阅读说明：本技术 用于决定层的厚度和折射率的方法 (Method for determining the thickness and refractive index of a layer ) 是由 N.兰戈尔兹 J.哈尔斯特里奇 于 2019-07-17 设计创作，主要内容包括：本发明涉及一种用于决定在基板(26)上的层(6)的厚度和折射率的方法,层(6)具有面向基板(26)的层边界表面(30)以及背离基板(26)的层顶侧(28)。在所述方法中,实行以下步骤：沿光轴(8)由共聚焦显微镜将层(6)成像；决定在层边界表面(30)和层顶侧(28)处的沿光轴(8)分辨的点扩散函数；从在点扩散函数的两个极大值之间的距离,决定层在层的侧向点处的表观厚度；在侧向点处,决定在层边界表面(30)的点扩散函数具有的极大值相对于在层顶侧(28)的点扩散函数具有的相同极大值的加宽；以及从表观厚度和加宽,决定层(6)在侧向点处的厚度和折射率。(The invention relates to a method for determining the thickness and the refractive index of a layer (6) on a substrate (26), the layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26). In the method, the following steps are carried out: -imaging the layer (6) by a confocal microscope along the optical axis (8); determining a point spread function resolved along the optical axis (8) at the layer boundary surface (30) and the layer top side (28); determining the apparent thickness of the layer at lateral points of the layer from the distance between the two maxima of the point spread function; determining a broadening of a maximum of the point spread function at the layer boundary surface (30) relative to the same maximum of the point spread function at the layer top side (28) at a lateral point; and determining the thickness and refractive index of the layer (6) at the lateral points from the apparent thickness and broadening.)

1. A method for determining the thickness and refractive index of a layer (6) located on a substrate (26), wherein the layer (6) has a layer bottom side (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26), and wherein the following steps are carried out:

a) setting the lateral position of the layer (6),

b) performing confocal microscopy imaging of the layer (6) at the lateral position and at a plurality of axial positions along the optical axis (8),

c) determining a first axial relative position of a major or minor maximum of the axial intensity distribution at the layer bottom side (30) at said lateral position, and determining a second axial relative position of the same major or minor maximum of the intensity distribution at the layer bottom side (30) at said lateral position,

d) determining a first value of a shape characteristic of the intensity distribution at a layer bottom side (30) of the lateral position and a second value of the same shape characteristic of the intensity distribution at a layer top side (28) of the lateral position, and

e) determining the thickness and the refractive index of the layer (6) at the lateral position from the difference between the first and second axial relative positions and the difference between the first and second values of the shape feature.

2. The method of claim 1, wherein the shape feature comprises a distance between two maxima present in the intensity distribution, such that determining a difference between a first value and a second value of the shape feature comprises determining a change in the distance between maxima.

3. The method of claim 1 or 2, wherein the shape feature comprises an intensity ratio of maxima present in the intensity distribution, such that determining the difference between the first and second values of the shape feature comprises determining a change in intensity ratio between maxima.

4. Method according to any one of claims 1 to 3, wherein in step c) and/or step d) a z-stack having at least three axial positions at which the lateral positions are recorded at the layer top and layer bottom sides (30, 28), respectively.

5. The method of any one of claims 1 to 4, wherein the width of the primary or secondary maxima is determined in step d) as a shape feature.

6. Method according to one of claims 1 to 5, wherein, for carrying out steps c) and d), in each case at a lateral position, a first point spread function resolved along the optical axis (8) is determined at the layer bottom side (30) and a second point spread function resolved along the optical axis (8) is determined at the layer top side (28), and the point spread functions are used as an intensity distribution.

7. The method according to any one of claims 1 to 6, wherein the method is repeated for various lateral positions of the layer (6) in order to determine the lateral distribution of the refractive index and layer thickness in a scanning manner.

8. The method according to any one of claims 1 to 7, wherein an objective lens (10) is used for confocal microscopy and a transfer curve is provided for the objective lens (10), the transfer curve specifying the refractive index of the layer (6) as a function of the difference between the first and second axial positions and the difference between the first and second values of the shape feature.

9. The method according to any one of claims 1 to 8, wherein the layer (6) is part of a multilayer system.

10. The method according to claim 9, wherein the layer (6) is an inner layer in the multilayer system.