阅读说明：本技术 绘制装置和绘制方法 (Drawing device and drawing method ) 是由 三根阳介 宫崎一仁 于 2019-08-08 设计创作，主要内容包括：本发明的实施方式的绘制装置(1)包括多个支承部(51)、移动部(53)、调节部(30、31)和绘制部(32)。多个支承部(51)从下方支承工件。移动部(53)使支承部(51)沿水平方向移动。调节部(30、31)对支承于支承部(51)的工件从下方吹去空气来调节工件的浮起高度。绘制部(32)对工件进行绘制,该工件由调节部(30、31)调节了浮起高度并以支承于支承部(51)的方式移动。调节部(21、30、31、40)包括：在支承部(51)的移动方向上设置在比绘制部(32)靠上游侧处的第1调节部(30)；和设置在绘制部(32)的下方的、比第1调节部(30)高精度地调节工件的浮起高度的第2调节部(31)。(A drawing device (1) according to an embodiment of the present invention includes a plurality of support portions (51), a moving portion (53), adjustment portions (30, 31), and a drawing portion (32). The plurality of support portions (51) support the workpiece from below. The moving section (53) moves the support section (51) in the horizontal direction. The adjustment units (30, 31) blow air from below onto the workpiece supported by the support unit (51) to adjust the floating height of the workpiece. A drawing unit (32) draws a workpiece that has its floating height adjusted by the adjustment units (30, 31) and that moves so as to be supported by the support unit (51). The adjustment section (21, 30, 31, 40) includes: a 1 st adjustment unit (30) provided upstream of the drawing unit (32) in the moving direction of the support unit (51); and a 2 nd adjustment unit (31) that is provided below the drawing unit (32) and adjusts the floating height of the workpiece more accurately than the 1 st adjustment unit (30).)

1. A rendering apparatus, comprising:

a plurality of support portions for supporting the workpiece from below;

a moving unit for moving the support unit in a horizontal direction;

an adjusting portion that blows air from below to the work supported by the supporting portion to adjust a floating height of the work; and

a drawing unit that draws the workpiece that has been adjusted in the floating height by the adjustment unit and that moves so as to be supported by the support unit,

the adjusting portion includes:

a 1 st adjustment unit provided upstream of the drawing unit in a moving direction of the support unit; and

and a 2 nd adjusting part which is arranged below the drawing part and adjusts the floating height of the workpiece with higher precision than the 1 st adjusting part.

2. The rendering apparatus according to claim 1, characterized in that:

a groove through which the support portion can move is formed in the 2 nd adjustment portion.

3. The rendering apparatus according to claim 1 or 2, characterized in that:

the moving unit moves the support unit that supports the workpiece drawn by the drawing unit in a direction orthogonal to the moving direction in a surface direction of the workpiece,

the drawing unit draws the workpiece moved in the orthogonal direction again.

4. The rendering apparatus according to claim 3, characterized in that:

further comprising an adjustment moving portion that moves the 2 nd adjustment portion in the orthogonal direction in accordance with the movement of the support portion in the orthogonal direction.

5. The drawing apparatus according to any one of claims 1 to 4, wherein:

the adjusting portion includes:

a 3 rd adjusting part which is provided upstream of the 1 st adjusting part in the moving direction and adjusts the floating height of the workpiece with higher accuracy than the 1 st adjusting part; and

and an attached matter detecting device for detecting whether or not the attached matter exists on the workpiece from which the air is blown by the 3 rd adjusting part.

6. The drawing apparatus according to any one of claims 1 to 5, wherein:

the drawing state detection device is arranged above the adjusting part and used for detecting the drawing state of the drawing part.

7. The rendering apparatus according to claim 6, characterized in that:

the drawing state detection means detects the drawing state when the drawing of the workpiece by the drawing section is completed and the next workpiece is conveyed to the 1 st adjustment section.

8. The drawing apparatus according to any one of claims 1 to 7, wherein:

and a flash portion disposed above the adjustment portion and performing flash of the drawing portion.

9. The drawing apparatus according to any one of claims 1 to 8, wherein:

the drawing section includes a plurality of carriers arranged in an orthogonal direction orthogonal to the moving direction,

the plurality of carriers are capable of adjusting positions in the orthogonal direction, respectively.

10. The rendering apparatus according to claim 9, characterized in that:

the plurality of carriers can adjust the release timing of the functional liquid, respectively.

11. The drawing apparatus according to any one of claims 1 to 10, wherein:

the measuring unit is provided at a position spaced apart from a region where the workpiece is conveyed in a horizontal direction orthogonal to a moving direction of the support unit, and measures a weight of the droplet discharged from the drawing unit.

12. The rendering apparatus according to claim 11, characterized in that:

the drawing section includes a plurality of carriers having a plurality of discharge heads that discharge the liquid droplets,

the measuring unit measures the weight of the droplet for each of the carriers.

13. The rendering apparatus according to claim 12, characterized in that:

the measuring section has a plurality of scale portions provided corresponding to the number of the discharge heads, and measures the weight of the discharged droplets.

14. The rendering apparatus according to claim 13, characterized in that:

and a shielding portion that shields the opening of the balance portion when the weight of the liquid droplet is measured.

15. The rendering apparatus according to claim 14, characterized in that:

the shielding portion has a suction portion that sucks and discharges the liquid droplet whose weight is measured.

16. The rendering apparatus according to claim 15, characterized in that:

the plurality of suction units are provided corresponding to the number of the scale units, and the droplets are sucked from the plurality of scale units.

17. A method of rendering, comprising:

supporting the workpiece from below by a plurality of support portions;

moving the support portion in a horizontal direction;

drawing the workpiece that moves so as to be supported by the support unit;

blowing air from below to the workpiece supported by the support portion on an upstream side of a portion where the workpiece is drawn in a moving direction of the support portion, to thereby perform a 1 st floating height adjustment of the workpiece;

and a step of adjusting the floating height of the workpiece by blowing air from below the workpiece supported by the support portion below a portion where the workpiece is drawn, and performing a 2 nd floating height adjustment of adjusting the floating height of the workpiece with higher accuracy than the 1 st floating height adjustment.

Technical Field

The present invention relates to a drawing apparatus and a drawing method.

Background

Patent document 1 discloses a technique of applying droplets of a coating liquid to a substrate to be conveyed by an ink jet method.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2018-49805

Disclosure of Invention

Technical problem to be solved by the invention

The invention provides a technique for improving productivity.

Technical solution for solving technical problem

A drawing device according to an aspect of the present invention includes a plurality of support portions, a moving portion, an adjusting portion, and a drawing portion. The plurality of support portions support the workpiece from below. The moving section moves the support section in the horizontal direction. The adjusting part blows air from below to the workpiece supported by the supporting part to adjust the floating height of the workpiece. The drawing section draws a workpiece, which is adjusted in floating height by the adjustment section and moves so as to be supported by the support section. The adjusting part includes: a 1 st adjusting part provided upstream of the drawing part in a moving direction of the support part; and a 2 nd adjusting part which is arranged below the drawing part and adjusts the floating height of the workpiece with higher precision than the 1 st adjusting part.

Effects of the invention

According to the present invention, productivity can be improved.

Drawings

Fig. 1A is a plan view showing a schematic configuration of a drawing apparatus according to embodiment 1.

Fig. 1B is a side view showing a schematic configuration of the drawing apparatus according to embodiment 1.

Fig. 2 is a plan view showing a schematic configuration of a part of the drawing unit according to embodiment 1.

Fig. 3A is a schematic diagram (1) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 3B is a schematic diagram (1) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 4A is a schematic diagram (2) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 4B is a schematic diagram (2) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 5A is a schematic diagram (3) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 5B is a schematic diagram (3) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 6A is a schematic diagram (4) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 6B is a schematic diagram (4) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 7A is a schematic diagram (5) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 7B is a schematic diagram (5) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 8A is a schematic diagram (6) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 8B is a schematic diagram (6) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 9A is a schematic diagram (7) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 9B is a schematic diagram (7) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 10A is a schematic diagram (8) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 10B is a schematic diagram (8) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 11A is a schematic diagram (9) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 11B is a schematic diagram (9) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 12A is a schematic diagram (10) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 12B is a schematic diagram (10) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 13A is a schematic diagram (11) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 13B is a schematic diagram (11) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 14A is a schematic diagram (12) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 14B is a schematic diagram (12) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 15A is a schematic diagram (13) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 15B is a schematic diagram (13) showing a drawing step of the drawing apparatus according to embodiment 1.

Fig. 16 is a flowchart for explaining the rendering processing in embodiment 1.

Fig. 17A is a plan view showing a schematic configuration of the drawing apparatus according to embodiment 2.

Fig. 17B is a side view showing a schematic configuration of the drawing apparatus according to embodiment 2.

Fig. 18A is a plan view illustrating a schematic configuration of the weight measuring device according to embodiment 2.

Fig. 18B is a side view illustrating a schematic configuration of the weight measuring device according to embodiment 2.

Fig. 19A is a schematic diagram (1 thereof) showing a weight measurement procedure of the plotting device of embodiment 2.

Fig. 19B is a schematic diagram (2 thereof) showing a weight measurement step of the drawing device of embodiment 2.

Fig. 19C is a schematic diagram (3) showing a weight measurement step of the plotting device of embodiment 2.

Fig. 19D is a schematic diagram (4) showing a weight measurement step of the drawing device of embodiment 2.

Fig. 20 is a flowchart for explaining the weight measurement processing according to embodiment 2.

Fig. 21 is a plan view showing a schematic configuration of a part of a drawing apparatus according to a modification.

Detailed Description

Embodiments of a drawing apparatus and a drawing method according to the present invention will be described in detail below with reference to the drawings. The drawing apparatus and the drawing method disclosed in the embodiments shown below are not limited.

(embodiment 1)

< integral Structure >

A drawing apparatus 1 according to embodiment 1 will be described with reference to fig. 1A and 1B. Fig. 1A is a plan view showing a schematic configuration of a drawing apparatus 1 according to embodiment 1. Fig. 1B is a side view showing a schematic configuration of the drawing apparatus 1 according to embodiment 1. In fig. 1A, a part of the configuration of the control device 9 and the like is omitted.

The drawing apparatus 1 is a substrate processing apparatus that draws a substrate S as a workpiece by an ink jet method while conveying the substrate S in a horizontal direction. The substrate S is, for example, a substrate for a flat panel display.

The drawing apparatus 1 includes a feeding stage 2, a drawing stage 3, a feeding stage 4, a moving device 5, an air conditioning device 6, a drawing state detection device 7, a flashing (flashing) unit 8, and a control device 9.

In the drawings referred to below, a rectangular coordinate system is given in which the X-axis direction, the Y-axis direction, and the Z-axis direction are defined to be orthogonal to each other and the Z-axis normal direction is set as the vertical upward direction for easy understanding of the description. The horizontal direction including the X-axis direction and the Y-axis direction coincides with the surface direction of the substrate S.

In the drawing apparatus 1, the carrying-in table 2, the drawing table 3, and the carrying-out table 4 are arranged in the Y-axis direction in the order of the carrying-in table 2, the drawing table 3, and the carrying-out table 4. The drawing apparatus 1 draws a substrate S carried into the carrying-in table 2 by a carrying-in arm (not shown) while conveying the substrate S in the Y-axis direction, and then sends out the drawn substrate S from the carrying-out table 4.

Note that the direction from the loading table 2 to the unloading table 4 in the Y-axis direction may be referred to as a moving direction, the loading table 2 side may be referred to as an upstream side in the moving direction, and the unloading table 4 side may be referred to as a downstream side. In the rectangular coordinate system, the X-axis direction is a direction orthogonal to the moving direction, and is sometimes referred to herein as a width direction (an example of an orthogonal direction).

In addition, fig. 1A and 1B show a state in which the substrate S is disposed on each of the stages 2 to 4 for the sake of explanation.

The substrate S is fed to the feeding stage 2 by a feeding arm. In the carrying-in table 2, the substrate S is transferred from the carrying-in arm to the 1 st wafer transfer device 50. The substrate S fed to the feeding stage 2 is supported from below by the 1 st sheet feeder 50 of the moving device 5.

The carrying-in table 2 includes a plurality of 1 st floating portions 20, a plurality of 2 nd floating portions 21, and an attached matter detection device 22.

The 1 st floating portion 20 extends in the moving direction. The 1 st floating portions 20 are arranged side by side in the width direction. The 1 st floating portion 20 blows air to the substrate S from below the substrate S supported by the 1 st sheet feeder 50, and applies a force acting upward (hereinafter referred to as a buoyancy) to the substrate S. The buoyancy is a force that highly stabilizes the floating of the substrate S and reduces the gravity acting on the substrate S. The 1 st floating part 20 applies buoyancy to adjust the floating height of the substrate S supported by the 1 st sheet conveyer 50. Specifically, the 1 st floating portion 20 is adjusted so that the floating height of the substrate S is stabilized within a range of 200 to 2000 μm. The blowing of air to the substrate S by the 1 st floating portion 20 also has a function of correcting the warpage of the substrate S.

A groove 20a is formed between adjacent 1 st floating portions 20. The 1 st sheet feeder 50 is disposed in the groove 20 a. The groove 20a is formed in the moving direction so that the 1 st pass device 50 can move in the moving direction.

The 2 nd floating portion 21 is located downstream of the 1 st floating portion 20 and upstream of the 1 st floating portion 30 of the drawing table 3, which will be described later. The 2 nd floating portions 21 are arranged side by side in the width direction.

The 2 nd floating portion 21 blows air to the substrate S from below the substrate S supported by the 1 st sheet conveyer 50, and applies buoyancy to the substrate S. Further, the 2 nd floating portion 21 attracts air existing between it and the substrate S. Thereby, the 2 nd floating portion 21 adjusts the floating height of the substrate S supported by the 1 st sheet conveyer 50. That is, the 2 nd floating portion 21 (an example of the adjusting portion and the 3 rd adjusting portion) is provided upstream of the 1 st floating portion 30 (an example of the 1 st adjusting portion) in the moving direction, and the floating height of the substrate S (an example of the workpiece) is adjusted with high accuracy.

Specifically, the 2 nd floating portion 21 can be adjusted with high accuracy so that the floating height of the substrate S is stabilized within a range of 30 to 60 μm, and the adhering substance adhering to the substrate S can be detected by the adhering substance detecting device 22. Further, the 2 nd floating portion 21 can adjust the flow rate of air blown off the substrate S. The 2 nd floating portion 21 can adjust the flow rate of air blown to the lower surface of the substrate S according to the size, thickness, and the like of the substrate S. Thus, the 2 nd floating portion 21 can adjust the floating height of the substrate S with high accuracy. The blowing of air to the substrate S by the 2 nd floating portion 21 also has a function of correcting the warpage of the substrate S.

A groove 21a is formed between the adjacent 2 nd floating portions 21 to enable the 1 st sheet transfer device 50 to move in the moving direction.

The attached matter detection device 22 detects the presence or absence of attached matter on the substrate S (an example of a workpiece) on which air is blown by the 2 nd floating portion 21 (an example of the 3 rd regulating portion). The attached matter detection device 22 includes a laser unit 22a and a light receiving unit 22 b.

The laser section 22a is provided at one end of the feeding table 2 in the width direction. The light receiving unit 22b is provided at the other end of the feeding stage 2 in the width direction. That is, the attached matter detection device 22 is disposed so that the laser section 22a and the light receiving section 22b face each other with the substrate S therebetween. The attached matter detection device 22 detects the light quantity of the laser light irradiated from the laser unit 22a by the light receiving unit 22b, and detects the presence or absence of the substrate S.

The substrate S is conveyed from the carry-in table 2 to the drawing table 3 by the 1 st sheet feeder 50. In the drawing table 3, the substrate S is transferred from the 1 st sheet feeder 50 to the 2 nd sheet feeder 51. The substrate S conveyed to the drawing table 3 is supported from below by the 2 nd sheet conveyer 51 of the moving device 5.

The drawing table 3 includes a plurality of 1 st floating portions 30, 2 nd floating portions 31, and drawing portions 32.

The 1 st floating portion 30 extends in the moving direction. The 1 st floating portions 30 are arranged side by side in the width direction.

A groove 30a is formed between adjacent 1 st floating portions 30. The groove 30a is formed in the moving direction so that the 1 st sheet passing device 50 can move in the moving direction.

Further, a groove 30b different from the groove 30a is formed between the adjacent 1 st floating portions 30. The 2 nd sheet feeder 51 is disposed in the groove 30 b. The groove 30b is formed in the moving direction so that the 2 nd sheet conveyer 51 can move in the moving direction.

Further, the groove 30b is formed so that the 2 nd sheet conveyer 51 can move in the moving direction in the case where the 2 nd sheet conveyer 51 moves in the width direction. The length of the groove 30b in the width direction is set based on the amount of movement of the 2 nd blade transfer device 51 in the width direction. For example, the length of the groove 30b in the width direction is 2 times or more the length of the 2 nd sheet feeder 51 in the width direction.

The 1 st floating portion 30 is provided upstream of the drawing portion 32 in the moving direction of the 2 nd sheet feeder 51 (an example of a support portion).

The 1 st floating portion 30 blows air to the substrate S from below the substrate S supported by the 1 st sheet conveyer 50 or the 2 nd sheet conveyer 51, and applies buoyancy to the substrate S. That is, the 1 st floating portion 30 (an example of the adjusting portion and the 1 st adjusting portion) blows air from below to the substrate S (an example of the workpiece) supported by the 1 st sheet feeder 50 or the 2 nd sheet feeder (an example of the supporting portion) to adjust the floating height of the substrate S. Specifically, the 1 st floating portion 30 is adjusted so that the floating height of the substrate S is stabilized within a range of 200 to 2000 μm. The blowing of air to the substrate S by the 1 st floating portion 30 also has a function of correcting the warpage of the substrate S.

The 2 nd floating portion 31 is provided downstream of the 1 st floating portion 30 and below the drawing portion 32. The 2 nd floating portion 31 extends in the width direction.

The 2 nd floating portion 31 blows air to the substrate S from below the substrate S supported by the 2 nd sheet conveyer 51, and applies buoyancy to the substrate S. Further, the 2 nd floating portion 31 attracts air existing between it and the substrate S. Thereby, the 2 nd floating portion 31 adjusts the floating height of the substrate S supported by the 2 nd sheet conveyer 51. That is, the 2 nd floating unit 31 (an example of an adjusting unit and a 2 nd adjusting unit) is provided below the drawing unit 32, and the floating height of the substrate S (an example of a workpiece) is adjusted with higher accuracy than the 1 st floating unit 30.

Specifically, the 2 nd floating portion 31 can hold the substrate S horizontally, perform adjustment with high accuracy so that the floating height of the substrate S is stabilized within a range of 30 to 60 μm, and perform drawing on the substrate S with high accuracy by the drawing portion 32. Further, the 2 nd floating portion 31 can adjust the flow rate of air blown off the substrate S, similarly to the 2 nd floating portion 21 of the carry-in table 2. The blowing of air to the substrate S by the 2 nd floating portion 31 also has a function of correcting the warpage of the substrate S.

The 2 nd floating portion 31 is movable in the width direction, and moves in the width direction in accordance with the movement of the 2 nd sheet feeder 51 in the width direction.

A groove 31a through which the 2 nd sheet feeder 51 (an example of a support portion) can move is formed in the 2 nd floating portion 31. The length of the width-direction groove 31a is a length over which the 2 nd sheet feeder 51 can move, and is shorter than the width-direction length of the 1 st floating portion 30 of the groove 30 b.

The drawing section 32 is of an ink jet type, and draws on the substrate S by discharging a functional liquid such as ink onto the substrate S. The drawing section 32 is held horizontally by the 2 nd sheet feeder 51 and the 2 nd floating section 31, and discharges the functional liquid to the substrate S being conveyed to draw on the substrate S. That is, the drawing section 32 adjusts the floating height with high accuracy by the 2 nd floating section 31 (an example of an adjusting section) and draws the substrate S (an example of a workpiece) supported and conveyed by the 2 nd sheet feeder 51 (an example of a supporting section).

The drawing section 32 draws the substrate S2 times. Specifically, the drawing section 32 performs the second drawing on the substrate S moved in the width direction after the 1 st drawing is completed. That is, the drawing unit 32 draws the substrate S (an example of a workpiece) moved in the width direction (an example of an orthogonal direction) again.

The drawing unit 32 includes a plurality of carriers (carriers) 32a for discharging the functional liquid. The carriers 32a are arranged side by side in the width direction as shown in fig. 2. Fig. 2 is a plan view showing a schematic configuration of a part of the drawing unit 32 according to embodiment 1. That is, the drawing unit 32 includes a plurality of carriers 32a arranged in the width direction (an example of an orthogonal direction orthogonal to the moving direction). Further, the carriers 32a are arranged in 2 rows in the moving direction. The carriage 32a may be provided in 1 row in the moving direction, or may be provided in a plurality of rows of 3 rows or more. The carrier 32a has a plurality of discharge heads 32b that discharge the functional liquid. The release heads 32b are arranged in 2 rows in the width direction for 1 carrier 32 a. The release heads 32b may be arranged in one row in the width direction, or may be arranged in a plurality of rows of 3 rows or more.

In addition, the release heads 32b are arranged side by side in the moving direction. For example, the release heads 32b are arranged in 6 columns in the moving direction. The discharge heads 32b may be arranged in a single row in the moving direction, or may be arranged in a plurality of rows such as 8 rows. As described above, the drawing section 32 includes the plurality of carriers 32a, and the plurality of carriers 32a have the plurality of discharge heads 32b that discharge the liquid droplets. The drawing section 32 draws the substrate S by discharging the functional liquid from the plurality of discharge heads.

The position in the moving direction of the drawing section 32 is fixed. Further, the drawing unit 32 moves in the vertical direction when the drawing state is detected by the drawing state detection device 7.

Returning to fig. 1A and 1B, the substrate S is carried from the drawing stage 3 to the carry-out stage 4 by the 2 nd sheet transporter 51. In the feeding stage 4, when the substrate S on which the drawing unit 32 has performed the 1 st drawing is carried by the 2 nd sheet conveyer 51, the 2 nd sheet conveyer 51 and the substrate S are moved in the width direction.

In the feeding stage 4, when the substrate S subjected to the second drawing by the drawing section 32 is conveyed by the 2 nd sheet conveyer 51, the substrate S is transferred from the 2 nd sheet conveyer 51 to the 3 rd sheet conveyer 52 of the moving device 5. The substrate S is supported from below by the 3 rd sheet conveyer 52.

In the delivery table 4, the substrate S conveyed downstream by the 3 rd sheet feeder 52 is delivered from the 3 rd sheet feeder 52 to the delivery arm.

The delivery table 4 has a plurality of floating portions 40. The floating portion 40 extends in the moving direction. The floating portions 40 are arranged side by side in the width direction.

Grooves 40a are formed between adjacent floating portions 40. The groove 40a is a groove at the X-axis positive end, and is formed in the moving direction so that the 2 nd sheet conveyer 51 can move in the moving direction and the width direction. The length of the groove 40a in the width direction is set based on the amount of movement of the 2 nd blade transfer device 51 in the width direction. For example, the length of the groove 40a in the width direction is the same as the length of the groove 30b of the 1 st floating portion 30 of the drawing table 3.

Further, a groove 40b different from the groove 40a is formed between the adjacent floating portions 40. The groove 40b is formed on the X-axis negative side compared to the groove 40 a. The 3 rd sheet feeder 52 is disposed in the groove 40 b. The groove 40b is formed in the moving direction to enable the 3 rd sheet conveyer 52 to move in the moving direction.

The floating portion 40 blows air to the substrate S from below the substrate S supported by the 2 nd sheet conveyer 51 or the 3 rd sheet conveyer 52, and applies buoyancy to the substrate S. Thus, the floating part 40 is adjusted so that the floating height of the substrate S supported by the 2 nd sheet conveyer 51 or the 3 rd sheet conveyer 52 is stabilized within a range of 200 to 2000 μm. The blowing of air to the substrate S by the float portion 40 also has a function of correcting the warpage of the substrate S.

The moving device 5 includes a plurality of 1 st sheet carriers 50, a plurality of 2 nd sheet carriers 51, a plurality of 3 rd sheet carriers 52, and a driving portion 53.

The 1 st sheet feeder 50 is moved in the up-down direction and the moving direction by a driving portion 53. The 1 st wafer transfer 50 supports a substrate S (an example of a workpiece) from below. Specifically, the 1 st wafer transfer device 50 is attached to the lower surface of the substrate S fed by the feeding arm, and supports the substrate S from below. The 1 st sheet transporter 50 transports the substrate S from the carry-in table 2 to the drawing table 3 with the substrate S supported from below, and transfers the substrate S to the 2 nd sheet transporter 51.

The 1 st sheet feeder 50 is disposed in the slot 20a of the feeding table 2. Specifically, 4 1 st sheet carriers 50 are separately provided in 2 slots 20 a. The 21 st sheet carriers 50 are disposed in the 1 st groove 20 a. The 1 st sheet carriers 50 provided in the 1 groove 20a are arranged at predetermined intervals in the moving direction. The predetermined interval is, for example, an interval at which both end sides of the substrate S in the moving direction are supported by 21 st sheet carriers 50. In addition, the number of the 1 st sheet passing devices 50 is not limited to 4, and may be 6, for example. The number of the grooves 20a in which the 1 st blade transfer device 50 is provided is not limited to 2, and may be 3, for example. In addition, the number of the 1 st sheet passing devices 50 may be 2. The 21 st sheet feeders 50 are disposed on the upstream side of the feeding table 2 and are provided in 2 slots 20a separately. That is, the 21 st wafer carriers 50 attract the substrate S to the lower surface of the upstream side end, and support the substrate S in a cantilever state.

The 2 nd sheet conveyer 51 is moved in the up-down direction, the moving direction, and the width direction by a driving section 53. The 2 nd sheet conveyer 51 supports a substrate S (an example of a workpiece) from below. Specifically, the 2 nd sheet conveyer 51 is attracted to the lower surface of the substrate S conveyed by the 1 st sheet conveyer 50, and supports the substrate S from below. The 2 nd sheet conveyer 51 conveys the substrate S between the drawing table 3 and the carry-in table 2 in a state of supporting the substrate S from below, and delivers the substrate S to the 3 rd sheet conveyer 52.

A part of the 2 nd sheet passing device 51 is disposed in the slot 30b of the drawing table 3. Specifically, 4 2 nd film carriers 51 are provided on the drawing stage 3, and 2 nd film carriers 51 of the 4 2 nd film carriers 51 are provided in the grooves 30 b. Further, the other 2 nd film passers 51 of the 4 2 nd film passers 51 are provided at the drawing stage 3 end in the width direction. The 2 nd sheet transfer devices 51 are provided outside the 1 st floating portion 30 and the 2 nd floating portion 31 of the drawing table 3 in the width direction.

The 2 nd sheet carriers 51 provided outside the 2 nd sheet carriers 51 provided in the groove 30b and the 1 st floating portion 30 and the 2 nd floating portion 31 of the drawing table 3 in the width direction are arranged at predetermined intervals in the moving direction. The 2 nd sheet conveyer 51 is disposed so as to support four corners of the substrate S. In addition, the number of the 2 nd sheet passing devices 51 is not limited to 4, and may be 6, for example. The number of the grooves 30b for providing the 2 nd sheet feeder 51 is not limited to 1, and may be 2, for example. In addition, the number of the 2 nd sheet passing devices 51 may be 2. The 2 nd sheet carriers 51 are arranged at predetermined intervals in the moving direction. That is, the 2 nd wafer transfer device 51 adsorbs the lower surface of one end in the width direction of the substrate S, and supports the substrate S in a cantilever state.

The 3 rd sheet feeder 52 is moved in the up-down direction and the moving direction by a driving portion 53. The 3 rd sheet conveyer 52 supports a substrate S (an example of a workpiece) from below. Specifically, the 3 rd sheet conveyer 52 is attracted to the lower surface of the substrate S conveyed by the 2 nd sheet conveyer 51, and supports the substrate S from below. The 3 rd sheet carrier 52 moves in the moving direction while supporting the substrate S from below, and transfers the substrate S to the send-out arm.

The 3 rd sheet feeder 52 is provided in the slot 40b of the delivery table 4. Specifically, 4 3 rd sheet carriers 52 are provided separately in 2 slots 40 b. The 2 rd 3 rd sheet carriers 52 are disposed in the 1 st slot 40 b. The 23 rd sheet carriers 52 provided in the 1 slot 40b are arranged at predetermined intervals in the moving direction. In addition, the number of the 3 rd sheet passing devices 52 is not limited to 4, and may be 6, for example. The number of the grooves 40b for providing the 3 rd sheet passing device 52 is not limited to 2, and may be 3, for example. In addition, the number of the 3 rd sheet passing devices 52 may be 2. The 23 rd sheet feeders 52 are disposed downstream of the delivery table 4 and are provided in the 2 slots 40 b. That is, the 2 rd 3 rd wafer carrier 52 adsorbs the lower surface of the downstream side end of the substrate S, and supports the substrate S in a cantilever state.

The driving unit 53 includes, for example, a motor, a chain device, a belt conveyor, and the like, and moves the 1 st sheet feeder 50, the 2 nd sheet feeder 51, and the 3 rd sheet feeder 52, respectively. The driving unit 53 moves the 1 st, 2 nd, and 3 rd sheet feeders 50, 51, and 52 (an example of a supporting unit) in the moving direction (an example of a horizontal direction).

When drawing the substrate S a plurality of times, for example, 2 times, the driving unit 53 moves the 2 nd sheet feeder 51 a plurality of times between the drawing stage 3 and the delivery stage 4.

The driving unit 53 moves the 2 nd sheet conveyer 51 in the width direction when moving the 2 nd sheet conveyer 51 supporting the substrate S on which the drawing of the 1 st drawing is completed to the sending-out stage 4. Further, the driving unit 53 moves the 2 nd floating unit 31 of the drawing table 3 in the width direction. Specifically, the driving portion 53 (an example of an adjustment moving portion) moves the 2 nd floating portion 31 (an example of a 2 nd adjustment portion) in the width direction in accordance with the movement of the 2 nd sheet feeder (an example of a support portion) in the width direction (an example of an orthogonal direction).

Next, the driving section 53 moves the 2 nd sheet feeder 51 moved in the width direction from the feeding stage 4 to the drawing stage 3. Then, the driving section 53 moves the 2 nd sheet conveyer 51 supporting the substrate S on which the second drawing is completed again from the drawing stage 3 to the sending-out stage 4.

That is, the driving section 53 moves the 2 nd sheet feeder 51 (an example of a supporting section) that supports the substrate S (an example of a workpiece) drawn by the drawing section 32 in the width direction (an example of a direction orthogonal to the moving direction of the surface direction of the substrate S).

The driving unit 53 moves the roll paper 71 and the flash unit 8 of the drawing state detection device 7 in the moving direction. The driving unit 53 moves the drawing unit 32 in the vertical direction when detecting the drawing state or when performing flash. In addition, a plurality of driving portions 53 may be provided corresponding to the respective sheet carriers 51 to 52. That is, the sheet conveyors 51 to 52, the roll paper 71, the flash unit 8, and the like can be driven by different driving units 53.

The air conditioning device 6 includes a pump 60, a supply line 61, a vacuum portion 62, and a suction line 63. The pump 60 blows compressed air from the respective floating portions 20, 21, 30, 31, 40 through the supply line 61. The supply line 61 is provided with an adjusting valve (not shown) for adjusting the flow rate of air blown out from the respective floating portions 20, 21, 30, 31, and 40.

Further, the vacuum unit 62 sucks air existing between the 2 nd floating unit 21 of the carry-in table 2 and the 2 nd floating unit 31 of the drawing table 3 and the substrate S through a suction line 63. Further, an adjusting valve (not shown) for adjusting the amount of air sucked is provided in the suction line 63.

The drawing state detection device 7 is provided above the 1 st floating unit 30 (an example of an adjustment unit) of the drawing table 3, and detects the drawing state of the drawing unit 32. The drawing state detection device 7 has a photographing device 70 and roll paper 71. The drawing state detection device 7 photographs the functional liquid discharged to the roll paper 71 with the photographing device 70. The imaging result is output to the control device 9, and the control device 9 determines whether or not the drawing state of the drawing unit 32 is normal.

Further, the roll paper 71 may be disposed in 2 rows in the moving direction. For example, the roll paper 71 is disposed in 2 rows corresponding to the carriers 32a disposed in 2 rows. This enables the functional liquid to be discharged to different roll papers 71 for each carriage 32 a. Therefore, in the case of determining the drawing state in 2 carriers 32a, the time taken for the determination can be shortened.

In addition, in the case of determining the drawing state for 1 carriage 32a, the drawing state can be determined using 1 roll paper 71 out of 2 roll paper 71. That is, the drawing state can be determined without using the other roll paper 71. Therefore, in the case of determining the drawing state for 1 carriage 32a, the roll paper 71 used can be reduced.

The drawing state detection device 7 detects the drawing state when the drawing of the substrate S (an example of a workpiece) by the drawing section 32 is completed and the next substrate S is conveyed to the 1 st floating section 30 (an example of the 1 st regulating section) of the drawing table 3.

The flash unit 8 is provided above the floating unit 40 (an example of an adjustment unit) of the delivery table 4, and performs flash of the drawing unit 32. The flash unit 8 discharges the functional liquid from the drawing unit 32 based on a predetermined flash period. The flash portion 8 recovers the released functional liquid. That is, the flash unit 8 recovers the functional liquid released by the flash. The functional liquid collected by the flash portion 8 is discharged as a waste liquid through a waste liquid pipe not shown.

The control device 9 is, for example, a computer, and includes a control unit 90 and a storage unit 91. The storage unit 91 stores programs for controlling various processes executed in the drawing apparatus 1. The control unit 90 reads and executes the program stored in the storage unit 91 to control the operation of the drawing apparatus 1.

The program may be recorded in a computer-readable storage medium, and may be installed from the storage medium to the storage unit 91 of the control device 9. Examples of the computer-readable storage medium include a Hard Disk (HD), a Flexible Disk (FD), an optical disk (CD), a magneto-optical disk (MO), and a memory card.

< drawing step >

Next, the drawing steps of the drawing apparatus 1 according to embodiment 1 will be described with reference to fig. 3A to 15B. Fig. 3A to 15B are schematic diagrams (1 to 13) showing drawing steps of the drawing apparatus 1 according to embodiment 1.

In fig. 3A to 15B, a part of the configuration of the control device 9 and the like is omitted. In fig. 3A to 15B, a drawing with a mark "a" is a plan view showing the outline of the drawing apparatus 1 according to embodiment 1, and a drawing with a mark "B" is a side view showing the outline of the drawing apparatus 1 according to embodiment 1.

The drawing apparatus 1 feeds the substrate S to the feed table 2 by a feed arm (not shown). At this time, the substrate S can be transferred from the transfer arm to the transfer table 2 by a lift pin (not shown) capable of moving up and down and supporting the substrate S from below. After the substrate S is fed into the carry-in table 2, as shown in fig. 3A and 3B, the 1 st sheet conveyer 50 is raised from the initial position, and the 1 st sheet conveyer 50 is attracted to the lower surface of the substrate S. Thereby, the substrate S is transferred from the feed arm to the 1 st wafer transfer device 50, and is supported from below by the 1 st wafer transfer device 50.

Further, air is blown to the lower surface of the substrate S from the 1 st floating portion 20 of the carry-in table 2. Thus, the substrate S is made to generate buoyancy and adjusted so that the floating height of the substrate S is stabilized within a range of 200 to 2000 μm.

Further, in the carry-in table 2, when the substrate S is carried in by the carry-in arm, alignment for adjusting the position of the substrate S is performed.

In the drawing apparatus 1, when the 1 st sheet conveyer 50 supports the substrate S, the 1 st sheet conveyer 50 is moved to the downstream side in the moving direction, i.e., the drawing table 3, as shown in fig. 4A and 4B. At this time, in the carry-in table 2, air is blown from the 2 nd floating portion 21 toward the lower surface of the substrate S, and air existing between the substrate S and the air is sucked. Thus, the presence or absence of the deposit adhering to the substrate S is detected by the deposit detection device 22 in a state where the floating height of the substrate S is adjusted with high accuracy so as to be stable within a range of 30 to 60 μm.

In the drawing apparatus 1, when the substrate S is conveyed to the drawing table 3 by the 1 st sheet conveyer 50, as shown in fig. 5A and 5B, the 2 nd sheet conveyer 51 is lifted from the initial position, and the 2 nd sheet conveyer 51 is attracted to the lower surface of the substrate S. Further, the drawing apparatus 1 releases the suction of the 1 st sheet conveyer 50 to the substrate S, and lowers the 1 st sheet conveyer 50. Thereby, the substrate S is transferred from the 1 st sheet conveyer 50 to the 2 nd sheet conveyer 51, and is supported from below by the 2 nd sheet conveyer 51.

In addition, air is blown from the 1 st floating portion 30 of the drawing stage 3 to the lower surface of the substrate S. Thus, the substrate S is made to generate buoyancy and adjusted so that the floating height of the substrate S is stabilized within a range of 200 to 2000 μm.

Further, in the carry-in table 3, alignment for adjusting the position of the substrate S is performed while the substrate S is conveyed by the 1 st sheet conveyer 50.

In the drawing apparatus 1, when the 2 nd sheet conveyer 51 supports the substrate S, the 2 nd sheet conveyer 51 is moved to the downstream side, that is, the delivery table 4 side in the moving direction as shown in fig. 6A and 6B. The drawing apparatus 1 also discharges the functional liquid to the substrate S by the drawing section 32, and draws the substrate S for the 1 st time.

At this time, in the drawing table 3, air is blown from the 2 nd floating portion 31 toward the lower surface of the substrate S, and air existing between it and the substrate S is sucked. Thus, the floating height of the substrate S is adjusted to be stable within a range of 30 to 60 μm with high precision. The substrate S is held in a state where four corners are supported by the 2 nd sheet conveyer 51 and the floating height is adjusted with high accuracy by the 2 nd floating portion 31 extended in the width direction. Therefore, the drawing apparatus 1 can draw the substrate S with high accuracy by the drawing section 32.

The drawing apparatus 1 moves the 1 st sheet feeder 50 to the loading table 2, and returns the 1 st sheet feeder 50 to the loading table 2.

When the drawing apparatus 1 conveys the substrate S on which the 1 st drawing is performed to the sending-out table 4, the 2 nd sheet conveyer 51 is moved in the width direction as shown in fig. 7A and 7B. For example, the drawing apparatus 1 moves the 2 nd sheet feeder 51 in the width direction in the X-axis forward direction. Thereby, the substrate S moves in the width direction in accordance with the movement in the width direction of the 2 nd sheet conveyer 51.

In addition, the drawing apparatus 1 moves the 2 nd floating portion 31 of the drawing table 3 in the same direction as the 2 nd sheet feeder 51 according to the movement of the 2 nd sheet feeder 51. In the carry-out stage 4, air is blown from the floating portion 40 toward the lower surface of the substrate S. Thus, the floating height of the substrate S is adjusted to be stable within a range of 200 to 2000 μm. Further, the next substrate S is fed to the feeding stage 2. The next substrate S is handed over from the in-arm to the 1 st pass-through 50.

When the drawing apparatus 1 finishes moving the 2 nd sheet conveyer 51 in the width direction, as shown in fig. 8A and 8B, the 2 nd sheet conveyer 51 is moved to the drawing stage 3, and the functional liquid is discharged to the substrate S by the drawing section 32 to draw the substrate S for the second time.

Further, in the drawing stage 3, air is blown from the 2 nd floating portion 31 toward the lower surface of the substrate S, and air existing between it and the substrate S is sucked. Therefore, the floating height of the substrate S is adjusted with high precision so as to be stable within the range of 30 to 60 μm. Therefore, the drawing apparatus 1 can draw the substrate S with high accuracy as in the drawing of the 1 st time.

Further, since the 2 nd floating portion 31 moves in the width direction in accordance with the movement of the 2 nd sheet conveyer 51, the drawing apparatus 1 can move the 2 nd sheet conveyer 51 to the drawing table 3 without interfering with the movement of the 2 nd sheet conveyer 51.

As shown in fig. 9A and 9B, when the drawing apparatus 1 conveys the substrate S subjected to the second drawing to the drawing stage 3, the 2 nd sheet feeder 51 is moved to the sending-out stage 4 as shown in fig. 10A and 10B. Since drawing is not performed here, the moving speed of the 2 nd film transfer device 51 is higher than that when drawing is performed. Thus, the drawing apparatus 1 can shorten the time for drawing the substrate S and improve productivity.

In the drawing apparatus 1, when the 2 nd sheet conveyer 51 conveys the substrate S to the carry-out table 4, as shown in fig. 11A and 11B, the 3 rd sheet conveyer 52 is lifted from the initial position, and the 3 rd sheet conveyer 52 is attracted to the lower surface of the substrate S. Further, the drawing apparatus 1 releases the suction of the 2 nd sheet conveyer 51 to the substrate S, and lowers the 2 nd sheet conveyer 51. Thereby, the substrate S is transferred from the 2 nd sheet feeder 51 to the 3 rd sheet feeder 52, and is supported from below by the 3 rd sheet feeder 52.

In the carrying-out table 4, air is blown from the floating portion 40 to the lower surface of the substrate S, and the floating height of the substrate S is adjusted to be stable within a range of 200 to 2000 μm.

The drawing device 1 raises the drawing unit 32 and moves the roll paper 71 above the feeding table 4 in the moving direction.

When the transfer of the substrate S to the 3 rd sheet feeder 52 is completed, the drawing apparatus 1 moves the 3 rd sheet feeder 52 to a predetermined feeding position in the feeding table 4 as shown in fig. 12A and 12B. Further, the drawing apparatus 1 moves the 2 nd sheet feeder 51 and the 2 nd floating portion 31 of the drawing table 3 in the width direction. For example, the drawing apparatus 1 moves the 2 nd sheet feeder 51 and the 2 nd floating unit 31 in the width direction in the negative X-axis direction.

In the drawing apparatus 1, the 2 nd sheet feeder 51 and the 2 nd floating portion 31 of the drawing table 3 may be moved in the width direction when drawing is performed on the next substrate S without moving the 2 nd sheet feeder 51 and the 2 nd floating portion 31 of the drawing table 3 in the width direction.

In the drawing apparatus 1, when the 3 rd sheet conveyer 52 conveys the substrate S to the predetermined sending position, as shown in fig. 13A and 13B, the 2 nd sheet conveyer 51 is moved to the drawing stage 3, and the 2 nd sheet conveyer 51 is returned to the drawing stage 3. Further, the drawing apparatus 1 moves the 1 st sheet feeder 50 to the drawing table 3, and conveys a new substrate S to the drawing table 3.

As shown in fig. 14A and 14B, the drawing apparatus 1 moves the roll paper 71 toward the drawing table 3, and discharges the functional liquid from the drawing section 32 toward the roll paper 71. Then, the drawing device 1 photographs the roll paper 71 with the photographing device 70, and detects the drawing state. When the feed arm comes into contact with the lower surface of the substrate S, the drawing apparatus 1 releases the suction of the 3 rd sheet feeder 52 and lowers the 3 rd sheet feeder 52 to the initial position. Thereby, the substrate S is transferred from the 3 rd sheet feeder 52 to the carrying-out arm. Then, the substrate S is sent out from the sending-out table 4 by a sending-out arm. In this case, the substrate S may be transferred to the feed arm by an elevating pin (not shown) in the same manner as in the feeding.

As shown in fig. 15A and 15B, the drawing apparatus 1 moves the 3 rd sheet feeder 52 to the upstream side in the feeding table 4. Further, the drawing device 12 lowers the drawing unit 32. Further, the drawing apparatus 1 hands over the next substrate S from the 1 st sheet conveyer 50 to the 2 nd sheet conveyer 51.

As described above, the drawing apparatus 1 carries the substrate S by the 1 st to 3 rd sheet carriers 50 to 52 and draws the substrate S. Further, the drawing step in the drawing apparatus 1 is not limited to the above-described step. For example, the drawing apparatus 1 may detect the drawing state before a new substrate S is conveyed to the drawing stage 3.

< drawing treatment >

Next, the rendering process of embodiment 1 will be described with reference to fig. 16. Fig. 16 is a flowchart for explaining the rendering processing in embodiment 1. Here, a process from the feeding of 1 substrate S to the feeding after drawing is performed will be described.

The drawing device 1 performs the loading process (S10). Specifically, the drawing apparatus 1 feeds the substrate S to the feeding stage 2 by a feeding arm.

The drawing device 1 performs the 1 st supporting process (S11). Specifically, the drawing apparatus 1 supports the substrate S fed to the feeding table 2 by the feeding arm from below by the 1 st sheet feeder 50. Further, the drawing apparatus 1 blows air to the lower surface of the substrate S by the 1 st floating portion 20 of the carrying table 2, and adjusts the floating height of the substrate S.

The drawing device 1 performs the attached matter detection process (S12). Specifically, the drawing apparatus 1 blows air from the 2 nd floating portion 21 of the carrying-in table 2 to the lower surface of the substrate S, and sucks air existing between the substrate S and the blowing air, thereby adjusting the floating height of the substrate S with high accuracy. Then, the drawing apparatus 1 detects foreign matter adhering to the substrate S by the adhering matter detecting device 22.

The drawing device 1 performs the 2 nd supporting process (S13). Specifically, the drawing apparatus 1 supports the substrate S conveyed to the drawing table 3 by the 1 st sheet conveyer 50 from below by the 2 nd sheet conveyer 51. Further, the drawing apparatus 1 blows air to the lower surface of the substrate S by the 1 st floating portion 30 of the drawing table 3 to adjust the floating height of the substrate S.

The rendering apparatus 1 performs rendering processing (S14). Specifically, the drawing apparatus 1 blows air from the 2 nd floating portion 31 of the drawing table 3 to the lower surface of the substrate S, and sucks air existing between the substrate S and the blowing air, thereby adjusting the floating height of the substrate S with high accuracy. Then, the drawing apparatus 1 carries out drawing of the substrate S for the 1 st time by the drawing section 32 while conveying the substrate S to the send-out table 4 by the 2 nd sheet feeder 51. When the drawing apparatus 1 finishes drawing at the 1 st drawing, the drawing unit 32 performs the second drawing on the substrate S while the 2 nd sheet conveyer 51 and the 2 nd floating unit 31 of the drawing table 3 are moved in the width direction and the substrate S is conveyed to the drawing table 3 by the 2 nd sheet conveyer 51.

The drawing device 1 performs the 3 rd supporting process (S15). Specifically, the drawing apparatus 1 supports the substrate S, which is transported to the sending-out table 4 by the 2 nd sheet transporter 51, from below by the 3 rd sheet transporter 52. Further, the drawing apparatus 1 blows air to the lower surface of the substrate S by the floating portion 40 of the sending-out table 4 to adjust the floating height of the substrate S. Further, the drawing apparatus 1 conveys the substrate S to a predetermined delivery position by the 3 rd sheet feeder 52.

The drawing device 1 performs the sending-out process (S16). Specifically, the drawing apparatus 1 feeds out the substrate S supported by the 3 rd sheet feeder 52 by a feed-out arm.

< effects >

In the drawing apparatus of the comparative example which performs drawing while conveying a substrate, drawing is performed by, for example, placing the substrate on a placing table and moving the placing table.

In the drawing apparatus of the comparative example, when the size of the substrate is increased, the mounting table is increased in size and the weight is also increased. Therefore, in the drawing device of the comparative example, the moving device for moving the mounting table becomes large, and the cost becomes high.

In the drawing apparatus of the comparative example, in order to move the large-sized moving apparatus, the movement of the mounting table is reduced, and it is difficult to improve the movement accuracy. In addition, the drawing apparatus of the comparative example cannot increase the moving speed because a large-sized moving apparatus is moved. Therefore, the drawing apparatus of the comparative example has room for improvement in terms of improvement in productivity.

The drawing apparatus 1 of embodiment 1 includes a plurality of 2 nd sheet carriers 51 (one example of a plurality of support portions), a driving portion 53 (one example of a moving portion), a 1 st floating portion 30 (one example of an adjusting portion and a 1 st adjusting portion) of the drawing table 3, a 2 nd floating portion 31 (one example of an adjusting portion and a 2 nd adjusting portion) of the drawing table 3, and a drawing portion 32. The plurality of 2 nd sheet carriers 51 support the substrate S (one example of a workpiece) from below. The driving section 53 moves the 2 nd sheet feeder 51 in the horizontal direction. The 1 st floating part 30 and the 2 nd floating part 31 blow air from below to the substrate S supported by the 2 nd sheet conveyer 51, and adjust the floating height of the substrate S. The drawing section 32 adjusts the floating height with high accuracy by the 1 st floating section 30 and the 2 nd floating section 31, and draws the substrate S supported and conveyed by the 2 nd sheet conveyer 51. The 1 st floating unit 30 is provided upstream of the drawing unit 32 in the moving direction of the 2 nd sheet feeder 51. The 2 nd floating portion 31 is provided below the drawing portion 32, and adjusts the floating height of the substrate S with higher accuracy than the 1 st floating portion 30.

In other words, the drawing apparatus 1 includes, as a drawing method: a step of supporting the substrate S (an example of a workpiece) from below by a plurality of 2 nd sheet carriers 51 (an example of a plurality of supporting portions); a step of moving the 2 nd sheet conveyer 51 in the horizontal direction; and a step of drawing the substrate S supported and carried by the 2 nd sheet conveyer 51. Further, the rendering apparatus 1 includes, as a rendering method: a step of blowing air from below to the substrate S supported by the 2 nd sheet conveyer 51, provided on the upstream side of the portion where the substrate S is drawn in the moving direction of the 2 nd sheet conveyer 51, and performing the 1 st floating height adjustment of the substrate S; and a step of blowing air from below to the substrate S supported by the 2 nd sheet conveyer 51 below a portion where the substrate S is drawn, adjusting the floating height of the substrate S, and performing the 2 nd floating height adjustment of the floating height of the substrate S with higher accuracy than the 1 st floating height adjustment.

Thus, the drawing apparatus 1 can make the 2 nd sheet conveyer 51 for supporting and conveying the substrate S small, and can easily convey the substrate S by the small-sized driving portion 53. Further, in the drawing apparatus 1, the substrate S is given buoyancy by the 1 st floating portion 30 and the 2 nd floating portion 31, and thus the 2 nd sheet feeder 51 and the substrate S can be easily transported by the small-sized driving portion 53. Therefore, the drawing apparatus 1 can be downsized and the cost can be reduced. Further, the range of movement with high accuracy in the entire movement range of the substrate S can be shortened.

In addition, the drawing apparatus 1 can reduce the size and weight of the 2 nd sheet conveyer 51 for conveying the substrate S, increase the moving speed of the 2 nd sheet conveyer 51, and improve the moving accuracy of the 2 nd sheet conveyer 51. Therefore, the drawing apparatus 1 can draw with high accuracy, and shorten the drawing time for one substrate S, and can improve productivity. Can be played, the drawing device 1 can improve productivity.

In addition, a groove 31a in which the 2 nd sheet feeder 51 (an example of a supporting portion) can move is formed in the 2 nd floating portion 31 (an example of a 2 nd adjusting portion) of the drawing table 3.

Thus, in the drawing apparatus 1, the 2 nd floating portions 31 are provided on both sides of the groove 31 a. Therefore, the drawing apparatus 1 can adjust the floating height of the substrate S with high accuracy even when the substrate S is supported by the 2 nd sheet conveyer 51 in a state of protruding outward from the 2 nd sheet conveyer 51 in the width direction. For example, even when drawing a substrate S having a 90-degree rotated orientation and a substrate S of a different size as shown in fig. 1A or the like, the drawing apparatus 1 can accurately adjust the floating height of the substrate S and perform drawing.

Further, the driving section 53 (an example of a moving section) moves the 2 nd sheet transporter 51 (an example of a supporting section) that supports the substrate S (an example of a workpiece) drawn by the drawing section 32 in the width direction (an example of a direction orthogonal to the moving direction in the surface direction of the workpiece). Further, the drawing section 32 draws the substrate S moved in the width direction again.

Thereby, the drawing apparatus 1 can draw the substrate S a plurality of times, for example, 2 times. Therefore, the drawing device 1 can draw the drawing unit 32 finely. Further, the drawing apparatus 1 can draw the same portion of the substrate S by using different carriers 32a, and can make the film thickness of the functional liquid uniform.

The drawing apparatus 1 further includes a driving unit 53 (an example of an adjustment moving unit), and the driving unit 53 moves the 2 nd floating unit 31 (an example of a 2 nd adjustment unit) of the drawing table 3 in the width direction in accordance with the movement of the 2 nd sheet feeder 51 (an example of a support unit) in the width direction (an example of an orthogonal direction).

Thus, the drawing apparatus 1 can shorten the length of the 2 nd floating portion 31 in the width direction of the groove 31a through which the 2 nd sheet feeder 51 passes. That is, the drawing apparatus 1 can arrange a portion of the 2 nd floating portion 31, which blows air to the lower surface of the substrate S or sucks air existing between the substrate S and the lower surface, to be long in the width direction. Therefore, the drawing apparatus 1 can adjust the floating height of the substrate S with high accuracy by the 2 nd floating portion 31, and can draw the substrate S with high accuracy.

The drawing apparatus 1 includes a 2 nd floating unit 21 (an example of a 3 rd adjusting unit) and an attached matter detecting device 22 of the carrying table 2. The 2 nd floating portion 21 is provided upstream of the 1 st floating portion 30 (an example of the 1 st adjusting portion) of the drawing table 3 in the moving direction, and adjusts the floating height of the substrate S with higher accuracy than the 1 st floating portion 30 of the drawing table 3. The attached matter detection device 22 detects the presence or absence of attached matter on the substrate S from which air has been blown by the 2 nd floating portion 21.

Thus, the drawing apparatus 1 can detect the presence or absence of the attached matter attached to the substrate S by the attached matter detecting device 22 in a state where the floating height of the substrate S is accurately adjusted by the 2 nd floating portion 21 of the carrying-in table 2. Therefore, the drawing apparatus 1 can accurately determine whether or not the deposit on the substrate S is present.

The drawing apparatus 1 includes a drawing state detection device 7 which is provided above the 1 st floating unit 30 (an example of an adjustment unit) of the drawing table 3 and detects a drawing state of the drawing unit 32.

Thereby, the drawing apparatus 1 can shorten the length of the drawing apparatus 1 in the moving direction.

The drawing state detection device 7 detects the drawing state when the drawing of the substrate S (an example of a workpiece) by the drawing section 32 is completed and the next substrate S is conveyed to the 1 st floating section 30 (an example of the 1 st regulating section) of the drawing table 3.

Thus, the drawing apparatus 1 can detect the drawing state in the drawing section 32 while carrying out the next substrate S, and can improve productivity and productivity.

The drawing device 1 includes a flash unit 8 which is provided above the floating unit 40 (an example of an adjustment unit) of the delivery table 4 and performs flash of the drawing unit 32.

Thereby, the drawing apparatus 1 can shorten the length of the drawing apparatus 1 in the moving direction.

(embodiment 2)

Next, the drawing apparatus 1 according to embodiment 2 will be described with reference to fig. 17A and 17B. Fig. 17A is a plan view showing a schematic configuration of the drawing apparatus 1 according to embodiment 2. Fig. 17B is a side view showing a schematic configuration of the drawing apparatus 1 according to embodiment 2. In fig. 17A, a part of the configuration of the control device 9 and the like is omitted. Here, differences from embodiment 1 will be mainly described. Note that the same components as those in embodiment 1 are denoted by the same reference numerals as those in embodiment 1, and detailed description thereof is omitted.

The drawing apparatus 1 according to embodiment 2 includes a weight measuring device 100 in addition to the carrying-in table 2, the drawing table 3, the carrying-out table 4, the moving device 5, the air conditioning device 6, the drawing state detecting device 7, the flash unit 8, and the control device 9. In fig. 17B, the air-conditioning apparatus 6 shown in fig. 1B is omitted.

The drawing section 32 provided on the drawing table 3 is movable between a drawing area a in which the substrate S is drawn and a maintenance area B provided at a position shifted in the width direction from the drawing area a. The drawing area a is an area where the substrate S is conveyed in the moving direction, and is an area included in a route along which the substrate S is conveyed. The maintenance area B is an area where the maintenance operation of the drawing unit 32 is performed. Further, the drawing section 32 can move each carriage 32a in the width direction. That is, the drawing section 32 can move each carriage 32a between the drawing area a and the maintenance area B.

The driving unit 53 of the moving device 5 moves the drawing unit 32 between the drawing area a and the maintenance area B. That is, the driving unit 53 moves the drawing unit 32 in the width direction. Further, the driving unit 53 moves the measuring unit 101 and the bath unit 103 of the weight measuring device 100 in the moving direction. Further, the driving portion 53 moves the wind-proof portion 102 and the suction portion 105 of the weight measuring device 100 in the up-down direction.

The plurality of driving units 53 are provided corresponding to the sheet carriers 51 to 52, the measuring unit 101, the wind shielding unit 102, and the like. That is, the sheet carriers 51 to 52, the measuring section 101, the wind-proof section 102, and the like may be driven by different driving sections 53.

Here, the weight measuring apparatus 100 will be described with reference to fig. 18A and 18B. Fig. 18A is a plan view showing a schematic configuration of a weight measuring apparatus 100 according to embodiment 2. Fig. 18B is a side view showing a schematic configuration of weight measuring apparatus 100 according to the embodiment. The weight measuring device 100 is disposed outside the drawing area a, specifically, between the drawing area a and the maintenance area B.

The weight measuring device 100 includes a measuring unit 101, a wind-proof unit 102, and a bath unit 103. The measurement unit 101, the wind-proof unit 102, and the bath unit 103 are provided corresponding to the row of the carriers 32a in the moving direction. Therefore, for example, in the case where 2 rows of carriers 32a are provided in the moving direction, 2 rows of the measuring section 101, the wind-proof section 102, and the bath section 103 are provided in the moving direction.

The measuring unit 101 is movable in the moving direction. The measurement section 101 is movable between a discharge position at which a droplet of the functional liquid is discharged from the discharge head 32b of the drawing section 32 and a measurement position at which the weight of the discharged droplet is measured. The measuring position is arranged downstream of the release position, for example.

The measuring unit 101 is provided outside the drawing area a in the width direction, and measures the weight of the droplet of the functional liquid discharged from the discharge head 32 b. That is, the measuring unit 101 is provided at a position spaced apart in the width direction (an example of the horizontal direction orthogonal to the moving direction of the support) from the drawing area a (an example of the area) where the substrate S is conveyed (an example of the workpiece), and measures the weight of the droplet discharged from the drawing unit 32. The measuring unit 101 measures the weight of the droplet for each carrier.

The measuring unit 101 includes a plurality of scale units 104. The balance portion 104 is provided in correspondence with the number of the release heads 32b of the drawing portion 32. For example, when the release head 32b is provided with 6 rows in the moving direction and 2 rows in the width direction, the balance portion 104 is provided with 6 rows in the moving direction and 2 rows in the width direction. That is, the measuring unit 101 includes a plurality of scale units 104 provided corresponding to the number of discharge heads 32b and measuring the weight of the discharged droplets.

The storage portion 104a opened upward is formed in the balance portion 104. The reservoir 104a stores droplets of the functional liquid discharged from the discharge head 32 b. The scale unit 104 measures the weight of the functional liquid in the reservoir 104 a. The measuring unit 101 can measure the weight of the droplets of the functional liquid discharged from each discharge head 32b individually by each balance unit 104.

When the functional liquid droplet is discharged from the discharge head 32b at the discharge position, the measuring unit 101 moves to the measurement position, and the weight of the functional liquid droplet is measured.

The wind guard 102 is disposed above the measurement position. The wind guard 102 is movable in the vertical direction. The wind guard 102 covers the upper side of the bath unit 103 when the measurement unit 101 is at the release position, and covers the upper side of the measurement unit 101 when the measurement unit 101 is at the measurement position. Specifically, when the weight of the droplet of the functional liquid is measured by the measuring unit 101, the opening of the scale unit 104 is shielded by the wind shield 102 (an example of a shielding unit). Thus, the wind shielding portion 102 prevents a measurement error from being generated by the influence of ambient wind when the weight of the droplet of the functional liquid is measured by the measuring portion 101.

The wind-proof portion 102 is provided with a plurality of suction portions 105. The suction portion 105 moves in the vertical direction with respect to the wind shielding portion 102. The suction unit 105 is, for example, a suction nozzle, and is inserted into the reservoir 104a when the measurement of the weight of the functional liquid is completed, so as to suck the functional liquid in the reservoir 104a and discharge the functional liquid from the reservoir 104 a. That is, the wind shielding portion 102 (an example of the shielding portion) has a suction portion 105 that sucks and discharges a droplet whose weight is measured.

The plurality of suction units 105 is provided corresponding to the number of scale units 104, and sucks the liquid droplets from the plurality of scale units 104. That is, the suction unit 105 is provided in plurality corresponding to the number of the release heads 32b of the drawing unit 32. For example, when the discharge head 32b is provided with 6 rows in the moving direction and 2 rows in the width direction, the suction portion 105 is provided with 6 rows in the moving direction and 2 rows in the width direction.

Bath (bath) unit 103 is movable in the moving direction together with measuring unit 101. When the measurement unit 101 is in the release position, the bath unit 103 is in the measurement position. When the measuring unit 101 moves from the release position to the measurement position, the bath unit 103 moves from the measurement position to the retreat position on the downstream side in the movement direction from the measurement position. The bath unit 103 is a tank in which a solvent for preventing drying is stored. The bath unit 103 prevents the suction unit 105 provided in the wind prevention unit 102 from drying when the weight of the functional liquid is not measured by the weight measuring device 100, for example, when the substrate S is drawn.

The drawing device 1 further includes a wiper (not shown) for wiping the liquid droplets adhering to the discharge heads 32B of the drawing unit 32 between the maintenance area B and the drawing area a. For example, the drawing device 1 wipes the liquid droplets attached to the discharge head 32b of the drawing unit 32, which has finished the maintenance, with a wiper. For example, the wipers are arranged side by side in the moving direction with respect to the weight measuring device 100. Further, the wipers may be arranged side by side in the width direction with respect to the weight measurement device 100.

< weight measurement step >

Next, a weight measurement procedure of the drawing apparatus 1 according to embodiment 2 will be described with reference to fig. 19A to 19D. Fig. 19A is a schematic diagram (1) showing a weight measurement step of the plotting apparatus 1 according to embodiment 2. Fig. 19B is a schematic diagram (2) showing a weight measurement step of the plotting apparatus 1 according to embodiment 2. Fig. 19C is a schematic diagram (3) showing a weight measurement step of the plotting apparatus 1 according to embodiment 2. Fig. 19D is a schematic diagram (4) showing a weight measurement step of the drawing apparatus 1 according to embodiment 2.

The drawing device 1 measures the weight of the droplets of the functional liquid discharged from the discharge head 32B at a predetermined timing, for example, when the carriage 32a is moved from the maintenance area B (see fig. 17A) to the drawing area a (see fig. 17A). The predetermined time is a preset time, for example, every one week. Further, the drawing device 1 can perform weight measurement of the droplets of the functional liquid based on the operation of the operator.

In the drawing apparatus 1, as shown in fig. 19A, as an initial state, a measurement portion 101 is disposed at a release position, and a bath portion 103 is disposed below a wind-proof portion 102 which is a measurement position. The wind shielding part 102 is provided to cover the upper part of the bath part 103 in which the solvent is stored, and can suppress the drying of the suction part 105.

When the drawing apparatus 1 measures the weight of the droplet of the functional liquid discharged from the discharge head 32B of the drawing section 32, the carriage 32a is conveyed above the discharge position as shown in fig. 19B. Specifically, the drawing device 1 carries the carriage 32a so that the release head 32b of the carriage 32a is above the stock portion 104a of the balance portion 104 of the measuring portion 101.

Then, the drawing device 1 discharges the droplets of the functional liquid from the discharge head 32b a predetermined number of times. The predetermined number of times is a preset number of times. Thereby, the functional liquid discharged from the discharge head 32b is stored in the storage portion 104a of the measuring portion 101. The wind-prevention portion 102 is held in a state of covering the upper side of the bath portion 103.

When the release of the droplets of the functional liquid a predetermined number of times from the release head 32b is completed, the drawing apparatus 1 raises the wind-shielding portion 102, separates the wind-shielding portion 102 from the bath portion 103, and moves the measurement portion 101 and the bath portion 103 in the moving direction. The drawing device 1 conveys the measuring portion 101 to the measuring position, i.e., below the wind-guard portion 102. Specifically, the drawing device 1 conveys the measurement unit 101 so that the suction unit 105 of the wind-proof unit 102 is above the stock unit 104a of the scale unit 104 of the measurement unit 101.

Further, the drawing device 12 lowers the wind screen 102 to cover the upper side of the balance 104 and to block the opening of the storage 104a of the balance 104 as shown in fig. 19C. Then, the drawing device 1 measures the weight of the functional liquid in the reservoir 104a by the balance 104, and transmits a signal relating to the measured weight to the control device 9.

As described above, the drawing device 1 measures the weight of the droplet of the functional liquid released from the release head 32b for each carrier 32 a.

When the weight measurement of the droplets of the functional liquid is completed, the drawing device 1 lowers the suction unit 105 and inserts the suction unit 105 into the reservoir 104a of the scale unit 104 as shown in fig. 19D. Then, the drawing apparatus 1 sucks the functional liquid in the reservoir 104a by the suction unit 105, and discharges the functional liquid from the reservoir 104 a.

< weight measurement treatment >

Next, the weight measurement processing of embodiment 2 will be described with reference to fig. 20. Fig. 20 is a flowchart for explaining the weight measurement processing according to embodiment 2.

The drawing device 1 conveys the carrier 32a to above the measuring portion 101 at the release position (S20).

The drawing device 1 releases the droplet of the functional liquid from the release head 32b to the measurement unit 101 at the release position (S21). Specifically, the drawing device 1 discharges droplets of the functional liquid from the discharge head 32b of the carriage 32a to the reservoir 104a of the scale unit 104a predetermined number of times.

The drawing device 1 conveys the measurement unit 101 of the released droplet of the functional liquid to the measurement position (S22). Specifically, the drawing device 1 moves the wind shield 102 upward, then moves the measuring unit 101 and the bath unit 103 in the moving direction, and conveys the measuring unit 101 to the measuring position.

When the measuring unit 101 is transported to the measuring position, the drawing device 1 measures the weight of the discharged droplets of the functional liquid (S23). Specifically, when the surveying unit 101 is transported to the surveying position, the drawing device 1 moves the wind-proof unit 102 downward to cover the upper side of the surveying unit 101 and shield the opening of the storage unit 104a of the scale unit 104. Then, the drawing apparatus 1 measures the weight of the released droplets of the functional liquid by the measuring unit 101.

When the measurement is completed, the drawing apparatus 1 sucks and discharges the functional liquid in the reservoir 104a by the suction unit 105 (S24). Specifically, the drawing device 1 inserts the suction unit 105 into the reservoir 104a of the scale unit 104, and discharges the functional liquid by the suction unit 105.

< effects >

The drawing apparatus 1 includes a 2 nd sheet feeder 51 and the like (an example of a support portion), a driving portion 53 (an example of a moving portion), a drawing portion 32, and a measuring portion 101. The 2 nd sheet conveyer 51 and the like support the pair of substrates S (an example of a workpiece) from below. The driving section 53 moves the 2 nd sheet feeder 51 and the like in the horizontal direction. The drawing section 32 discharges the droplet to draw the substrate S. The measuring unit 101 is provided at a position spaced apart in the width direction (horizontal direction orthogonal to the moving direction of the support) from the drawing area a (an example of an area) where the substrate S is conveyed, and measures the weight of the droplet discharged from the drawing unit 32.

In other words, the rendering apparatus 1 includes, as a rendering method: a step of supporting a substrate S (an example of a workpiece) from below by a 2 nd sheet feeder 51 or the like (an example of a supporting part); a step of moving the 2 nd sheet conveyer 51 and the like in the horizontal direction; a step of discharging the droplets from the drawing section 32 to draw the substrate S; and a step of measuring the weight of the liquid droplets discharged from the drawing section 32 at a position spaced in the width direction (horizontal direction orthogonal to the moving direction of the support section) from the drawing area a (an example of an area) where the substrate S is conveyed.

Thereby, the drawing apparatus 1 can simplify the configuration of the path for the substrate S to be conveyed. Further, the drawing apparatus 1 can shorten the length of the drawing apparatus 1 in the moving direction.

In addition, the drawing section 32 includes a plurality of carriers 32a, and the plurality of carriers 32a have a plurality of discharge heads 32b that discharge droplets. The measuring unit 101 measures the weight of the droplet for each carrier 32 a.

Thus, the drawing apparatus 1 can shorten the time for measuring the weight of the liquid droplet on 1 carriage 32a by measuring the weight of the liquid droplet on each carriage 32 a. Therefore, the drawing apparatus 1 can shorten the time taken for the weight measurement in the drawing section 32, can quickly start drawing the substrate S, and can improve productivity.

The measuring unit 101 includes a plurality of scale units 104 provided corresponding to the number of discharge heads 32b and measuring the weight of the discharged droplets.

Thereby, the drawing device 1 can measure the weight of the liquid droplet of each discharge head 32 b. Therefore, the drawing device 1 can measure the discharge amount of the droplets of each discharge head 32b, and can detect the discharge state of each discharge head 32 b.

The drawing device 1 includes a wind shielding portion 102 (an example of a shielding portion) that shields an opening of the balance portion 104 when the weight of the liquid droplet is measured.

Thus, the drawing device 1 can suppress the influence of the surrounding wind and accurately measure the weight of the liquid droplets.

The wind shielding portion 102 (an example of a shielding portion) has a suction portion 105 that sucks and discharges a droplet whose weight is measured.

Accordingly, the drawing device 1 can discharge the functional liquid stored in the storage section 104a of the scale section 104 from the scale section 104 without moving the wind-proof section 102, for example, and can improve workability.

Further, a plurality of suction units 105 are provided corresponding to the number of scale units 104, and liquid droplets are sucked from the plurality of scale units 104.

Thus, the drawing device 1 can collectively discharge the functional liquid from the reservoir portions 104a of the plurality of scale portions 104, and the workability can be improved.

(modification example)

The drawing apparatus 1 of the modification can finish drawing the substrate S by 1 drawing. Further, the drawing apparatus 1 of the modification can finish drawing the substrate S by drawing 3 times or more. The drawing apparatus 1 of the modification can perform the second drawing while being transported from the drawing stage 3 to the sending-out stage 4, for example.

In the drawing apparatus 1 of the modified example, the length in the width direction of the groove 31a formed in the 2 nd floating portion 31 of the drawing table 3 may be equal to or greater than the length in the width direction of the groove 30b of the 1 st floating portion 30. Thus, the drawing apparatus 1 of the modification can perform, for example, the second drawing without moving the 2 nd floating portion 31 of the drawing table 3 in the width direction.

In the drawing apparatus 1 according to the modified example, when the 2 nd sheet feeder 51 is moved in the width direction in the delivery table 4, the 2 nd sheet feeder 51 is moved in the width direction while being moved in the moving direction. That is, the drawing apparatus 1 according to the modified example may move the 2 nd sheet feeder 51 in the width direction by moving the 2 nd sheet feeder 51 obliquely with respect to the moving direction.

In the drawing apparatus 1 of the modification, for example, the predetermined interval of the 21 st sheet feeders 50 provided in the 1 slot 20a can be changed. Thus, the drawing apparatus 1 of the modified example can carry the substrate S having different lengths in the moving direction and draw the substrate S.

In the drawing apparatus 1 of the modification, as shown in fig. 21, the alignment camera 120 may be provided on the carriage 32a arranged side by side in the width direction. Fig. 21 is a plan view showing a schematic configuration of a part of the drawing apparatus 1 according to a modification. The alignment camera 120 is, for example, a CCD camera.

Each carrier 32a is capable of moving in the width direction. That is, the positions of the carriers 32a in the Y-axis direction (an example of the orthogonal direction) can be adjusted. Each carrier 32a can be adjusted in position in the Y-axis direction by a motor or the like.

In addition, the 2 nd sheet feeder 51 can adjust the position in the moving direction (X-axis direction) and the width direction (Y-axis direction). For example, the 2 nd sheet feeder 51 can be adjusted in position in the moving direction (X-axis direction) and the width direction (Y-axis direction) by a motor. Further, the 2 nd sheet feeder 51 can rotate about an axis in the Z-axis direction. For example, the 2 nd blade transfer device 51 can be rotated about an axis in the Z-axis direction by the driving force transmitted from the motor via the transmission mechanism. The 2 nd sheet conveyer 51 can adjust the position of the substrate S in the moving direction and the width direction in a state of supporting the substrate S. Further, the 2 nd sheet conveyer 51 is rotatable with respect to the axis of the substrate S in the Z-axis direction in a state of supporting the substrate S.

Here, the positional alignment of each carriage 32a in the drawing table 3 of the drawing apparatus 1 of the modification will be described. The positional alignment of each carrier 32a is performed by the control device 9.

First, the control device 9 adjusts the position of the substrate S with the 2 nd sheet conveyer 51 so that the alignment marks 121 provided at the front end of the substrate S can be photographed with the alignment cameras 120 provided at both ends in the width direction. Further, the control device 9 adjusts the positions of the carriers 32a provided at both ends in the width direction. That is, alignment of the substrate S is performed, and the positions of the carriers 32a disposed at both ends in the width direction are adjusted.

Further, the alignment cameras 120 different from both ends in the width direction may be used to adjust the position of the substrate S and the position of the carrier 32 a.

Then, the control device 9 adjusts the position of the carriage 32a between the carriages 32a provided at both ends in the width direction. Specifically, the control device 9 adjusts the position of the carrier 32a so that the alignment marks 121 provided on the substrate S can be photographed with the respective alignment cameras 120 disposed between the alignment cameras 120 at both ends.

After the alignment of the positions of the respective carriers 32a is completed, a reference position for moving the substrate S in the moving direction at the time of drawing is initialized. For example, a laser interferometer that can detect the position of the movement direction of the carriage 32a is reset. In the case of performing the drawing, the substrate S is conveyed in the moving direction by adjusting the amount of movement from the reference position based on the measurement result of the laser interferometer.

As described above, the drawing device 1 of the modified example can adjust the position of the carriage 32a in the width direction for each carriage 32 a. Therefore, when the positions of the carriers 32a are shifted due to a temperature change or the like, the drawing device 1 according to the modification can adjust the positions of the carriers 32a in the width direction for each carrier 32a, and can draw with high accuracy.

In addition, the drawing apparatus 1 of the modified example can adjust the release timing of the functional liquid for each carriage 32 a. That is, the plurality of carriers 32a can adjust the release timing of the functional liquid. In the drawing device 1 of the modification, when the alignment mark 121 imaged by the alignment camera 120 is shifted in the moving direction, the release timing of the carriage 32a whose alignment mark 121 is shifted in the moving direction is adjusted.

The drawing device 1 of the modification can perform drawing with high accuracy by adjusting the release timing of the functional liquid in the moving direction for each carriage 32 a.

The drawing apparatus 1 of the modified example can measure the weight of the droplet of the functional liquid discharged from a part of the discharge heads 32 b. The drawing device 1 of the modification may be configured to measure only the weight of the liquid droplets discharged from the discharge heads 32b that discharge the blue ink, for example, when 1 carriage 32a has a plurality of discharge heads 32b that discharge the blue, red, green, and the like inks as the functional liquid. That is, the weight of the droplets of the functional liquid is measured for each carrier 32a, including the case where the weight is measured for the droplets of the functional liquid discharged from a part of the discharge heads 32 b.

Thus, the drawing device 1 of the modified example can measure the weight of the droplets of the functional liquid in a part of the discharge heads 32b with respect to the carriage 32 a.

The drawing apparatus 1 according to the modification can place the substrate S on the stage and convey the stage.

The embodiments disclosed herein are illustrative and not restrictive in all respects. In fact, the above-described embodiments may be omitted, replaced, or changed in various ways without departing from the scope and gist of the appended claims

Description of the reference numerals

1 rendering device

2 feeding table

3 drawing table

4 delivery table

5 moving device

6 air conditioning device

7 drawing state detection device

8 flash spraying part

9 control device

20 st floating part

21 2 nd floating part (adjusting part, 3 rd adjusting part)

22 attachment detection device

30 No. 1 floating part (adjusting part, No. 1 adjusting part)

31 No. 2 float part (adjusting part, No. 2 adjusting part)

31a groove

32 drawing part

40 float part (regulating part)

50 st 1 sheet conveyer (support)

51 nd 2 nd sheet conveyer (supporting part)

52 rd 3 sheet conveyer (support part)

53 drive part (moving part, adjusting moving part)

100 weight measuring device

101 measurement unit

102 windproof part (shielding part)

103 bath part

104 balance part

105 a suction part.