阅读说明：本技术 气体搅拌装置、铸锭炉及其使用方法 (Gas stirring device, ingot furnace and using method thereof ) 是由 陈湘伟 胡动力 张华利 游达 张祥 于 2020-07-27 设计创作，主要内容包括：本发明公开了一种气体搅拌装置、铸锭炉及其使用方法,所述气体搅拌装置包括升降单元、进气管、密封单元和喷头；所述进气管与所述升降单元相连,由所述升降单元驱动进行升降运动；所述进气管上还设有进气口；所述密封单元与所述进气管相连,且用于连接铸锭炉,以实现铸锭炉内气体与外界隔离；所述喷头与所述进气管的出口相连,所述喷头的出气喷嘴的延伸方向与进气管的延伸方向之间存在夹角,喷头喷射出的气流将推动铸锭炉内的硅液流动。本发明通过形成硅液的流动,有利于实现将硅液中的杂质上移到硅锭表面和侧部,提高产品质量。(The invention discloses a gas stirring device, an ingot furnace and a using method of the ingot furnace, wherein the gas stirring device comprises a lifting unit, a gas inlet pipe, a sealing unit and a spray head; the air inlet pipe is connected with the lifting unit and is driven by the lifting unit to move up and down; the air inlet pipe is also provided with an air inlet; the sealing unit is connected with the air inlet pipe and is used for connecting the ingot furnace so as to realize the isolation of the gas in the ingot furnace from the outside; the sprayer is connected with the outlet of the air inlet pipe, an included angle exists between the extending direction of the air outlet nozzle of the sprayer and the extending direction of the air inlet pipe, and the air flow sprayed by the sprayer pushes the silicon liquid in the ingot furnace to flow. According to the invention, through forming the flow of the silicon liquid, the impurities in the silicon liquid can be moved up to the surface and the side part of the silicon ingot, and the product quality is improved.)

1. A gas stirring device, comprising:

a lifting unit;

the air inlet pipe is connected with the lifting unit and is driven by the lifting unit to move up and down; the air inlet pipe is also provided with an air inlet;

the sealing unit is connected with the air inlet pipe and is used for connecting the ingot furnace so as to realize the isolation of the gas in the ingot furnace from the outside;

and the spray head is connected with the outlet of the air inlet pipe, an included angle exists between the extending direction of the air outlet nozzle of the spray head and the extending direction of the air inlet pipe, and the air flow sprayed by the spray head pushes the silicon liquid in the ingot furnace to flow.

2. A gas stirring device as claimed in claim 1, wherein: the diameter of the inner cavity of the air outlet nozzle is gradually reduced along the extension direction of the air outlet nozzle, and the diameter is used for increasing the flow velocity of the air flow.

3. A gas stirring device as claimed in claim 1, wherein: the sealing unit is a sealing ring or a vacuum corrugated pipe.

4. A gas stirring device as claimed in claim 1, wherein: the gas inlet pipe is made of stainless steel, aluminum oxide, silicon carbide or quartz glass.

5. The ingot furnace comprises an ingot furnace body, wherein the ingot furnace body comprises a furnace body, a cover body, a heat insulation cage, a graphite guide pipe, a heater and a crucible; the cover body covers the opening of the furnace body, and a notch is formed in the cover body; the heat insulation cage is arranged in the furnace body; one end of the graphite conduit is communicated with the notch at the cover body, and the other end of the graphite conduit is communicated with the heat insulation cage; the heater and the crucible are arranged in the heat insulation cage; a notch is arranged on the crucible; the method is characterized in that: still include gaseous agitating unit, include:

the lifting unit is connected with the furnace body;

one end of the air inlet pipe penetrates through the graphite guide pipe and then enters the crucible through a notch on the crucible, and the other end of the air inlet pipe is connected with the lifting unit and is driven by the lifting unit to do lifting motion in the furnace body; the air inlet pipe is also provided with an air inlet;

the sealing unit is respectively connected with the gas inlet pipe and the furnace body so as to realize the isolation of the gas in the furnace body from the outside;

and the spray head is connected with the outlet of the air inlet pipe, an included angle exists between the extending direction of the air outlet nozzle of the spray head and the extending direction of the air inlet pipe, and the air flow sprayed by the spray head pushes the silicon liquid in the ingot furnace to flow.

6. The ingot furnace of claim 5, wherein: the sealing unit is a sealing ring or a vacuum corrugated pipe.

7. The ingot furnace of claim 5, wherein: the gas inlet pipe is made of stainless steel, aluminum oxide, silicon carbide or quartz glass.

8. The ingot furnace of claim 5, wherein: the diameter of the inner cavity of the air outlet nozzle is gradually reduced along the extension direction of the air outlet nozzle, and the diameter is used for increasing the flow velocity of the air flow.

9. Use method of the ingot furnace of any one of claims 5 to 8, characterized by comprising:

the air inlet pipe is driven to move upwards by using the lifting unit until the spray head completely enters the graphite guide pipe;

introducing argon from an air inlet pipe, enabling the ingot furnace to work in a gas mode, and starting a heater to run;

when the temperature in the stove reaches preset temperature, and the silicon liquid level in the crucible drops to minimum liquid level, utilize the lift unit drive intake pipe to move down, make the shower nozzle get into in the crucible, and keep predetermined distance with the silicon liquid level, adjust the argon gas flow to suitable size, inside argon gas process intake pipe and shower nozzle entering crucible, the argon gas air current that the shower nozzle erupted will promote the silicon liquid and form and flow, simultaneously because the argon gas air current is normal atmospheric temperature gas, form certain difference in temperature from top to bottom at the silicon liquid, utilize the difference in temperature to make the silicon liquid form and flow.

10. The use method of the ingot furnace according to claim 9, characterized in that: the method further comprises the following steps: and after the crystal growth process of the ingot furnace is finished, the air inlet pipe is driven to move upwards by the lifting unit, and the spray head is moved into the graphite guide pipe.

Technical Field

The invention particularly relates to a gas stirring device, an ingot furnace and a using method thereof, which are suitable for production of ingot production equipment or other vacuum smelting furnaces in the photovoltaic industry.

Background

In the production process of the photovoltaic industry, a crystal silicon ingot furnace is an important production device for producing silicon wafers. Some impurities are inevitably introduced in the production process of the crystalline silicon ingot, such as: oxygen, carbon, silicon nitride, etc., which form precipitates, complexes, etc. in the silicon solution, and become recombination centers of minority carriers, affecting the minority carrier lifetime of the silicon wafer, thereby reducing the conversion efficiency of the crystalline silicon solar cell. In addition, because no stirring device is arranged in the existing crystal silicon ingot furnace equipment, the silicon liquid can only be driven to flow a small amount by the temperature difference distribution generated by the thermal field temperature gradient on the silicon liquid after being melted, the flow is very limited relative to the total amount of the silicon liquid, so that impurities in the silicon liquid cannot drift to the upper surface or the edge of a silicon ingot to grow in the middle position of a crystal, and the crystal yield is certainly influenced.

Disclosure of Invention

Aiming at the problems, the invention provides the gas stirring device, the ingot furnace and the using method thereof, which are beneficial to realizing the upward movement of impurities in the silicon liquid to the surface and the side part of the silicon ingot and improving the product quality by forming the flow of the silicon liquid.

In order to achieve the technical purpose and achieve the technical effects, the invention is realized by the following technical scheme:

in a first aspect, the present invention provides a gas stirring apparatus comprising:

a lifting unit;

the air inlet pipe is connected with the lifting unit and is driven by the lifting unit to move up and down; the air inlet pipe is also provided with an air inlet;

the sealing unit is connected with the air inlet pipe and is used for connecting the ingot furnace so as to realize the isolation of the gas in the ingot furnace from the outside;

and the spray head is connected with the outlet of the air inlet pipe, an included angle exists between the extending direction of the air outlet nozzle of the spray head and the extending direction of the air inlet pipe, and the air flow sprayed by the spray head pushes the silicon liquid in the ingot furnace to flow.

Optionally, the diameter of the inner cavity of the air outlet nozzle is gradually reduced along the extension direction of the air outlet nozzle, so as to increase the flow speed of the air flow.

Optionally, the sealing unit is a sealing ring or a vacuum bellows.

Optionally, the inlet tube is made of stainless steel, alumina, silicon carbide or quartz glass.

In a second aspect, the invention provides an ingot furnace, which comprises an ingot furnace body, wherein the ingot furnace body comprises a furnace body, a cover body, a heat insulation cage, a graphite guide pipe, a heater and a crucible; the cover body covers the opening of the furnace body, and a notch is formed in the cover body; the heat insulation cage is arranged in the furnace body; one end of the graphite conduit is communicated with the notch at the cover body, and the other end of the graphite conduit is communicated with the heat insulation cage; the heater and the crucible are arranged in the heat insulation cage; a notch is arranged on the crucible; still include gaseous agitating unit, include:

the lifting unit is connected with the furnace body;

one end of the air inlet pipe penetrates through the graphite guide pipe and then enters the crucible through a notch on the crucible, and the other end of the air inlet pipe is connected with the lifting unit and is driven by the lifting unit to do lifting motion in the furnace body; the air inlet pipe is also provided with an air inlet;

the sealing unit is respectively connected with the gas inlet pipe and the furnace body so as to realize the isolation of the gas in the furnace body from the outside;

and the spray head is connected with the outlet of the air inlet pipe, an included angle exists between the extending direction of the air outlet nozzle of the spray head and the extending direction of the air inlet pipe, and the air flow sprayed by the spray head pushes the silicon liquid in the ingot furnace to flow.

Optionally, the sealing unit is a sealing ring or a vacuum bellows.

Optionally, the inlet tube is made of stainless steel, alumina, silicon carbide or quartz glass.

Optionally, the diameter of the inner cavity of the air outlet nozzle is gradually reduced along the extension direction of the air outlet nozzle, so as to increase the flow speed of the air flow.

In a third aspect, the present invention provides a method for using an ingot furnace according to any one of the second aspects, including:

the air inlet pipe is driven to move upwards by using the lifting unit until the spray head completely enters the graphite guide pipe;

introducing argon from an air inlet pipe, enabling the ingot furnace to work in a gas mode, and starting a heater to run;

when the temperature in the stove reaches preset temperature, and the silicon liquid level in the crucible drops to minimum liquid level, utilize the lift unit drive intake pipe to move down, make the shower nozzle get into in the crucible, and keep predetermined distance with the silicon liquid level, adjust the argon gas flow to suitable size, inside argon gas process intake pipe and shower nozzle entering crucible, the argon gas air current that the shower nozzle erupted will promote the silicon liquid and form and flow, simultaneously because the argon gas air current is normal atmospheric temperature gas, form certain difference in temperature from top to bottom at the silicon liquid, utilize the difference in temperature to make the silicon liquid form and flow.

Optionally, the method further comprises: and after the crystal growth process of the ingot furnace is finished, the air inlet pipe is driven to move upwards by the lifting unit, and the spray head is moved into the graphite guide pipe.

Compared with the prior art, the invention has the beneficial effects that:

the invention provides a novel gas stirring device, which is used for being matched with an ingot furnace, and is provided with a spray head with an included angle with an air inlet pipe, wherein the airflow sprayed by the spray head pushes silicon liquid in the ingot furnace to flow, so that the airflow is accelerated to form a spraying effect, meanwhile, the airflow forms a certain temperature difference between the upper part and the lower part of the silicon liquid due to the fact that the airflow is normal-temperature gas, the temperature difference can also enable the silicon liquid to flow, the flowing of the silicon liquid is beneficial to the impurities in the silicon liquid to move upwards to the surface and the lateral part of a silicon ingot, and the purpose of improving the product quality is achieved.

Drawings

In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the present disclosure taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a schematic overall structure diagram of an ingot furnace according to an embodiment of the invention;

FIG. 2 is a schematic structural diagram of a showerhead according to an embodiment of the present invention

FIG. 3 is a schematic diagram illustrating the effect that the gas flow ejected by the nozzle of one embodiment of the present invention will push the silicon liquid in the ingot furnace to flow;

wherein:

1-lifting unit, 2-air inlet pipe, 3-sealing unit, 4-spray head, 5-furnace body, 6-cover body, 7-heat insulation cage, 8-heater, 9-crucible, 10-graphite conduit, 11-air inlet, 12-silicon liquid level, 13-angle between nozzle outlet and horizontal silicon liquid level, and 14-DS block.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the scope of the invention.

In the description of the present patent, it is to be noted that the terms "upper", "lower", "left", "right", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present patent and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present patent.

In the description of the present patent application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The following detailed description of the principles of the invention is provided in connection with the accompanying drawings.