阅读说明：本技术 阴极驱动单元、溅射阴极和用于组装阴极驱动单元的方法 (Cathode drive unit, sputtering cathode and method for assembling cathode drive unit ) 是由 约阿希姆·松嫩申 丹尼尔·谢弗-科皮托 托拜西·伯格曼 于 2019-02-12 设计创作，主要内容包括：描述了一种用于沉积源的阴极驱动单元(100)。所述阴极驱动单元包括：阴极支撑件(102)；和带驱动器,所述带驱动器用于旋转所述阴极支撑件。所述带驱动器包括：第一滑轮(112),所述第一滑轮耦接到驱动所述阴极支撑件的轴(103)；驱动组件(120),所述驱动组件具有第二滑轮(114)；带(116),所述带与所述第一滑轮和所述第二滑轮接合；引导件(130),所述引导件支撑所述驱动组件的至少一部分；和张紧器(140),所述张紧器向所述驱动组件的至少所述部分提供力以用于沿所述引导件移动所述驱动组件的至少所述部分。(A cathode drive unit (100) for a deposition source is described. The cathode driving unit includes: a cathode support (102); and a tape drive for rotating the cathode support. The tape drive includes: a first pulley (112) coupled to a shaft (103) driving the cathode support; a drive assembly (120) having a second pulley (114); a belt (116) engaged with the first and second pulleys; a guide (130) supporting at least a portion of the drive assembly; and a tensioner (140) providing a force to at least the portion of the drive assembly for moving at least the portion of the drive assembly along the guide.)