阅读说明：本技术 一种基于坩埚下降法生长晶体的自动控制装置及控制方法 (Automatic control device and control method for growing crystal based on Bridgman method ) 是由 徐悟生 张磊 朱逢锐 徐超 赵丽媛 甄西合 于 2021-09-09 设计创作，主要内容包括：本发明涉及晶体材料生长领域,具体的涉及一种基于坩埚下降法生长晶体的自动控制装置及控制方法,包括以下步骤：步骤一：将晶体生长的原料放入坩埚中,控制垂直升降机构运行到原始位置；步骤二：通过信息输入器输入晶体生长工艺参数；步骤三：开启自动运行控制器与伺服控制器进行通讯,将相应参数输送到伺服控制器,通过伺服控制器对伺服电机进行控制；步骤四：温度感应器和位移感应器的实时数据被信息采集器实时采集；步骤五：程序运行结束后,待炉体内温度降至室温,通过垂直升降机构调节坩埚在炉体内的位置,将晶体取出。通过自动控制装置及控制方法,晶体生长操作控制更加简单方便、自动化程度高。(The invention relates to the field of crystal material growth, in particular to an automatic control device and a control method for growing crystals based on a Bridgman method, which comprises the following steps: the method comprises the following steps: putting raw materials for crystal growth into a crucible, and controlling a vertical lifting mechanism to move to an original position; step two: inputting crystal growth process parameters through an information input device; step three: starting an automatic operation controller to communicate with a servo controller, transmitting corresponding parameters to the servo controller, and controlling a servo motor through the servo controller; step four: real-time data of the temperature sensor and the displacement sensor are collected by the information collector in real time; step five: after the program operation is finished, when the temperature in the furnace body is reduced to the room temperature, the position of the crucible in the furnace body is adjusted through the vertical lifting mechanism, and the crystal is taken out. Through the automatic control device and the control method, the crystal growth operation control is simpler and more convenient, and the automation degree is high.)

1. An automatic control device for growing crystals based on a Bridgman method is characterized in that: comprises that

The linkage control module: an information control center for regulating and controlling the relationship between the temperature and the vertical movement of the crucible in the crystal growth process through time calculation;

a crystal growth module: comprises a furnace body for crystal growth and a crucible for placing crystal growth raw materials in the furnace body;

a temperature regulation module: the input and output module is used for receiving the signal of the linkage control module to heat the furnace body and regulate and control the temperature in the furnace body, and sending a temperature signal to the linkage control module or serving as temperature control;

a crucible movement module: the crucible vertical movement control device is used for receiving a signal of the linkage control module, controlling the crucible to automatically perform vertical movement and feeding back relevant information of the current operation position, speed and direction of the linkage control module;

the linkage control module synchronously sends temperature, speed, movement direction and time parameters to the temperature regulation and control module and the crucible movement module, and the crucible movement module is static or moves in a set state while the temperature regulation and control module regulates and controls the temperature.

2. The automatic control device for growing a crystal by the Bridgman method as claimed in claim 1, wherein: the linkage control module comprises a controller used for receiving or sending a temperature regulation module signal and sending a signal to the crucible movement module, a data acquisition unit used for recording temperature change, vertical movement distance and crystal growth progress in the crystal growth process, a remote controller used for remotely detecting and controlling the linkage control module, an information input unit used for inputting movement time and speed when the crucible moves vertically and temperature values of the temperature in the furnace body at corresponding time, and an information processor used for processing and comparing information data in the controller, the data acquisition unit, the remote controller and the information input unit.

3. The automatic control device for growing a crystal by the Bridgman method as claimed in claim 1, wherein: the temperature module comprises a heater for resistance heating and/or induction heating, a temperature controller for controlling the temperature gradient in the furnace body and calculating the holding time of the crucible in the furnace body under different temperature gradients, and a temperature sensor for detecting the temperature in the furnace body, receiving signals of the temperature controller and sending temperature signals to the linkage control module.

4. The automatic control device for growing a crystal by the Bridgman method as claimed in claim 1, wherein: the crucible movement module comprises a servo controller used for receiving signals of the linkage control module, a vertical lifting mechanism used for controlling the vertical movement of the crucible, a servo motor used for receiving signals of the servo controller and providing power for the vertical lifting mechanism, and a displacement sensor used for recording the movement distance of the vertical lifting mechanism.

5. The automatic control device for growing a crystal by the Bridgman method as claimed in claim 1, wherein: the crystal growth module also comprises a furnace body frame for supporting the furnace body and a heat preservation layer arranged outside the furnace body and used for keeping the temperature of the furnace body constant.

6. A control method of an automatic control device for growing a crystal based on the Bridgman method as defined in any one of claims 1 to 5, comprising the steps of:

the method comprises the following steps: putting raw materials for crystal growth into a crucible, and controlling a vertical lifting mechanism to move to an original position;

step two: inputting crystal growth process parameters including time, temperature, speed and movement direction through an information input device, and controlling a temperature regulation module and a crucible movement module according to the parameters by a linkage control module;

step three: starting automatic operation, sending process parameters to a controller which finishes scription by an information input device, communicating the controller with a temperature controller, transmitting corresponding parameters to the temperature controller, controlling a heater by the temperature controller, heating a furnace body with a heat-insulating layer, and forming a required temperature gradient area in the furnace body; meanwhile, the controller is communicated with the servo controller, corresponding parameters are transmitted to the servo controller, the servo motor is controlled by the servo controller, and the crucible is kept static or ascends or descends at a certain speed;

step four: real-time data of the temperature sensor and the displacement sensor are collected by the information collector in real time and transmitted to the information processor to be collected;

step five: after the program operation is finished, when the temperature in the furnace body is reduced to the room temperature, the position of the crucible in the furnace body is adjusted through the vertical lifting mechanism, and the crystal is taken out.

7. The method of controlling an automatic control apparatus for growing a crystal by the Bridgman method as set forth in claim 6, wherein: the linkage control module is provided with a remote network signal transmission receiver and a remote control device for receiving the remote network signal transmission receiver and carrying out remote monitoring control on the linkage control module.

Technical Field

The invention relates to the field of crystal material growth, in particular to an automatic control device and a control method for growing crystals based on a Bridgman method.

Background

With the development of industrial technology and the wider application of crystal materials, crystal growth equipment of the conventional Bridgman method needs to be improved.

The crystal growth by the descent method is a melt method crystal growth technology, in the method, raw materials of a crystal material are required to be heated in a crucible to be partially or completely melted, then a required temperature gradient area is formed through a designed temperature field, and then the melt is slowly solidified and crystallized through the temperature gradient area to finally form the crystal material.

The crystal growth equipment by descent method is composed of crystal growth furnace body portion and mechanical lifting portion. The furnace body part heats materials through resistance heating or induction heating by a temperature control system, forms a proper temperature gradient in the furnace body through a temperature field design, and is connected with a crucible at the upper part or the lower part of a crystal furnace through a mechanical motion system, so that the crucible can vertically move up and down in the crystal furnace, and the materials slowly pass through a temperature gradient area to carry out crystal growth.

The specific operation process of the crystal growth by the descent method at present comprises the following steps: the raw materials are put into a crucible, put into a crystal growing furnace and connected with a mechanical motion system, and then the temperature control instruments including an European surface, a Japanese conductive instrument and a domestic programmable temperature control instrument are programmed according to the requirements so as to control the temperature of the crystal growing furnace. After the temperature reaches a certain temperature, the mechanical movement system needs to be operated to lower the crucible in the crystal growth furnace to start the crystal growth process. After the crystal growth is finished, the mechanical movement system needs to be operated again to stop the crucible descending. The position of the crucible in the furnace is then adjusted as required by a mechanical movement system, and it may also be necessary to match the temperature and position requirements of the crystal growth by manually adjusting the temperature control system.

The invention patent 201810378496.4 discloses a crystal growth control device and a control method, comprising a pulling device, a crucible, a controller, a rotating motor and a lifting motor; the crucible is used for containing raw material liquid, and the lifting device is positioned above the crucible; the pulling device is used for clamping seed crystals; the rotating motor and the lifting motor are respectively connected with the lifting device, and the controller is respectively connected with the rotating motor and the lifting motor; the controller enables the lifting device to ascend or descend through the lifting motor so that the lifting device can stretch into or separate from the crucible; the controller rotates the lifting device through the rotating motor; the controller may also weigh the crystal through the pulling device. The invention has the advantages and beneficial effects that: the weight of the crystal in the growth process is accurately controlled, the diameters of all cross sections of the equal-diameter part of the crystal in the axial direction are consistent in the equal-diameter growth process of the crystal, and the quality of a crystal product is improved; manual intervention is not needed, and the automation level of crystal growth control work is improved.

In the above technical solutions, a technique for growing a crystal by a czochralski method is disclosed, and although a motor is used to control the crucible up and down, the time in the temperature gradient is not controlled by time and the mechanical lifting is not linked.

Therefore, in the existing equipment for growing crystals by using the Bridgman method, the main problems are that the temperature control system and the mechanical motion control system of the equipment are two independent systems and are not linked, so that the control is not accurate enough, the manual intervention is more in the operation, and the automation degree is low.

Disclosure of Invention

Aiming at the problems that the existing Bridgman-Stockbarge-method growth equipment is low in automation degree and needs to be operated respectively by a temperature control system and a mechanical motion control system, the application aims to provide the control equipment and the control method for linking the temperature control system and the mechanical motion control system of the Bridgman-method growth equipment through time parameters, so that few or even no human intervention is performed except that raw materials enter a furnace and the crystal is discharged out of the furnace after the growth of the crystal in the Bridgman-method crystal growth process.

In order to achieve the above purposes, the technical scheme adopted by the invention is as follows: an automatic control device for growing crystal based on Bridgman method comprises

The linkage control module: an information control center for regulating and controlling the relationship between the temperature and the vertical movement of the crucible in the crystal growth process through time calculation;

a crystal growth module: comprises a furnace body for crystal growth and a crucible for placing crystal growth raw materials in the furnace body;

a temperature regulation module: the input and output module is used for receiving the signal of the linkage control module to heat the furnace body and regulate and control the temperature in the furnace body, and sending a temperature signal to the linkage control module or serving as temperature control;

a crucible movement module: the crucible vertical movement control device is used for receiving a signal of the linkage control module, controlling the crucible to automatically perform vertical movement and feeding back relevant information of the current operation position, speed and direction of the linkage control module;

the linkage control module synchronously sends temperature, speed, movement direction and time parameters to the temperature regulation and control module and the crucible movement module, and the crucible movement module is static or moves in a set state while the temperature regulation and control module regulates and controls the temperature.

The automatic control device for crystal growth based on the Bridgman-Stockbarge method is characterized in that the linkage control module comprises a controller for receiving or sending a temperature regulation and control module signal and sending the signal to the crucible movement module, a data collector for recording temperature change, vertical movement distance and crystal growth progress in the crystal growth process, a remote controller for remotely detecting and controlling the linkage control module, an information input device for inputting movement time and speed of the crucible in vertical movement and temperature value of temperature in the furnace body at corresponding time, and an information processor for processing and comparing information data in the controller, the data collector, the remote controller and the information input device.

The automatic control device for crystal growth based on the Bridgman-Stockbarge method is characterized in that the temperature module comprises a heater for resistance heating and/or induction heating, a temperature controller for controlling the temperature gradient in the furnace body and calculating the holding time of the crucible in the furnace body under different temperature gradients, and a temperature sensor for detecting the temperature in the furnace body, receiving signals of the temperature controller and sending temperature signals to the linkage control module.

The automatic control device for growing the crystal based on the Bridgman-Stockbarge method comprises a crucible movement module, a servo motor and a displacement sensor, wherein the crucible movement module comprises a servo controller used for receiving signals of the linkage control module, a vertical lifting mechanism used for controlling the vertical movement of the crucible, the servo motor used for receiving signals of the servo controller and providing power for the vertical lifting mechanism, and the displacement sensor used for recording the movement distance of the vertical lifting mechanism.

According to the automatic control device for growing the crystal based on the Bridgman-Stockbarge method, the crystal growth module further comprises a furnace body frame for supporting the furnace body and a heat insulation layer arranged outside the furnace body and used for keeping the temperature of the furnace body constant.

A control method of an automatic control device for growing crystals based on the Bridgman method as defined in any one of the preceding claims, comprising the steps of:

the method comprises the following steps: putting raw materials for crystal growth into a crucible, and controlling a vertical lifting mechanism to move to an original position;

step two: inputting crystal growth process parameters including time, temperature, speed and movement direction through an information input device, and controlling a temperature regulation module and a crucible movement module according to the parameters by a linkage control module;

step three: starting automatic operation, sending process parameters to a controller which finishes scription by an information input device, communicating the controller with a temperature controller, transmitting corresponding parameters to the temperature controller, controlling a heater by the temperature controller, heating a furnace body with a heat-insulating layer, and forming a required temperature gradient area in the furnace body; meanwhile, the controller is communicated with the servo controller, corresponding parameters are transmitted to the servo controller, the servo motor is controlled by the servo controller, and the crucible is kept static or ascends or descends at a certain speed;

step four: real-time data of the temperature sensor and the displacement sensor are collected by the information collector in real time and transmitted to the information processor to be collected;

step five: after the program operation is finished, when the temperature in the furnace body is reduced to the room temperature, the position of the crucible in the furnace body is adjusted through the vertical lifting mechanism, and the crystal is taken out.

According to the control method of the automatic control device for growing the crystal based on the Bridgman-Stockbarge method, the linkage control module is provided with the remote network signal transmission receiver and the remote control equipment for receiving the remote network signal transmission receiver and carrying out remote monitoring control on the linkage control module.

The automatic control device and the control method for growing the crystal based on the Bridgman method have the advantages that: through the automatic control device and the control method, the crystal growth operation control is simpler and more convenient, the automation degree is high, the manual operation in the crystal growth process is reduced or eliminated, the crystal growth success rate can be improved, and the product cost is reduced; data in the crystal growth process can be recorded in real time so as to track abnormal conditions in the crystal growth, and remote monitoring and control can be carried out, so that convenience is brought; the equipment has high automation degree, can realize remote monitoring and control, is beneficial to improving the crystal growth success rate and reducing the crystal product cost.

Drawings

FIG. 1 is a schematic diagram of a signal transmission process according to the present invention;

FIG. 2 is a schematic view of the top-mounted structure of the vertical lift mechanism of the present invention;

FIG. 3 is a schematic view of the bottom structure of the vertical lift mechanism of the present invention;

FIG. 4 is a schematic diagram of the temperature control curve in the furnace body according to the present invention;

FIG. 5 is a graph showing the relationship between the crucible elevation position and the temperature according to the present invention.

In the figure: the device comprises a furnace body 1, a crucible 2, a heater 3, a crystal raw material 4, a crystal 5, a heat insulation layer 6, a furnace body frame 7, a vertical lifting mechanism 8, an information processor 9, an information input device 10, a support frame 11, a support plate 12, a servo motor 13, a crucible connecting rod 14, a lead screw sliding table mechanism 15, a lead wire 16, a base 17, a lifting ring 18 and a control box 19.

Detailed Description

In order to make the technical solution better understood by those skilled in the art, the technical solution of the present invention is described below with reference to the specific embodiments and the accompanying drawings.

As shown in fig. 1-5: an automatic control device for growing crystal based on Bridgman method comprises

The linkage control module: the information control center is used for calculating and controlling the relationship between the temperature and the vertical movement of the crucible in the crystal growth process through time, a control box is integrally arranged on the outer side, and comprises a controller used for receiving or sending a temperature control module signal and sending the signal to a crucible movement module, a data collector used for recording the temperature change, the vertical movement distance and the crystal growth progress in the crystal growth process, a remote controller used for remotely detecting and controlling a linkage control module, an information input device used for inputting the movement time and speed of the crucible in the vertical movement and the temperature value of the temperature in the furnace body at the corresponding time, and an information processor used for processing and comparing the information data in the controller, the data collector, the remote controller and the information input device.

A crystal growth module: the furnace comprises a furnace body for crystal growth, a crucible for placing crystal raw materials in the furnace body, a furnace body frame for supporting the furnace body, and a heat insulation layer arranged outside the furnace body and used for keeping the temperature of the furnace body constant.

A temperature regulation module: the crucible temperature control device comprises a heater used for heating the furnace body and regulating and controlling the temperature in the furnace body, detecting the temperature of the furnace body and the time kept at the temperature, and sending a temperature signal to the linkage control module, and the crucible temperature control device comprises a temperature controller used for controlling the temperature gradient in the furnace body and calculating the time kept in the furnace body by the crucible under different temperature gradients, and a temperature sensor used for detecting the temperature in the furnace body, receiving a signal of the temperature controller, and sending the temperature signal to the linkage control module.

A crucible movement module: the crucible vertical lifting device comprises a servo controller, a vertical lifting mechanism, a servo motor and a data collector, wherein the servo controller is used for receiving a signal of a linkage control module and controlling a crucible to perform vertical lifting motion, the vertical lifting mechanism is used for controlling the vertical motion of the crucible, the servo motor is used for receiving a signal of the servo controller and providing power for the vertical lifting mechanism, the servo motor is used for recording the motion distance of the vertical lifting mechanism, the servo motor is a power source of the vertical lifting mechanism, the vertical lifting mechanism is the prior art, the vertical lifting mechanism is formed by a worm gear, a worm screw or a lead screw and the like, the moving distance of the vertical lifting mechanism is calculated by mechanical transmission parameters and the rotation rate of the servo motor and is sent to the data collector, the moving distance of the vertical lifting mechanism is equal to the vertical moving distance of the crucible in a temperature field in a furnace body, and the connecting point of the vertical lifting mechanism and the crucible can also be arranged on the bottom wall of the crucible, the vertical lifting mechanism can also be arranged above the crucible, and when the vertical lifting mechanism is arranged on the bottom wall, a support frame which is convenient for the rod body of the vertical lifting mechanism to move up and down is arranged outside the vertical lifting mechanism and below the furnace body frame; when the vertical lifting mechanism is arranged above the furnace body, a supporting plate for placing the vertical lifting mechanism is arranged on the furnace body frame.

In addition, the crucible movement module can adopt a servo controller for receiving a signal of the linkage control module and controlling the crucible to automatically move vertically, and comprises a servo controller for receiving the signal of the linkage control module, a vertical lifting mechanism for controlling the vertical movement of the crucible, a servo motor for receiving the signal of the servo controller and providing power for the vertical lifting mechanism, and a displacement sensor for recording the movement distance of the vertical lifting mechanism, wherein the servo motor transmits power to the vertical lifting mechanism by controlling a lead screw sliding table mechanism or an air pump, the vertical lifting mechanism is the prior art, the lead screw sliding table mechanism with a crucible connecting rod can be used, the vertical lifting mechanism can also be formed by components such as a worm gear or a lead screw, the displacement sensor records the movement distance of the vertical lifting mechanism and sends the signal of the movement distance of the vertical lifting mechanism to a data collector, the moving distance of the vertical lifting mechanism is equal to the vertical moving distance of the crucible in a temperature field in the furnace body, the connecting point of the vertical lifting mechanism and the crucible can be also arranged on the bottom wall of the crucible or above the crucible, and when the vertical lifting mechanism is arranged on the bottom wall, a support frame convenient for the rod body of the vertical lifting mechanism to move up and down is arranged outside the vertical lifting mechanism and below the furnace body frame; when the vertical lifting mechanism is arranged above the furnace body, a supporting plate for placing the vertical lifting mechanism is arranged on the furnace body frame.

The linkage control module synchronously sends temperature, speed, movement direction and time parameters to the temperature regulation and control module and the crucible movement module, and the crucible movement module is static or moves in a set state while the temperature regulation and control module regulates and controls the temperature.

In addition, the temperature control module sends temperature information in the crystal growth module to the linkage control module, the linkage control module processes the temperature information and then sends a vertical movement signal to the crucible movement module, and the crucible movement module controls the crucible in the crystal growth module to move vertically.

The control box comprises an electronic circuit system in a linkage control module, a temperature regulation and control module and a crucible movement module, and is placed beside the crystal growth module but is not rigidly connected with the crystal module. The temperature control module is connected with the furnace body part in the crystal growth module through a circuit to control the temperature, and the crucible movement module is connected with the movement part in the crystal growth module through a circuit to control the crucible movement. This kind of connected mode can guarantee when controlling the control box, for example middle state inspection, does not influence crystal growth module steady state, and crystal growth can normally go on.

The control box can be arranged on the side of the furnace body frame by using a base arranged below the control box, and when the control box is arranged, the control box is moved by using a lifting ring on the upper side of the control box, and the lifting ring can rotate circumferentially relative to the box body.

The technical scheme of the invention adopts the following ideas: the temperature control system and the mechanical motion system are connected through a controller (such as a Programmable Logic Controller (PLC) or an industrial personal computer) by utilizing various communication modes, the temperature control system and the mechanical motion system are connected and interacted through time distribution, namely, a script program is compiled in the controller, time, temperature, speed and motion direction parameters are set through an information input device, after the program runs, the controller is communicated with a temperature controller and a motor controller, the parameters are sent to the temperature controller and the motor controller, the temperature controller controls the temperature of a furnace body, the motor controller controls the motion state of a crucible, the linkage of the whole crystal growth system is realized, and the manual operation is reduced in the crystal growth process. The following three ways are included but not limited to:

1. the information input device of the crystal growth furnace is operated by adopting a touch screen, the PLC is utilized to control external equipment, an independent temperature controller such as a programmable temperature control instrument like an European meter controls the temperature of a temperature area in the furnace body, and the mechanical motion and the linkage of temperature control equipment are achieved through the communication between the temperature controller and the PLC; or the data input and output module of the PLC is adopted to control the temperature, and the PLC program is programmed to be linked with the mechanical motion equipment. And various data in the crystal growth process are recorded through the information transmission of the data acquisition unit to the temperature sensor and the displacement sensor.

2. The crystal growth furnace is operated by adopting an industrial personal computer to control external equipment, the programmable temperature controller controls the temperature of a temperature area in the furnace body, the industrial personal computer is communicated with the programmable temperature controller and a mechanical motion system, and the programmable temperature controller runs and keeps equipment linkage by utilizing temperature, speed, motion direction and time programming. And various data in the crystal growth process are recorded through the information transmission of the data acquisition unit to the temperature sensor and the displacement sensor.

3. The crystal growth furnace adopts an industrial personal computer and a functional board card to carry out operation control on external equipment, the temperature controller carries out temperature control on a temperature area in the furnace body, and mechanical motion and temperature control equipment linkage are achieved through communication between the temperature controller and the industrial personal computer. And various data in the crystal growth process are recorded through the information transmission of the data acquisition unit to the temperature sensor and the displacement sensor.

By adopting the mode, the crystal growth operation of the descent method can be simplified into that a program containing temperature, speed, movement direction and time is designed and input into the information processor, the crucible filled with raw materials is connected with the mechanical movement system and then adjusted to a proper position in the furnace, the programmed program is operated, and the crystal growth process of the descent method can be completed without manual operation in the middle.

A control method of an automatic control device for growing crystals based on the Bridgman method as described in any one of the above, comprising the steps of:

the method comprises the following steps: putting raw materials for crystal growth into a crucible, and controlling a vertical lifting mechanism to move to an original position;

step two: the crystal growth process parameters including time, temperature, speed and movement direction are input through the information input device, and the linkage control module controls the temperature regulation module and the crucible movement module according to the parameters.

Step three: starting automatic operation, sending process parameters to a controller which finishes scription by an information input device, communicating the controller with a temperature controller, transmitting corresponding parameters to the temperature controller, controlling a heater by the temperature controller, heating a furnace body with a heat-insulating layer, and forming a required temperature gradient area in the furnace body; meanwhile, the controller is communicated with the servo controller, corresponding parameters are transmitted to the servo controller, the servo motor is controlled by the servo controller, and the crucible is kept static or ascends or descends at a certain speed.

Step four: the real-time data of the temperature sensor and the displacement sensor are collected by the information collector in real time and transmitted to the information processor to be collected.

Step five: after the program operation is finished, when the temperature in the furnace body is reduced to the room temperature, the position of the crucible in the furnace body is adjusted through the vertical lifting mechanism, and the crystal is taken out.

According to the implementation method of the automatic control device for growing the crystal based on the Bridgman-Stockbarge method, the linkage control module is provided with the remote network signal transmission receiver and the remote control equipment for receiving the remote network signal transmission receiver and carrying out remote monitoring control on the linkage control module.

Further, the data acquisition unit records the temperature change in the furnace body, the temperature duration and the vertical movement distance of the crucible in the temperature zone, and feeds back the recorded content to the information processor for recording and comparing the relationship between the temperature in the furnace body and the crucible displacement in the crystal growth process.

Further, the data acquisition unit records the temperature change in the furnace body, the temperature duration and the vertical movement distance of the crucible in the temperature zone, and feeds back the recorded content to the information processor for recording and comparing the relationship between the temperature in the furnace body and the crucible displacement in the crystal growth process.

In the above way, the crystal growth operation by the descent method can be simplified as follows: designing a temperature program and a mechanical motion program, inputting the temperature program and the mechanical motion program into an information processor, adjusting the crucible filled with the raw materials to a proper position in the furnace after connecting the crucible with a mechanical motion system, running the programmed program, and finishing the crystal growth process by a descent method without manual operation in the middle.

Specifically, the method comprises the following steps:

example 1

Taking calcium fluoride crystal growth equipment as an example, in the equipment, a Siemens TP700 touch screen and Siemens S7-1200PLC are utilized to form a linkage control module, a Europe 3504 temperature controller is used as a heating circuit of a control core to form a temperature regulation and control module, and a servo driver, a servo motor and a lifting mechanism form a crucible movement module. The S7-1200PLC and the Europe 3504 temperature controller carry out Modbus communication control temperature adjustment, and the S7-1200PLC and the servo driver carry out communication control mechanical movement. And the Siemens TP700 smart touch screen is used as an upper computer to communicate with the Siemens S7-1200PLC to set and operate and control the crystal growth equipment.

The operation process in the crystal growth is as follows:

1. placing the crucible filled with the materials into a furnace, manually operating the vertical lifting mechanism to a specified position, or setting a motion program of the vertical lifting mechanism in advance, and controlling the vertical lifting mechanism to the specified position through the program;

2. inputting temperature, speed, movement direction and time parameters into the equipment through the touch screen, and setting the program as shown in the following table;

3. starting automatic operation, and writing temperature control program parameters of the upper computer into a set address of an European 3504 temperature control instrument and simultaneously controlling a mechanical motion system;

4. after the program run was completed, the crystal was removed from the crucible.

The device operating program is set as follows:

setting the number of stages	1	2	3	4	5	6	7
								Time (h)	8	320	8	60	8	320	0
Temperature in zone 1	1500	1500	1000	1000	1000	20	0
								Temperature in zone 2	1000	1000	1000	1000	1000	20	0
Lifting speed (mm/h)	0	2	0	1	0	0	0
								1/0 of rise	0	0	0	1	0	0	0

Description of the drawings: in the 1 st section, the temperature of the 1 st zone is increased to 1500 ℃, the temperature of the 2 nd zone is increased to 1000 ℃, the speed of the lifting mechanism is 0, and the lifting mechanism does not run for 8 hours;

in the 2 nd section, the temperature of the 1 st zone is constant at 1500 ℃ and the temperature of the 2 nd zone is constant at 1000 ℃ for 320 hours, and the crucible runs downwards at the speed of 2mm/h for 640 mm;

in the 3 rd section, the temperature of the 1 st zone is reduced to 1000 ℃ for 8 hours, the temperature of the 2 nd zone is constant at 1000 ℃, and the crucible is static;

in the 4 th stage, 60 hours, when the temperature of the 1 st zone is constant at 1000 ℃, the temperature of the 2 nd zone is constant at 1000 ℃, and the crucible rises by 60mm at the speed of 1 mm/h;

in the 5 th section, 8 hours, when the temperature in the 1 st zone is constant at 1000 ℃, the temperature in the 2 nd zone is constant at 1000 ℃, and the crucible is static;

in the 6 th section, 320 hours, when the temperature of the 1 st zone is reduced to 20 ℃, the temperature of the 2 nd zone is reduced to 20 ℃, and the crucible is static;

paragraph 7, 0 hours, the procedure ends.

The touch screen or industrial control machine of the device can display the parameters of the temperature controller such as the number of operation sections, the operation time, the set temperature, the actual temperature, the current OP output and the like, and can also export corresponding data by recording the parameters.

During the period, the temperature of the crystal growth and the position of the crucible are recorded by using a temperature sensor, and the crystal growth condition is remotely monitored by using a mobile phone.

Example 2

Taking sodium iodide crystal growth equipment as an example, in the equipment, a Kunlun Tong TPC1071G i touch screen and Siemens S7-1200PLC are utilized to form a linkage control module, a space electric AI-719P temperature controller is used as a heating circuit of a control core to form a temperature regulation and control module, and a servo driver, a servo motor and a lifting mechanism form a crucible movement module. The S7-1200PLC and the space electric AI-719P temperature controller carry out Modbus communication control temperature adjustment, and the S7-1200PLC and the servo driver carry out communication control mechanical movement. And a Kunlun state TPC1071G i touch screen is used as an upper computer to communicate with a Siemens S7-1200PLC to set and operate and control the crystal growth equipment.

The process of crystal growth is as follows:

1. placing the crucible filled with the materials into a furnace, and manually operating a vertical lifting mechanism to a specified position;

2. inputting temperature, speed, movement direction and time parameters into the equipment through the touch screen, and setting the program as shown in the following table;

3. starting automatic operation, and writing temperature control program parameters of the upper computer into a set address of the space electric AI-719P temperature control instrument and controlling a mechanical motion system;

4. after the program run was completed, the crystal was removed from the crucible.

The device operating program is set as follows:

description of the drawings: in the 1 st section, the temperature of the 1 st zone is raised to 750 ℃, the temperature of the 2 nd zone is raised to 450 ℃, the speed of the lifting mechanism is 0, and the lifting mechanism does not run for 8 hours;

in the 2 nd section, the temperature in the 1 st zone is constant at 750 ℃ and the temperature in the 2 nd zone is constant at 450 ℃ for 120 hours, and the crucible runs downwards by 360mm at 3 mm/h;

in the 3 rd section, 8 hours, the temperature in the 1 st zone is reduced to 450 ℃, the temperature in the 2 nd zone is constant to 450 ℃, and the crucible is static;

in the 4 th section, 60 hours, when the temperature of the 1 st zone is constant at 450 ℃, the temperature of the 2 nd zone is constant at 450 ℃, and the crucible rises by 120mm at the speed of 2 mm/h;

in the 5 th section, 8 hours, when the temperature in the 1 st zone is constant at 450 ℃, the temperature in the 2 nd zone is constant at 450 ℃, and the crucible is static;

in the 6 th section, the temperature of the 1 st zone is reduced to 20 ℃ and the temperature of the 2 nd zone is reduced to 20 ℃ after 80 hours, and the crucible is static;

paragraph 7, 0 hours, the procedure ends.

The touch screen or industrial control machine of the device can display the parameters of the temperature controller such as the number of operation sections, the operation time, the set temperature, the actual temperature, the current OP output and the like, and can also export corresponding data by recording the parameters.

During the period, the temperature of the crystal growth and the position of the crucible are recorded by using a temperature sensor, and the crystal growth condition is remotely monitored by using a mobile phone.

Through the technical scheme of the invention, the temperature control system and the mechanical motion system can be linked by taking the time parameter as the connection when the crystal grows by the Bridgman method, so that the full-automatic control of the crystal growth process by the Bridgman method is realized.

And parameters required to be monitored are monitored and recorded in real time in the crystal growth process for analysis and use.

And the growth state of the crystal can be remotely monitored through a mobile phone, a PC or a flat plate.

Example 3

Taking the lithium fluoride crystal growth device as an example, in the device, the Siemens S7-1200PLC + SM1231 thermocouple analog input module + SM1232 analog output module is used as a temperature control system, the S7-1200PLC + SM1232 analog output module + servo controller is used as a motion control system, and the linkage of the temperature control and mechanical motion control system is realized by programming the PLC. And the Siemens touch screen TP900 smart panel is used as an upper computer to communicate with the Siemens S7-1200PLC to set and operate and control the crystal growth equipment.

The process of crystal growth is as follows:

1. placing the crucible filled with the materials into a furnace, and manually operating a lifting mechanism to a specified position;

2. inputting temperature, speed, movement direction and time parameters into the equipment through the touch screen, and setting the program as shown in the following table;

3. starting automatic operation, writing a program into an S7-1200PLC by an upper computer, communicating the PLC with an SM1231 and an SM1232, transmitting temperature and time parameters to the two modules, and controlling a heating system; meanwhile, the PLC communicates with the servo controller and transmits the lifting speed, the running direction and the time parameters to the motion system to control the mechanical lifting;

4. after the program run was completed, the crystal was removed from the crucible.

The device operating program is set as follows:

setting the number of stages	1	2	3	4	5	6	7
								Time (h)	8	150	8	60	8	80	0
Temperature in zone 1	1020	1020	880	880	880	20	0
								Temperature in zone 2	800	800	880	880	880	20	0
Lifting speed (mm/h)	0	2	0	1	0	0	0
								1/0 of rise	0	0	0	1	0	0	0

Description of the drawings: in the 1 st section, the temperature of the 1 st zone is increased to 1020 ℃, the temperature of the 2 nd zone is increased to 800 ℃, the speed of the lifting mechanism is 0, and the lifting mechanism does not run after 8 hours;

in the 2 nd section, the temperature in the 1 st zone is constant at 1020 ℃ and the temperature in the 2 nd zone is constant at 800 ℃ for 120 hours, and the crucible downwards runs for 360mm at the speed of 3 mm/h;

in the 3 rd section, 8 hours, the temperature in the 1 st zone is reduced to 880 ℃, the temperature in the 2 nd zone is increased to 880 ℃, and the crucible is static;

in the 4 th stage, 60 hours, when the temperature of the 1 st zone is constant at 880 ℃, the temperature of the 2 nd zone is constant at 880 ℃, and the crucible rises 60mm at the speed of 1 mm/h;

in the 5 th section, 8 hours, when the temperature in the 1 st zone is constant at 880 ℃, the temperature in the 2 nd zone is constant at 880 ℃, and the crucible is static;

in the 6 th section, the temperature of the 1 st zone is reduced to 20 ℃ and the temperature of the 2 nd zone is reduced to 20 ℃ after 80 hours, and the crucible is static;

paragraph 7, 0 hours, the procedure ends.

The touch screen or industrial control machine of the equipment can display the parameters of the number of operation sections, the operation time, the set temperature, the actual temperature, the current OP output and the like, and can also derive corresponding data by recording the parameters.

During the period, the temperature of the crystal growth and the position of the crucible are recorded by using a temperature sensor, and the crystal growth condition is remotely monitored by using a mobile phone.

Through the technical scheme of the invention, the temperature control system and the mechanical motion system can be linked by taking the time parameter as the connection when the crystal grows by the Bridgman method, so that the full-automatic control of the crystal growth process by the Bridgman method is realized.

And parameters required to be monitored are monitored and recorded in real time in the crystal growth process for analysis and use.

And the growth state of the crystal can be remotely monitored through a mobile phone, a PC or a flat plate.

The above-mentioned embodiments are only for illustrating the structural conception and the characteristics of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and the protection scope of the present invention is not limited thereby. All equivalent changes or modifications made according to the spirit of the present disclosure should be covered within the scope of the present disclosure.