阅读说明：本技术 用于决定层的厚度和折射率的方法 (Method for determining the thickness and refractive index of a layer ) 是由 N.兰戈尔兹 J.哈尔斯特里奇 于 2019-07-17 设计创作，主要内容包括：本发明涉及一种用于决定在基板(26)上的层(6)的厚度和折射率的方法,层(6)具有面向基板(26)的层边界表面(30)以及背离基板(26)的层顶侧(28)。在所述方法中,实行以下步骤：沿光轴(8)由共聚焦显微镜将层(6)成像；决定在层边界表面(30)和层顶侧(28)处的沿光轴(8)分辨的点扩散函数；从在点扩散函数的两个极大值之间的距离,决定层在层的侧向点处的表观厚度；在侧向点处,决定在层边界表面(30)的点扩散函数具有的极大值相对于在层顶侧(28)的点扩散函数具有的相同极大值的加宽；以及从表观厚度和加宽,决定层(6)在侧向点处的厚度和折射率。(The invention relates to a method for determining the thickness and the refractive index of a layer (6) on a substrate (26), the layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26). In the method, the following steps are carried out: -imaging the layer (6) by a confocal microscope along the optical axis (8); determining a point spread function resolved along the optical axis (8) at the layer boundary surface (30) and the layer top side (28); determining the apparent thickness of the layer at lateral points of the layer from the distance between the two maxima of the point spread function; determining a broadening of a maximum of the point spread function at the layer boundary surface (30) relative to the same maximum of the point spread function at the layer top side (28) at a lateral point; and determining the thickness and refractive index of the layer (6) at the lateral points from the apparent thickness and broadening.)