阅读说明：本技术 一种超声波扫查仪高质量成像装置及其工作方法 (High-quality imaging device of ultrasonic scanning instrument and working method thereof ) 是由 历德义 丁兆达 于 2021-07-23 设计创作，主要内容包括：本发明公开了一种超声波扫查仪高质量成像装置及其工作方法,超声波扫查仪高质量成像装置包括：水箱、超声波查扫机构、承载台、供水机构、液位检测机构、排水机构和电阻率检测头,水箱内存储有去离子水,供水机构与水箱的内部连通,供水机构用于向水箱内注入去离子水,液位检测机构安装于水箱内,液位检测机构用于检测水箱内的液面高度,排水机构与水箱的内部连通,排水机构内设置有电阻率检测头,承载台设置于水箱内,承载台上承载有待检测的芯片。通过对本发明的应用,提供了一种以去离子水作为超声波检测介质的芯片检测设备,降低了污染物以及其他离子等杂质混入去离子水中对检测结果带来的干扰,进一步地提高了芯片的检测效率和检测质量。(The invention discloses a high-quality imaging device of an ultrasonic scanner and a working method thereof, wherein the high-quality imaging device of the ultrasonic scanner comprises: the water tank, the ultrasonic wave is looked into and is swept the mechanism, the plummer, water supply mechanism, liquid level detection mechanism, drainage mechanism and resistivity detection head, the in-tank storage has deionized water, the inside intercommunication of water supply mechanism and water tank, water supply mechanism is used for injecting the deionized water into the water tank, liquid level detection mechanism installs in the water tank, liquid level detection mechanism is used for detecting the liquid level in the water tank, drainage mechanism and the inside intercommunication of water tank, be provided with the resistivity detection head in the drainage mechanism, the plummer sets up in the water tank, bear the weight of on the plummer and wait to detect the chip. By applying the invention, the chip detection equipment using the deionized water as the ultrasonic detection medium is provided, the interference of pollutants, other ions and other impurities mixed in the deionized water to the detection result is reduced, and the detection efficiency and the detection quality of the chip are further improved.)

1. The utility model provides an ultrasonic scanner high quality image device which characterized in that includes: mechanism, plummer, water supply mechanism, an at least liquid level detection mechanism, an at least drainage mechanism and an at least resistivity detection head are swept to water tank, ultrasonic wave investigation, the water tank is stored with deionized water, water supply mechanism with the inside intercommunication of water tank, water supply mechanism be used for to inject the deionized water in the water tank, liquid level detection mechanism install in the water tank, liquid level detection mechanism is used for detecting liquid level in the water tank, drainage mechanism with the inside intercommunication of water tank, be provided with in the drainage mechanism the resistivity detection head, the plummer set up in the water tank, the bear the weight of on the plummer and wait to detect the chip, the ultrasonic wave is looked into the sense terminal of sweeping the mechanism and is stretched into in the water tank, the ultrasonic wave is looked into sweep the mechanism and is used for right the chip detects.

2. The high quality imaging apparatus of claim 1, further comprising: the water tank is arranged on the water tank, the alarm device is installed on the control host, and the alarm device, the water supply mechanism, the drainage mechanism, the resistivity detection head and the liquid level detection mechanism are all in communication connection with the control host.

3. The high quality imaging apparatus of claim 1, wherein the ultrasonic scanning mechanism comprises: remove frame, X-Y bidirectional movement mechanism and go up ultrasonic probe, X-Y bidirectional movement mechanism's stiff end fixed mounting in the outside of water tank, X-Y bidirectional movement mechanism's removal end with remove frame fixed connection, X-Y bidirectional movement mechanism is used for the drive remove the frame and remove arbitrary department on the horizontal plane, go up ultrasonic probe install in remove on the frame, the vertical downward setting of sense terminal of going up ultrasonic probe, the sense terminal of going up ultrasonic probe stretch into to below the liquid level of water tank, the sense terminal of going up ultrasonic probe operatively set up in the top of chip.

4. The high quality imaging apparatus of claim 3, wherein the ultrasound scanning mechanism further comprises: lower ultrasonic probe, it is the setting of C style of calligraphy structure to remove the frame, go up ultrasonic probe fixed mounting in remove the upper portion of frame, lower ultrasonic probe set up in remove the lower part of frame, the vertical upwards setting of sense terminal of lower ultrasonic probe just right go up ultrasonic probe's sense terminal, go up ultrasonic probe's sense terminal with the interval has a certain distance between lower ultrasonic probe's the sense terminal, lower ultrasonic probe operationally set up in under the chip.

5. The high quality imaging apparatus of claim 1, wherein the water supply mechanism comprises: the water storage tank is internally stored with deionized water, the water storage tank is connected with the water outlet pipe, the water outlet pipe is connected with the water supply pump, the water supply pump is connected with the injection pipe, and the injection pipe is communicated with the water tank.

6. The high quality imaging apparatus of claim 1, wherein the liquid level detection mechanism comprises: the water tank comprises a containing barrel, an upper liquid level sensor and a lower liquid level sensor, wherein the containing barrel is of a cylindrical structure, the axis of the containing barrel is arranged along the vertical direction, a necking pipe is formed by downward extension of the lower portion of the containing barrel, the containing barrel extends into the water tank, the inner diameter of the necking pipe is smaller than that of the containing barrel, the upper liquid level sensor is arranged on the upper portion of the inner side of the containing barrel, and the lower liquid level sensor is arranged on the lower portion of the inner side of the containing barrel.

7. The high-quality imaging device of the ultrasonic scanning instrument of claim 6, wherein the water tank has a rectangular structure, the number of the liquid level detection mechanisms is four, the four liquid level detection mechanisms are respectively arranged at four corners of the water tank, and the high-quality imaging device further comprises: four installed parts, the installed part all fixed with on the inner wall of water tank, each the installed part all with one the outer wall of a holding section of thick bamboo is connected.

8. The high quality imaging apparatus of claim 1, wherein the drainage mechanism comprises: the device comprises a waste water tank, a main drainage pipe, a plurality of first drainage branch pipes, a plurality of upper electromagnetic valves and a plurality of lower electromagnetic valves, wherein the main drainage pipe is connected with the waste water tank, the upper end of each first drainage branch pipe is connected with the bottom of a water tank through one upper electromagnetic valve, the lower end of each first drainage branch pipe is connected with the main drainage pipe through one lower electromagnetic valve, each first drainage branch pipe is arranged in the vertical direction, and the lower part of each drainage branch pipe is provided with one resistivity detection head.

9. The high quality ultrasound scanner imaging apparatus of claim 8, wherein the drainage mechanism further comprises: the upper ends of the second drainage branch pipes are connected with the middle part of the water tank through the upper electromagnetic valve, and the lower ends of the second drainage branch pipes are connected with the main drainage pipe through the lower electromagnetic valve; the second drainage support is of an inverted L-shaped structure, and the resistivity detection head is arranged at the lower part of the second drainage branch pipe.

10. A method for operating a high-quality imaging device of an ultrasonic scanner, comprising the high-quality imaging device of the ultrasonic scanner of any one of claims 1 to 9, further comprising: the ultrasonic scanning control system comprises an ultrasonic scanning mechanism, a water supply mechanism, a liquid level detection mechanism, a drainage mechanism and a resistivity detection head which are all in communication connection with the scanning control system, and specifically comprises the following steps:

step S1, presetting a first liquid level threshold value, a second liquid level threshold value and a standard resistivity value in the scanning control system, wherein the first liquid level threshold value is smaller than the second liquid level threshold value;

step S2, placing the chip on the bearing table and starting the scanning control system;

step S3, the liquid level detection mechanism detects the liquid level height in the water tank in real time and obtains a liquid level real-time height value, if the liquid level real-time height value is less than or equal to the first liquid level threshold value, the step S4 is performed, and if the liquid level real-time height is greater than the first liquid level threshold value and less than the second liquid level threshold value, the step S4 is performed

Step S5, if the real-time liquid level height is greater than or equal to the second liquid level threshold, the process goes to step S6;

step S4, the water supply mechanism injects deionized water with a first unit volume into the water tank, and returns to step S3;

a step S5 of discharging a second unit volume of deionized water from the water tank by the water discharge mechanism, and proceeding to a step S7;

step S6, the drain mechanism drains a third unit volume of deionized water from the water tank and returns to step S3;

step S7, detecting the resistivity of the deionized water with the second unit volume through the resistivity detection head, obtaining a detected resistivity value, entering step S8 if the detected resistivity value is smaller than the standard resistivity value, and entering step S9 if the detected resistivity value is larger than or equal to the standard resistivity value;

step S8, the drain mechanism drains a fourth unit volume of deionized water, and proceeds to step S10;

step S9, the ultrasonic scanning mechanism carries out ultrasonic scanning on the chip and obtains the scanning result of the chip, and the process goes to step S11;

step S10, the water supply mechanism injects a fourth unit volume of deionized water, and returns to step S5;

in step S11, the chip is taken out.

Technical Field

The invention relates to the technical field of chip quality detection, in particular to a high-quality imaging device of an ultrasonic scanner and a working method thereof.

Background

At present, with the rapid development of semiconductor chips, the development of chip detection service industry is also driven. For packaging chips that are becoming smaller and smaller, nondestructive testing is becoming more and more important. Therefore, the ultrasonic detection instrument is correspondingly applied, and the chip is hardly damaged in the process of detecting by ultrasonic waves. The problem between different encapsulation can be accurately found through the transmission of ultrasonic wave, for example common DIE and the separation of plastic-sealed body, middle inclusion person air, because ultrasonic meets the air total reflection principle, the place that has the problem, the picture colour that scans out can be darker to except meeting air reflection, meet the material of different density and also can take place partial reflection, and lead to last ultrasonic detector's formation of image very confusion. Therefore, although the ultrasonic wave can detect the problem of each layer of the chip, the ultrasonic wave still has great interference, the detection accuracy of the quality of the chip is greatly influenced, and certain unnecessary workload is brought to detection personnel.

Disclosure of Invention

In view of the above, in order to solve the above problems, the present invention provides a high quality imaging device for an ultrasonic scanner, comprising: mechanism, plummer, water supply mechanism, an at least liquid level detection mechanism, an at least drainage mechanism and an at least resistivity detection head are swept to water tank, ultrasonic wave investigation, the water tank is stored with deionized water, water supply mechanism with the inside intercommunication of water tank, water supply mechanism be used for to inject the deionized water in the water tank, liquid level detection mechanism install in the water tank, liquid level detection mechanism is used for detecting liquid level in the water tank, drainage mechanism with the inside intercommunication of water tank, be provided with in the drainage mechanism the resistivity detection head, the plummer set up in the water tank, the bear the weight of on the plummer and wait to detect the chip, the ultrasonic wave is looked into the sense terminal of sweeping the mechanism and is stretched into in the water tank, the ultrasonic wave is looked into sweep the mechanism and is used for right the chip detects.

In another preferred embodiment, the method further comprises: the water tank is arranged on the water tank, the alarm device is installed on the control host, and the alarm device, the water supply mechanism, the drainage mechanism, the resistivity detection head and the liquid level detection mechanism are all in communication connection with the control host.

In another preferred embodiment, the ultrasonic scanning mechanism includes: remove frame, X-Y bidirectional movement mechanism and go up ultrasonic probe, X-Y bidirectional movement mechanism's stiff end fixed mounting in the outside of water tank, X-Y bidirectional movement mechanism's removal end with remove frame fixed connection, X-Y bidirectional movement mechanism is used for the drive remove the frame and remove arbitrary department on the horizontal plane, go up ultrasonic probe install in remove on the frame, the vertical downward setting of sense terminal of going up ultrasonic probe, the sense terminal of going up ultrasonic probe stretch into to below the liquid level of water tank, the sense terminal of going up ultrasonic probe operatively set up in the top of chip.

In another preferred embodiment, the ultrasonic scanning mechanism further includes: lower ultrasonic probe, it is the setting of C style of calligraphy structure to remove the frame, go up ultrasonic probe fixed mounting in remove the upper portion of frame, lower ultrasonic probe set up in remove the lower part of frame, the vertical upwards setting of sense terminal of lower ultrasonic probe just right go up ultrasonic probe's sense terminal, go up ultrasonic probe's sense terminal with the interval has a certain distance between lower ultrasonic probe's the sense terminal, lower ultrasonic probe operationally set up in under the chip.

In another preferred embodiment, the water supply mechanism includes: the water storage tank is internally stored with deionized water, the water storage tank is connected with the water outlet pipe, the water outlet pipe is connected with the water supply pump, the water supply pump is connected with the injection pipe, and the injection pipe is communicated with the water tank.

In another preferred embodiment, the liquid level detection mechanism includes: the water tank comprises a containing barrel, an upper liquid level sensor and a lower liquid level sensor, wherein the containing barrel is of a cylindrical structure, the axis of the containing barrel is arranged along the vertical direction, a necking pipe is formed by downward extension of the lower portion of the containing barrel, the containing barrel extends into the water tank, the inner diameter of the necking pipe is smaller than that of the containing barrel, the upper liquid level sensor is arranged on the upper portion of the inner side of the containing barrel, and the lower liquid level sensor is arranged on the lower portion of the inner side of the containing barrel.

In another preferred embodiment, the water tank is a rectangular structure, the number of the liquid level detection mechanisms is four, four of the liquid level detection mechanisms are respectively arranged at four corners of the water tank, and further comprising: four installed parts, the installed part all fixed with on the inner wall of water tank, each the installed part all with one the outer wall of a holding section of thick bamboo is connected.

In another preferred embodiment, the drain mechanism includes: the device comprises a waste water tank, a main drainage pipe, a plurality of first drainage branch pipes, a plurality of upper electromagnetic valves and a plurality of lower electromagnetic valves, wherein the main drainage pipe is connected with the waste water tank, the upper end of each first drainage branch pipe is connected with the bottom of a water tank through one upper electromagnetic valve, the lower end of each first drainage branch pipe is connected with the main drainage pipe through one lower electromagnetic valve, each first drainage branch pipe is arranged in the vertical direction, and the lower part of each drainage branch pipe is provided with one resistivity detection head.

In another preferred embodiment, the drainage mechanism further comprises: the upper ends of the second drainage branch pipes are connected with the middle part of the water tank through the upper electromagnetic valve, and the lower ends of the second drainage branch pipes are connected with the main drainage pipe through the lower electromagnetic valve; the second drainage support is of an inverted L-shaped structure, and the resistivity detection head is arranged at the lower part of the second drainage branch pipe.

The present invention also provides a working method of a high-quality imaging device of an ultrasonic scanner, including any one of the above high-quality imaging devices of an ultrasonic scanner, further including: the ultrasonic scanning control system comprises an ultrasonic scanning mechanism, a water supply mechanism, a liquid level detection mechanism, a drainage mechanism and a resistivity detection head which are all in communication connection with the scanning control system, and specifically comprises the following steps:

step S1, presetting a first liquid level threshold value, a second liquid level threshold value and a standard resistivity value in the scanning control system, wherein the first liquid level threshold value is smaller than the second liquid level threshold value;

step S2, placing the chip on the bearing table and starting the scanning control system;

step S3, the liquid level detection mechanism detects the liquid level height in the water tank in real time and obtains a liquid level real-time height value, if the liquid level real-time height value is smaller than or equal to the first liquid level threshold value, the step S4 is performed, if the liquid level real-time height is larger than the first liquid level threshold value and smaller than the second liquid level threshold value, the step S5 is performed, and if the liquid level real-time height is larger than or equal to the second liquid level threshold value, the step S6 is performed;

step S4, the water supply mechanism injects deionized water with a first unit volume into the water tank, and returns to step S3;

a step S5 of discharging a second unit volume of deionized water from the water tank by the water discharge mechanism, and proceeding to a step S7;

step S6, the drain mechanism drains a third unit volume of deionized water from the water tank and returns to step S3;

step S7, detecting the resistivity of the deionized water with the second unit volume through the resistivity detection head, obtaining a detected resistivity value, entering step S8 if the detected resistivity value is smaller than the standard resistivity value, and entering step S9 if the detected resistivity value is larger than or equal to the standard resistivity value;

step S8, the drain mechanism drains a fourth unit volume of deionized water, and proceeds to step S10;

step S9, the ultrasonic scanning mechanism carries out ultrasonic scanning on the chip and obtains the scanning result of the chip, and the process goes to step S11;

step S10, the water supply mechanism injects a fourth unit volume of deionized water, and returns to step S5;

in step S11, the chip is taken out.

Due to the adoption of the technical scheme, compared with the prior art, the invention has the following positive effects: by applying the invention, the chip detection equipment using the deionized water as the ultrasonic detection medium is provided, and the deionized water in the water tank is always kept at a certain purity through the comprehensive control of the system, so that the interference of pollutants, other ions and other impurities mixed into the deionized water to the detection result is reduced, and the detection efficiency and the detection quality of the chip are further improved.

Drawings

FIG. 1 is a schematic structural diagram of a high-quality imaging device of an ultrasonic scanner according to the present invention;

fig. 2 is a schematic view of a working method of the high-quality imaging device of the ultrasonic scanner of the present invention.

In the drawings:

1. a water tank; 2. an ultrasonic scanning mechanism; 3. a bearing table; 4. a water supply mechanism; 5. a liquid level detection mechanism; 6. a drainage mechanism; 7. a resistivity detection head; 8. a control host; 9. an alarm device; 21. a movable frame; 22. an X-Y bidirectional moving mechanism; 23. an upper ultrasonic probe; 24. a lower ultrasonic probe; 41. an injection pipe; 51. an accommodating cylinder; 52. an upper liquid level sensor; 53. a lower liquid level sensor; 61. a wastewater tank; 62. a main drainage pipe; 63. a first drain branch pipe; 64. an upper solenoid valve; 65. a lower electromagnetic valve; 66. a second drain branch.

Detailed Description

The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.

As shown in fig. 1, there is shown a high quality imaging device of an ultrasonic scanner of a preferred embodiment, comprising: the water tank 1, the mechanism 2 is swept to the ultrasonic wave investigation, the plummer 3, water supply mechanism 4, an at least liquid level detection mechanism 5, an at least drainage mechanism 6 and an at least resistivity detection head 7, the interior deionized water that has stored in the water tank 1, water supply mechanism 4 and water tank 1's inside intercommunication, water supply mechanism 4 is used for injecting the deionized water into to water tank 1, liquid level detection mechanism 5 installs in water tank 1, liquid level detection mechanism 5 is used for detecting the liquid level height in the water tank 1, drainage mechanism 6 and water tank 1's inside intercommunication, be provided with resistivity detection head 7 in the drainage mechanism 6, the plummer 3 sets up in water tank 1, bear the weight of on the plummer 3 and wait to detect the chip, the ultrasonic wave is looked into the sense terminal of sweeping the mechanism 2 and is stretched into in water tank 1, the ultrasonic wave is looked into and is swept mechanism 2 and is used for detecting the chip.

Further, as a preferred embodiment, the method further comprises: the water tank control system comprises a control host 8 and an alarm device 9, wherein the control host 8 is arranged on one side of the water tank 1, the alarm device 9 is installed on the control host 8, and the alarm device 9, the water supply mechanism 4, the drainage mechanism 6, the resistivity detection head 7 and the liquid level detection mechanism 5 are all in communication connection with the control host 8.

Further, as a preferred embodiment, the alarm device 9 is a buzzer or an alarm light or a combination of the buzzer and the alarm light.

Further, as a preferred embodiment, the control host 8 is provided with a control panel.

Further, as a preferred embodiment, the scanning control system is installed in the control host 8.

Further, as a preferred embodiment, the ultrasonic scanning mechanism 2 includes: the ultrasonic testing device comprises a moving frame 21, an X-Y bidirectional moving mechanism 22 and an upper ultrasonic probe 23, wherein the fixed end of the X-Y bidirectional moving mechanism 22 is fixedly installed on the outer side of the water tank 1, the moving end of the X-Y bidirectional moving mechanism 22 is fixedly connected with the moving frame 21, the X-Y bidirectional moving mechanism 22 is used for driving the moving frame 21 to move to any position on the horizontal plane, the upper ultrasonic probe 23 is installed on the moving frame 21, the detection end of the upper ultrasonic probe 23 is vertically and downwards arranged, the detection end of the upper ultrasonic probe 23 extends below the liquid level of the water tank 1, and the detection end of the upper ultrasonic probe 23 is operably arranged above a chip.

Further, as a preferred embodiment, the X-Y bidirectional movement mechanism 22 includes: the X-direction moving assembly and the Y-direction moving assembly are arranged on the X-direction moving assembly, and one side of the moving frame 21 is fixedly connected with the Y-direction moving assembly and can move along the X direction and the Y direction.

Further, as a preferred embodiment, the upper ultrasonic probe 23 is provided with at least a transmitting end and a receiving end.

Further, as a preferred embodiment, the lower ultrasonic probe 24 is provided with at least one receiving end.

Further, as a preferred embodiment, the ultrasonic scanning mechanism 2 further includes: lower ultrasonic probe 24, removal frame 21 is the setting of C style of calligraphy structure, goes up ultrasonic probe 23 fixed mounting in the upper portion of removing frame 21, and lower ultrasonic probe 24 sets up in the lower part of removing frame 21, and the vertical upwards setting of sense terminal of lower ultrasonic probe 24 just is just to the sense terminal of going up ultrasonic probe 23, and the interval has a certain distance between the sense terminal of going up ultrasonic probe 23 and the sense terminal of lower ultrasonic probe 24, and lower ultrasonic probe 24 is operable to be set up under the chip.

Further, as a preferred embodiment, the water supply mechanism 4 includes: the water storage tank is internally stored with deionized water and is connected with the water outlet pipe, the water outlet pipe is connected with the water supply pump, the water supply pump is connected with the injection pipe 41, and the injection pipe 41 is communicated with the water tank 1.

Further, as a preferred embodiment, the liquid level detection mechanism 5 includes: the liquid level measuring device comprises a containing cylinder 51, an upper liquid level sensor 52 and a lower liquid level sensor 53, wherein the containing cylinder 51 is of a cylindrical structure, the axis of the containing cylinder 51 is arranged along the vertical direction, a necking pipe is formed by downward extending of the lower part of the containing cylinder 51, the containing cylinder 51 extends into the water tank 1, the inner diameter of the necking pipe is smaller than that of the containing cylinder 51, the upper liquid level sensor 52 is arranged on the upper part of the inner side of the containing cylinder 51, and the lower liquid level sensor 53 is arranged on the lower part of the inner side of the containing cylinder 51.

Further, as an embodiment of a preferred, water tank 1 is the cuboid structure, and the quantity of liquid level detection mechanism 5 is four, and four liquid level detection mechanisms 5 set up respectively in the four corners department of water tank 1, and still include: four installed parts, the installed part all fixed with the inner wall of water tank 1 on, each installed part all is connected with an outer wall of a holding section of thick bamboo 51.

Further, as a preferred embodiment, the drain mechanism 6 includes: the waste water tank 61, the main drainage pipe 62, a plurality of first drainage branch pipes 63, a plurality of solenoid valve 64 and a plurality of solenoid valve 65 down, the main drainage pipe 62 is connected with the waste water tank 61, the upper end of each first drainage branch pipe 63 all is connected the setting through a solenoid valve 64 and the bottom of water tank 1, the lower extreme of each first drainage branch pipe 63 all is connected with the main drainage pipe 62 through a solenoid valve 65 down, each first drainage branch pipe 63 all sets up along vertical direction, the lower part of each drainage branch pipe all is provided with a resistivity detection head 7.

Further, as a preferred embodiment, it is characterized in that the drainage mechanism 6 further includes: a plurality of second drain branch pipes 66, the upper ends of the second drain branch pipes 66 being connected to the middle of the water tank 1 through an upper electromagnetic valve 64, and the lower ends of the second drain branch pipes 66 being connected to the drain main pipe 62 through a lower electromagnetic valve 65; wherein the second drainage support is in an inverted L-shaped structure, and the lower part of the second drainage branch pipe 66 is provided with a resistivity detection head 7.

Further, as a preferred embodiment, a plurality of second drain branch pipes 66 are uniformly arranged along the upper outer wall of the water tank 1.

A plurality of second drain branches 66 are provided below the surface of the deionized water in the water tank 1, each of the upper solenoid valves 64.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope and the implementation manner of the present invention.

The present invention also has the following embodiments in addition to the above:

in a further embodiment of the present invention, the carrier 3 comprises: platform portion and grudging post portion, the lower extreme of grudging post portion and the interior bottom fixed connection of water tank 1, the upper end of grudging post portion is provided with one in one side fixed connection of platform portion, and the upper surface of platform portion puts the position, places position and chip phase-match.

Through the implementation of the above embodiment, as shown in fig. 2, the present invention provides a working method of a high-quality imaging device of an ultrasonic scanner, which includes any one of the above high-quality imaging devices of an ultrasonic scanner, and further includes: the scanning control system comprises an ultrasonic scanning mechanism, a water supply mechanism 4, a liquid level detection mechanism 5, a drainage mechanism 6 and a resistivity detection head 7 which are in communication connection with the scanning control system, and specifically comprises the following steps:

and step S1, presetting a first liquid level threshold value, a second liquid level threshold value and a standard resistivity value in the scanning control system, wherein the first liquid level threshold value is smaller than the second liquid level threshold value. Further, the first liquid level threshold is the height at which the upper ultrasonic probe 23 can extend below the liquid level, the second liquid level threshold is the safe height at which deionized water does not splash out of the water tank 1 during the operation of the present invention, and then the process proceeds to step S2.

Step S2, the chip is placed on the carrier 3, the scanning control system is started, and then step S3 is performed.

Step S3, the liquid level detection mechanism 5 detects the liquid level in the water tank 1 in real time and obtains a real-time liquid level height value, and if the real-time liquid level height value is less than or equal to the first liquid level threshold value, the process proceeds to step S4, if the real-time liquid level height value is greater than the first liquid level threshold value and less than the second liquid level threshold value, the process proceeds to step S5, and if the real-time liquid level height value is greater than or equal to the second liquid level threshold value, the process proceeds to step S6. And further, comparing the measured real-time liquid height value with the first liquid level threshold value and the second liquid level threshold value under the cooperation of the scanning control system.

In step S4, the water supply mechanism 4 injects the first unit volume of deionized water into the water tank 1, and returns to step S3. Further, the first unit volume is no more than a maximum of one third of the volume of plasma water between the first level threshold and the second level threshold.

In step S5, the drain mechanism 6 drains the second unit volume of deionized water from the water tank 1, and proceeds to step S7. Further, the second unit volume is smaller than the third unit volume.

In step S6, the drain mechanism 6 drains the third unit volume of deionized water from the water tank 1, and returns to step S3. Further, the second unit volume of plasma water is less than the first unit volume.

Step S7, the resistivity of the deionized water of the second unit volume is detected by the resistivity detection head 7, and a detected resistivity value is obtained, and if the detected resistivity value is smaller than the standard resistivity value, the step S8 is performed, and if the detected resistivity value is greater than or equal to the standard resistivity value, the step S9 is performed. Further, preferably, the standard resistivity value should be close to 18M Ω cm (25 ℃).

In step S8, the drain mechanism 6 drains the fourth unit volume of deionized water, and proceeds to step S10.

In step S9, the ultrasonic scanning mechanism 2 performs ultrasonic scanning on the chip to obtain a scanning result of the chip, and the process advances to step S11.

In step S10, the water supply mechanism 4 injects a fourth unit volume of deionized water, and returns to step S5.

In step S11, the chip is taken out.

In a further embodiment of the present invention, step S9 specifically includes:

step S91, performing reflective scanning on the chip, wherein the reflective scanning is to turn on the upper ultrasonic probe 23, transmit ultrasonic waves to the chip and receive the reflected ultrasonic waves, and turn off the lower ultrasonic probe 24, and the step S92 is executed after the reflective scanning is finished;

step S92, performing transmission type scanning on the chip, wherein the transmission type scanning is that the upper ultrasonic probe 23 and the lower ultrasonic probe 24 are opened, the upper ultrasonic probe 23 transmits ultrasonic waves to the chip and receives the transmitted ultrasonic waves through the lower ultrasonic probe 24, and the step S93 is performed after the scanning is finished;

step S92 compares the result of the reflective scanning with the structure of the transmissive scanning and outputs the result.

In a further embodiment of the present invention, step S5 includes:

step S51, the lower solenoid valve 65 opens to discharge the residual ionized water in the first drain branch pipe 63 or the second drain branch pipe 66;

step S52, the lower solenoid valve 65 is closed, the upper solenoid valve 64 is opened, and the ionized water in the water tank 1 partially flows into the first branch drain pipe 63 or the second branch drain pipe 66;

in step S53, the upper solenoid valve 64 is closed, and the resistivity detection head 7 detects the ionized water in the first drain branch pipe 63 or the second drain branch pipe 66.

In a further embodiment of the present invention, step S6 includes:

step S61, opening the upper solenoid valve 64 and the lower solenoid valve 65 at the same time;

step S62, the upper solenoid valve 64 and the lower solenoid valve 65 are closed at the same time.

In a further embodiment of the present invention, in response to the actual requirement of step S3, the present invention provides that the detecting end of the upper level sensor 52 is level with the second level threshold, and the detecting end of the lower level sensor 53 is level with the first level threshold; that is, the liquid level in the water tank 1 exceeds the first liquid level threshold when the lower level sensor 53 has a reading, the liquid level in the water tank 1 is against the first liquid level threshold when the upper sensor has no reading, and the liquid level in the water tank 1 is higher than the second liquid level threshold when both the upper level sensor 52 and the lower level sensor 53 have readings.

While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.