阅读说明：本技术 一种基于光学薄膜的多功能显微成像载片 (Multifunctional microscopic imaging slide glass based on optical film ) 是由 蒯雁 张斗国 于 2021-06-28 设计创作，主要内容包括：本发明公开了一种基于光学薄膜的多功能显微成像载片,包括：光子晶体入射层、散射薄膜层、光子晶体功能层、样品层；本发明各层可以利用膜层加工的方式逐层制备,也可以分别制备后利用折射率匹配油组合起来。该成像载片第一次利用特殊设计制备的多种一维光子晶体复合结构,将垂直入射光转化为大数值孔径出射光、全内反射光和表面等离激元,成功在传统显微镜上实现了高对比度的暗场和表面等离激元成像。(The invention discloses a multifunctional microscopic imaging slide glass based on an optical film, which comprises: the photonic crystal imaging device comprises a photonic crystal incident layer, a scattering thin film layer, a photonic crystal functional layer and a sample layer; each layer of the invention can be prepared layer by using a film processing mode, and can also be combined by using the refractive index matching oil after being respectively prepared. The imaging slide glass firstly utilizes a plurality of one-dimensional photonic crystal composite structures prepared by special design to convert vertical incident light into emergent light with large numerical aperture, total internal reflection light and surface plasmon, and successfully realizes dark field and surface plasmon imaging with high contrast on a traditional microscope.)

1. A multifunctional microscopic imaging slide glass based on an optical film is characterized in that: the slide includes: the photonic crystal imaging device comprises a photonic crystal incidence layer (1), a scattering thin film layer (2), a photonic crystal functional layer (3) and a sample layer (4);

the photonic crystal functional layer (3) modulates the incidence angles and polarizations of a plurality of designed incidence working wavelengths through forbidden band design, the transmission numerical aperture of the photonic crystal functional layer (3) designed for total internal reflection is more than 1, the transmission numerical aperture of the photonic crystal functional layer (3) is required to be more than the numerical aperture of a collection system for a transmission type dark field, and then the light beam is transmitted through the photonic crystal functional layer (3) and then generates total internal reflection and dark field transmission on the surface of the sample layer (4), so that a high-contrast unmarked microscopic image with the contrast higher than 0.1 is realized for organic nanospheres and nanowires with the diameter of less than 100 nanometers in a liquid environment;

the photonic crystal incident layer (1) enables one or more target wavelengths to pass through under the condition of vertical incidence close to zero degree by designing a forbidden band, so that the target wavelengths irradiate the scattering thin film layer (2) to be scattered, non-vertical emergent light beams scattered by the scattering thin film layer (2) and reflected by the photonic crystal functional layer (3) are limited, and the utilization efficiency of the imaging slide glass is improved;

the scattering thin film layer (2) is arranged between the photonic crystal functional layer (3) and the photonic crystal incidence layer (1), provides a scattering wave vector source for light beams penetrating through the incidence layer, and simultaneously scatters the light beams reflected by the photonic crystal functional layer (3) and the photonic crystal incidence layer (1);

the sample layer (4) is used to support the sample and is bonded to the other layers by an index matching oil.

2. The multifunctional microscopic imaging slide based on optical film as claimed in claim 1, characterized in that the sample layer (4) is a glass substrate for transmission or total internal reflection system requirements, and only needs to be replaced with metal nano-film for surface plasmon system.

3. The multifunctional microscopic imaging slide glass based on the optical film as claimed in claim 1, wherein the photonic crystal functional layer (3) can adjust the functional properties thereof by adjusting the position of the forbidden band, so as to satisfy a plurality of working wavelengths and simultaneously correspond to a plurality of different functions.

4. The multifunctional microscopic imaging slide based on optical thin film according to claim 1 or 3, characterized in that the photonic crystal functional layer (3) is formed by stacking one-dimensional photonic crystal silicon nitride and silicon oxide, and the precise processing is realized by chemical and physical vapor deposition.

5. The multifunctional microscopic imaging slide based on optical thin film as claimed in claim 1, characterized in that the scattering thin film layer (2) is prepared from nanoparticles doped in spin-on glass material by spin-on film-forming process, providing scattering efficiency by refractive index difference with respect to medium material, while adding active material of fluorescent or quantum dot type, capable of easily obtaining different working wavelength with respect to incident light.

6. The multifunctional microscopic imaging slide glass based on the optical film as claimed in claim 1, wherein the photonic crystal incidence layer (1) is composed of a multilayer dielectric film, and a photon forbidden band reflects light beams out of a small angle close to vertical incidence, namely a condition of plus or minus 10 degrees, so that most of the light beams scattered by the scattering thin film layer (2) and reflected by the photonic crystal functional layer (3) can be confined in the imaging slide glass, thereby increasing the energy utilization efficiency of the imaging slide glass.

7. The multifunctional optical film-based microscopic imaging slide as claimed in claim 1, wherein the incident layer for the requirement of multiple incident wavelengths requires repeated processing of photonic crystals of the required wavelengths on the basis of processed photonic crystals to achieve the function of transmitting incident light beams.

8. The multifunctional microscopic imaging slide glass based on the optical film as claimed in claim 1, wherein the photonic crystal incident layer (1), the scattering thin film layer (2) and the photonic crystal functional layer (3) are continuously processed by physical and chemical film forming process, and each layer is processed on the glass substrate respectively in actual use and bonded by refractive index matching oil for use, and is replaced and cleaned respectively after use.

Technical Field

The invention relates to the field of dark field optical microscopic imaging with high contrast, in particular to the field of multifunctional microscopic imaging slides based on optical films.

Background

The microscopic technology is the most direct means for people to know the microscopic world, and the optical microscopy technology directly presents images of the microscopic world in front of our eyes, which is the most intuitive and most common microscopic technology in all the microscopic technologies. Dark field microscopy enhances the collection of the scattered light after illumination by reducing the collection of the illumination light during the optical microscopy imaging process, so as to improve the signal-to-noise ratio of the imaging system. According to the numerical aperture of the illuminating light, the dark field microscope can provide illumination modes such as transmission, total internal reflection and the like. The above-mentioned main microscopic techniques have certain limitations in practical applications, and have the following problems:

(1) the optical structure is complicated. The traditional dark field microscopic mode depends on the mutual matching of various optical elements such as a dark field ring, a condenser, a dark field collecting objective lens and the like, the structure building is complex, and the occupied space is large.

(2) The use cost is high. Various optical elements required by the traditional dark field microscope are large in quantity, the manufacturing and processing cost is high, the optical elements need to be matched with a complete set of microscope system to be built, and the overall use and building cost is high compared with that of the microscope system.

(3) The use convenience is poor. For different dark field illumination modes, elements such as a dark field ring and a collection objective lens of a traditional dark field microscope need to be finely adjusted, the adjustment experience of a skilled optical system is very depended on, and the use convenience is poor for most users.

Disclosure of Invention

The technical problem of the invention is solved: the multifunctional microscopic imaging slide glass based on the optical film is provided, the slide glass is used for preparing a multilayer optical film structure, and multiple functions including large numerical aperture transmission, total reflection dark field, surface plasmon illumination and the like are simultaneously realized for one or more working wavelengths by utilizing vertical incidence illumination light of a traditional microscopic system, so that the use cost of a dark field microscopic system is reduced, and the use convenience is improved.

The technical scheme for realizing the purpose is as follows: a multifunctional optical film-based microscopic imaging slide, the slide comprising: the photonic crystal imaging device comprises a photonic crystal incidence layer (1), a scattering thin film layer (2), a photonic crystal functional layer (3) and a sample layer (4);

the photonic crystal functional layer (3) is designed through a forbidden band, the incident angles and the polarization of a plurality of designed incident working wavelengths are modulated, the transmission numerical aperture of the photonic crystal functional layer (3) designed for total internal reflection is larger than 1, the transmission numerical aperture of the photonic crystal functional layer is required to be larger than the numerical aperture of a collection system for a transmission type dark field, light beams are subjected to total internal reflection and dark field transmission on the surface of the sample layer (4) after penetrating through the photonic crystal functional layer (3), high-contrast unmarked microscopic images with the contrast higher than 0.1 are realized for organic nanospheres and nanowires with the diameter of less than 100 nanometers in a liquid environment, and compared with the traditional dark field imaging effect, the contrast can be increased by 8-10 times;

the photonic crystal incident layer (1) enables one or more target wavelengths to pass through under the condition of vertical incidence close to zero degree by designing a forbidden band, so that the target wavelengths irradiate the scattering thin film layer (2) to be scattered, and simultaneously, non-vertical emergent light beams scattered by the scattering thin film layer (2) and reflected by the photonic crystal functional layer (3) are limited, so that the utilization efficiency of an imaging slide glass is improved;

the scattering thin film layer (2) is arranged between the photonic crystal functional layer (3) and the photonic crystal incidence layer (1), provides a scattering wave vector source for light beams penetrating through the incidence layer, and simultaneously scatters the light beams reflected by the photonic crystal functional layer (3) and the photonic crystal incidence layer (1);

the sample layer (4) is used for bearing a sample, and is combined with other layers through the refractive index matching oil, so that the separation and replacement are convenient, the use cost is reduced, and the use convenience is improved.

The sample layer (4) adopts a glass substrate for the requirements of a transmission or total internal reflection system, and can be realized for a surface plasmon system only by replacing the surface plasmon system with a metal nano film.

The photonic crystal functional layer (3) can flexibly adjust the property of the function by adjusting the position of a forbidden band, and a plurality of working wavelengths simultaneously correspond to a plurality of different functions.

The photonic crystal functional layer (3) is formed by laminating one-dimensional photonic crystal silicon nitride and silicon oxide, and the precise processing is realized by chemical and physical vapor deposition. The film thickness can be selectively processed corresponding to a designed wavelength of, for example, 640 nm or 750 nm, as compared to conventional illumination.

The scattering thin film layer (2) is prepared by nano particles doped in spin-on glass materials through a spin-on film forming process, the scattering efficiency is provided by the refractive index difference relative to a medium material, and when a fluorescent or quantum dot type active material is added, different working wavelengths relative to incident light can be easily obtained.

The photonic crystal incident layer (1) is composed of multiple layers of dielectric films, and the photonic forbidden band reflects light beams out of a small angle (plus or minus 10 degrees) condition close to vertical incidence, so that most of the light beams scattered by the scattering thin film layer (2) and reflected by the photonic crystal functional layer (3) can be constrained in an imaging slide glass, and the energy utilization efficiency of the imaging slide glass is improved.

The incident layer aiming at the requirement of a plurality of incident wavelengths can realize the function of transmitting incident beams by repeatedly processing the photonic crystals with the required wavelengths on the basis of the processed photonic crystals.

The photonic crystal incident layer (1), the scattering thin film layer (2) and the photonic crystal functional layer (3) are continuously processed through a physical and chemical film forming process, and each layer is processed on a glass substrate respectively in actual use and is adhered by refractive index matching oil for use, and the layers are replaced and cleaned respectively after use. Compared with the traditional thin film imaging device, the film imaging device has the advantages that the use convenience can be improved, and the use cost can be reduced.

Compared with the prior imaging technology, the invention has the advantages that:

(1) the photonic crystal can realize the precise modulation of the position and width characteristics of the forbidden band of the photonic crystal through the adjustment of the thickness and the refractive index of the multilayer dielectric film, so that the angle polarization and other regulation and control are carried out on the radiation and the reflected light with specific wavelength, and the numerical aperture and the polarization requirements of high-contrast imaging modes such as a dark field microscope, a total internal reflection microscope, a surface plasmon resonance microscope and the like are met. The photonic crystal incident layer is positioned at the bottom layer of the slide, allows vertical incident light to enter the slide, and limits scattered light to leave the slide through angle constraint. The scattering layer scatters incident light to various angles, so that the radiation requirements of the photonic crystal functional layer are met. The photonic crystal functional layer enables light meeting dark field, total internal reflection and surface plasmon modes to pass through forbidden band design, and the light meeting the conditions is reflected back to the scattering layer. The sample layer is positioned on the topmost layer and is used for bearing the observed sample so as to be convenient to replace. Each layer can be prepared layer by using a film processing mode, and can also be combined by using the refractive index matching oil after being respectively prepared. The imaging slide glass disclosed by the invention converts vertical incident light into emergent light with large numerical aperture, total internal reflection light and surface plasmon by utilizing the prepared photonic crystal structure for the first time, and successfully realizes dark field and surface plasmon imaging with high contrast on a traditional microscope.

(2) The optical structure is simple: complex optical structures and components of traditional dark field microscopic imaging are abandoned, the dark field illumination function is centralized on the optical thin film devices to be processed into imaging slide glass, and the high integration is achieved.

(3) The use cost is low: compared with the optical element which is required by the traditional dark field microscopic imaging and specially designed, the imaging slide glass used by the invention only needs a simple film processing technology, and the sample film can be separated and repeatedly cleaned for use, so that the use cost is extremely low.

(4) The use convenience is high: the dark field microscopic imaging effect with high contrast can be obtained on the traditional microscope only by utilizing the traditional bright field illumination mode without carrying out optical structure transformation. Meanwhile, due to the special forbidden band design advantages of the photonic crystal, a plurality of wavelengths and various dark field and surface plasmon resonance imaging functions can be integrated on the same imaging slide, and function switching can be realized only by switching incident wavelengths, so that the use convenience is further improved.

Drawings

FIG. 1 is a schematic structural diagram of a multifunctional microscopic imaging slide based on an optical film according to the present invention;

FIG. 2 shows bright field (left) and dark field (right) imaging results for nanowires with a diameter of 70nm, with color bars representing a logarithmic distribution of gray scale, and a scale length of 10 um;

fig. 3 shows the bright field (left) and dark field (right) imaging results of a standard PS bead with a diameter of 200nm, the color bars being gray scale distribution, and the length of the scale being 10 um.

Detailed Description

The present invention is described in further detail below with reference to the attached drawings.

As shown in fig. 1, a multifunctional microscopic imaging slide based on optical film of the present invention comprises: a photonic crystal incident layer 1, a scattering thin film layer 2, a photonic crystal functional layer 3 and a sample layer 4.

Firstly, a photonic crystal incident layer 1 is processed on the surface of a glass substrate in a mode of physically and chemically depositing silicon nitride and silicon oxide, when the working requirement has more than 2 working wavelengths, for example, the working is simultaneously carried out at 640 nanometers and 750 nanometers, the photonic crystal is continuously processed on the basis of the processed photonic crystal incident layer, and the photonic crystal incident layer can realize high transmission close to a vertical angle (plus or minus 10 degrees) at the required wavelength. If the working wavelength needs to be accurately adjusted, the thickness and the refractive index of the photonic crystal only need to be adjusted in the physical and chemical deposition processes, the working wavelength is moved by 10 nanometers and is changed by 3 nanometers corresponding to the thickness or the refractive index is changed by about 0.1, and therefore the forbidden band position of the photonic crystal is changed. The scattering thin film layer 2 is prepared by doping nanoparticles into spin-on glass material and by spin-on film forming process, and the total thickness of the scattering thin film layer 2 is 1 to 3 micrometers according to the scattering efficiency requirement. By adding fluorescent molecules and quantum dot-like active materials into the scattering thin film layer, other operating wavelengths different from the incident wavelength can be obtained. The surface of the glass or the surface of the photonic crystal incidence layer 1 can be directly processed during processing. The photonic crystal functional layer 3 is also prepared by physical and chemical deposition of silicon nitride and silicon oxide, and the function of precisely adjusting the working wavelength can be realized by only adjusting the photonic crystal in the deposition process, wherein the working wavelength is moved by 10 nanometers, the corresponding layer thickness is changed by about 3 nanometers or the refractive index is changed by about 0.1, so that the forbidden band position of the photonic crystal is changed. When the surface plasma imaging system is used, only a metal film with the thickness less than 100 nanometers needs to be processed on the photonic crystal functional layer 3. When the multifunctional microscopic imaging slide glass is used, objective lens oil or other refractive index matching oil is adhered to the sample layer 4, the photonic crystal functional layer 3, the scattering thin film layer 2 and the photonic crystal incidence layer 1 through the refractive index matching oil to form a complete multifunctional microscopic imaging slide glass based on the optical film, the complete multifunctional microscopic imaging slide glass is placed on a sample table of a common bright field optical microscope, and the common bright field microscope has the dark field imaging capability. Incident light enters the structure perpendicularly and then is scattered with the scattering thin film layer 2, light beams meeting the emission condition of the photonic crystal functional layer 3 after scattering can be emitted or totally internally reflected, a sample on the surface of the sample layer 4 is illuminated, scattering signals of the sample are collected by an objective lens with numerical aperture smaller than that of the illuminating light, and the dark field imaging function is achieved. The primary function of the scattering film layer 2 is to scatter the incident beam into various angles, including the wave vectors and polarizations required to achieve multifunctional dark field imaging. The photonic crystal functional layer 3 mainly has the function of selecting required transmission dark field light beams and total internal reflection light beams, and light beams which do not meet the requirements of the functional layer are reflected by the functional layer back to the scattering thin film layer 2 to be scattered again, so that most of incident energy is constrained in the microscopic imaging slide glass, and the energy utilization efficiency of the imaging slide glass is increased. Changing the incident wavelength of the bright field microscope, entering the multifunctional microscopic imaging slide glass, and corresponding to the functions of transmission, total internal reflection and surface plasmon according to the design of the functional layer. The nano-wire and the nano-sphere borne by the sample layer 4 and the actual biochemical sample can be lightened by the transmission illumination light beam, the total internal reflection and the surface plasmon illumination light emitted by the photonic crystal functional layer 3, so that the light is collected and imaged by a common bright field microscope, and the transmission illumination light beam or the total internal reflection illumination light emitted by the photonic crystal cannot be collected by a microscope system. The multifunctional microscopic imaging slide glass based on the optical film is only required to be placed on a sample table of a bright field microscope, and the dark field microscope function with high contrast can be realized. Still possess imaging contrast ratios of maximally over 0.2 for transparent materials less than 100 nanometers. Meanwhile, the cost is low and the use is convenient.

As shown in FIG. 2, a contrast image of the bright field imaging function and the dark field imaging function is obtained by placing the multifunctional optical film-based microscopic imaging slide glass on a common bright field microscope. Both images were taken for the imaging effect of nylon nanowires approximately 70nm in diameter bridged on 5 micron thick hydrogel microwires. The left image shows the imaging effect of the transmission bright field shot by the common bright field imaging function, and the imaging contrast is less than 0.05, and the right image shows the high-contrast dark field microscopic imaging effect shot by the dark field imaging function of the invention, and the dark field imaging contrast as high as 0.2 can be realized at the position tightly attached to the surface of the substrate.

As shown in fig. 3, it is a contrast image of bright field and surface plasmon imaging functions obtained by placing the multifunctional microscopic imaging slide based on optical film of the present invention on a common bright field microscope. The two images are used for shooting the imaging effect of the standard polyethylene microspheres with the diameters of 100 nanometers, wherein the left image is the imaging effect of a transmission bright field shot by a common bright field imaging function, the average imaging contrast is less than 0.03, and the right image shows the high-contrast surface plasmon effect achieved by the surface plasmon imaging function shooting of the invention, and the average imaging contrast is more than 0.15.

Parts of the invention not described in detail are well known in the art.