜工艺完成片状图形化镀膜加工,结合高温发泡胶带粘合工艺对片状镀膜品进行粘合从而完成外形尺寸的条形加工,再同样经丝印保护油墨镀膜完成单条另外两面图形化镀膜加工,针对图形对位精度可通过激光切割十字标记进行丝印保护油墨对位确认。最终经脱胶工艺完成最终产品加工。解决现有工艺因片尺寸厚度太厚(超过10mm)无法进行光刻,且因片形状为条形无法进行涂胶、显影等工序作业的问题。(The invention discloses a strip-shaped optical glass multi-surface graphical optical coating processing technology. The process of the invention adopts the screen printing mode with the protective ink and the film coating process to finish the sheet graphical film coating processing, combines the high-temperature foaming adhesive tape bonding process to bond the sheet film coating product so as to finish the strip processing of the outline dimension, then finishes the single strip other two-sided graphical film coating processing through the screen printing protective ink film coating, and can carry out the screen printing protective ink contraposition confirmation through laser cutting cross marks aiming at the graphic contraposition precision. Finally, the final product is processed by a degumming process. The problems that photoetching cannot be carried out due to the fact that the thickness of a sheet is too thick (exceeding 10mm) and working procedures such as gluing and developing cannot be carried out due to the fact that the sheet is in a strip shape in the prior art are solved.)

1. A strip-shaped optical glass multi-surface graphical optical coating processing technology is characterized by comprising the following processing steps:

s1, laser cutting: selecting an optical glass substrate with the thickness of 2mm-20mm, finding the center of the optical glass substrate according to the overall dimension of a product, selecting an invalid area according to the dimension of a patterned coating of an actually processed product, and making a plurality of cross alignment confirmation marks with the length and width of 3mm by adopting laser cutting for accurately aligning the relative positions of patterned printing on the front side and the back side of a sheet;

s2, ultrasonic cleaning: carrying out ultrasonic cleaning on the surface of the optical glass substrate;

s3, screen printing protective ink on the first surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out first-side screen printing on the surface of the optical glass substrate with the protective ink;

s4, baking: after the protective printing ink is printed on the first surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s5 Plasma washing: after curing, the product is cleaned by Plasma;

s6, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s7: and (3) evaporation coating of the first surface: carrying out first surface evaporation coating on the cleaned product;

s8, ultrasonic cleaning: carrying out ultrasonic cleaning on the product subjected to the first-side evaporation coating, and simultaneously turning over the product and cleaning the surface;

s9, screen printing protective ink on the second surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out screen printing on the second surface of the optical glass substrate with the protective ink;

s10, baking: after the protective printing ink is printed on the second surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s11 Plasma washing: after curing, the product is cleaned by Plasma;

s12, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s13: and (3) evaporating and coating the second surface: carrying out evaporation coating on the second surface of the cleaned product;

s14, ultrasonic cleaning: performing ultrasonic cleaning on the surface of the product subjected to the second-side evaporation coating;

s15, bonding: respectively bonding the double-sided high-temperature foaming adhesive tapes on the film-coated surfaces at two sides, bonding protective glass with the TTV within 5um on the surfaces of the double-sided high-temperature foaming adhesive tapes, and then using a pressing machine with the pressure of 0.2-0.4 Mpa, heating an upper pressing plate of the pressing machine to 85 +/-5 ℃, heating a lower platform to 85 +/-5 ℃, and pressing for 15 minutes to complete the bonding of the protective glass;

s16, multi-knife cutting: cutting the sheet product into strips by adopting a multi-knife cutting machine according to the cross mark position;

s17, polishing surface processing: the polished surface processing of the other two surfaces of the strip is finished by the processes of ultrasonic cleaning, grinding, ultrasonic cleaning, polishing and ultrasonic cleaning on the cut surface;

s18, coating films on the other two sides of the strip-shaped product: repeating the steps S1-S14 aiming at the other two sides of the bar-shaped product to finish the screen printing protective ink and the evaporation coating on the other two sides of the bar-shaped product;

s19: baking and removing the adhesive, namely baking the strip-shaped coated product in an oven at 195 ℃ for 15 minutes, wherein the double-sided high-temperature foaming adhesive tape foams and the viscosity disappears, and removing the protective glass attached to the two sides;

s20: soaking the strip-shaped coating product in NMP solution at normal temperature for 12 h;

s21: and (3) dimethyl sulfoxide washing: washing the soaked strip-shaped coated product with dimethyl sulfoxide solution; removing the residual protective printing ink at the edge of the film layer;

s22: ultrasonic cleaning: and cleaning the strip-shaped coated product by ultrasonic pure water to ensure the whole appearance of the product to be clean and finish the whole process.

2. The processing technology of claim 1, wherein in steps S3 and S9, the protective ink is selected from a large-volume thermal curing protective ink THW-5B205, and the screen is selected from a 500-mesh steel wire mesh plate.

3. The processing technology of claim 1, wherein the printed silkscreen cross pattern has a positional deviation less than ± 20 μm from the laser cross pattern in steps S3 and S9.

4. Root of herbaceous plantThe processing technology of the strip-shaped optical glass multi-surface patterned optical coating according to claim 1, wherein the Plasma process parameters of the Plasma cleaning are as follows: gas-O₂Flow rate: 150sccm-300sccm, 300s-400s of time and 450w of power.

5. The processing technology of claim 1, wherein in step S15, the double-sided high-temperature foaming tape is Nitto RDS-500F high-temperature thermal foaming tape.

Technical Field

The invention relates to the field of optical coating processing, in particular to a strip-shaped optical glass multi-surface graphical optical coating processing technology.

Background

The existing glue coating-photoetching-developing process of the semiconductor can not carry out photoetching due to the fact that the thickness of a slice is too thick (more than 10mm), and can not carry out working procedures such as glue coating, developing and the like due to the fact that the slice is in a strip shape. Therefore, it is urgently needed to develop a multi-surface graphical optical coating processing technology for optical glass in the shape of a strip.

Disclosure of Invention

In order to solve the technical problem, the invention designs a strip-shaped optical glass multi-surface graphical optical coating processing technology.

The invention adopts the following technical scheme:

a strip-shaped optical glass multi-surface graphical optical coating processing technology comprises the following processing steps:

s1, laser cutting: selecting an optical glass substrate with the thickness of 2mm-20mm, finding the center of the optical glass substrate according to the overall dimension of a product, selecting an invalid area according to the dimension of a patterned coating of an actually processed product, and making a plurality of cross alignment confirmation marks with the length and width of 3mm by adopting laser cutting for accurately aligning the relative positions of patterned printing on the front side and the back side of a sheet;

s2, ultrasonic cleaning: carrying out ultrasonic cleaning on the surface of the optical glass substrate;

s3, screen printing protective ink on the first surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out first-side screen printing on the surface of the optical glass substrate with the protective ink;

s4, baking: after the protective printing ink is printed on the first surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s5 Plasma washing: after curing, the product is cleaned by Plasma;

s6, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s7: and (3) evaporation coating of the first surface: carrying out first surface evaporation coating on the cleaned product;

s8, ultrasonic cleaning: carrying out ultrasonic cleaning on the product subjected to the first-side evaporation coating, and simultaneously turning over the product and cleaning the surface;

s9, screen printing protective ink on the second surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out screen printing on the second surface of the optical glass substrate with the protective ink;

s10, baking: after the protective printing ink is printed on the second surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s11 Plasma washing: after curing, the product is cleaned by Plasma;

s12, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s13: and (3) evaporating and coating the second surface: carrying out evaporation coating on the second surface of the cleaned product;

s14, ultrasonic cleaning: performing ultrasonic cleaning on the surface of the product subjected to the second-side evaporation coating;

s15, bonding: respectively bonding double-sided high-temperature foaming adhesive tapes on the surfaces of the two sides coated with films, bonding protective glass with the thickness within 5um (TTV is the difference value between the maximum thickness and the minimum thickness of a silicon single crystal wafer in a thickness measurement value and is called as the total thickness change of the silicon wafer) on the surfaces of the double-sided high-temperature foaming adhesive tapes, then using a pressing machine with the pressure of 0.2-0.4 Mpa, heating an upper pressing plate of the pressing machine to 85 +/-5 ℃, heating a lower platform to 85 +/-5 ℃ and pressing for 15 minutes to finish the bonding of the protective glass;

s16, multi-knife cutting: cutting the sheet product into strips by adopting a multi-knife cutting machine according to the cross mark position;

s17, polishing surface processing: the polished surface processing of the other two surfaces of the strip is finished by the processes of ultrasonic cleaning, grinding, ultrasonic cleaning, polishing and ultrasonic cleaning on the cut surface;

s18, coating films on the other two sides of the strip-shaped product: repeating the steps S1-S14 aiming at the other two sides of the bar-shaped product to finish the screen printing protective ink and the evaporation coating on the other two sides of the bar-shaped product;

s19: baking and removing the adhesive, namely baking the strip-shaped coated product in an oven at 195 ℃ for 15 minutes, wherein the double-sided high-temperature foaming adhesive tape foams and the viscosity disappears, and removing the protective glass attached to the two sides;

s20: soaking the strip-shaped coating product in NMP solution at normal temperature for 12 h;

s21: and (3) dimethyl sulfoxide washing: washing the soaked strip-shaped coated product with dimethyl sulfoxide solution; removing the residual protective printing ink at the edge of the film layer;

s22: ultrasonic cleaning: and cleaning the strip-shaped coated product by ultrasonic pure water to ensure the whole appearance of the product to be clean and finish the whole process.

Preferably, in steps S3 and S9, the protective ink is selected to be large enough to contain the thermosetting protective ink THW-5B205, and the mesh plate is selected to be a 500-mesh steel mesh plate. Protective ink selection conditions: considering that the printing edge of the pattern has burrs due to too low viscosity of the protective ink, and the patterned edge has jagged edges due to too low ink output due to too high viscosity, the viscosity is selected to be 50-100 dpa.s. Secondly, considering that the coating process is a vacuum high-temperature condition, the maximum coating temperature is 160 ℃, so the ink needs to bear the coating temperature of 180 ℃ for 3 hours after being cured and gas cannot volatilize. And the hardness of the cured ink needs to be higher than 1H, and the damage of the protective ink caused by scraping in the subsequent process is avoided after the curing. Fourthly, after film plating, weak alkaline solution or NMP and degumming liquid are adopted to easily remove the protective printing ink. The steel wire mesh plate is lower in size variation quantity caused by screen printing tension when being used for printing sheet-shaped patterns with larger sizes relative to the resin screen plate.

Preferably, in steps S3 and S9, the position deviation of the silk-screen cross pattern and the laser pattern cross after printing is less than ± 20 um. The silk-screen pattern has no defect, rough edges or saw-toothed shape.

Preferably, theThe Plasma process parameters of the Plasma cleaning are as follows: gas-O₂Flow rate: 150sccm-300sccm, 300s-400s of time and 450w of power. Considering that because the printing ink is an organic material and the printing ink is doped with an organic reagent which is easy to volatilize, the organic reagent can volatilize through a baking and curing process, the volatile matter can pollute an area which is not printed with the printing ink, and if an unclean coating film layer is treated and the coating film is arranged in the polluted area, the film firmness is abnormal, namely the film layer falls off abnormally. A targeted Plasma cleaning process is required.

Preferably, in step S15, the double-sided high-temperature foaming tape is a Nitto RDS-500F high-temperature thermal foaming tape. Selecting a double-sided high-temperature foaming adhesive tape: the adhesive is required to have strong viscosity and alkali resistance, and the adhesive is subjected to contour dimension processing after being adhered, so that the right angle between the adhesive surface and the cutting surface of the product after the contour dimension processing of the product is poor if the thickness uniformity of the adhesive is poor; the thickness of the adhesive is easy to control, and the two surfaces of the adhesive are subjected to high-temperature procedures such as ink protection baking, film coating and the like after the appearance size processing; the requirement is that the adhesive tape can bear the high temperature condition of 160 ℃ after being bonded. In conclusion, the process selects the Nitto RDS-500F high-temperature thermal foaming adhesive tape which has strong viscosity (as high as 380N/cm 2), good thickness consistency (56 um +/-5 um), acid resistance, alkali resistance and easy degumming (the adhesive tape can be separated after being baked for 15 minutes at the high temperature of 180 ℃) after being bonded at the high temperature (the highest resistant temperature of 160 ℃).

The invention has the beneficial effects that: the process of the invention adopts the screen printing mode with the protective ink and the film coating process to finish the sheet graphical film coating processing, combines the high-temperature foaming adhesive tape bonding process to bond the sheet film coating product so as to finish the strip processing of the outline dimension, then finishes the single strip other two-sided graphical film coating processing through the screen printing protective ink film coating, and can carry out the screen printing protective ink contraposition confirmation through laser cutting cross marks aiming at the graphic contraposition precision. Finally, the final product is processed by a degumming process. The problems that photoetching cannot be carried out due to the fact that the thickness of a sheet is too thick (exceeding 10mm) and working procedures such as gluing and developing cannot be carried out due to the fact that the sheet is in a strip shape in the prior art are solved.

Drawings

FIG. 1 is a process flow diagram of the present invention;

Detailed Description

The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:

example (b): as shown in the attached figure 1, the processing technology of the strip-shaped optical glass multi-surface graphical optical coating comprises the following processing steps:

s1, laser cutting: selecting an optical glass substrate with the thickness of 2mm-20mm, finding the center of the optical glass substrate according to the overall dimension of a product, selecting an invalid area according to the dimension of a patterned coating of an actually processed product, and making a plurality of cross alignment confirmation marks with the length and width of 3mm by adopting laser cutting for accurately aligning the relative positions of patterned printing on the front side and the back side of a sheet;

s2, ultrasonic cleaning: carrying out ultrasonic cleaning on the surface of the optical glass substrate;

s3, screen printing protective ink on the first surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out first-side screen printing on the surface of the optical glass substrate with the protective ink;

s4, baking: after the protective printing ink is printed on the first surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s5 Plasma washing: after curing, the product is cleaned by Plasma;

s6, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s7: and (3) evaporation coating of the first surface: carrying out first surface evaporation coating on the cleaned product;

s8, ultrasonic cleaning: carrying out ultrasonic cleaning on the product subjected to the first-side evaporation coating, and simultaneously turning over the product and cleaning the surface;

s9, screen printing protective ink on the second surface: covering the protective ink to the whole graphical area of the screen plate, reducing the height of the screen plate to enable the screen plate to be in contact with the surface of a product, then uniformly scraping the screen graphical area by inclining a scraper blade by 30 degrees, and carrying out screen printing on the second surface of the optical glass substrate with the protective ink;

s10, baking: after the protective printing ink is printed on the second surface in a silk-screen mode, the product is placed in an oven and baked for 30mins at the temperature of 80-100 ℃, and the protective printing ink is completely cured;

s11 Plasma washing: after curing, the product is cleaned by Plasma;

s12, ultrasonic cleaning: cleaning the product Plasma and then cleaning the product Plasma by ultrasonic pure water;

s13: and (3) evaporating and coating the second surface: carrying out evaporation coating on the second surface of the cleaned product;

s14, ultrasonic cleaning: performing ultrasonic cleaning on the surface of the product subjected to the second-side evaporation coating;

s15, bonding: respectively bonding the double-sided high-temperature foaming adhesive tapes on the film-coated surfaces at two sides, bonding protective glass with the TTV within 5um on the surfaces of the double-sided high-temperature foaming adhesive tapes, and then using a pressing machine with the pressure of 0.2-0.4 Mpa, heating an upper pressing plate of the pressing machine to 85 +/-5 ℃, heating a lower platform to 85 +/-5 ℃, and pressing for 15 minutes to complete the bonding of the protective glass;

s16, multi-knife cutting: cutting the sheet product into strips by adopting a multi-knife cutting machine according to the cross mark position;

s17, polishing surface processing: the polished surface processing of the other two surfaces of the strip is finished by the processes of ultrasonic cleaning, grinding, ultrasonic cleaning, polishing and ultrasonic cleaning on the cut surface;

s18, coating films on the other two sides of the strip-shaped product: repeating the steps S1-S14 aiming at the other two sides of the bar-shaped product to finish the screen printing protective ink and the evaporation coating on the other two sides of the bar-shaped product;

s19: baking and removing the adhesive, namely baking the strip-shaped coated product in an oven at 195 ℃ for 15 minutes, wherein the double-sided high-temperature foaming adhesive tape foams and the viscosity disappears, and removing the protective glass attached to the two sides;

s20: soaking the strip-shaped coating product in NMP solution at normal temperature for 12 h;

s21: and (3) dimethyl sulfoxide washing: washing the soaked strip-shaped coated product with dimethyl sulfoxide solution; removing the residual protective printing ink at the edge of the film layer;

s22: ultrasonic cleaning: and cleaning the strip-shaped coated product by ultrasonic pure water to ensure the whole appearance of the product to be clean and finish the whole process.

In steps S3 and S9, the protective ink is selected to be large-volume heat-curable protective ink THW-5B205, and the screen is selected to be a 500-mesh steel wire mesh plate. Protective ink selection conditions: considering that the printing edge of the pattern has burrs due to too low viscosity of the protective ink, and the patterned edge has jagged edges due to too low ink output due to too high viscosity, the viscosity is selected to be 50-100 dpa.s. Secondly, considering that the coating process is a vacuum high-temperature condition, the maximum coating temperature is 160 ℃, so the ink needs to bear the coating temperature of 180 ℃ for 3 hours after being cured and gas cannot volatilize. And the hardness of the cured ink needs to be higher than 1H, and the damage of the protective ink caused by scraping in the subsequent process is avoided after the curing. Fourthly, after film plating, weak alkaline solution or NMP and degumming liquid are adopted to easily remove the protective printing ink. The steel wire mesh plate is lower in size variation quantity caused by screen printing tension when being used for printing sheet-shaped patterns with larger sizes relative to the resin screen plate.

In steps S3 and S9, after printing, the position deviation between the silk-screen cross pattern and the laser pattern cross is less than ± 20 um. The silk-screen pattern has no defect, rough edges or saw-toothed shape.

The Plasma process parameters of the Plasma cleaning are as follows: gas-O2, flow rate: 150sccm-300sccm, 300s-400s of time and 450w of power. Considering that because the printing ink is an organic material and the printing ink is doped with an organic reagent which is easy to volatilize, the organic reagent can volatilize through a baking and curing process, the volatile matter can pollute an area which is not printed with the printing ink, and if an unclean coating film layer is treated and the coating film is arranged in the polluted area, the film firmness is abnormal, namely the film layer falls off abnormally. A targeted Plasma cleaning process is required.

In step S15, the double-sided high-temperature foaming adhesive tape is a Nitto RDS-500F high-temperature thermal foaming adhesive tape. Selecting a double-sided high-temperature foaming adhesive tape: the adhesive is required to have strong viscosity and alkali resistance, and the adhesive is subjected to contour dimension processing after being adhered, so that the right angle between the adhesive surface and the cutting surface of the product after the contour dimension processing of the product is poor if the thickness uniformity of the adhesive is poor; the thickness of the adhesive is easy to control, and the two surfaces of the adhesive are subjected to high-temperature procedures such as ink protection baking, film coating and the like after the appearance size processing; the requirement is that the adhesive tape can bear the high temperature condition of 160 ℃ after being bonded. In conclusion, the process selects the Nitto RDS-500F high-temperature thermal foaming adhesive tape which has strong viscosity (as high as 380N/cm 2), good thickness consistency (56 um +/-5 um), acid resistance, alkali resistance and easy degumming (the adhesive tape can be separated after being baked for 15 minutes at the high temperature of 180 ℃) after being bonded at the high temperature (the highest resistant temperature of 160 ℃).

The process of the invention adopts the screen printing mode with the protective ink and the film coating process to finish the sheet graphical film coating processing, combines the high-temperature foaming adhesive tape bonding process to bond the sheet film coating product so as to finish the strip processing of the outline dimension, then finishes the single strip other two-sided graphical film coating processing through the screen printing protective ink film coating, and can carry out the screen printing protective ink contraposition confirmation through laser cutting cross marks aiming at the graphic contraposition precision. Finally, the final product is processed by a degumming process. The problems that photoetching cannot be carried out due to the fact that the thickness of a sheet is too thick (exceeding 10mm) and working procedures such as gluing and developing cannot be carried out due to the fact that the sheet is in a strip shape in the prior art are solved.

The above-described embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any way, and other variations and modifications may be made without departing from the spirit of the invention as set forth in the claims.