阅读说明：本技术 一种水平开合的半导体检测用探针座 (Horizontally opened and closed probe seat for semiconductor detection ) 是由 张勇 于 2020-07-04 设计创作，主要内容包括：本发明公开了一种水平开合的半导体检测用探针座,一对竖直支撑板相互靠近的端面之间成型有一对左右对称设置的连接组；连接组包括一对上下对称设置的连接板；一对竖直支撑板的中心之间设置有测试座；测试座位于一对连接组之间并且位于上侧和下侧的连接板之间；放置座的左右两端左右方向分别套设有加热套；加热套为内侧端成型有与放置座配合的矩形槽状的套设槽的长方体；一对套设槽的上侧壁相互靠近的一端成型有上下贯穿的矩形槽状的检测插孔；套设槽的上下侧壁远离检测插孔的一端成型有上下贯穿的矩形槽状的透气孔；一对套设槽相互远离的内侧壁中心安装有电加热棒。(The invention discloses a probe seat for detecting a semiconductor, which is horizontally opened and closed.A pair of bilaterally-symmetrically-arranged connecting groups are formed between the mutually-close end surfaces of a pair of vertical supporting plates; the connecting group comprises a pair of connecting plates which are arranged up and down symmetrically; a test seat is arranged between the centers of the pair of vertical supporting plates; the test seat is positioned between the pair of connection groups and between the connection plates on the upper side and the lower side; the left end and the right end of the placing seat are respectively sleeved with a heating sleeve in the left-right direction; the heating sleeve is a cuboid with a rectangular groove-shaped sleeving groove matched with the placing seat formed at the inner side end; one end of the upper side walls of the pair of sleeving grooves, which is close to each other, is formed with a rectangular groove-shaped detection jack which penetrates through the upper part and the lower part; one end of the upper side wall and the lower side wall of the sleeving groove, which are far away from the detection jack, is formed with a rectangular groove-shaped vent hole which penetrates through up and down; the center of the inner side wall of the pair of sleeving grooves, which is far away from each other, is provided with an electric heating rod.)

1. A probe seat for semiconductor detection capable of horizontally opening and closing is characterized in that: comprises a base (10) and a placing seat (40); the placing seat (40) is arranged right above the base (10) in a lifting way; the placing seat (40) comprises a pair of cuboid vertical supporting plates (41) which are symmetrically arranged front and back; a pair of left-right symmetrically arranged connecting groups are formed between the mutually close end surfaces of the pair of vertical supporting plates (41); the connecting group comprises a pair of rectangular plate-shaped connecting plates (42) which are arranged up and down symmetrically; a test seat (50) is arranged between the centers of the pair of vertical supporting plates (41); the test socket (50) is positioned between the pair of connection groups and between the connection plates (42) on the upper side and the lower side; the left end and the right end of the placing seat (40) are respectively sleeved with a heating sleeve (24) in the left-right direction; the heating jacket (24) is a cuboid with a rectangular groove-shaped jacket groove (240) which is matched with the placing seat (40) and formed at the inner side end; one end of the upper side walls of the pair of sleeving grooves (240), which is close to each other, is formed with a detection jack (242) which is in a rectangular groove shape and penetrates through the upper and lower parts; one end of the upper side wall and the lower side wall of the sleeving groove (240) far away from the detection jack (242) is formed with a rectangular groove-shaped vent hole (241) which penetrates through the upper side wall and the lower side wall; the centers of the inner side walls of the pair of sleeving grooves (240) which are far away from each other are provided with electric heating rods (25); a pair of electric heating rods (25) are positioned between the connecting plates (42) on the upper side and the lower side; when the pair of heating jackets (24) are closest to each other, the pair of heating jackets (24) abut against each other and the four connecting plates (42) close the four ventilation holes (241).

2. The probe holder for semiconductor inspection according to claim 1, wherein: a left and right driving support unit (20) is arranged on the base (10); the left and right driving support unit (20) comprises a left and right support seat (22); vertical connecting columns (23) are respectively formed at one ends of the lower end surfaces of the pair of heating sleeves (24) close to each other; the vertical connecting column (23) is vertically arranged on the left and right supporting seats (22) on the corresponding side in a telescopic manner; a pair of left and right support seats (22) are arranged on the upper end surface of the base (10) in a left-right movement mode.

3. The probe holder for semiconductor inspection according to claim 2, wherein: a pair of left and right moving grooves (100) which are arranged in a left and right symmetrical mode and used for left and right moving of the left and right supporting seats (22) are formed on the upper end face of the base (10); a left and right driving threaded rod (21) is pivoted between the left and right side walls of the left and right moving groove (100); the lower ends of the left and right supporting seats (22) move left and right and are arranged in left and right moving grooves (100) on corresponding sides and are in threaded connection with left and right driving threaded rods (21) on corresponding sides; the outer side end of the left and right driving threaded rod (21) is formed with a right and left driving knob (211) with a regular hexagon shape.

4. The probe holder for semiconductor inspection according to claim 1, wherein: a lifting driving device (30) is arranged between the placing seat (40) and the base (10); the lifting driving device (30) is used for lifting the placing seat (40); the lifting driving device (30) comprises a pair of rectangular parallelepiped lifting seats (32) which are symmetrically arranged in front and back; a pair of lifting seats (32) is fixed in the middle of the upper end surface of the base (10); a lifting support plate (31) is formed at the center of the lower end face of the vertical support plate (41); a lifting guide groove matched with the lifting support plate (31) is formed on the upper end surface of the lifting seat (32); a pair of lifting guide grooves are respectively provided with a long hole-shaped inner lifting guide hole (3200) on the side wall close to each other and a long hole-shaped outer lifting guide hole (320) on the side wall far away from each other; a cylindrical connecting column (311) matched with the inner lifting guide hole (3200) is formed between the lower ends of the end surfaces, close to each other, of the pair of lifting support plates (31); a pair of limiting plates (34) which are symmetrically arranged front and back are arranged on the connecting column (311) in a back-and-forth movement manner; an avoiding groove (243) matched with the lifting support plate (31) is formed on the heating sleeve (24).

5. The probe holder for semiconductor inspection according to claim 4, wherein: damping layers are respectively formed on the end surfaces of the pair of limiting plates (34) far away from each other.

6. The probe holder for semiconductor inspection according to claim 4, wherein: a front and back driving threaded rod (33) is pivoted between the pair of lifting support plates (31); the front and back driving threaded rod (33) passes through the pair of inner lifting guide holes (3200) and the pair of outer lifting guide holes (320) in the front and back direction; the front end and the rear end of the part of the front and rear driving threaded rod (33) between the pair of lifting support plates (31) are respectively provided with external threads with opposite rotation directions; a pair of limit plates (34) are screwed on different external thread parts of the front and rear driving threaded rods (33); front and rear drive knobs (331) having a regular hexagonal shape are formed at the front and rear ends of the front and rear drive threaded rods (33), respectively.

Technical Field

The invention relates to the technical field of semiconductor detection, in particular to a probe seat for semiconductor detection, which can be opened and closed horizontally.

Background

As is known, a probe holder for semiconductor testing is an auxiliary device for positioning and clamping chips so as to detect the transmission condition of electronic signals and current between circuit boards, and thus to know whether the test chips work normally, so as to judge the quality of the chips, and is widely used in the field of semiconductor quality inspection; the existing probe seat for semiconductor test comprises a base, a support, a test seat and a placing plate, wherein the support is arranged at the top end of the base, the placing plate is arranged at the top end of the support, a fixing groove is formed in the middle of the top end of the placing plate, and the test seat is arranged on the inner bottom wall of the fixing groove; when the probe seat for testing the semiconductor is used, only a semiconductor chip is arranged on the test seat, and then the extra photosensitive lamp box or other components are pressed down to enable the pins of the semiconductor chip to be in contact with the contacts on the test seat, so that whether the test chip works normally is judged; when the probe seat for the semiconductor test is used, the height of the placing plate is fixed, the placing plate cannot be adjusted according to requirements, and the adaptability is poor; moreover, various types of chips may work at a higher temperature due to different purposes or heat generated during the operation of the chips, and the chips can only detect the condition of semiconductor chips working at normal temperature, so that the use limitation is high.

Disclosure of Invention

The invention aims to solve the technical problem that the conventional semiconductor detection device cannot detect the state under a high-temperature environment, and provides a probe seat for semiconductor detection, which is horizontally opened and closed.

The technical scheme for solving the technical problems is as follows: a probe seat for semiconductor detection, which can be opened and closed horizontally, comprises a base and a placing seat; the placing seat is arranged right above the base in a lifting manner; the placing seat comprises a pair of cuboid vertical supporting plates which are symmetrically arranged front and back; a pair of connection groups which are arranged in bilateral symmetry are formed between the mutually close end surfaces of the pair of vertical supporting plates; the connecting group comprises a pair of cuboid plate-shaped connecting plates which are arranged up and down symmetrically; a test seat is arranged between the centers of the pair of vertical supporting plates; the test seat is positioned between the pair of connection groups and between the connection plates on the upper side and the lower side; the left end and the right end of the placing seat are respectively sleeved with a heating sleeve in the left-right direction; the heating sleeve is a cuboid with a rectangular groove-shaped sleeving groove matched with the placing seat formed at the inner side end; one end of the upper side walls of the pair of sleeving grooves, which is close to each other, is formed with a rectangular groove-shaped detection jack which penetrates through the upper part and the lower part; one end of the upper side wall and the lower side wall of the sleeving groove, which are far away from the detection jack, is formed with a rectangular groove-shaped vent hole which penetrates through up and down; the centers of the inner side walls of the pair of sleeving grooves, which are far away from each other, are provided with electric heating rods; a pair of electric heating rods are positioned between the connecting plates on the upper side and the lower side; when the pair of heating sleeves are closest, the pair of heating sleeves abut against each other and the four connecting plates close the four air holes.

Preferably, the base is provided with a left-right driving support unit; the left and right driving support unit comprises a left and right support seat; vertical connecting columns are respectively formed at one ends of the lower end surfaces of the pair of heating sleeves, which are close to each other; the vertical connecting column is vertically and telescopically arranged on the left and right supporting seats on the corresponding side; a pair of left and right supporting seats are arranged on the upper end surface of the base in a left-right movement mode.

Preferably, a pair of left and right moving grooves which are arranged in a left and right symmetrical mode and used for left and right moving of the left and right supporting seats are formed on the upper end face of the base; a left driving threaded rod and a right driving threaded rod are pivoted between the left side wall and the right side wall of the left moving groove and the right moving groove; the lower ends of the left and right supporting seats move left and right and are arranged in left and right moving grooves on the corresponding sides and are in screwed connection with left and right driving threaded rods on the corresponding sides; the outer side end of the left and right driving threaded rod is formed with a right and left driving knob in a regular hexagon shape.

Preferably, a lifting driving device is arranged between the placing seat and the base; the lifting driving device is used for lifting the placing seat; the lifting driving device comprises a pair of cuboid lifting seats which are symmetrically arranged in front and back; the pair of lifting seats is fixed in the middle of the upper end face of the base; a lifting support plate is formed in the center of the lower end face of the vertical support plate; a lifting guide groove matched with the lifting support plate is formed on the upper end surface of the lifting seat; the side walls of the pair of lifting guide grooves, which are close to each other, are respectively formed with a long-hole-shaped inner lifting guide hole, and the side walls, which are far away from each other, are respectively formed with a long-hole-shaped outer lifting guide hole; a cylindrical connecting column matched with the inner lifting guide hole is formed between the lower ends of the end surfaces, close to each other, of the pair of lifting support plates; a pair of limiting plates which are symmetrically arranged front and back are arranged on the connecting column in a front-back movement manner; an avoiding groove matched with the lifting support plate is formed on the hot jacket.

Preferably, the damping layer is formed on each of the end surfaces of the pair of stopper plates remote from each other.

Preferably, a front-back driving threaded rod is pivoted between the pair of lifting support plates; the front and back driving threaded rod passes through the pair of inner lifting guide holes and the pair of outer lifting guide holes in the front and back directions; external threads with opposite rotation directions are respectively formed at the front end and the rear end of the part of the front and rear driving threaded rod between the pair of lifting support plates; the pair of limiting plates are in threaded connection with different external thread parts of the front and rear driving threaded rods; front and back drive knobs in regular hexagon shapes are respectively formed at the front end and the back end of the front and back drive threaded rod.

The invention has the beneficial effects that: the structure is simple, the detection of the semiconductor in a high-temperature environment is adapted, and the heat dissipation is fast after the detection.

Drawings

FIG. 1 is a front view of the present invention;

fig. 2 is a schematic structural view of a cross section of the present invention.

In the figure, 10, the base; 100. a groove is moved left and right; 20. a left and right driving support unit; 21. driving the threaded rod left and right; 211. a left and right drive knob; 22. a left support seat and a right support seat; 23. a vertical connecting column; 24. heating a jacket; 240. sleeving a groove; 241. air holes are formed; 242. detecting the jacks; 243. an avoidance groove; 25. an electrical heating rod; 30. a lift drive; 31. lifting the supporting plate; 311. connecting columns; 32. a lifting seat; 320. an outer lifting guide hole; 3200. an inner lifting guide hole; 33. driving the threaded rod back and forth; 331. a front and rear drive knob; 34. a limiting plate; 40. lifting the placing seat; 50. and (6) testing the seat.

Detailed Description

As shown in fig. 1 and 2, a probe holder for semiconductor test, which is opened and closed horizontally, comprises a base 10 and a placing seat 40; the placing seat 40 is arranged right above the base 10 in a lifting way; the placement base 40 includes a pair of rectangular parallelepiped vertical support plates 41 disposed symmetrically in the front-rear direction; a pair of left-right symmetrically arranged connecting groups are formed between the mutually close end surfaces of the pair of vertical supporting plates 41; the connecting group comprises a pair of rectangular plate-shaped connecting plates 42 which are arranged up and down symmetrically; a test socket 50 is arranged between the centers of the pair of vertical support plates 41; the test socket 50 is located between a pair of connection sets and between the connection plates 42 on the upper and lower sides; the left end and the right end of the placing seat 40 are respectively sleeved with the heating sleeves 24 in the left-right direction; the heating jacket 24 is a cuboid with a rectangular groove-shaped jacket groove 240 matched with the placing seat 40 formed at the inner side end; one end of the upper side wall of the pair of sleeving grooves 240, which is close to each other, is formed with a rectangular groove-shaped detection jack 242 which penetrates up and down; a rectangular groove-shaped air hole 241 which penetrates through the upper and lower side walls of the sleeving groove 240 is formed at one end, away from the detection jack 242, of the sleeving groove; the electric heating rod 25 is arranged at the center of the inner side walls of the pair of sleeving grooves 240 which are far away from each other; a pair of electric heating rods 25 are located between the upper and lower connection plates 42; when the pair of heating jackets 24 are closest to each other, the pair of heating jackets 24 abut against each other and the four connecting plates 42 close the four airing holes 241.

As shown in fig. 1 and 2, the base 10 is provided with a left and right driving support unit 20; the left and right driving supporting unit 20 includes left and right supporting seats 22; vertical connecting columns 23 are respectively formed at one ends of the lower end surfaces of the pair of heating sleeves 24 close to each other; the vertical connecting column 23 is vertically arranged on the left and right supporting seats 22 on the corresponding side in a telescopic manner; a pair of left and right support bases 22 are provided on the upper end surface of the base 10 so as to be movable in the left-right direction.

As shown in fig. 1 and 2, a pair of left and right moving grooves 100 for left and right moving of the left and right supporting seats 22 are formed on the upper end surface of the base 10; a left and right driving threaded rod 21 is pivoted between the left and right side walls of the left and right moving groove 100; the lower ends of the left and right supporting seats 22 move left and right and are arranged in left and right moving grooves 100 on the corresponding sides and are in threaded connection with left and right driving threaded rods 21 on the corresponding sides; a hexagonal right and left drive knob 211 is formed at the outer end of the right and left drive screw rod 21.

As shown in fig. 1 and 2, a lifting driving device 30 is arranged between the placing seat 40 and the base 10; the lifting driving device 30 is used for lifting the placing seat 40; the elevation driving device 30 includes a pair of rectangular parallelepiped elevation bases 32 disposed symmetrically in the front-rear direction; a pair of lifting seats 32 is fixed in the middle of the upper end surface of the base 10; a lifting support plate 31 is formed at the center of the lower end face of the vertical support plate 41; a lifting guide groove matched with the lifting support plate 31 is formed on the upper end surface of the lifting seat 32; a pair of lifting guide grooves are respectively formed with a long-hole-shaped inner lifting guide hole 3200 on the side wall close to each other and a long-hole-shaped outer lifting guide hole 320 on the side wall far away from each other; a cylindrical connection column 311 matched with the inner lifting guide hole 3200 is formed between the lower ends of the end surfaces of the pair of lifting support plates 31 close to each other; a pair of limiting plates 34 which are symmetrically arranged front and back are arranged on the connecting column 311 in a front-and-back movement manner; the thermal cover 24 is formed with an escape groove 243 to be engaged with the elevation support plate 31.

As shown in fig. 2, damping layers are formed on the end surfaces of the pair of stopper plates 34 that are away from each other.

As shown in fig. 1 and 2, a front and rear driving threaded rod 33 is pivoted between the pair of lifting support plates 31; the front and rear driving threaded rod 33 passes through the pair of inner elevation guide holes 3200 and the pair of outer elevation guide holes 320 in the front and rear direction; external threads with opposite rotation directions are respectively formed at the front end and the rear end of the part of the front and rear driving threaded rod 33 between the pair of lifting support plates 31; a pair of stopper plates 34 screwed to different male screw portions of the front and rear drive screw rods 33; front and rear drive knobs 331 having a regular hexagonal shape are formed at front and rear ends of the front and rear drive threaded rod 33, respectively.

The working principle of the probe seat for semiconductor detection which is horizontally opened and closed;

in normal operation, as shown in fig. 1 and 2, when the pair of heating jackets 24 are closest to each other, the pair of heating jackets 24 abut against each other and the four connecting plates 42 close the four ventilation holes 241; the pair of electric heating rods 25 generate heat, so that the temperature of the internal spaces of the pair of heating jackets 24 and the placing seat 40 is raised, then the semiconductor enters from the pair of detection jacks 242 and is placed on the test seat 50, then the pressing block enters from the pair of detection jacks 242, so that the semiconductor is pressed against the test seat 50 for detection, and the pressing block blocks the pair of detection jacks 242, so that the temperature of the internal spaces of the pair of heating jackets 24 and the placing seat 40 is quickly raised to a proper temperature, and the detection efficiency of the high-temperature state of the semiconductor is high;

when detection is not needed, the pressing block is separated from the detection jack 242, the semiconductor is taken out, then the pair of heating sleeves 24 are far away from each other, and gaps between the four air holes 241 and the four connecting plates 42 are opened, so that quick heat dissipation is facilitated, and the subsequent detection environments with different temperatures are conveniently improved.

The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description herein, since various changes and modifications can be made in the details of the embodiment and the application range according to the spirit of the present invention.