阅读说明：本技术 智能压力平衡控制系统 (Intelligent pressure balance control system ) 是由 陈奇志 钟晓宏 何永文 肖岳意 于 2021-05-18 设计创作，主要内容包括：本发明公开了智能压力平衡控制系统,包括反应炉,所述反应炉的内壁固定连接有多个压强检测器,所述反应炉的两侧分别固定连接有进气端和出气端,所述反应炉的一侧设有用于增加反应炉内压强的加压组件,所述反应炉的另一侧设有用于降低反应炉内压强的降压组件,所述反应炉的一侧固定连接有控制面板,本发明结构简单,使用方便,通过启动驱动电机和第一电动推杆可以分别打开进气端与出气端,方便平衡反应炉内的压强,且通过启动转动电机和第二电动推杆可以使反应炉内的气体分布均匀,方便在反应炉内不同位置的压强检测器检测到准确的压强,进而方便控制面板控制驱动电机、第一电动推杆、抽气泵和吸气泵来平衡反应炉内的压强。(The invention discloses an intelligent pressure balance control system, which comprises a reaction furnace, wherein a plurality of pressure detectors are fixedly connected to the inner wall of the reaction furnace, a gas inlet end and a gas outlet end are respectively and fixedly connected to two sides of the reaction furnace, a pressurizing assembly used for increasing the pressure in the reaction furnace is arranged on one side of the reaction furnace, a pressure reducing assembly used for reducing the pressure in the reaction furnace is arranged on the other side of the reaction furnace, and a control panel is fixedly connected to one side of the reaction furnace The first electric push rod, the air suction pump and the air suction pump are used for balancing the pressure in the reaction furnace.)

1. The intelligent pressure balance control system comprises a reaction furnace (1) and is characterized in that a plurality of pressure detectors (2) are fixedly connected to the inner wall of the reaction furnace (1), the air inlet end (3) and the air outlet end (10) are fixedly connected to the two sides of the reaction furnace (1) respectively, a pressurizing assembly used for increasing the pressure in the reaction furnace (1) is arranged on one side of the reaction furnace (1), a pressure reducing assembly used for reducing the pressure in the reaction furnace (1) is arranged on the other side of the reaction furnace (1), a control panel (32) is fixedly connected to one side of the reaction furnace (1), and a stirring assembly used for enabling gas in the reaction furnace (1) to be uniformly distributed is arranged in the reaction furnace (1).

2. The intelligent pressure balance control system according to claim 1, wherein the pressurizing assembly comprises an air pump (4) arranged on one side of the reaction furnace (1), an air outlet pipe of the air pump (4) extends into the air inlet end (3), a baffle (5) is connected in the air inlet end (3) in a sliding manner, the top of the baffle (5) penetrates through the top of the air inlet end (3) in a sliding manner, a rotating wheel (7) is connected to the top of the air inlet end (3) in a rotating manner, a sliding groove (8) is formed in the outer wall of the rotating wheel (7), a connecting block (6) which is connected with the sliding groove (8) in a sliding manner is fixedly connected to the top of one side of the baffle (5), a driving motor (9) is fixedly connected to the top of the air inlet end (3), and an output shaft of the driving motor (9) and the rotating wheel (7) are in gear transmission.

3. The intelligent pressure balance control system according to claim 1, wherein the pressure reduction assembly comprises a getter pump (11) disposed at the other side of the reactor (1), an air suction pipe of the air suction pump (11) extends into the air outlet end (10), a rotating shaft (12) is transversely and rotatably connected in the air outlet end (10), a rotating plate (13) is fixedly sleeved on the outer wall of the rotating shaft (12), and the top and the bottom of the rotating plate (13) are respectively contacted with the top inner wall and the bottom inner wall of the air outlet end (10), one end of the rotating shaft (12) rotatably penetrates through one side of the air outlet end (10) and is fixedly connected with a first gear (14), one side of the air outlet end (10) is fixedly connected with a first electric push rod (15), a piston rod of the first electric push rod (15) is fixedly connected with a first rack (16) meshed with the first gear (14).

4. The intelligent pressure balance control system according to claim 2 or 3, wherein the stirring assembly comprises a rotating motor (24) arranged at one side of the reaction furnace (1), two symmetrical rotating rods (17) are transversely and rotatably connected in the reaction furnace (1), a round sleeve (18) is fixedly sleeved on the outer wall of each rotating rod (17), a plurality of stirring blades (19) are fixedly connected to the outer wall of each round sleeve (18) at equal intervals, one end of each rotating rod (17) close to the rotating motor (24) extends to one side of the reaction furnace (1) and is fixedly connected with a first synchronizing wheel (20), an output shaft of each rotating motor (24) is fixedly connected with one end of one rotating rod (17), one side of the reaction furnace (1) close to the rotating motor (24) is rotatably connected with a second synchronizing wheel (21) and a third synchronizing wheel (22), the second synchronous wheel (21), the third synchronous wheel (22) and the two first synchronous wheels (20) are in transmission connection with the same synchronous belt (23).

5. The intelligent pressure balance control system according to claim 4, wherein a rotating shaft (25) which is perpendicular to the rotating rod (17) is rotatably connected to the reaction furnace (1), the outer wall of the rotating shaft (25) is fixedly sleeved with a sliding sleeve (26) positioned between the two round sleeves (18), two symmetrical sliding rods (27) are connected in the sliding sleeve (26) in a sliding way, one end of the sliding rod (27) far away from the rotating shaft (25) is rotatably connected with a sliding block (28) which is in sliding connection with the outer wall of the round sleeve (18), one end of the rotating shaft (25) extends to one side of the reaction furnace (1) and is fixedly connected with a second gear (29), one side of the reaction furnace (1) is fixedly connected with a second electric push rod (30), a piston rod of the second electric push rod (30) is fixedly connected with a second rack (31) meshed with the second gear (29).

6. The intelligent pressure balance control system according to claim 1, wherein a sealing ring (33) is arranged on the top of the air inlet end (3), and one side of the baffle (5) slides through the sealing ring (33).

7. The intelligent pressure balance control system according to claim 4, characterized in that a stop (34) is fixedly sleeved on the outer wall of the rotating rod (17).

8. The intelligent pressure balance control system according to claim 3, wherein a gas collection tank (35) is arranged on one side of the reaction furnace (1) close to the getter pump (11), and a gas outlet pipe of the getter pump (11) extends into the gas collection tank (35).

Technical Field

The invention relates to the technical field of pressure balance control, in particular to an intelligent pressure balance control system.

Background

In semiconductor or solar diffusion furnace equipment, a non-closed tube mode is adopted in a traditional diffusion furnace production process, and the mode has no restriction and control on the pressure in the furnace and cannot achieve the corresponding pressure balance in the furnace, so that the standard of the traditional equipment for realizing the pressure balance in the furnace in the diffusion process on the process level has certain difficulty, along with the rapid development of the semiconductor industry, the requirements on the uniformity and the process expansibility of the diffusion process are higher and higher, and meanwhile, a corresponding brand new standard is provided for the pressure control in the furnace of the diffusion equipment, so that the realization of the pressure balance in the diffusion furnace is a key link for the development of the semiconductor industry.

In the prior art, the pressure in the furnace cannot be effectively and accurately controlled in a balanced manner, so that the process level cannot be improved, and in the process of controlling the pressure balance in the furnace, the pressure in the furnace cannot be accurately detected due to the fact that gas in the furnace is unevenly distributed.

Disclosure of Invention

The invention aims to solve the defects in the prior art and provides an intelligent pressure balance control system.

In order to achieve the purpose, the invention adopts the following technical scheme:

the intelligent pressure balance control system comprises a reaction furnace, wherein a plurality of pressure detectors are fixedly connected to the inner wall of the reaction furnace, the two sides of the reaction furnace are respectively and fixedly connected with an air inlet end and an air outlet end, a pressurizing assembly used for increasing the pressure in the reaction furnace is arranged on one side of the reaction furnace, a pressure reducing assembly used for reducing the pressure in the reaction furnace is arranged on the other side of the reaction furnace, a control panel is fixedly connected to one side of the reaction furnace, and a stirring assembly used for enabling the gas in the reaction furnace to be uniformly distributed is arranged in the reaction furnace.

Preferably, the pressurizing assembly comprises an air pump arranged on one side of the reaction furnace, an air outlet pipe of the air pump extends into the air inlet end, a baffle is connected in the air inlet end in a sliding mode, the top of the baffle penetrates through the top of the air inlet end in a sliding mode, a rotating wheel is connected to the top of the air inlet end in a rotating mode, a sliding groove is formed in the outer wall of the rotating wheel, a connecting block which is fixedly connected with the top of one side of the baffle and is connected with the sliding groove in a sliding mode, a driving motor is fixedly connected to the top of the air inlet end, and an output shaft of the driving motor and the rotating wheel are in gear transmission.

Preferably, the pressure reduction assembly includes the aspirator pump that sets up at the reacting furnace opposite side, the breathing pipe of aspirator pump extends to in giving vent to anger the end, it is the transverse rotation and is connected with the pivot to give vent to anger in the end, the outer wall fixed cover of pivot is equipped with the rotor plate, and the top of rotor plate and bottom respectively with give vent to anger the top inner wall of end and bottom inner wall and touch mutually, the one end of pivot is rotated and is run through one side and the first gear of fixedly connected with of the end of giving vent to anger, the first electric putter of one side fixedly connected with of the end of giving vent to anger, first electric putter's piston rod fixedly connected with and first gear engaged with first rack.

Preferably, the stirring subassembly is including setting up the rotation motor in reacting furnace one side, it is the transverse rotation and is connected with two symmetrical dwangs in the reacting furnace, the fixed cover of outer wall of dwang is equipped with the circle cover, a plurality of stirring leaves of outer wall equidistance fixedly connected with of circle cover, two the dwang is close to the one end of rotating the motor and all extends to one side of reacting furnace and the first synchronizing wheel of equal fixedly connected with, the output shaft of rotating the motor and the one end fixed connection of one of them dwang, one side that the reacting furnace is close to the rotating motor rotates and is connected with second synchronizing wheel and third synchronizing wheel, the transmission is connected with same hold-in range on second synchronizing wheel, third synchronizing wheel and two first synchronizing wheels.

Preferably, the inside of the reaction furnace is rotatably connected with a rotating shaft which is perpendicular to the rotating rod, the outer wall of the rotating shaft is fixedly sleeved with a sliding sleeve which is positioned between the two circular sleeves, the sliding sleeve is internally and slidably connected with two symmetrical sliding rods, one end, far away from the rotating shaft, of each sliding rod is rotatably connected with a sliding block which is slidably connected with the outer wall of each circular sleeve, one end of the rotating shaft extends to one side of the reaction furnace and is fixedly connected with a second gear, one side of the reaction furnace is fixedly connected with a second electric push rod, and a piston rod of the second electric push rod is fixedly connected with a second rack which is meshed with the second gear.

Preferably, the top of inlet end is equipped with the sealing washer, and one side slip of baffle runs through the sealing washer, can increase the leakproofness of inlet end through the sealing washer.

Preferably, the fixed cover of outer wall of dwang is equipped with the dog, can play limiting displacement to the circle cover through the dog.

Preferably, a gas collecting box is arranged on one side of the reaction furnace close to the getter pump, a gas outlet pipe of the getter pump extends into the gas collecting box, and gas in the reaction furnace is collected through the gas collecting box, so that the gas in the reaction furnace is prevented from overflowing and scattering, and the environment is prevented from being polluted.

Compared with the prior art, the invention has the beneficial effects that:

1. in the invention, a driving motor is started, an output shaft of the driving motor drives a rotating wheel to rotate through a gear, a connecting block drives a baffle plate to slide along the track of a chute along with the rotation of the rotating wheel, so that the baffle plate moves upwards, an air suction pump is started at the moment, and gas is supplemented into a reaction furnace through the air suction pump, so that the pressure in the reaction furnace is increased;

2. according to the invention, the first electric push rod is started, the piston rod of the first electric push rod pushes the first rack to move to one side, and the first rack is meshed with the first gear, so that the rotating plate can be driven to rotate along with the rotation of the first gear, and further, gas in the reaction furnace can be pumped into the gas collection box through the suction pump, so that the pressure in the reaction furnace is reduced;

3. according to the invention, the rotating motor is started, the rotating motor drives the two rotating rods to rotate through the first synchronizing wheel, the second synchronizing wheel, the third synchronizing wheel and the synchronous belt, so that gas in the reaction furnace can be uniformly distributed through the rotation of the stirring blades, then the second electric push rod and the piston rod of the second electric push rod are started to push the second rack to move back and forth, the second gear and the rotating shaft are driven to reciprocate for small-amplitude rotation, and then the upper round sleeve and the lower round sleeve can be driven to move in a staggered manner through the sliding sleeve, so that the gas in the reaction furnace can be more effectively uniformly distributed.

The gas pressure detector is simple in structure and convenient to use, the gas inlet end and the gas outlet end can be opened respectively by starting the driving motor and the first electric push rod, so that the pressure in the reaction furnace is balanced conveniently, the gas in the reaction furnace can be uniformly distributed by starting the rotating motor and the second electric push rod, so that the pressure detectors at different positions in the reaction furnace can detect accurate pressure conveniently, and the control panel can control the driving motor, the first electric push rod, the air suction pump and the air suction pump to balance the pressure in the reaction furnace conveniently.

Drawings

FIG. 1 is a schematic sectional view of an intelligent pressure balance control system according to the present invention;

FIG. 2 is a schematic left-side view of a reactor of the intelligent pressure balance control system according to the present invention;

FIG. 3 is a schematic diagram of a right-side sectional view of a reaction furnace of the intelligent pressure balance control system according to the present invention;

FIG. 4 is a schematic diagram of a front view of an air outlet end of the intelligent pressure balance control system according to the present invention;

FIG. 5 is a schematic diagram of a top view of an air inlet end of the intelligent pressure balance control system according to the present invention;

FIG. 6 is a schematic sectional top view of an air inlet end of the intelligent pressure balance control system according to the present invention;

fig. 7 is a system block diagram of the intelligent pressure balance control system proposed by the present invention.

In the figure: 1. a reaction furnace; 2. a pressure detector; 3. an air inlet end; 4. an air pump; 5. a baffle plate; 6. connecting blocks; 7. a rotating wheel; 8. a chute; 9. a drive motor; 10. an air outlet end; 11. A getter pump; 12. a rotating shaft; 13. a rotating plate; 14. a first gear; 15. a first electric push rod; 16. a first rack; 17. rotating the rod; 18. a round sleeve; 19. stirring blades; 20. a first synchronizing wheel; 21. a second synchronizing wheel; 22. a third synchronizing wheel; 23. a synchronous belt; 24. rotating the motor; 25. a rotating shaft; 26. a sliding sleeve; 27. a slide bar; 28. a slider; 29. a second gear; 30. a second electric push rod; 31. a second rack; 32. a control panel; 33. a seal ring; 34. a stopper; 35. a gas collection box.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

Example one

Referring to fig. 1-7, the intelligent pressure balance control system comprises a reaction furnace 1, wherein a plurality of pressure detectors 2 are fixedly connected to the inner wall of the reaction furnace 1, a gas inlet end 3 and a gas outlet end 10 are respectively and fixedly connected to the two sides of the reaction furnace 1, a pressurizing assembly for increasing the pressure in the reaction furnace 1 is arranged on one side of the reaction furnace 1, a pressure reducing assembly for reducing the pressure in the reaction furnace 1 is arranged on the other side of the reaction furnace 1, a control panel 32 is fixedly connected to one side of the reaction furnace 1, and a stirring assembly for enabling gas in the reaction furnace 1 to be uniformly distributed is arranged in the reaction furnace 1.

Example two

The embodiment is improved on the basis of the first embodiment: the pressurizing assembly comprises an air extracting pump 4 arranged on one side of the reaction furnace 1, an air outlet pipe of the air extracting pump 4 extends into an air inlet end 3, a baffle plate 5 is connected in the air inlet end 3 in a sliding mode, the top of the baffle plate 5 penetrates through the top of the air inlet end 3 in a sliding mode, a rotating wheel 7 is connected on the top of the air inlet end 3 in a rotating mode, a sliding groove 8 is formed in the outer wall of the rotating wheel 7, a connecting block 6 connected with the sliding groove 8 in a sliding mode is fixedly connected to the top of the baffle plate 5, a driving motor 9 is fixedly connected to the top of the air inlet end 3, an output shaft of the driving motor 9 and the rotating wheel 7 are in gear transmission, the pressure reducing assembly comprises an air suction pump 11 arranged on the other side of the reaction furnace 1, an air suction pipe of the air suction pump 11 extends into an air outlet end 10, a rotating shaft 12 is connected into the air outlet end 10 in a transverse rotating mode, a rotating plate 13 is fixedly sleeved on the outer wall of the rotating shaft 12, and the top and the bottom of the rotating plate 13 are respectively contacted with the inner wall of the top and the inner wall of the bottom of the air outlet end 10, one end of the rotating shaft 12 is rotatably penetrated through one side of the gas outlet end 10 and is fixedly connected with a first gear 14, one side of the gas outlet end 10 is fixedly connected with a first electric push rod 15, a piston rod of the first electric push rod 15 is fixedly connected with a first rack 16 meshed with the first gear 14, the stirring component comprises a rotating motor 24 arranged on one side of the reaction furnace 1, two symmetrical rotating rods 17 are transversely and rotatably connected in the reaction furnace 1, a round sleeve 18 is fixedly sleeved on the outer wall of the rotating rod 17, a plurality of stirring blades 19 are fixedly connected on the outer wall of the round sleeve 18 at equal intervals, one ends of the two rotating rods 17 close to the rotating motor 24 extend to one side of the reaction furnace 1 and are fixedly connected with first synchronizing wheels 20, an output shaft of the rotating motor 24 is fixedly connected with one end of one of the rotating rods 17, one side of the reaction furnace 1 close to the rotating motor 24 is rotatably connected with a second synchronizing wheel 21 and a third synchronizing wheel 22, the second synchronous wheel 21, the third synchronous wheel 22 and the two first synchronous wheels 20 are in transmission connection with the same synchronous belt 23, a rotating shaft 25 which is perpendicular to the rotating rod 17 is rotationally connected in the reaction furnace 1, a sliding sleeve 26 which is positioned between the two circular sleeves 18 is fixedly sleeved on the outer wall of the rotating shaft 25, two symmetrical sliding rods 27 are slidably connected in the sliding sleeve 26, one ends of the sliding rods 27, far away from the rotating shaft 25, are rotatably connected with sliding blocks 28 which are slidably connected with the outer wall of the circular sleeves 18, one end of the rotating shaft 25 extends to one side of the reaction furnace 1 and is fixedly connected with a second gear 29, one side of the reaction furnace 1 is fixedly connected with a second electric push rod 30, a piston rod of the second electric push rod 30 is fixedly connected with a second rack 31 which is meshed with the second gear 29, a sealing ring 33 is arranged at the top of the air inlet end 3, and one side of the baffle plate 5 slidably penetrates through the sealing ring 33, can increase the leakproofness of inlet end 3 through sealing washer 33, the fixed cover of outer wall of dwang 17 is equipped with dog 34, can play limiting displacement to circle cover 18 through dog 34.

EXAMPLE III

The embodiment is improved on the basis of the first embodiment: one side of the reaction furnace 1 close to the getter pump 11 is provided with a gas collection box 35, the gas outlet pipe of the getter pump 11 extends into the gas collection box 35, and the gas in the reaction furnace 1 is collected through the gas collection box 35, so that the gas in the reaction furnace 1 is prevented from overflowing and scattering, and the environment is prevented from being polluted.

The working principle is as follows: starting a rotating motor 24, wherein the rotating motor 24 drives two rotating rods 17 to rotate through a first synchronizing wheel 20, a second synchronizing wheel 21, a third synchronizing wheel 22 and a synchronous belt 23, so that the gas in the reaction furnace 1 can be uniformly distributed through the rotation of a stirring blade 19, then starting a second electric push rod 30, a piston rod of the second electric push rod 30 pushes a second rack 31 to move back and forth to drive a second gear 29 and a rotating shaft 25 to rotate back and forth in a small amplitude, and further, the upper round sleeve 18 and the lower round sleeve 18 can be driven to move in a staggered manner through a sliding sleeve 26, so that the gas in the reaction furnace 1 can be more efficiently and uniformly distributed, the accurate pressure intensity in the reaction furnace 1 is detected through pressure intensity detectors 2 at different positions in the reaction furnace 1, if the pressure intensity is low, starting a driving motor 9, an output shaft of the driving motor 9 drives a rotating wheel 7 to rotate through the gear, and along with the rotation of the rotating wheel 7, the connecting block 6 drives the baffle 5 to slide along the track of the chute 8, so that the baffle 5 moves upwards, the air pump 4 is started at the moment, the air pump 4 replenishes gas in the reaction furnace 1 to increase the pressure in the reaction furnace 1, the round sleeve 18 and the stirring blade 19 stir back and forth, the pressure in the reaction furnace 1 can be quickly detected through the pressure detector 2, and further the pressure in the reaction furnace 1 can be finely regulated, if high pressure is detected, the first electric push rod 15 is started, the piston rod of the first electric push rod 15 pushes the first rack 16 to move to one side, the first rack 16 is meshed with the first gear 14, so that the rotating plate 13 can be driven to rotate along with the rotation of the first gear 14, the gas in the reaction furnace 1 can be pumped into the gas collection box 35 through the air suction pump 11 to reduce the pressure in the reaction furnace 1, and the round sleeve 18 and the stirring blade 19 stir back and forth, the pressure detector 2 can be used for rapidly detecting the pressure in the reaction furnace 1, and further finely regulating and controlling the pressure in the reaction furnace 1, so that the pressure balance in the reaction furnace 1 can be accurately controlled.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.