阅读说明：本技术 一种等离子微束同轴电极化诱导电喷打印装置及喷印方法 (Plasma microbeam coaxial electric polarization induction electric spray printing device and spray printing method ) 是由 叶冬 蒋宇 黄永安 尹周平 谢寒 于 2020-11-25 设计创作，主要内容包括：本发明属于柔性曲面电子共形微纳制造相关技术领域,其公开了一种等离子微束同轴电极化诱导电喷打印装置及喷印方法,装置包括墨水模块、等离子体模块及感应电场模块,墨水模块用于将墨液材料输送到喷嘴中,等离子体模块用于放电产生等离子体,感应电场模块用于感应电荷形成电场以使墨液喷射；墨水模块、等离子体模块及感应电场模块相配合以实现等离子体感应强电场诱导电流体泰勒锥实现驱动墨水射流喷射。利用等离子体的感生强电场来聚焦电喷射流飞行通道的空间电场,加以等离子体气流的流场进行复合约束射流鞭动和减小非均匀电场所导致曲面沉积时滑移。本发明实现射流/墨滴的精准定向运输,并实现射流/墨滴高精度高分辨率精准曲面共形定位沉积。(The invention belongs to the technical field of flexible curved surface electronic conformal micro-nano manufacturing, and discloses a plasma micro-beam coaxial electric polarization induced electrospray printing device and a spray printing method, wherein the device comprises an ink module, a plasma module and an induced electric field module, the ink module is used for conveying ink liquid materials to a nozzle, the plasma module is used for discharging to generate plasma, and the induced electric field module is used for inducing charges to form an electric field so as to eject the ink liquid; the ink module, the plasma module and the induced electric field module are matched to realize that the plasma induced strong electric field induces the electrohydrodynamic Taylor cone to realize driving the ink jet spray. The induced strong electric field of the plasma is used for focusing the space electric field of the electric jet flow flight channel, the flow field of the plasma air flow is added for carrying out composite constrained jet flow whip and reducing the slippage caused by the non-uniform electric field during curved surface deposition. The invention realizes the accurate directional transportation of the jet flow/ink drop and the accurate conformal positioning deposition of the curved surface of the jet flow/ink drop with high precision and high resolution.)

1. A plasma microbeam coaxial electric polarization induction electric spray printing device is characterized in that:

the printing device comprises an ink module, a plasma module and an induced electric field module, wherein the ink module is used for conveying ink liquid materials for printing to a nozzle, the plasma module is used for generating plasma through discharging, and the induced electric field module is used for inducing charges to form an electric field so as to enable the ink liquid to be sprayed;

the ink module, the plasma module and the induction electric field module are mutually matched to realize that the plasma induction strong electric field induces the electrohydrodynamic Taylor cone to realize driving ink drop jet injection, and simultaneously, the induced strong electric field of the plasma is utilized to focus a space electric field of an electrospray flow flight channel, and the flow field of plasma airflow is added to perform composite constrained jet flow whip and reduce the slippage when the curved surface is deposited due to non-uniform electric field, so that the directional transportation of jet flow/ink drop is realized.

2. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 1, wherein: the ink module comprises a glass tube, and an arc-shaped necking is formed at the lower end of the glass tube; the induction electric field module comprises a high dielectric filler, a first medium pipe, a first annular metal electrode and a dielectric layer, wherein an arc-shaped necking is formed at the lower end of the first medium pipe; the plasma module comprises a first glass medium pipe and an annular electrode, wherein an air inlet pipe is formed at the upper end of the first glass medium pipe, and an arc-shaped necking is formed at the lower end of the first glass medium pipe; one end of the glass tube, which is provided with an arc-shaped necking, is accommodated in the first medium tube and is close to the arc-shaped necking of the first medium tube, and the other end of the glass tube protrudes out of the first medium tube; one end of the first medium pipe with an arc-shaped necking passes through the necking of the first glass medium pipe, and the other end of the first medium pipe protrudes out of the first glass medium pipe; the high-dielectric filler is filled between the glass tube and the first medium tube so as to connect the glass tube and the first medium tube; the first annular metal electrode is arranged on the outer wall surface of the first medium pipe and is positioned at the arc-shaped necking of the first medium pipe; the dielectric layer is arranged on the outer wall surface of the annular electrode so as to completely wrap the exposed surface of the first annular metal electrode; the annular electrode is arranged on the outer wall surface of the first glass medium pipe and is adjacent to the air inlet pipe.

3. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 2, wherein: the radian of the arc-shaped necking of the first glass medium pipe is smaller than that of the arc-shaped necking of the first medium pipe; the horizontal position of the high-dielectric filler, which is adjacent to the lower end face of the glass tube, is higher than the horizontal position of the arc-shaped necking of the glass tube, and the horizontal position of the bottom end face of the arc-shaped necking of the first medium tube is lower than the arc-shaped necking of the glass tube.

4. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 2, wherein: the horizontal position of the bottom of the first annular metal electrode is flush with the necking part of the glass tube; the central axis of the first glass medium pipe and the central axis of the glass pipe are coincided with the central axis of the first medium pipe.

5. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 2, wherein: the ink module comprises a cylindrical glass tube; the plasma module comprises a first glass medium tube and an annular electrode; the induction electric field module comprises high dielectric filler, a medium tube and an induction needle, and the induction needle is L-shaped; one end of the first glass medium pipe is provided with an air inlet pipe, and the other end of the first glass medium pipe is provided with an arc-shaped necking; one end of the first medium pipe with an arc-shaped necking passes through the arc-shaped necking of the first glass medium pipe; one end of the glass tube extends into the first medium tube; the high-dielectric filler is arranged between the glass tube and the first medium tube; one end of the inducing needle sequentially penetrates through the glass tube and the high-dielectric filler and then is attached to the first glass medium tube, and the other end of the inducing needle is formed with a needle point which protrudes out of the glass tube.

6. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 1, wherein: the ink module comprises a glass tube, and an arc-shaped necking is formed at one end of the glass tube; the induction electric field module comprises high dielectric filler, a second medium pipe and a second annular metal electrode; the plasma module comprises a second glass medium pipe and a third annular metal electrode, and an air inlet pipe is formed at the upper end of the second glass medium pipe; one end of the glass tube, which is formed with an arc-shaped necking, is accommodated in the second medium tube; one end of the second medium pipe is accommodated in the second glass medium pipe; the high-dielectric filler is filled between the glass tube and the second medium tube; the second annular metal electrode is arranged on the inner wall surface of the second medium pipe; the third annular metal electrode is arranged on the outer wall surface of the second glass medium pipe and is adjacent to the air inlet pipe; the second medium pipe, the second annular metal electrode and the end opening of the second glass medium pipe far away from the air inlet pipe are all outwards turned horn-shaped.

7. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 6, wherein: the second annular metal electrode is directly attached to the second medium pipe, and the second medium pipe serves as a dielectric layer.

8. The plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to claim 6, wherein: the ink module comprises a glass tube; the plasma module comprises a small plasma nozzle; the induction electric field module comprises a second annular metal electrode; the glass tube is vertically arranged, the lower end of the glass tube is of a necking structure, the third annular metal electrode is arranged on the outer wall of the necking area of the glass tube, the small plasma nozzle is obliquely arranged beside the glass tube, and the extension line of the axis of the small plasma nozzle is connected with the outer wall surface of the third annular metal electrode.

9. A jet printing method is characterized in that: the jet printing method is to jet print by using the plasma microbeam coaxial electric polarization induction electrospray printing device of any one of claims 1-8.

Technical Field

The invention belongs to the technical field related to flexible curved surface electronic conformal micro-nano manufacturing, and particularly relates to a plasma microbeam coaxial electric polarization induced electrospray printing device and a spray printing method.

Background

The jet printing technology directly realizes large-area, heterogeneous multi-layer and high-precision manufacturing of micro-nano structures on various substrates such as planes/curved surfaces, organic/inorganic substrates and the like, and is considered as an ideal mode for electronic manufacturing of flexible curved surfaces. The electrohydrodynamic spray printing utilizes a high-voltage electric field to induce the hanging drop at the nozzle to generate rheological flow so as to form a Taylor cone, jet flow/liquid drops are ejected from the top end of the Taylor cone, micro-nano-size liquid drop spray printing is realized, a micro-nano structure can be prepared by utilizing a high-viscosity solution, the technical bottlenecks of the traditional spray printing ink compatibility, low printing resolution and the like are broken through, the characteristics of low cost, large area, high efficiency, non-contact and good compatibility with R2R manufacturing can be kept, and the electrohydrodynamic spray printing has the unique advantages of high resolution, wide material printable range, multiple printing modes and the like. Electrospray accuracy depends on the ejection frequency and flight trajectory of the charged droplets/jets in the electric field. The electrospinning direct writing is regarded as one of macro-micro-nano cross-scale three-dimensional structure printing and manufacturing technologies with application prospects, but the conformal accurate direct writing deposition of the curved surface of the electrospun fiber is realized, so that the technology becomes a practical manufacturing means of flexible curved surface electronics, and the influence of the curved surface substrate and a non-uniform electric field caused by the curved surface substrate on jet motion and positioning deposition must be solved.

The formation of stable cone jet in electrospray must reach the threshold of critical field intensity, but when printing on a curved substrate, the section of a large curved insulating substrate is high/thick, and it is generally difficult to construct sufficient field intensity. Micro liquid drops/jet flow formed by electro-jet printing carry charges, the space flight track of the micro liquid drops/jet flow is easily interfered by an external electromagnetic field, and the charges are accumulated and coulomb repulsion force is generated when the micro liquid drops/jet flow is deposited on the surface of a high dielectric material or the surface (such as an insulating substrate and the like) with slow charge dissipation, so that the subsequent ink drops/jet flow has abnormal phenomena of deviation, rebound, retraction or whip; the curved substrate or the printed structure can cause the nonuniformity of a space electric field, influence the flight positioning of charged droplets/jet flow, and cause the turbulence of the flight track of the jet flow and even the instability phenomena of splitting, atomization and the like.

In the prior art, the induction by a collecting plate and the control by an auxiliary electrode are two major control methods for realizing the electrospray jet printing constrained deposition, but the direct-writing deposition of a single fiber and the minimum resolution of a fiber micro-nano structure cannot be accurately controlled, and the positioning deposition of a high-precision high-resolution precise micro-nano pattern is difficult to realize; introduction of sheath gas focusing (such as flow focusing, electrokinetic focusing and air flotation deposition) is a new development trend of spinning jet flow jet printing control research, and most of the methods are developed aiming at far-field electrostatic spinning or planar electrospinning direct writing so far, and the preparation control of accurate deposition and patterning of single nanofiber on a curved surface is still to be deeply researched.

Therefore, the field needs to provide a novel electro-jet printing auxiliary method capable of synchronously focusing a space electric field and accelerating dissipation of surface polarization charges, so as to realize accurate positioning deposition of jet flow/ink droplets with high precision and high resolution of a curved surface, overcome influence of a curved surface substrate and a non-uniform electric field caused by the curved surface substrate on jet flow motion and positioning deposition, solve printing and forming of a complex-surface fine micro-nano structure, and provide technical support for efficient and high-precision conformal jet printing manufacturing of flexible curved surface electronic micro-nano structures such as a three-dimensional circuit, an aircraft intelligent skin, a robot electronic skin and the like.

Disclosure of Invention

Aiming at the defects or the improvement requirements of the prior art, the invention provides a plasma microbeam coaxial electric polarization induction electric spray printing device and a spray printing method, wherein the printing device introduces plasma restraint, utilizes plasma microbeam coaxial electrostatic induction polarization ink liquid to be sprayed, utilizes a local dynamic strong electric field of plasma jet to focus an electric jet flow flight channel space electric field, coaxially restrains jet flow whip and reduces curved surface deposition slippage caused by a non-uniform electric field, weakens the residual charge interference on the surface of a high-dielectric substrate by means of a gas conductor electrode, can realize precise positioning deposition of jet flow/ink drops with high precision and high resolution, and overcomes the problem that the non-uniform electric field caused by the curved surface substrate affects jet flow movement and positioning deposition.

In order to achieve the above objects, according to one aspect of the present invention, there is provided a plasma microbeam coaxial electric polarization induced electrospray printing apparatus, the printing apparatus including an ink module, a plasma module and an induced electric field module, the ink module is used for delivering ink material for printing to a nozzle, the plasma module is used for generating plasma by discharging, and the induced electric field module is used for inducing charges to form an electric field so as to eject the ink;

the ink module, the plasma module and the induction electric field module are mutually matched to realize that the plasma induction strong electric field induces the electrofluid Taylor cone to realize driving ink water jet injection, and simultaneously, the induced strong electric field of the plasma is utilized to focus a space electric field of an electrospray flow flight channel, and the flow field of plasma airflow is added to carry out composite constrained jet flow whip and reduce curved surface deposition slippage caused by non-uniform electric fields, so that the directional transportation of jet flow/ink drops is realized.

Further, the ink module comprises a glass tube, and an arc-shaped necking is formed at the lower end of the glass tube; the induction electric field module comprises a high dielectric filler, a first medium pipe, a first annular metal electrode and a dielectric layer, wherein an arc-shaped necking is formed at the lower end of the first medium pipe; the plasma module comprises a first glass medium pipe and an annular electrode, wherein an air inlet pipe is formed at the upper end of the first glass medium pipe, and an arc-shaped necking is formed at the lower end of the first glass medium pipe; one end of the glass tube, which is provided with an arc-shaped necking, is accommodated in the first medium tube and is close to the arc-shaped necking of the first medium tube, and the other end of the glass tube protrudes out of the first medium tube; one end of the first medium pipe with an arc-shaped necking passes through the necking of the first glass medium pipe, and the other end of the first medium pipe protrudes out of the first glass medium pipe; the high-dielectric filler is filled between the glass tube and the first medium tube so as to connect the glass tube and the first medium tube; the first annular metal electrode is arranged on the outer wall surface of the first medium pipe and is positioned at the arc-shaped necking of the first medium pipe; the dielectric layer is arranged on the outer wall surface of the annular electrode so as to completely wrap the exposed surface of the first annular metal electrode; the annular electrode is arranged on the outer wall surface of the first glass medium pipe and is adjacent to the air inlet pipe.

Further, the radian of the arc-shaped necking of the first glass medium pipe is smaller than that of the arc-shaped necking of the first medium pipe; the horizontal position of the high-dielectric filler, which is adjacent to the lower end face of the glass tube, is higher than the horizontal position of the arc-shaped necking of the glass tube, and the horizontal position of the bottom end face of the arc-shaped necking of the first medium tube is lower than the arc-shaped necking of the glass tube.

Furthermore, the horizontal position of the bottom of the first annular metal electrode is flush with the necking position of the glass tube; the central axis of the first glass medium pipe and the central axis of the glass pipe are coincided with the central axis of the first medium pipe.

Further, the ink module includes a cylindrical glass tube; the plasma module comprises a first glass medium tube and an annular electrode; the induction electric field module comprises high dielectric filler, a medium tube and an induction needle, and the induction needle is L-shaped; one end of the first glass medium pipe is provided with an air inlet pipe, and the other end of the first glass medium pipe is provided with an arc-shaped necking; one end of the first medium pipe with an arc-shaped necking passes through the arc-shaped necking of the first glass medium pipe; one end of the glass tube extends into the first medium tube; the high-dielectric filler is arranged between the glass tube and the first medium tube; one end of the inducing needle sequentially penetrates through the glass tube and the high-dielectric filler and then is attached to the first glass medium tube, and the other end of the inducing needle is formed with a needle point which protrudes out of the glass tube.

Further, the ink module comprises a glass tube, and an arc-shaped necking is formed at one end of the glass tube; the induction electric field module comprises high dielectric filler, a second medium pipe and a second annular metal electrode; the plasma module comprises a second glass medium pipe and a third annular metal electrode, and an air inlet pipe is formed at the upper end of the second glass medium pipe; one end of the glass tube, which is formed with an arc-shaped necking, is accommodated in the second medium tube; one end of the second medium pipe is accommodated in the second glass medium pipe; the high-dielectric filler is filled between the glass tube and the second medium tube; the second annular metal electrode is arranged on the inner wall surface of the second medium pipe; the third annular metal electrode is arranged on the outer wall surface of the second glass medium pipe and is adjacent to the air inlet pipe; the second medium pipe, the second annular metal electrode and the end opening of the second glass medium pipe far away from the air inlet pipe are all outwards turned horn-shaped.

Furthermore, the second annular metal electrode is directly attached to the second dielectric tube, and the second dielectric tube serves as a dielectric layer.

Further, the ink module includes a glass tube; the plasma module comprises a small plasma nozzle; the induction electric field module comprises a second annular metal electrode; the glass tube is vertically arranged, the lower end of the glass tube is of a necking structure, the third annular metal electrode is arranged on the outer wall of the necking area of the glass tube, the small plasma nozzle is obliquely arranged beside the glass tube, and the extension line of the axis of the small plasma nozzle is connected with the outer wall surface of the third annular metal electrode.

According to another aspect of the invention, a jet printing method is provided, wherein the jet printing method is used for jet printing by using the plasma microbeam coaxial electric polarization induction electrospray printing device.

In general, compared with the prior art, the plasma microbeam coaxial electric polarization induction electrospray printing device and the jet printing method provided by the invention have the following beneficial effects:

1. the invention provides a device for coaxially inducing ink-jet printing by a plasma induction electric field and a jet printing method aiming at the key scientific problems of jet whip restraint and focusing positioning.

2. The invention utilizes plasma to charge the passive electrode, namely utilizes plasma to induce an electrofluid Taylor cone by a strong electric field to realize driving ink jet injection, and realizes a novel injection principle.

3. According to the jet principle, a space electric field of an electrospray flow flight channel can be focused by utilizing an induced strong electric field of plasma, and the flow field of plasma airflow is added to carry out composite constrained jet flow whip, so that accurate directional transportation of jet flow/ink drops is realized.

4. By utilizing the strong electric field and the airflow flow field of the plasma jet, the curved surface deposition slippage caused by the non-uniform electric field can be remarkably reduced, and the residual charge interference on the surface of the high-dielectric substrate is weakened by the aid of the gaseous conductor electrode, so that high-precision high-resolution precise positioning deposition of jet/ink drops is realized.

5. The high-dielectric filler is filled between the glass tube and the first medium tube to connect the glass tube and the first medium tube and coaxially fix the relative positions of the glass tube and the first medium tube, and plays a role in shielding induced charges for ink in the glass tube.

6. Thereby form the toper ink droplet by the needle point induction more easily, thereby form the taylor cone at sharp portion electric field sharply increasing more easily, this will be favorable to reducing required voltage for plasma is changeed and is produced the electric charge of response and lead to the ink liquid efflux, can reduce the inside backward flow effect of solution when ink liquid backward flow in a discharge cycle simultaneously, improves ink liquid fluidic stability, expands the suitability of shower nozzle.

7. The trumpet-shaped nozzle enables the weak ionized air flow to have a tendency of diffusing outwards in the radial direction, the air flow focusing effect on the middle ink jet flow is reduced, meanwhile, the unstable phenomenon possibly occurring in the ink jet flow due to the fluctuation influence of the air flow is reduced, the diffused weak ionized air flow enables the electric field in the space between the spray head and the substrate to tend to be stable, and the ink jet flow under the action of the electric field tends to be in a stable flying state.

Drawings

FIG. 1 is a schematic cross-sectional view of a plasma microbeam coaxial electric polarization induced electrospray printing apparatus provided by the present invention;

FIG. 2 is a partial schematic view of the plasma microbeam coaxial electric polarization induced electrospray printing apparatus of FIG. 1 in an operating state;

FIG. 3 is a schematic cross-sectional view of a plasma microbeam coaxial electric polarization-induced electrospray printing apparatus provided in embodiment 1 of the present invention;

FIG. 4 is a partial schematic view of the plasma microbeam coaxial electric polarization-induced electrospray printing apparatus of FIG. 3 in a use state;

FIG. 5 is a schematic cross-sectional view of a plasma microbeam coaxial electric polarization-induced electrospray printing apparatus provided in embodiment 2 of the present invention;

fig. 6 is a schematic cross-sectional view of a plasma microbeam coaxial electric polarization-induced electrospray printing apparatus provided in embodiment 3 of the present invention.

The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-glass tube, 2-high dielectric filler, 3-first medium tube, 4-first annular metal electrode, 5-dielectric layer, 6-first glass medium tube, 7-annular electrode, 8-plasma jet, 9-weak ionized air flow, 10-ink water jet, 11-space under the nozzle, 12-substrate, 13-induction needle, 14-second medium tube, 15-second annular metal electrode, 16-second glass medium tube, 17-third annular metal electrode, and 18-small plasma nozzle.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

Referring to fig. 1 and 2, the plasma microbeam coaxial electric polarization induced electrospray printing apparatus provided by the present invention includes an ink module, a plasma module and an induced electric field module, wherein the ink module is configured to deliver an ink material for printing to a nozzle, the plasma module is configured to generate plasma by discharging, and the induced electric field module is configured to induce charges to form an electric field so as to eject ink droplets. The ink module, the plasma module and the induced electric field module are mutually matched, so that the aim that the plasma induced strong electric field induces the Taylor cone of the electric fluid to drive the jet injection of ink liquid can be realized, the induced strong electric field of the plasma is utilized to focus the space electric field of an electric injection flow flight channel, the flow field of plasma air flow is added to carry out compound constraint jet whipping and reduce curved surface deposition slippage caused by non-uniform electric fields, the accurate directional transportation of jet/ink drops is realized, the residual charge interference on the surface of a high-dielectric substrate is weakened by a gas electrode, the high-precision high-resolution accurate curved surface conformal positioning deposition of the jet/ink drops is realized, the influence of the non-uniform electric field on the jet motion and the positioning deposition caused by a curved substrate is overcome, the difficult problem of printing and forming of the fine micro-nano structure with a complex, The high-efficiency and high-precision conformal jet printing manufacturing of flexible curved surface electronic micro-nano structures such as robot electronic skin provides technical support.

The ink module comprises a glass tube 1, and an arc-shaped necking is formed at the lower end of the glass tube 1. The induction electric field module comprises a high dielectric filler 2, a first medium pipe 3, a first annular metal electrode 4 and a dielectric layer 5, wherein an arc-shaped necking is formed at the lower end of the first medium pipe 3. The plasma module comprises a first glass medium pipe 6 and an annular electrode 7, an air inlet pipe is formed at the upper end of the first glass medium pipe 6, an arc-shaped necking is formed at the lower end of the first glass medium pipe 6, and the radian of the arc-shaped necking of the first glass medium pipe 6 is smaller than that of the arc-shaped necking of the first medium pipe 3.

One end of the glass tube 1, which is provided with an arc-shaped necking, is contained in the first medium tube 3 and is adjacent to the arc-shaped necking of the first medium tube 3, and the other end of the glass tube protrudes out of the first medium tube 3. One end of the first medium pipe 3 with an arc-shaped necking passes through the arc-shaped necking of the first glass medium pipe 6, and the other end of the first medium pipe protrudes out of the first glass medium pipe 6. The high dielectric filler 2 is filled between the glass tube 1 and the first medium tube 3 to connect the glass tube 1 and the first medium tube 3 and coaxially fix the relative positions of the glass tube 1 and the first medium tube 3, and plays a role in shielding induced charges for ink in the glass tube 1.

The horizontal position of the high-dielectric filler 2 close to the lower end face of the glass tube 1 is higher than the horizontal position of the arc-shaped necking of the glass tube 1, and the horizontal position of the bottom end face of the arc-shaped necking of the first medium tube 3 is lower than the arc-shaped necking of the glass tube 1, so that the area around the arc-shaped necking of the glass tube 1 is protected.

The first annular metal electrode 4 is arranged on the outer wall surface of the first medium pipe 3 and is positioned at the arc-shaped reducing opening of the first medium pipe 3. The bottom of the first annular metal electrode 4 is located at a horizontal position which is approximately flush with the necking position of the glass tube 1. The dielectric layer 5 is disposed on the outer wall surface of the annular electrode 4 to completely wrap the exposed surface of the first annular metal electrode 4.

In the present embodiment, the central axis of the first glass medium tube 6 and the central axis of the glass tube 1 coincide with the central axis of the first medium tube 3; the lower end surface of the necking of the first glass medium pipe 6 is positioned at a horizontal position which is basically flush with the lower end surface of the first annular metal electrode 4. The annular electrode 7 is arranged on the outer wall surface of the first glass medium pipe 6 and is adjacent to the air inlet pipe.

The upper end opening of the glass tube 1 is connected with an ink supply system, the ink supply system is conveyed to the glass tube 1 until the position of a reducing opening of the glass tube 1 in a low-flow-rate state, an upper end air inlet pipe of the first glass medium tube 6 is connected with an air supply system, and the air supply system supplies inert gas, particularly He or Ar gas, into the first glass medium tube 6. The annular electrode 7 is connected with a high-voltage power supply, the high-voltage power supply refers to a power supply with the output voltage at the level of kV, specifically, a pulse high-voltage power supply, the high-voltage power supply provides high voltage for the annular electrode 7 so that introduced gas is ionized to generate a plasma jet 8, and the plasma jet 8 is downwards sprayed from the vicinity of the annular electrode 7 along an annular through groove formed by the first medium tube 3 and the first glass medium tube 6 until the vicinity of the dielectric layer 5 and the first annular metal electrode 4.

When the plasma jet 8 is jetted to the dielectric layer 5 and the vicinity of the first annular metal electrode 4, the positive charges carried by the head of the plasma jet 8 will accumulate to the outer surface of the upper end of the dielectric layer 5, so that the upper end of the first annular metal electrode 4 electrostatically induces negative charges, the charge distribution in the first annular metal electrode 4 is changed, then the negative charges with the polarity opposite to that of the upper end are induced at the lower end of the first annular metal electrode 4, the positive charges of the first annular metal electrode 4 are located at a horizontal position approximately flush with the throat of the glass tube 1, the free charges existing in the ink at the throat of the glass tube 1 in a small amount migrate under the action of the electric field formed at the lower end of the first annular metal electrode 4, and are largely accumulated on the ink-air interface, the ink is gradually deformed under the action of gravity, surface tension, viscous force and electric field force to form a taylor cone, and a fine ink jet 10 is ejected.

When the plasma jet 8 is sprayed to the vicinity of the dielectric layer 5 and the first annular metal electrode 4, which is equivalent to charging the first annular metal electrode 4, at this time, the gas ionization degree of the plasma jet 8 is weakened and becomes a weak ionized gas flow 9, the weak ionized gas flow 9 continues to be sprayed downwards and is sprayed from the throat of the first glass medium tube 6 to enter a space 11 below the sprayer, the throat of the first medium tube 3 shields the vicinity of the throat of the glass tube 1, so that the situation that the ink charges are neutralized and a taylor cone jet cannot be formed due to direct contact between the weak ionized gas flow 9 and the taylor cone formed at the port of the throat of the glass tube 1 is avoided, because the interior of the sprayer is axially symmetric, the throat of the first glass medium tube 6 has a certain radian and the fluid property of the gas flow, the weak ionized gas flow 9 has the function of gas flow focusing in the space 11 below the sprayer, the electric field carried by the weak ionized air flow 9 can generate a radial focusing electric field in a space 11 below the spray head, under the combined action of air flow focusing and electric field focusing, the ink jet flow 10 can further reduce the beam diameter thereof, is transported in flight in the air and is finally deposited on the substrate 12, the substrate 12 can be a plane or a curved surface, a conductive or an insulating substrate, and the weak ionized air flow 9 can remarkably reduce the surface residual charge interference on the substrate 12, thereby realizing coaxial constraint jet flow whip and reducing curved surface deposition slip caused by non-uniform electric fields, weakening the surface residual charge interference of a high dielectric substrate, realizing accurate positioning deposition of jet flow/ink drop with high accuracy and high resolution, and overcoming the problem that the non-uniform electric field caused by the curved surface substrate affects jet flow movement and positioning deposition.

Referring to fig. 3 and 4, an ink module for delivering ink droplets and a plasma module for generating plasma of a plasma microbeam coaxial electric polarization induced electrospray printing apparatus according to embodiment 1 of the present invention are substantially the same as those of the printing apparatus shown in fig. 1. The ink module comprises a glass tube 1, the plasma module comprises a first glass medium tube 6 and an annular electrode 7, and a necking is not formed at one end of the glass tube 1 contained in the first medium tube 3, and the glass tube is cylindrical. The original first annular metal electrode 4 in the induction electric field module is changed into a inducing needle 13, the dielectric layer 5 is replaced by the tube wall of the first medium tube 3, therefore, the induction electric field module comprises a high dielectric filler 2, the first medium tube 3 and the inducing needle 13, and the inducing needle 13 is made of metal and is L-shaped. One end of the inducing needle 13 is horizontally arranged, the end penetrates through the glass tube 1 and the high dielectric filler 2 and then is tightly attached to the inner wall of the first medium tube 3, the other end of the inducing needle 13 is provided with a needle point, the inducing needle is vertically arranged, and the horizontal position where the needle point is located is slightly lower than the end surface of the necking of the glass tube 1, namely the needle point slightly protrudes out of the tube opening of the glass tube 1.

The ink supply system delivers ink into the glass tube 1 in a low flow speed state, the ink submerges the part of the induction needle 13 exposed in the glass tube 1 until the ink flows to the necking part of the glass tube 1, and further flows the fine needle point protruding from the necking end surface of the glass tube 1 along the induction needle 13 until the fine needle point completely covers the induction needle 13, and at this time, the end part of the glass tube 1 is already formed with a taper shape caused by the needle point.

When the plasma jet 8 is injected to the area near the L-shaped cross rod end surface of the induction needle 13, the positive charge on the head of the plasma jet 8 will be accumulated on the wall surface of the area where the first medium pipe 3 is jointed with the L-shaped cross rod end surface of the induction needle 13, so that the upper end of the induction needle 13 induces the negative charge, the charge distribution in the induction needle 13 is changed, and further the positive charge with the polarity opposite to that of the upper end is induced at the lower end needle point of the induction needle 13, because the curvature radius at the needle point is small, the intensity of the electric field is relatively large, because the cone-shaped structure of the ink is originally formed at the needle point, the electric field of the cone-shaped ink is sharply increased, the Taylor cone is easily formed to inject the fine ink jet 10, and the plasma jet 8 charges the induction needle 13 to become the weak ionization air flow 9, the weak ionized air flow 9 continues to be sprayed downwards to enter a space 11 below the spray head, an electric field carried by the weak ionized air flow 9 can generate a radially focused electric field in the space 11 below the spray head, and under the combined action of air flow focusing and electric field focusing, the ink water jet 10 further reduces the beam diameter, is transported in air flight and is finally deposited on the substrate 12.

The printing device provided by the embodiment 1 of the invention simplifies the placement of the induction metal electrode, is induced by the needle point to be easier to form conical ink drops, and is easier to form a Taylor cone due to the sharp increase of the electric field at the tip, so that the required voltage can be favorably reduced, the plasma is easier to generate induced charges and cause ink jet, and meanwhile, the reflux effect in the solution can be reduced when the ink flows back in a discharge period, the stability of the ink jet is improved, and the applicability of the nozzle is expanded.

Referring to fig. 5, the working principle of the ink module and the plasma module included in the plasma microbeam coaxial electric polarization induced electrospray printing apparatus provided in embodiment 2 of the present invention is consistent with the respective correspondence in the plasma microbeam coaxial electric polarization induced electrospray printing apparatus of fig. 1, wherein the ink module includes a glass tube 1, an ink supply system delivers ink into the glass tube 1 in a low flow rate state to a constricted position thereof, the plasma module generates a plasma jet to be ejected downward along a circular channel, a second medium tube 14 in an induced electric field module corresponds to a first medium tube 3 in fig. 1, a second circular metal electrode 15 corresponds to a first circular metal electrode 4 in fig. 1, and a second glass medium tube 16 corresponds to a first glass medium tube 6 in fig. 1, with the difference that lower end openings of the second medium tube 14, the second circular metal electrode 15, and the second glass medium tube 16 are outwards turned trumpet-shaped, when the airflow is sprayed out of the nozzle, the airflow is diffused to the outside, the second annular metal electrode 15 is directly attached to the second dielectric tube 14, and the second dielectric tube 14 serves as a dielectric layer.

When the plasma jet 8 is jetted to the vicinity of the second annular metal electrode 15, positive charges carried by the head of the plasma jet 8 are accumulated to the surface of the joint part of the second medium tube 14 and the second annular metal electrode 15, so that negative charges are electrostatically induced at the upper end of the second annular metal electrode 15, positive charges are induced at the lower end of the second annular metal electrode 15, the horizontal position of the positive charges of the annular metal electrode is approximately flush with the necking of the glass tube 1, free charges slightly existing in ink at the necking of the glass tube 1 are migrated and accumulated on an ink-air interface under the action of an electric field formed at the lower end of the second annular electrode 15, and the ink is gradually deformed to form a taylor cone under the action of gravity, surface tension, viscous force and electric field force, and fine ink jet 10 is jetted.

The plasma jet 8 is charged by the second annular metal electrode 15, the ionization degree of the plasma jet is weakened to become weak ionized air flow 9, the weak ionized air flow 9 is ejected from the horn-shaped nozzle to enter a space 11 below the nozzle, the horn-shaped nozzle enables the weak ionized air flow 9 to have a tendency of radially outward diffusion, the air flow focusing effect on the middle ink jet 10 is reduced, meanwhile, the unstable phenomenon possibly occurring on the ink jet 10 due to the fluctuation influence of the air flow is reduced, the electric field in the space between the nozzle and the substrate 12 tends to be stable due to the diffused weak ionized air flow 9, and the ink jet 10 under the action of the electric field enters a stable flying state and is finally deposited on the substrate 12.

Compared with the plasma microbeam coaxial electric polarization induced electric spray printing device shown in fig. 1, the plasma microbeam coaxial electric polarization induced electric spray printing device provided in embodiment 2 of the invention further simplifies the placement of the induction metal electrode, avoids possible fluctuation influence of gas flow on ink jet, stabilizes an electric field between the nozzle and the substrate, increases the stability of printing jet from two aspects of a flow field and the electric field, enables the printing device to perform stacked printing on the substrate to form a stable high-precision 3D micro-nano structure, and widens the printing application occasions of the nozzle.

Referring to fig. 6, a plasma microbeam coaxial electric polarization induced electrospray printing apparatus provided in embodiment 3 of the present invention is a simple deformable structure of the plasma microbeam coaxial electric polarization induced electrospray printing apparatus in fig. 1, an ink module of the apparatus includes a glass tube 1, a plasma module includes a small plasma nozzle 18, and an induced electric field module includes a third annular metal electrode 17; wherein, the glass tube 1 is vertically arranged, the lower end thereof is of a necking structure, the third annular metal electrode 17 is arranged on the outer wall of the necking area of the glass tube 1, the small plasma nozzle 18 is obliquely arranged beside the glass tube 1, and the extension line of the axis thereof is connected with the outer wall surface of the third annular metal electrode 17.

The upper end of the glass tube 1 is connected with an ink supply system, the ink supply system conveys ink liquid into the glass tube 1 to the position of the contraction opening in a low-flow-rate state, the small plasma spray head 18 generates a fine plasma jet 8 and sprays the fine plasma jet to the third annular metal electrode 17, when the plasma jet 8 impacts the third annular metal electrode 17, charge substances in the plasma are transferred to the third annular metal electrode 17 to enable the third annular metal electrode 17 to have high voltage, a high-voltage electric field is generated, a small amount of free charges in the ink liquid at the arc-shaped contraction opening are transferred and gathered on a gas-liquid interface in a large amount under the action of the high-voltage electric field, and the ink liquid is gradually deformed to form a water jet Taylor cone and sprays the ink liquid 10 under the action of gravity, surface tension, viscous force and electric field force.

Compared with the plasma microbeam coaxial electric polarization induced electrospray printing device in fig. 1, the plasma microbeam coaxial electric polarization induced electrospray printing device provided by the embodiment 3 of the invention further simplifies the spray printing structure and complexity, and plays a role in connecting the electrode with high voltage in a mode of charging the metal electrode by plasma, so that the spraying process and the device are simple and convenient, and the plasma microbeam coaxial electric polarization induced electrospray printing device is suitable for simpler occasions.

The invention also provides a jet printing method, which adopts the plasma microbeam coaxial electric polarization induction electrospray printing device to carry out jet printing.

The invention coaxially induces ink ejection through a plasma induction electric field, focuses an electric jet flow flight channel space electric field by using a plasma jet flow local dynamic strong electric field, coaxially restrains jet flow whip and reduces curved surface deposition slippage caused by a non-uniform electric field, weakens residual charge interference on the surface of a high-dielectric substrate by means of a gaseous conductor electrode, can realize accurate positioning deposition of jet flow/ink droplets with high precision and high resolution, and overcomes the problem that the non-uniform electric field caused by the curved surface substrate affects jet flow movement and positioning deposition.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.