阅读说明：本技术 一种单晶硅生长炉炉盖精密成型装置 (Precise forming device for monocrystalline silicon growth furnace cover ) 是由 汪书文 叶建海 高典 高文柱 于 2021-07-05 设计创作，主要内容包括：本发明公开了一种单晶硅生长炉炉盖精密成型装置,包括锻压机、传送带、转运器、脱模剂喷洒器和中央控制器,两条所述传送带分别设置在锻压机的前后两侧,所述转运器设置在锻压机的一侧并将炉盖原材料或炉盖成品在锻压机和传送带之间转送,所述脱模剂喷洒器包括喷枪、液管、液箱和液泵,所述喷枪通过液管与储存有脱模剂的液箱相连接且管路上安装有液泵,若干个所述喷枪分别固定在锻压机之中且朝向锻压机的冲压板和模具喷洒脱模剂,所述锻压机、传送带、转运器和脱模剂喷洒器分别与中央控制器电连接,能够避免传送电机从输出轴处接收热量升温而导致使用寿命降低,还可避免炉盖成品与冲压板和模具相粘连。(The invention discloses a precision forming device for a furnace cover of a monocrystalline silicon growth furnace, which comprises a forging press, conveyor belts, a transporter, a release agent sprayer and a central controller, wherein the two conveyor belts are respectively arranged at the front side and the rear side of the forging press, the transporter is arranged at one side of the forging press and transfers furnace cover raw materials or furnace cover finished products between the forging press and the conveyor belts, the release agent sprayer comprises a spray gun, a liquid pipe, a liquid tank and a liquid pump, the spray gun is connected with the liquid tank storing the release agent through the liquid pipe, the liquid pump is arranged on the pipeline, a plurality of spray guns are respectively fixed in the forging press and spray the release agent towards a stamping plate and a die of the forging press, the conveyor belts, the transporter and the release agent sprayer are respectively electrically connected with the central controller, and the reduction of service life caused by the fact that a transmission motor receives heat from an output shaft and is heated can be avoided, and the adhesion of the furnace cover finished product with the stamping plate and the die can also be avoided.)

1. The utility model provides a precision forming device of monocrystalline silicon growth furnace bell which characterized in that: comprises a forging press (1), two conveyor belts (2), a transporter (3), a release agent sprayer (4) and a central controller, wherein the two conveyor belts (2) are respectively arranged at the front side and the rear side of the forging press (1), the transporter (3) is arranged at one side of the forging press (1) and transfers furnace cover raw materials or furnace cover finished products between the forging press (1) and the conveyor belt (2), the release agent sprayer (4) comprises spray guns, liquid pipes, a liquid box and a liquid pump, the spray guns are connected with the liquid box storing the release agent through the liquid pipes, the liquid pump is installed on a pipeline, the spray guns are respectively fixed in the forging press (1) and spray the release agent towards a stamping plate (14) and a die (15) of the forging press (1), the forging press (1), the conveyor belt (2), the transfer device (3) and the release agent sprayer (4) are electrically connected with a central controller respectively.

2. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 1, characterized in that: the forging press (1) comprises a machine table (11), a rack (12), a hydraulic cylinder (13), a stamping plate (14) and a die (15), wherein the rack (12) is located on the machine table (11), the hydraulic cylinder (13) is installed on the rack (12), the end part of an expansion rod is connected with the stamping plate (14), and the die (15) is installed on the machine table (11) and is arranged opposite to the stamping plate (14).

3. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 1, characterized in that: the conveyor belt (2) comprises a conveyor belt body (21), a conveying motor (22) and a cooler (23), wherein the cooler (23) comprises a cooling box (231) and a cooling wheel (232), one part of a wheel plate (2321) of the cooling wheel (232) is immersed in cooling liquid in the cooling box (231), and the front side and the rear side of the wheel plate are respectively connected with a driving shaft of the conveyor belt body (21) and an output shaft of the conveying motor (22) in a concentric mode.

4. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 3, characterized in that: the cooling box (231) comprises a box body (2311) and a box cover (2312), the box cover (2312) closes an opening at the top of the box body (2311) so as to form a sealed chamber together with the box body (2311) in an enclosing mode, the wheel plate (2321) is located in the sealed chamber, and a side opening is formed in the box body (2311) or the box cover (2312).

5. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 4, wherein: the centers of the front side and the rear side of the wheel plate (2321) are respectively provided with a wheel shaft (2322), the two wheel shafts (2322) are respectively rotatably connected onto the box body (2311) or the box cover (2312), and the free ends of the two wheel shafts are concentrically connected with the driving shaft of the conveyor belt body (21) and the output shaft of the conveyor motor (22) after extending out of the sealing chamber along the side openings.

6. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 1, characterized in that: transporter (3) include vertical slip table (31), horizontal slip table (32) and manipulator (33), vertical slip table (31) are including vertical stage body and vertical driver, horizontal slip table (32) are including horizontal stage body and horizontal driver, the vertical spout of the horizontal stage body of vertical driver drive reciprocates along vertical stage body, horizontal driver drive manipulator (33) is along the horizontal spout back-and-forth movement of horizontal stage body, the manipulator includes finger (331) and hand driver (332), finger (331) are driven and are opened or closed by hand driver (332).

7. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 1, characterized in that: the spray gun comprises a main pipe body (41), an auxiliary pipe body (42), a spray head (43) and a gun body driver (44), wherein the top end of the main pipe body (41) is connected with a liquid pipe, the top end of the auxiliary pipe body (42) is rotatably connected into the main pipe body (41), the bottom end of the auxiliary pipe body is connected with the spray head (43), a bending section (421) is arranged at the position, close to the spray head (43), of the auxiliary pipe body (42), and the auxiliary pipe body (42) is driven to rotate by the gun body driver (44).

8. The precision forming device for the furnace cover of the monocrystalline silicon growth furnace as claimed in claim 7, wherein: the gun body driver (44) comprises a gun body motor (441), a driving gear (442) and a driven gear (443), the gun body motor (441) is fixed on the outer wall of the main tube body (41), an output shaft of the gun body motor is connected with the driving gear (442), the driving gear (442) is meshed with the driven gear (443), and the driven gear (443) is fixed on the outer wall of the auxiliary tube body (42).

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of single crystal furnaces, in particular to the technical field of a precise forming device for a furnace cover of a single crystal silicon growth furnace.

[ background of the invention ]

Monocrystalline silicon is a good semiconductor material, can be used in the production and deep processing and manufacturing of diode level, rectifier device level, circuit level and chip product, and its subsequent products such as integrated circuit and semiconductor separation device have also been widely applied in various fields, especially in military electronic equipment, and are in the front of the development of new materials.

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and then growing dislocation-free single crystals by using a Czochralski method, and generally comprises a furnace body, an electrical control cabinet, a heating transformer, a power supply filter cabinet, a main vacuum pump, an auxiliary chamber vacuum pump, a vacuum pipeline, a hydraulic system, an argon system, a cooling water system and the like.

At present, when a furnace cover of a single crystal furnace is prepared, a high-temperature cover body raw material is generally conveyed to a forging press by a conveyor belt to be forged and formed, and the problem of short service life is easily caused when a conveying motor of the conveyor belt operates in a high-temperature environment for a long time. In addition, during forging and pressing, the finished furnace cover product after pressing is easy to adhere to a die or a stamping plate, so that subsequent forging and pressing are influenced, and a solution is needed.

[ summary of the invention ]

The invention aims to solve the problems in the prior art, and provides a precision forming device for a furnace cover of a monocrystalline silicon growth furnace, which can continuously transmit heat transmitted from a driving shaft to cooling liquid to insulate a transmission motor, avoid the reduction of service life caused by the temperature rise of the transmission motor when receiving heat from an output shaft, and also avoid the adhesion of a finished furnace cover product with a stamping plate and a die.

In order to achieve the purpose, the invention provides a precision forming device for a furnace cover of a monocrystalline silicon growth furnace, which comprises a forging press, two conveyor belts, a transporter, a release agent sprayer and a central controller, wherein the two conveyor belts are respectively arranged on the front side and the rear side of the forging press, the transporter is arranged on one side of the forging press and transfers furnace cover raw materials or furnace cover finished products between the forging press and the conveyor belts, the release agent sprayer comprises a spray gun, a liquid pipe, a liquid box and a liquid pump, the spray gun is connected with the liquid box storing the release agent through the liquid pipe, the liquid pump is arranged on the pipeline, the spray guns are respectively fixed in the forging press and spray the release agent towards a stamping plate and a die of the forging press, and the forging press, the conveyor belts, the transporter and the release agent sprayer are respectively and electrically connected with the central controller.

Preferably, the forging press comprises a machine table, a rack, a hydraulic cylinder, a stamping plate and a die, wherein the rack is positioned above the machine table, the hydraulic cylinder is installed above the rack, the end part of the telescopic rod is connected with the stamping plate, and the die is installed above the machine table and is arranged opposite to the stamping plate.

Preferably, the conveyor belt comprises a conveyor belt body, a conveyor motor and a cooler, the cooler comprises a cooling tank and a cooling wheel, a part of a wheel plate of the cooling wheel is immersed in cooling liquid in the cooling tank, and the front side and the rear side of the wheel plate of the cooling wheel are respectively connected with the driving shaft of the conveyor belt body and the output shaft of the conveyor motor in a concentric mode.

Preferably, the cooling box comprises a box body and a box cover, the box cover closes the opening at the top of the box body so as to form a sealed chamber together with the box body in an enclosing mode, the wheel plate is located in the sealed chamber, and the box body or the box cover is provided with a side opening.

Preferably, the centers of the front side and the rear side of the wheel plate are respectively provided with a wheel shaft, the two wheel shafts are respectively rotatably connected onto the box body or the box cover, and the free ends of the two wheel shafts are concentrically connected with the driving shaft of the conveyor belt body and the output shaft of the conveyor motor after extending out of the sealing chamber along the side openings.

As preferred, the transfer ware includes vertical slip table, horizontal slip table and manipulator, vertical slip table includes vertical stage body and vertical driver, horizontal slip table includes horizontal stage body and horizontal driver, the horizontal stage body of vertical driver drive reciprocates along the vertical spout of vertical stage body, horizontal driver manipulator is along the horizontal spout back-and-forth movement of horizontal stage body, the manipulator includes finger and hand driver, the finger is driven by the hand driver and is opened or closed.

Preferably, the spray gun comprises a main pipe body, an auxiliary pipe body, a spray head and a gun body driver, wherein the top end of the main pipe body is connected with a liquid pipe, the top end of the auxiliary pipe body is rotatably connected into the main pipe body, the bottom end of the auxiliary pipe body is connected with the spray head, a bent section is arranged at the position, close to the spray head, of the auxiliary pipe body, and the auxiliary pipe body is driven to rotate by the gun body driver.

Preferably, the gun body driver comprises a gun body motor, a driving gear and a driven gear, the gun body motor is fixed on the outer wall of the main pipe body, an output shaft of the gun body motor is connected with the driving gear, the driving gear is meshed with the driven gear, and the driven gear is fixed on the outer wall of the auxiliary pipe body.

The invention has the beneficial effects that: according to the invention, through the mutual matching among the forging press, the conveyor belt and the transporter, automatic feeding, stamping and discharging are completed, and meanwhile, the release agent sprayer is arranged in a matching manner, so that the release agent can be automatically sprayed on the stamping plate and the die of the forging press before and after stamping, the phenomenon that the processing of subsequent products is influenced due to the adhesion of a furnace cover finished product with the stamping plate and the die is avoided, the whole process does not need to be matched by workers, and the working efficiency is high; the gun body driver is arranged to drive the auxiliary pipe body to rotate under the main pipe body, so that the spraying range of the release agent can be enlarged under the condition that the release agent is not sprayed; the cooling wheel is arranged between the driving shaft of the transmission belt body and the output shaft of the transmission motor, and a part of a wheel plate of the cooling wheel is immersed in the cooling liquid in the cooling box, so that the heat transmitted from the driving shaft is continuously transmitted into the cooling liquid, the transmission motor is insulated, and the transmission motor is prevented from receiving the heat from the output shaft and increasing the temperature to reduce the service life; the wheel plate is sealed in the sealed chamber, and the wheel shafts are respectively concentrically arranged at the front side and the rear side of the wheel plate, so that the wheel plate is convenient to mount and prevents cooling liquid from splashing along with the rotating cooling wheel.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a top view of a furnace cover precision forming device of a monocrystalline silicon growth furnace according to the invention;

FIG. 2 is a front view of a forging press of the furnace lid precision molding device of the monocrystalline silicon growth furnace of the invention;

FIG. 3 is a top view of a conveyor belt of a precision forming device for a furnace cover of a monocrystalline silicon growth furnace according to the invention;

FIG. 4 is a front view of a cooler of a precision forming device for a furnace lid of a single crystal silicon growth furnace according to the present invention;

FIG. 5 is a schematic view showing the connection between a conveying motor and a cooling wheel of the precise forming device for the furnace cover of the monocrystalline silicon growth furnace of the invention;

FIG. 6 is a top view of a transporter of the precision forming device for the furnace cover of the monocrystalline silicon growth furnace of the invention;

FIG. 7 is a front view of a spray gun of the precision forming device for the furnace cover of the monocrystalline silicon growth furnace.

In the figure: 1-forging press, 11-machine table, 12-machine frame, 13-hydraulic cylinder, 14-punching plate, 15-mould, 2-conveyor belt, 21-conveyor belt body, 22-conveyor motor, 23-cooler, 231-cooling box, 2311-box body, 2312-box cover, 232-cooling wheel, 2321-wheel plate, 2322-wheel shaft, 3-transporter, 31-vertical sliding table, 32-transverse sliding table, 33-manipulator, 331-finger, 332-hand driver, 4-release agent, 41-primary tube body, 42-secondary tube body, 421-bending section, 43-sprayer, 44-gun body driver, 441-gun body motor, 442-driving gear and 443-driven gear.

[ detailed description ] embodiments

Referring to fig. 1 to 7, the precise forming device for the furnace cover of the monocrystalline silicon growth furnace comprises a forging press 1, two conveyor belts 2, a transporter 3, a release agent sprayer 4 and a central controller, wherein the two conveyor belts 2 are respectively arranged on the front side and the rear side of the forging press 1, the transporter 3 is arranged on one side of the forging press 1 and transfers furnace cover raw materials or furnace cover finished products between the forging press 1 and the conveyor belts 2, the release agent sprayer 4 comprises a spray gun, a liquid pipe, a liquid box and a liquid pump, the spray gun is connected with the liquid box storing the release agent through the liquid pipe, the liquid pump is arranged on a pipeline, the spray guns are respectively fixed in the forging press 1 and spray the release agent towards a stamping plate 14 and a die 15 of the forging press 1, and the forging press 1, the conveyor belts 2, the transporter 3 and the release agent sprayer 4 are respectively and electrically connected with the central controller.

The forging press 1 comprises a machine table 11, a frame 12, a hydraulic cylinder 13, a stamping plate 14 and a die 15, wherein the frame 12 is located above the machine table 11, the hydraulic cylinder 13 is installed above the frame 12, the end part of an expansion rod is connected with the stamping plate 14, and the die 15 is installed above the machine table 11 and is arranged opposite to the stamping plate 14.

The conveyor belt 2 comprises a conveyor belt body 21, a conveyor motor 22 and a cooler 23, the cooler 23 comprises a cooling tank 231 and a cooling wheel 232, a part of a wheel plate 2321 of the cooling wheel 232 is immersed in cooling liquid in the cooling tank 231, and the front side and the rear side of the wheel plate 2321 are respectively connected with a driving shaft of the conveyor belt body 21 and an output shaft of the conveyor motor 22 in a concentric mode.

The cooling box 231 comprises a box body 2311 and a box cover 2312, the box cover 2312 closes an opening at the top of the box body 2311 so as to jointly surround the box body 2311 to form a sealed chamber, the wheel plate 2321 is located in the sealed chamber, and a side opening is formed in the box body 2311 or the box cover 2312.

The wheel plate 2321 is provided with two wheel shafts 2322 at the center of the front and rear sides thereof, the two wheel shafts 2322 are rotatably connected to the case body 2311 or the case cover 2312, and the free ends of the two wheel shafts 2322 are concentrically connected with the driving shaft of the conveyor belt body 21 and the output shaft of the conveyor motor 22 after extending out of the sealed chamber along the side openings.

The transfer device 3 includes vertical slip table 31, horizontal slip table 32 and manipulator 33, vertical slip table 31 includes vertical stage body and vertical driver, horizontal slip table 32 includes horizontal stage body and horizontal driver, the horizontal stage body of vertical driver drive reciprocates along the vertical spout of vertical stage body, horizontal driver drive manipulator 33 is along the horizontal spout back-and-forth movement of horizontal stage body, the manipulator includes finger 331 and hand driver 332, finger 331 is driven and is opened or closed by hand driver 332.

The spray gun comprises a main pipe body 41, a secondary pipe body 42, a spray head 43 and a gun body driver 44, wherein the top end of the main pipe body 41 is connected with a liquid pipe, the top end of the secondary pipe body 42 is rotatably connected in the main pipe body 41, the bottom end of the secondary pipe body 42 is connected with the spray head 43, a bent section 421 is arranged at the position, close to the spray head 43, of the secondary pipe body 42, and the secondary pipe body 42 is driven to rotate by the gun body driver 44.

The gun body driver 44 includes a gun body motor 441, a driving gear 442, and a driven gear 443, the gun body motor 441 is fixed on the outer wall of the main tube 41, the output shaft is connected to the driving gear 442, the driving gear 442 is engaged with the driven gear 443, and the driven gear 443 is fixed on the outer wall of the sub-tube 42.

The working process of the invention is as follows:

first, the conveyor belt main body 21 is driven by the conveyor motor 22 of the conveyor belt 2 located on the front side of the forging press 1 to run, and a high-temperature furnace lid material is continuously conveyed. Then, the liquid pump continuously conveys the release agent in the liquid tank to the spray gun, and the release agent is sprayed to the surfaces of the stamping plate 14 and the die 15 of the forging press 1 through the spray gun. At the same time, the gun body motor 441 drives the driving gear 442 to rotate, and the driven gear 443 drives the sub-pipe 42 to rotate under the main pipe 41, thereby increasing the spraying range of the release agent without affecting the spraying of the release agent. Subsequently, the vertical driver, the lateral driver, and the hand driver of the transporter 3 located at the front side of the forging press 1 are operated, respectively, to clamp the furnace lid raw material to the die 15. At this point, the hydraulic cylinder 13 drives the punch plate downward toward the die 15, thereby cooperating with the die 1445 to punch the furnace lid raw material into a furnace lid finished product. Next, the transfer device 3 located at the rear side of the forging press 1 again clamps the finished furnace lid onto the conveyor belt 2 located at the rear side of the forging press 1. In addition, during operation, the rotating cooling wheel 232 is able to continuously transfer heat from the drive shaft 212 to the cooling fluid to reduce the temperature thereof.

According to the invention, through the mutual matching among the forging press, the conveyor belt and the transporter, automatic feeding, stamping and discharging are completed, and meanwhile, the release agent sprayer is arranged in a matching manner, so that the release agent can be automatically sprayed on the stamping plate and the die of the forging press before and after stamping, the phenomenon that the processing of subsequent products is influenced due to the adhesion of a furnace cover finished product with the stamping plate and the die is avoided, the whole process does not need to be matched by workers, and the working efficiency is high; the gun body driver is arranged to drive the auxiliary pipe body to rotate under the main pipe body, so that the spraying range of the release agent can be enlarged under the condition that the release agent is not sprayed; the cooling wheel is arranged between the driving shaft of the transmission belt body and the output shaft of the transmission motor, and a part of a wheel plate of the cooling wheel is immersed in the cooling liquid in the cooling box, so that the heat transmitted from the driving shaft is continuously transmitted into the cooling liquid, the transmission motor is insulated, and the transmission motor is prevented from receiving the heat from the output shaft and increasing the temperature to reduce the service life; the wheel plate is sealed in the sealed chamber, and the wheel shafts are respectively concentrically arranged at the front side and the rear side of the wheel plate, so that the wheel plate is convenient to mount and prevents cooling liquid from splashing along with the rotating cooling wheel.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.