Optical lens with laser-induced periodic surface microstructure
阅读说明:本技术 具有激光诱发周期表面微结构的光学镜片 (Optical lens with laser-induced periodic surface microstructure ) 是由 吴昇澈 吴平田 蔡彦彬 于 2019-04-18 设计创作,主要内容包括:一种具有激光诱发周期表面微结构的光学镜片,包含:一光学镜片,为一体材质,并具有一表面及相反面之一曲面,并以激光诱发光学镜片的曲面,使光学镜片的曲面形成一激光诱发周期表面微结构,激光诱发周期表面微结构的结构排列及结构尺寸,结构排列为多个结构体呈现周期性排列,结构尺寸为各结构体之间隔在50nm~1000nm及高度在50nm~500nm。(An optical lens having a laser-induced periodic surface microstructure, comprising: an optical lens, which is a unitary material and has a surface and a curved surface opposite to the surface, and the curved surface of the optical lens is induced by laser to form a laser-induced periodic surface microstructure on the curved surface of the optical lens, the structure arrangement and the structure size of the laser-induced periodic surface microstructure are that a plurality of structures are arranged periodically, and the structure size is that the interval of each structure is 50 nm-1000 nm and the height is 50 nm-500 nm.)
1. An optical lens having a laser-induced periodic surface microstructure, comprising:
an optical lens, which is a unitary material and has a surface and a curved surface of the opposite surface, and the curved surface of the optical lens is induced by laser, so that the curved surface of the optical lens forms a laser-induced periodic surface microstructure, the structure arrangement and the structure size of the laser-induced periodic surface microstructure are that a plurality of structures are arranged periodically, and the structure size is that the interval of each structure is 50 nm-1000 nm and the height is 50 nm-500 nm.
2. The optical lens with a laser-induced periodic surface microstructure according to claim 1, wherein the optical lens is made of one of glass or polymer material.
3. The optical lens according to claim 1, wherein the structure is a cone having a cross-sectional area gradually decreasing from bottom to top.
4. The optical lens with a laser-induced periodic surface microstructure according to claim 1, wherein the structure is a moth-eye body, and the cross-sectional area of the moth-eye body gradually decreases from bottom to top.
5. The optical lens according to claim 1, further comprising at least one film coated on the curved surface of the optical lens, wherein the refractive index of the film material is matched to the refractive index of the optical lens material.
6. The optical lens according to claim 5, wherein the film is made of one of metal, semiconductor or dielectric.
7. The optical lens having a laser-induced periodic surface microstructure according to claim 5, wherein the film has a thickness of 20nm to 500 nm.
8. The optical lens according to claim 1, further comprising laser parameters of a laser device, the laser parameters including a laser pulse width parameter, a wavelength parameter, a focus range parameter, a laser repetition frequency parameter, a scan speed parameter, and an energy density parameter, and the laser parameters being adjustable to control the structural arrangement and the structural dimensions of the laser-induced periodic surface microstructure.
9. The optical lens with a laser-induced periodic surface microstructure according to claim 8, wherein the laser pulse width parameter is 1fs to 100ps, the wavelength parameter is 300nm to 1500nm, the focusing range parameter is 1 μm to 500 μm, the laser repetition frequency parameter is 1Hz to 10MHz, the scanning speed parameter is 40 μm/s to 5m/s, and the energy density parameter is 0.01J/cm2~50J/cm2。
10. The optical lens with a laser-induced periodic surface microstructure according to claim 8, wherein the laser pulse width parameter is 20fs to 2000fs, the wavelength parameter is 300nm to 1500nm, the focusing range parameter is 1 μm to 500 μm, the laser repetition frequency parameter is 1Hz to 3MHz, the scanning speed parameter is 40 μm/s to 5m/s, and the energy density parameter is50mJ/cm2~3000mJ/cm2。
11. The optical lens according to claim 8, wherein the optical lens is a glass material, the laser pulse width parameter is 100fs, the wavelength parameter is 800nm, the focusing range parameter is 80 μm, the laser repetition frequency parameter is 62Hz, the scanning speed parameter is 160 μm/s, and the fluence parameter is 995mJ/cm2。
12. The optical lens of claim 8, further comprising at least one thin film coated on the curved surface of the optical lens, wherein the refractive index of the thin film is matched with the refractive index of the optical lens, the thickness of the thin film is 180nm, the laser pulse width parameter is 100fs, the wavelength parameter is 800nm, the focusing range parameter is 15 μm, the laser repetition frequency parameter is 2000Hz, the scanning speed parameter is 40 μm/s, and the energy density parameter is 190mJ/cm2~230mJ/cm2。
Technical Field
The invention relates to an optical lens with a laser-induced periodic surface microstructure, in particular to an optical lens which has an approximately periodic microstructure on a curved surface of the optical lens, so that the optical lens has the effects of hydrophobicity, hydrophilicity, reduction of the reflectivity of light rays incident to the curved surface of the optical lens and the like, and the microstructure is generated by using ultrafast laser to irradiate the curved surface of the optical lens or a film of the curved surface of the optical lens.
Background
The adhesion material is formed on the surface of the optical lens, and the micro-nano structure is manufactured on the adhesion material, generally, the adhesion material is photosensitive, high molecular, or low hardness and other materials which are easy to process, and different from the material of the adhered optical lens, the practical problem is that the refractive index of the optical lens and the adhesion material is different, and when light passes through the interface, the Fresnel loss principle causes the penetrating energy loss and increases the unnecessary reflected light.
Secondly, regarding the manufacturing of the micro-nano structure, generally, the technology including lithography, etching and the like is applied, and the steps include 1. coating the light resistance on the curved surface; 2. performing a lithography pattern on the photoresist; 3. the photoresist layer is etched. Problems with this method implementation include: 1. coating the photoresist on the curved surface uniformly; 2. a photomask is required to be manufactured, and accurate micro-lithography on a curved surface is difficult to perform; 3. when etching is performed on a curved surface, uniformity control is difficult. For the curved surface, there is also proposed a method of dry etching the glass surface by introducing a reactive gas using a vacuum plasma apparatus and then performing mixed physical and chemical etching on the substrate by controlling the plasma intensity, the kind and the content of the gas. Although the method is applied to a curved surface, the larger the curvature of the lens is, the larger the difference of etching characteristics from the top point to the edge is, and meanwhile, the arrangement of the micro-nano structures is random and the sizes are inconsistent, so that the micro-nano structures on the lens are not uniformly distributed, and the optical function is unstable. In summary, although the photolithography and etching method can be used to fabricate the micro-nano structure on a planar substrate, the process is complicated and it is very difficult to implement the micro-nano structure on a curved surface.
Disclosure of Invention
Therefore, the primary objective of the present invention is to provide an optical lens with a laser-induced periodic surface microstructure, which can generate a nearly periodic microstructure on the surface of the irradiated object by the energy and polarization direction characteristics of the incident laser beam, and the processing characteristics can be controlled in practice. The surface structure of the processed object has the periodic characteristics close to or smaller than the laser wavelength, and the functional microstructure can be manufactured on a large-area curved surface by matching with parameters such as laser focusing, pulse number, scanning speed, scanning path and the like.
It is another object of the present invention to provide an optical lens with a laser-induced periodic surface microstructure, wherein the ultrafast laser pulse time is 10-15Second order or shorter lasers.
The optical lens with the laser-induced periodic surface microstructure comprises an optical lens, a first lens body and a second lens body, wherein the optical lens is made of an integral material and is provided with a curved surface of one surface and the opposite surface, the curved surface of the optical lens is induced by laser, so that the curved surface of the optical lens forms the laser-induced periodic surface microstructure, the structural arrangement and the structural size of the laser-induced periodic surface microstructure can be controlled, the structural arrangement is that a plurality of structural bodies are arranged periodically, and the structural size is that the interval of each structural body is 50 nm-1000 nm and the height is 50 nm-500 nm.
The optical lens is made of one of glass or polymer material.
The structural body is a cone, and the cross section area of the cone is gradually reduced from the bottom to the top.
The structure is a moth-eye body, and the cross-sectional area of the moth-eye body gradually decreases from the bottom to the top.
The optical lens further comprises at least one layer of film which is covered on the curved surface of the optical lens, and the refractive index of the film material is matched with that of the optical lens material.
The film is made of one of metal, semiconductor or dielectric.
The film thickness of the thin film is 20nm to 500 nm.
The laser device further comprises laser parameters of the laser device, wherein the laser parameters comprise a laser pulse width parameter, a wavelength parameter, a focusing range parameter, a laser repetition frequency parameter, a scanning speed parameter and an energy density parameter, and the laser parameters can be adjusted to control the structural arrangement and the structural size of the laser-induced periodic surface microstructure.
The laser pulse width parameter is 1 fs-100 ps, the wavelength parameter is 300 nm-1500 nm, the focusing range parameter is 1 mu m-500 mu m, the laser repetition frequency parameter is 1 Hz-10 MHz, the scanning speed parameter is 40 mu m/s-5 m/s, and the energy density parameter is 0.01J/cm2~50J/cm2。
The laser pulse width parameter is 20 fs-2000 fs, the wavelength parameter is 300 nm-1500 nm, the laser pulse width parameter isThe parameter of the focusing range is 1-500 μm, the parameter of the laser repetition frequency is 1 Hz-3 MHz, the parameter of the scanning speed is 40-5 m/s, and the parameter of the energy density is 50mJ/cm2~3000mJ/cm2。
The optical lens is made of glass material, and has a laser pulse width parameter of 100fs, a wavelength parameter of 800nm, a focusing range parameter of 80 μm, a laser repetition frequency parameter of 62Hz, a scanning speed parameter of 160 μm/s, and an energy density parameter of 995mJ/cm2。
Further comprises at least one layer of film coated on the curved surface of the optical lens, wherein the refractive index of the film material is matched with that of the optical lens material, the film is made of Indium Tin Oxide (ITO) and has a thickness of 180nm, and the laser pulse width parameter is 100fs, the wavelength parameter is 800nm, the focusing range parameter is 15 μm, the laser repetition frequency parameter is 2000Hz, the scanning speed parameter is 40 μm/s, and the energy density parameter is 190mJ/cm2~230mJ/cm2。
The curved surface of the optical lens is irradiated by ultrafast laser to generate an approximately periodic microstructure, or one or more layers of films are coated on the curved surface of the optical lens, wherein the films can be made of metal, semiconductor or dielectric substance, and then the films are irradiated by ultrafast laser to generate an approximately periodic microstructure. By means of proper laser processing parameters, the shape and interval of the microstructure can be controlled, the functions of hydrophilicity, hydrophobicity or reflectivity reduction are met, and large-area and curved surfaces can be realized by matching with scanning irradiation, and the nano structure can be rapidly manufactured.
Drawings
FIG. 1 is a flow chart of the present invention.
Fig. 2A is a schematic diagram of a laser device of the present invention inducing a curved surface of an optical lens.
FIG. 2B is a partial schematic view of a laser-induced periodic surface microstructure of the present invention.
FIG. 2C is another partial schematic view of a laser-induced periodic surface microstructure of the present invention.
FIG. 2D is a top view of an electron microscope of a laser-induced periodic surface microstructure of the present invention.
FIG. 2E is a graph of reflectivity of a laser-induced periodic surface microstructure of the present invention.
Fig. 3A is a schematic diagram of a laser device inducing a curvature of an optical lens according to another preferred embodiment of the invention.
FIG. 3B is a partial schematic view of a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3C is another partial schematic view of a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3D is a top view of an electron microscope with a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3E is a top view of another electron microscope with a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3F is a top view of another electron microscope with a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3G is a top view of a further electron microscope with a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
FIG. 3H is a graph of reflectivity of a laser-induced periodic surface microstructure according to another preferred embodiment of the invention.
List of reference numerals: a step a to a step c; 10-an optical lens; 101-a surface; 102-curved surface; 11-a film; 20-a laser device; 21-laser parameters; 211-laser pulse width parameter; 212-wavelength parameters; 213-focus range parameter; 214-laser repetition frequency parameter; 215-scan speed parameter; 216-energy density parameter; 30-laser induced periodic surface microstructure; 301-bottom; 302-top; 31-a structure; d-spacing; h-height; b-a substrate; an L-laser.
Detailed Description
First, referring to the flowchart shown in fig. 1, the optical lens with a laser-induced periodic surface microstructure according to the present invention comprises the following steps: a) manufacturing an
The
In one preferred embodiment, the laser
Further, the
As shown in fig. 2D, the topography of the laser-induced
Further, at least one
As shown in FIGS. 3D, 3E, 3F and 3G, the polarization of the laser light is horizontal, and the energy density parameter at different laser light is 223mJ/cm2、212mJ/cm2、202mJ/cm2、191mJ/cm2After scanning, the appearance of the laser-induced
In the first and second embodiments, the cone can control the size to make the external water drop or dirt contact the
With this structure, the
1. the laser-induced
2. If one or
3. The traditional process for manufacturing the microstructure is difficult to implement on a curved surface. The laser (L) can be used to directly process the large-area approximately periodic microstructure on the curved surface by means of scanning path planning, adjusting the focusing position, etc.
4. The traditional micro-lithography process needs to go through mask making, micro-lithography and etching, and each stage needs to properly control the quality to satisfy the shape of the final micro-nano structure, so the manufacturing process is complicated. The laser processing can directly control the shape of the microstructure of the processed finished product by the laser processing parameters, chemical agents such as photoresistance, etching solution and the like are not needed, waste is hardly generated, and the processing is simple and environment-friendly.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
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