Magnetic suspension motor and control method thereof
阅读说明:本技术 磁浮电机及其控制方法 (Magnetic suspension motor and control method thereof ) 是由 丛国栋 于 2019-04-17 设计创作,主要内容包括:本发明提供了一种磁浮电机及其控制方法,磁钢阵列模块上具有至少两个线圈模块,每个所述线圈模块均包括至少6个呈矩阵分布的发力体,控制模块实时识别两个线圈模块所处的工况并根据所述线圈模块所处的工况控制其发力体的通电和断电并切换所述线圈模块的工作模式,能够在有限的面积下使至少6个呈矩阵分布的发力体同时使用,在需要时增加所述线圈模块运动的加速度,并且不需要将磁钢阵列模块的尺寸做的足够大。(The invention provides a magnetic suspension motor and a control method thereof, wherein a magnetic steel array module is provided with at least two coil modules, each coil module comprises at least 6 force generators distributed in a matrix, the control module identifies the working condition of the two coil modules in real time, controls the power on and off of the force generators according to the working condition of the coil modules and switches the working mode of the coil modules, so that the at least 6 force generators distributed in the matrix can be used at the same time in a limited area, the acceleration of the movement of the coil modules is increased when needed, and the size of the magnetic steel array module does not need to be made large enough.)
1. A magnetic levitation motor, comprising:
the magnetic steel array module is used for generating a magnetic field;
the coil modules are positioned on the magnetic steel array module and can move in a plane parallel to the magnetic steel array module, and each coil module comprises at least 6 force generators distributed in a matrix;
and the control module is connected with each coil module and is used for controlling the electrification and the outage of each power generating body in the coil module and switching the working mode of the coil module.
2. A magnetic levitation motor as recited in claim 1, wherein the force generating body in the coil module comprises a plurality of coils arranged in parallel along a same direction, wherein the coil arrangement direction of two adjacent force generating bodies is perpendicular.
3. A method of controlling a magnetic levitation motor as recited in claim 1 or 2, wherein the total number of forcers per row in the coil module is less than the total number of forcers per column.
4. A magnetic levitation motor as recited in claim 2, wherein the coil module has K force generators therein, K being an even number greater than or equal to 6;
when K is a multiple of 3, the distance D between the centers of the two force generators in the coil arrangement direction in the coil module, which are the same as each other in the coil arrangement direction, in the coil arrangement direction satisfies the following formula:
when K is not a multiple of 3, the distance D between the centers of the two force generators in the coil arrangement direction in the coil module, which are the same as the coil arrangement direction, in the coil arrangement direction thereof satisfies the following formula:
wherein n is any positive integer, and τ is the magnetic pole pitch of the magnetic steel array module.
5. A magnetic levitation motor as recited in claim 1, wherein each of said coil modules comprises a support base, said force generator being disposed within said support base.
6. The magnetic levitation motor of claim 1, wherein a sum of width dimensions of all the coil modules on the magnetic steel array module in a row direction is smaller than a width dimension of the magnetic steel array module in the row direction; the width dimension of one coil module in the column direction is smaller than the width dimension of the magnetic steel array module in the column direction, and the sum of the width dimensions of the two coil modules in the column direction is larger than the width dimension of the magnetic steel array module in the column direction.
7. A method of controlling a magnetic levitation motor as recited in any one of claims 1-6, comprising:
the control module identifies the working condition of the coil module in real time;
the control module controls the power-on and power-off of the force generating body of the coil module according to the working condition of the coil module and switches the working mode of the coil module.
8. The method of claim 7, wherein the operation modes of the coil module include a less-coil operation mode and a full-coil operation mode, in the less-coil operation mode, the control module controls at least one of the power generators of the coil module to be powered off and the power generators of the remaining rows to be powered on, and in the full-coil operation mode, the control module controls all the power generators of the coil module to be powered on.
9. The method of claim 8, wherein the coil module is in a measurement alignment mode when the coil module moves within the magnetic steel array module, the control module controls the coil module to be in a full coil mode, and the coil module is in a position switching mode when the coil module moves to switch positions, the control module controls a power generator suspended outside the magnetic steel array module to be powered off and controls the coil module to be in a less coil mode.
10. A method for controlling a magnetic levitation motor as recited in claim 8 or 9, wherein in the less-coil operation mode, the control module controls the same number and same position of the force generators to be powered off each time for the same coil module.
Technical Field
The invention relates to the technical field of semiconductor preparation, in particular to a magnetic suspension motor and a control method thereof.
Background
In a workpiece stage and a mask stage of a lithography machine, a long-stroke linear motor is usually combined with a short-stroke voice coil motor, and an air bearing is selected to realize high-speed and high-precision positioning. However, in this structure, in order to obtain multiple degrees of freedom of movement, multiple linear motors are often required to be stacked. The structural scheme not only increases the complexity of the whole system and reduces the mode, but also increases the load of the bottom layer linear motor, so that the positioning precision, the control bandwidth and the movement speed of the movement table are greatly reduced. In addition, when the moving stroke needs to be increased, the manufacturing cost of the air floatation linear guide rail is not only increased geometrically, but also is more difficult, and the manufacturing cost becomes a development bottleneck of manufacturing large-size wafers.
In order to solve the problems, a magnetic suspension motor, which is a motor with a novel structure, is provided. The electromagnetic force generating device is based on the Lorentz force principle, directly applies the generated electromagnetic force to a workpiece table, and can provide multi-axis motion simultaneously. The magnetic suspension motor generally comprises two parts, namely a magnetic steel array module and a coil unit module, and magnetic steel array units in the magnetic steel array module are arranged alternately, so that the magnetic suspension motor is very convenient to expand and effectively solves the technical bottleneck of large-stroke design. And the constraint on the motion surface type is reduced through the magnetic levitation technology, the working process is free of contact abrasion, and the device is very suitable for the requirements of large stroke, vacuum, ultra-clean and ultra-precise positioning.
The coil unit module of current magnetic levitation motor has 4 to send out the acceleration that the power body provided the removal usually, and total acceleration is less, just need increase the quantity of sending out the power body in order to increase total acceleration, but because magnet steel array module width size can't accomplish very greatly in the direction of being listed as, be limited to the restraint of size and overall arrangement, the area of current magnet steel array module can't satisfy 6 and the more than sending out the power body and use simultaneously.
Disclosure of Invention
The invention aims to provide a magnetic suspension motor and a control method thereof, which can meet the requirement that 6 or more force generators are used simultaneously under the condition that the width size of a magnetic steel array module in the row direction is limited.
In order to achieve the above object, the present invention provides a magnetic levitation motor, comprising:
the magnetic steel array module is used for generating a magnetic field;
the coil modules are positioned on the magnetic steel array module and can move in a plane parallel to the magnetic steel array module, and each coil module comprises at least 6 force generators distributed in a matrix;
and the control module is connected with each coil module and is used for controlling the electrification and the outage of each power generating body in the coil module and switching the working mode of the coil module.
Optionally, the force generating body in the coil module includes a plurality of coils arranged in parallel along the same direction, and the coil arrangement directions of two adjacent force generating bodies are perpendicular.
Optionally, the total number of the hair-force bodies in each row in the coil module is less than the total number of the hair-force bodies in each column.
Optionally, the coil module has K force generators, where K is an even number greater than or equal to 6;
when K is a multiple of 3, the distance D between the centers of the two force generators in the coil arrangement direction in the coil module, which are the same as each other in the coil arrangement direction, in the coil arrangement direction satisfies the following formula:
when K is not a multiple of 3, the distance D between the centers of the two force generators in the coil arrangement direction in the coil module, which are the same as the coil arrangement direction, in the coil arrangement direction thereof satisfies the following formula:
wherein n is any positive integer, and τ is the magnetic pole pitch of the magnetic steel array module.
Optionally, each coil module includes a support seat, and the force generator is disposed in the support seat.
Optionally, the sum of the width dimensions of the coil modules on the magnetic steel array module in the row direction is smaller than the width dimension of the magnetic steel array module in the row direction; the width dimension of one coil module in the column direction is smaller than the width dimension of the magnetic steel array module in the column direction, and the sum of the width dimensions of the two coil modules in the column direction is larger than the width dimension of the magnetic steel array module in the column direction.
The invention also provides a control method of the magnetic suspension motor, which comprises the following steps:
the control module identifies the working condition of the coil module in real time;
the control module controls the power-on and power-off of the force generating body of the coil module according to the working condition of the coil module and switches the working mode of the coil module.
Optionally, the working modes of the coil module include a few-coil working mode and a full-coil working mode, in the few-coil working mode, the control module controls at least one line of the force generating bodies of the coil module to be powered off, and the force generating bodies in the remaining lines to be powered on, and in the full-coil working mode, the control module controls all the force generating bodies of the coil module to be powered on.
Optionally, when the coil module is in the magnetic steel array module moves, the coil module is in a measurement alignment working condition, the control module controls the coil module to be in a full-coil working mode, and when the coil module moves to switch positions, the coil module is in a position switching working condition, and the control module controls a force generating body suspended outside the magnetic steel array module to be powered off and controls the coil module to be in a less-coil working mode.
Optionally, in the less-coil operating mode, for the same coil module, the control module controls the power-off of the force generators in the same number and the same position each time.
In the magnetic suspension motor and the control method thereof provided by the invention, the magnetic steel array module is provided with at least two coil modules, each coil module comprises at least 6 power generating bodies distributed in a matrix, the control module identifies the working condition of the two coil modules in real time, controls the power on and off of the power generating bodies according to the working condition of the coil modules and switches the working mode of the coil modules, so that the at least 6 power generating bodies distributed in the matrix can be used at the same time in a limited area, the acceleration of the movement of the coil modules is increased when needed, and the size of the magnetic steel array module does not need to be made large enough.
Drawings
Fig. 1 is a schematic cross-sectional view of a coil module according to an embodiment of the present invention;
fig. 2 is a top view of a coil module provided in an embodiment of the present invention;
fig. 3 is a schematic plan view of a magnetic levitation motor according to an embodiment of the present invention;
fig. 4-8 are diagrams illustrating control steps of a magnetic levitation motor according to an embodiment of the present invention;
wherein the reference numerals are:
1-a magnetic steel array module; 2-a coil module; 21 a-a first coil module; 21 b-a second coil module; 211-hair force body; 212-support seat.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. Advantages and features of the present invention will become apparent from the following description and claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
For convenience of description, an XYZ three-dimensional coordinate system is established herein with a direction X (column direction) downward parallel to the paper, a direction Y (row direction) leftward on the paper, and a direction Z outward perpendicular to the paper. As shown in fig. 1-3, the present embodiment provides a magnetic levitation motor, which includes a magnetic steel array module 1, a control module, and at least two coil modules 2, where the magnetic steel array module 1 is configured to generate a magnetic field, at least two of the coil modules 2 are suspended above the magnetic steel array module 1, each of the coil modules 2 includes a
Specifically, as shown in fig. 2 and 3, in this embodiment, the magnetic steel array module 1 has two coil modules 2, each of the coil modules 2 has 6 force generators 211(XZ1, XZ2, XZ3, YZ1, YZ2, YZ3), each of the
It can be understood that, although the Z-direction force generated by each coil in each of the
wherein the content of the first and second substances,
TyXZ1、TyXZ2、TyXZ3、TxYZ1、TxYZ2、TxYZ3the pitch torques, Fx, generated by XZ1, XZ2, XZ3, YZ1, YZ2 and YZ3XZ1、FxXZ2、FxXZ3The X-direction force, Fy, generated by XZ1, XZ2 and XZ3 respectivelyYZ1、FyYZ2、FyYZ3Y-direction forces, Fz, generated by YZ1, YZ2, YZ3, respectivelyXZ1、FzXZ2、FzXZ3The Z-direction force, Fz, generated by XZ1, XZ2 and XZ3 respectivelyYZ1、FzYZ2、FzYZ3The Z-direction forces generated by YZ1, YZ2, YZ3, respectively.When all of the Δ X1, Δ X2, Δ Y1 and Δ Y2 satisfy the formula
Wherein D is Δ X1, Δ X2, Δ Y1 or Δ Y2, and n is any positive integer, then equation (1) is equivalent to:
tx and Ty are respectively distance torques in the X direction and the Y direction, and the magnetic suspension motor is in a state of uniform output at the moment, so that structural compensation of the distance torques is completed. That is, in the present embodiment, the distance D between the centers of the two
As can be obtained from the above manner, when the number K of the
Further, as shown in fig. 3, in this embodiment, the sum of the width dimensions of all the coil modules 2 in the Y direction of the magnetic steel array module 1 is smaller than the width dimension of the magnetic steel array module 1 in the Y direction, one of the width dimensions of the coil modules 2 in the X direction is smaller than the width dimension of the magnetic steel array module 1 in the X direction, so that the coil modules 2 can move and adjust positions in the X direction and the Y direction, and the sum of the width dimensions of the two coil modules 2 in the X direction is larger than the width dimension of the magnetic steel array module 1 in the X direction, so that the size of the magnetic steel array module 1 in the X direction can be made smaller, and the manufacturing cost of the magnetic steel array module 1 is reduced. Because the size of the magnetic steel array module 1 in the X direction is limited, when the two coil modules 2 move, the space of the magnetic steel array module 1 cannot be well utilized, and particularly, the exchange of the positions of the two coil modules 2 is difficult to realize. When two coil modules 2 are located in the magnetic steel array module 1 and only move within a fixed range (position exchange is not involved), the control module controls each force generating body in the coil modules 2 to be electrified and switches the working mode of the coil modules 2 to a full-coil working mode (6 force generating bodies work simultaneously), and when the two coil modules 2 need to switch positions, the control module controls at least one line of force generating bodies in the coil modules 2 to be powered off and switches the working mode of the coil modules 2 to at least the coil working mode (4 force generating bodies work simultaneously).
Based on this, the present embodiment further provides a control method of a magnetic levitation motor, including:
step S1: the control module identifies the working condition of the coil module in real time;
step S2: the control module controls the power-on and power-off of the force generating body of the coil module according to the working condition of the coil module and switches the working mode of the coil module.
Specifically, as shown in fig. 4 to 8, the magnetic levitation motor is used in a stage of a lithography machine to carry and move a substrate to be exposed.
As shown in fig. 4, the magnetic steel array module 1 has two stations, which are an exposure station and a measurement station, respectively, an exposure module and a measurement module are respectively disposed above the exposure station and the measurement station, the coil module is used for bearing a substrate, and when the coil module bears the substrate and is located at the exposure station or the measurement station, the exposure module and the measurement module perform exposure or measurement on the substrate. In this embodiment, the magnetic steel array module 1 is respectively provided with two coil modules 2, namely a
Further, after the substrates carried by the
It can be understood that, in this embodiment, since each of the
Further, as shown in fig. 6, when the
It can be understood that, in the few-coil operating mode, for the same coil module, the control module controls the power generators in the same number and the same position to be powered off each time, that is, the number and the positions of the power generators powered off and powered on in the few-coil operating mode of each coil module are fixed, and the control is simpler.
In summary, in the magnetic levitation motor and the control method thereof provided by the embodiments of the present invention, the magnetic steel array module is provided with at least two coil modules, each of the coil modules includes at least 6 force generators distributed in a matrix, the control module identifies the working conditions of the two coil modules in real time, controls the energization and the de-energization of the force generators according to the working conditions of the coil modules, and switches the working modes of the coil modules, so that at least 6 force generators distributed in a matrix can be used simultaneously in a limited area, the acceleration of the movement of the coil modules is increased when necessary, and the size of the magnetic steel array module does not need to be large enough.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
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