阅读说明：本技术 一种加氢系统及吹气方法 (Hydrogenation system and blowing method ) 是由 方沛军 宣锋 姜方 伍远安 曹俊 于 2021-04-23 设计创作，主要内容包括：本发明公开了一种加氢系统及吹气方法,加氢技术领域。所述加氢系统还包括吹气装置,吹气装置包括吹气瓶、第一控制阀、第二控制阀、吸气瓶、吹气回收组件和氢气回收组件。吹气瓶出气口和第一控制阀的进气口连通,第一控制阀的出气口与气体压缩装置的进气口连通,第二控制阀的进气口和储氢装置的出气口连通,吸气瓶中具有钯金属层,钯金属层将吸气瓶划分为第一腔体和第二腔体,钯金属层上具有多个通气孔,吹气瓶的顶部具有入气口,吸气瓶的外壁上具有加热件。吹气回收组件包括第三控制阀、氦气压缩机和吹气回收瓶。氢气回收组件包括第四控制阀和氢气回收瓶。本发明提供的加氢系统能够便捷实现对管道及部件中残留的氢气的清除。(The invention discloses a hydrogenation system and a blowing method, and belongs to the technical field of hydrogenation. The hydrogenation system also comprises a blowing device, and the blowing device comprises a blowing bottle, a first control valve, a second control valve, a suction bottle, a blowing recovery assembly and a hydrogen recovery assembly. The air outlet of the air blowing bottle is communicated with the air inlet of the first control valve, the air outlet of the first control valve is communicated with the air inlet of the air compression device, the air inlet of the second control valve is communicated with the air outlet of the hydrogen storage device, a palladium metal layer is arranged in the air suction bottle, the air suction bottle is divided into a first cavity and a second cavity by the palladium metal layer, a plurality of vent holes are formed in the palladium metal layer, the top of the air blowing bottle is provided with an air inlet, and a heating element is arranged on the outer wall of the air suction bottle. The blowing recovery assembly comprises a third control valve, a helium compressor and a blowing recovery bottle. The hydrogen recovery assembly comprises a fourth control valve and a hydrogen recovery bottle. The hydrogenation system provided by the invention can conveniently realize the removal of residual hydrogen in pipelines and parts.)

1. A hydrogenation system comprises a hydrogen supply device (100), a gas compression device (200), a hydrogen storage device (300) and a hydrogenation device (400), wherein the hydrogen supply device (100), the gas compression device (200), the hydrogen storage device (300) and the hydrogenation device (400) are sequentially communicated, and a stop valve (500) is arranged between the hydrogen supply device (100) and the gas compression device (200), and the hydrogenation system is characterized by further comprising a gas blowing device, wherein the gas blowing device comprises a gas blowing bottle (1), a first control valve (2), a second control valve (3), a gas suction bottle (4), a gas blowing recovery assembly (5) and a hydrogen recovery assembly (6);

helium is filled in the air blowing bottle (1), an air outlet of the air blowing bottle (1) is communicated with an air inlet of the first control valve (2), an air outlet of the first control valve (2) is communicated with an air inlet of the gas compression device (200), an air inlet of the second control valve (3) is communicated with an air outlet of the hydrogen storage device (300), a palladium metal layer (41) is arranged in the air blowing bottle (4), the air blowing bottle (4) is divided into a first cavity (42) and a second cavity (43) by the palladium metal layer (41), a plurality of vent holes (44) are formed in the palladium metal layer (41) to communicate the first cavity (42) with the second cavity (43), an air inlet (45) is formed in the top of the air blowing bottle (1), and the air inlet (45) is respectively communicated with the air outlets of the first cavity (42) and the second control valve (3), the outer wall of the air suction bottle (4) is provided with a heating element (46) for heating the air suction bottle (4);

the blowing recovery assembly (5) comprises a third control valve (51), a helium compressor (52), a blowing recovery bottle (53), a stop valve (54) and a vacuum pump (55), wherein an air inlet of the third control valve (51) is communicated with the second cavity (43), an air outlet of the third control valve (51) is communicated with an air inlet of the helium compressor (52), an air outlet of the helium compressor (52) is communicated with the blowing recovery bottle (53), an air inlet of the stop valve (54) is communicated with the second cavity (43), and an air outlet of the stop valve (54) is communicated with the vacuum pump (55);

the hydrogen recovery assembly (6) comprises a fourth control valve (61) and a hydrogen recovery bottle (62), wherein the gas inlet of the fourth control valve (61) is communicated with the second cavity (43), and the gas outlet of the fourth control valve (61) is communicated with the hydrogen recovery bottle (62).

2. The hydrogenation system according to claim 1, wherein the blowing device further comprises a pressure regulating valve (7), an air inlet of the pressure regulating valve (7) is communicated with an air outlet of the blowing bottle (1), and an air outlet of the pressure regulating valve (7) is communicated with an air inlet of the first control valve (2).

3. A hydrogenation system according to claim 1, wherein said blowing means further comprises a pressure sensor (8), and said pressure sensor (8) is located at the gas outlet of said blowing bottle (1).

4. A hydrogenation system according to claim 3, wherein said first control valve (2) is an electromagnetic valve, and said blowing means further comprises a controller electrically connected to said first control valve (2) and said pressure sensor (8), respectively.

5. A hydrogenation system according to claim 1, wherein the hydrogen recovery assembly (6) further comprises a recycle cooling water pipe (63), the recycle cooling water pipe (63) being wound on the line between the fourth control valve (61) and the hydrogen recovery bottle (62) to cool down the hydrogen.

6. A hydrogenation system according to claim 1, wherein the heating element (46) is a resistance wire wound around the outer wall of the suction bottle (4).

7. A hydrogenation system according to claim 1, wherein the hydrogen storage device (300) comprises a gas storage mechanism (310), the gas storage mechanism (310) comprises a gas storage tank (311), a fifth control valve (312) and a sixth control valve (313), a first gas port of the gas storage tank (311) is communicated with a gas outlet of the fifth control valve (312), a second gas port of the gas storage tank (311) is communicated with a gas inlet of the sixth control valve (313), a gas inlet of the fifth control valve (312) is communicated with a gas outlet of the gas compression device (200), and a gas outlet of the sixth control valve (313) is communicated with a gas inlet of the hydrogenation device (400).

8. The hydrogenation system according to claim 7, wherein the number of the gas storage means (310) is not less than two, and the pressure in the gas storage tank (311) in each of the gas storage means (310) is different.

9. A hydrogenation system according to any of claims 1-8, further comprising a seventh control valve (600), wherein the gas inlet of the seventh control valve (600) is in communication with the gas outlet of the hydrogen storage device (300), and the gas outlet of the seventh control valve (600) is in communication with the gas inlet of the hydrogenation device (400).

10. An air blowing method of a hydrogenation system, wherein the air blowing method is based on the hydrogenation system of claim 1, and the air blowing method comprises the following steps:

closing the shut-off valve (500);

opening the first control valve (2), the second control valve (3) and the third control valve (51), and closing the fourth control valve (61), so that the air blow bottle (1) performs air blowing operation;

closing the first control valve (2) and the third control valve (51), opening the stop valve (54), and starting the vacuum pump (55), so as to vacuumize the inhalation bottle (4);

-closing the first control valve (2), the second control valve (3) and the stop valve (54), and-opening the fourth control valve (61);

-heating the aspirating bottle (4) by means of the heating element (46);

closing the fourth control valve (61).

Technical Field

The invention belongs to the technical field of hydrogenation, and particularly relates to a hydrogenation system and a blowing method.

Background

With the gradual development of the technical field of vehicle control, the hydrogen fuel electric automobile is increasingly popular as a new vehicle, and the popularity of the hydrogen fuel electric automobile is continuously increased. The fuel of the hydrogen fuel electric automobile is mainly derived from hydrogen, so the hydrogenation system is particularly important for the hydrogen fuel electric automobile.

In the related art, the hydrogenation system needs to periodically overhaul pipelines and components (such as a compressor, a gas storage tank and the like) in the use process, so that the problems of gas leakage, component failure and the like in the subsequent use process are avoided. However, since hydrogen is flammable and explosive, during the maintenance process, the residual hydrogen in the pipelines and components is easy to cause safety accidents in the subsequent maintenance process.

Disclosure of Invention

In view of the above defects or needs for improvement in the prior art, the present invention provides a hydrogenation system and a blowing method, which can conveniently remove residual hydrogen in pipelines and components before maintenance.

In a first aspect, the invention provides a hydrogenation system, which comprises a hydrogen supply device, a gas compression device, a hydrogen storage device and a hydrogenation device, wherein the hydrogen supply device, the gas compression device, the hydrogen storage device and the hydrogenation device are sequentially communicated, a stop valve is arranged between the hydrogen supply device and the gas compression device, the hydrogenation system further comprises a blowing device, and the blowing device comprises a blowing bottle, a first control valve, a second control valve, a blowing bottle, a blowing recovery assembly and a hydrogen recovery assembly;

helium is filled in the air blowing bottle, an air outlet of the air blowing bottle is communicated with an air inlet of the first control valve, an air outlet of the first control valve is communicated with an air inlet of the gas compression device, an air inlet of the second control valve is communicated with an air outlet of the hydrogen storage device, a palladium metal layer is arranged in the air suction bottle, the air suction bottle is divided into a first cavity and a second cavity by the palladium metal layer, a plurality of vent holes are formed in the palladium metal layer to communicate the first cavity with the second cavity, an air inlet is formed in the top of the air blowing bottle and is respectively communicated with the air outlets of the first cavity and the second control valve, and a heating element is arranged on the outer wall of the air suction bottle to heat the air suction bottle;

the blowing recovery assembly comprises a third control valve, a helium compressor, a blowing recovery bottle, a stop valve and a vacuum pump, wherein the air inlet of the third control valve is communicated with the second cavity, the air outlet of the third control valve is communicated with the air inlet of the helium compressor, the air outlet of the helium compressor is communicated with the blowing recovery bottle, the air inlet of the stop valve is communicated with the second cavity, and the air outlet of the stop valve is communicated with the vacuum pump;

the hydrogen recovery assembly comprises a fourth control valve and a hydrogen recovery bottle, the air inlet of the fourth control valve is communicated with the second cavity, and the air outlet of the fourth control valve is communicated with the hydrogen recovery bottle.

Optionally, the air blowing device further comprises a pressure regulating valve, an air inlet of the pressure regulating valve is communicated with an air outlet of the air blowing bottle, and an air outlet of the pressure regulating valve is communicated with an air inlet of the first control valve.

Optionally, the air blowing device further comprises a pressure sensor, and the pressure sensor is located at the air outlet of the air blowing bottle.

Optionally, the first control valve is an electromagnetic valve, and the blowing device further includes a controller, and the controller is electrically connected to the first control valve and the pressure sensor, respectively.

Optionally, the hydrogen recovery assembly further comprises a circulating cooling water pipe, and the circulating cooling water pipe is wound on a pipeline between the fourth control valve and the hydrogen recovery bottle to cool the hydrogen.

Optionally, the heating element is a resistance wire, and the resistance wire is wound on the outer wall of the air suction bottle.

Optionally, the hydrogen storage device includes a gas storage mechanism, the gas storage mechanism includes a gas storage tank, a fifth control valve and a sixth control valve, a first gas port on the gas storage tank is communicated with a gas outlet of the fifth control valve, a second gas port of the gas storage tank is communicated with a gas inlet of the sixth control valve, a gas inlet of the fifth control valve is communicated with a gas outlet of the gas compression device, and a gas outlet of the sixth control valve is communicated with a gas inlet of the hydrogenation device.

Optionally, the number of the gas storage mechanisms is not less than two, and the pressure in the gas storage tank in each gas storage mechanism is different.

Optionally, the hydrogenation system further comprises a seventh control valve, a gas inlet of the seventh control valve is communicated with a gas outlet of the hydrogen storage device, and a gas outlet of the seventh control valve is communicated with a gas inlet of the hydrogenation device.

In a second aspect, the present invention provides an air blowing method for a hydrogenation system, the air blowing method being based on the hydrogenation system of the first aspect, the air blowing method comprising:

closing the stop valve;

opening the first control valve, the second control valve and the third control valve, and closing the fourth control valve, so that the air blow bottle performs air blowing operation;

closing the first control valve and the third control valve, opening the stop valve, and starting the vacuum pump so as to vacuumize the suction bottle;

closing the first control valve, the second control valve and the stop valve, and opening the fourth control valve;

heating the air suction bottle by the heating element;

closing the fourth control valve.

The technical scheme provided by the embodiment of the invention has the following beneficial effects:

for the hydrogenation system provided by the embodiment of the invention, the hydrogen supply device, the gas compression device, the hydrogen storage device and the hydrogenation device are sequentially communicated, and the stop valve is arranged between the hydrogen supply device and the gas compression device, so that under the condition of the stop valve passage, hydrogen discharged by the hydrogenation device is compressed by the gas compression device and then is stored in the hydrogen storage device, and the subsequent hydrogenation operation is realized through the hydrogenation device.

Furthermore, the first control valve, the second control valve and the third control valve are opened (at the moment, the fourth control valve is closed), so that helium in the gas blowing bottle can be discharged, and hydrogen in the pipeline and all parts can be blown to the first cavity of the gas suction bottle. And the hydrogen entering the air suction bottle can be fully absorbed by the palladium metal layer, so that the hydrogen can be conveniently removed. And helium can pass through the vent hole and enter the second cavity, and then enter the air blowing recovery bottle after being compressed by the helium compressor, so that the helium can be recovered and recycled (namely, after a period of time, the air blowing bottle can be used as the air blowing recovery bottle, and the air blowing recovery bottle can be used as the air blowing bottle).

In addition, after the blowing is finished, the fourth control valve is opened (the first control valve, the second control valve and the third control valve are closed at the moment), the gas suction bottle is heated through the heating element, so that hydrogen absorbed in the palladium metal layer is released and finally stored in the hydrogen recovery bottle, and the hydrogen is recycled.

That is to say, the hydrogenation system provided by the invention can not only blow the pipelines and components to remove hydrogen, so as to facilitate subsequent maintenance, but also recycle the blown and removed hydrogen, thereby greatly reducing the cost.

Drawings

FIG. 1 is a schematic diagram of a hydrogenation system according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of an inhalation bottle provided in an embodiment of the present invention;

FIG. 3 is a flow chart of a blowing method of a hydrogenation system according to an embodiment of the present invention.

The symbols in the drawings represent the following meanings:

100. a hydrogen supply device; 200. a gas compression device; 300. a hydrogen storage device; 310. a gas storage mechanism; 311. a gas storage tank; 312. a fifth control valve; 313. a sixth control valve; 400. a hydrogenation unit; 500. a stop valve; 600. a seventh control valve;

1. a gas blowing bottle; 2. a first control valve; 3. a second control valve; 4. an air suction bottle; 41. a palladium metal layer; 42. a first cavity; 43. a second cavity; 44. a vent hole; 45. an air inlet; 46. a heating member; 47. a thermometer; 5. a blow recovery assembly; 51. a third control valve; 52. a helium gas compressor; 53. blowing and recovering the bottle; 54. a stop valve; 55. a vacuum pump; 6. a hydrogen recovery assembly; 61. a fourth control valve; 62. a hydrogen recovery bottle; 63. a circulating cooling water pipe; 7. a pressure regulating valve; 8. a pressure sensor.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

Fig. 1 is a schematic structural diagram of a hydrogenation system according to an embodiment of the present invention, and as shown in fig. 1, the hydrogenation system includes a hydrogen supply device 100, a gas compression device 200, a hydrogen storage device 300, and a hydrogenation device 400, the hydrogen supply device 100, the gas compression device 200, the hydrogen storage device 300, and the hydrogenation device 400 are sequentially communicated, a stop valve 500 is provided between the hydrogen supply device 100 and the gas compression device 200, the hydrogenation system further includes a gas blowing device, and the gas blowing device includes a gas blowing bottle 1, a first control valve 2, a second control valve 3, a gas suction bottle 4, a gas blowing recovery assembly 5, and a hydrogen recovery assembly 6.

Helium is filled in the gas blowing bottle 1, the gas outlet of the gas blowing bottle 1 is communicated with the gas inlet of the first control valve 2, the gas outlet of the first control valve 2 is communicated with the gas inlet of the gas compression device 200, and the gas inlet of the second control valve 3 is communicated with the gas outlet of the hydrogen storage device 300.

Fig. 2 is a schematic structural diagram of a suction bottle according to an embodiment of the present invention, as shown in fig. 2, a palladium metal layer 41 is provided in the suction bottle 4, the palladium metal layer 41 divides the suction bottle 4 into a first cavity 42 and a second cavity 43, the palladium metal layer 41 has a plurality of vent holes 44 to communicate the first cavity 42 with the second cavity 43, the top of the gas blowing bottle 1 has a gas inlet 45, the gas inlet 45 communicates with the first cavity 42 and the gas outlet of the second control valve 3, respectively, and a heating member 46 is provided on an outer wall of the suction bottle 4 to heat the suction bottle 4.

The blowing gas recovery assembly 5 comprises a third control valve 51, a helium gas compressor 52, a blowing gas recovery bottle 53, a stop valve 54 and a vacuum pump 55, wherein the gas inlet of the third control valve 51 is communicated with the second cavity 43, the gas outlet of the third control valve 51 is communicated with the gas inlet of the helium gas compressor 52, the gas outlet of the helium gas compressor 52 is communicated with the blowing gas recovery bottle 53, the gas inlet of the stop valve 54 is communicated with the second cavity 43, and the gas outlet of the stop valve 54 is communicated with the vacuum pump 55.

The hydrogen recovery assembly 6 comprises a fourth control valve 61 and a hydrogen recovery bottle 62, wherein the gas inlet of the fourth control valve 61 is communicated with the second cavity 43, and the gas outlet of the fourth control valve 61 is communicated with the hydrogen recovery bottle 62.

For the hydrogenation system provided by the embodiment of the invention, the hydrogen supply device 100, the gas compression device 200, the hydrogen storage device 300 and the hydrogenation device 400 are sequentially communicated, and the stop valve 500 is arranged between the hydrogen supply device 100 and the gas compression device 200, so that under the condition that the stop valve 500 is communicated, hydrogen discharged by the hydrogenation device 400 is compressed by the gas compression device 200 and then is stored in the hydrogen storage device 300, so that the hydrogenation operation can be realized by the hydrogenation device 400 subsequently.

Further, the helium gas in the gas blowing bottle 1 can be discharged by opening the first control valve 2, the second control valve 3 and the third control valve 51 (at this time, the fourth control valve 61 is closed), and the hydrogen gas in the lines and the parts can be blown to the first cavity 42 of the gas suction bottle 4. The hydrogen entering the air suction bottle 4 is fully absorbed by the palladium metal layer 41, so that the hydrogen is conveniently removed. Helium gas enters the second cavity 43 through the vent hole 44, is subsequently compressed by the helium gas compressor 52 and then enters the air blowing recovery bottle 53, so that the helium gas is recovered and recycled (namely, after a period of time, the air blowing bottle 1 can be used as the air blowing recovery bottle 53, and the air blowing recovery bottle 53 can be used as the air blowing bottle 1). After the blowing is finished, the first control valve 2 and the third control valve 51 are closed, the stop valve 54 is opened, and the vacuum pump 55 is started, so that the helium gas remained in the pipeline and the air suction bottle 4 is vacuumized and discharged outside, and the subsequent recovery of the high-purity hydrogen gas in the air suction bottle 4 is facilitated.

In addition, after the blowing is completed, the fourth control valve 61 is opened (at this time, the first control valve 2, the second control valve 3 and the stop valve 54 are closed), the gas suction bottle 4 is heated by the heating element 46, so that the hydrogen absorbed in the palladium metal layer 41 is released and finally stored in the hydrogen recovery bottle 62, and the hydrogen recovery is realized.

That is to say, the hydrogenation system provided by the invention can not only blow the pipelines and components to remove hydrogen, so as to facilitate subsequent maintenance, but also recycle the blown and removed hydrogen, thereby greatly reducing the cost.

Referring to fig. 1 again, the air blowing device further comprises a pressure regulating valve 7, an air inlet of the pressure regulating valve 7 is communicated with an air outlet of the air blowing bottle 1, and an air outlet of the pressure regulating valve 7 is communicated with an air inlet of the first control valve 2.

In the above embodiment, the pressure regulating valve 7 can regulate the blowing pressure of the blowing bottle 1, and plays a role of regulating the flow rate of the blowing gas, thereby facilitating the sufficient absorption of hydrogen gas in cooperation with the palladium metal layer 41.

Optionally, the insufflation apparatus further comprises a pressure sensor 8, the pressure sensor 8 being located at the air outlet of the insufflation bottle 1.

In the above embodiment, the pressure sensor 8 monitors the blowing pressure.

Illustratively, the air inlets of the air blowing recovery bottle 53 and the hydrogen recovery bottle 62 are each provided with a pressure sensor 8, which functions to monitor the pressure as well.

In this embodiment, the first control valve 2 is an electromagnetic valve, and the blowing device further includes a controller (not shown), and the controller is electrically connected to the first control valve 2 and the pressure sensor 8, respectively.

In the above embodiment, the control valve can conveniently realize the control of the first control valve 2, thereby saving manpower.

Illustratively, when the pressure in the gas bottle 1 is reduced to a set value during the blowing process of the gas bottle 1, the pressure sensor 8 transmits data to the controller, and the controller acts on the first control valve 2, so that the first control valve 2 is closed, and the gas bottle 1 can be prevented from continuously blowing gas.

Optionally, the hydrogen recovery assembly 6 further comprises a circulating cooling water pipe 63, and the circulating cooling water pipe 63 is wound on a pipeline between the fourth control valve 61 and the hydrogen recovery bottle 62 to cool the hydrogen.

In the above embodiment, the circulating cooling water pipe 63 can cool the hydrogen gas that has been heated, facilitating safe storage.

Illustratively, the heating element 46 is a resistance wire that is wound around the outer wall of the suction bottle 4.

In other embodiments of the present disclosure, the heating element 46 may also be a water bath.

It should be noted that the heating element 46 controls the heating temperature of the suction bottle 4 to 40-50 ℃, so as to facilitate the rapid release of hydrogen in the palladium metal layer 41.

Illustratively, a thermometer 47 (see fig. 2) is inserted into the inhalation cylinder 4 to monitor the temperature in the inhalation cylinder 4 in real time.

With continued reference to fig. 1, the hydrogen storage apparatus 300 includes a gas storage mechanism 310, the gas storage mechanism 310 includes a gas storage tank 311, a fifth control valve 312 and a sixth control valve 313, a first gas port of the gas storage tank 311 is communicated with a gas outlet of the fifth control valve 312, a second gas port of the gas storage tank 311 is communicated with a gas inlet of the sixth control valve 313, a gas inlet of the fifth control valve 312 is communicated with a gas outlet of the gas compression apparatus 200, and a gas outlet of the sixth control valve 313 is communicated with a gas inlet of the hydrogenation apparatus 400.

In the above embodiment, the air tank 311 is controlled by the fifth control valve 312 and the sixth control valve 313 so that the air tank 311 can be charged and discharged properly.

In this embodiment, the number of the gas storage mechanisms 310 is not less than two, and the pressure in the gas storage tank 311 in each gas storage mechanism 310 is different.

It is easy to understand that the pressure of the gas storage tank 311 in different gas storage mechanisms 310 is different, so as to provide different pressures of gas, thereby increasing the application range of the hydrogenation apparatus 400.

In the present embodiment, the number of the gas storage mechanisms 310 is illustratively 3, and the gas storage pressures in the 3 gas storage tanks 311 are respectively high pressure, medium pressure and low pressure.

Optionally, the hydrogenation system further comprises a seventh control valve 600, wherein a gas inlet of the seventh control valve 600 is communicated with a gas outlet of the hydrogen storage device 300, and a gas outlet of the seventh control valve 600 is communicated with a gas inlet of the hydrogenation device 400.

In the above embodiment, the seventh control valve 600 is closed to facilitate the maintenance of the hydrogenation apparatus 400, thereby preventing the leakage of hydrogen.

Fig. 3 is a flow chart of an air blowing method of a hydrogenation system according to an embodiment of the present invention, as shown in fig. 3, the air blowing method is based on the hydrogenation system, and the air blowing method includes:

s301, closing the stop valve 500.

S302, the first control valve 2, the second control valve 3 and the third control valve 51 are opened, and the fourth control valve 61 is closed, so that the gas blow bottle 1 performs gas blowing operation (i.e. the hydrogen storage device 300 is a passage, and the fifth control valve 312 and the sixth control valve 313 are opened).

It is easily understood that, during the blowing process, the palladium metal layer 41 can efficiently absorb hydrogen gas included in helium gas as the gas flows.

S303, close the first control valve 2 and the third control valve 51, open the stop valve 54, and start the vacuum pump 55, thereby evacuating the suction bottle 4.

S304, closing the first control valve 2, the second control valve 3 and the stop valve 54, and opening the fourth control valve 61.

S305, the suction bottle 4 is heated by the heating member 46.

And S306, closing the fourth control valve 61.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.