阅读说明：本技术 分光特性测定装置、分光特性测定方法和炉的控制方法 (Spectroscopic characteristic measurement device, spectroscopic characteristic measurement method, and furnace control method ) 是由 儿玉俊文 天野胜太 高桥幸雄 于 2019-03-01 设计创作，主要内容包括：本发明的一个实施方式的分光特性测定装置(1)具备：将对象物A的直线状区域所发出的光或者来自直线状区域的反射光作为分光信息获取的成像分光装置(4)；对包含直线状区域的对象物A的二维区域的图像进行拍摄的二维摄像装置(6)；以及基于通过二维摄像装置(6)拍摄的图像而决定成像分光装置(4)获取分光信息的范围的运算装置(7)。(A spectroscopic characteristic measurement device (1) according to one embodiment of the present invention includes: an image forming spectroscopic device (4) for acquiring light emitted from the linear region of the object (A) or reflected light from the linear region as spectroscopic information; a two-dimensional imaging device (6) for imaging a two-dimensional region of an object (A) including a linear region; and an arithmetic device (7) for determining the range of the imaging spectroscopic device (4) for acquiring spectroscopic information based on the image captured by the two-dimensional imaging device (6).)

1. A spectroscopic characteristic measurement device is provided with:

an imaging spectroscopic device that obtains light generated by a linear region of an object or reflected light from the linear region as spectroscopic information;

a two-dimensional imaging device that captures an image of a two-dimensional region of the object including the linear region; and

and an arithmetic device for determining a range within which the imaging spectroscopic device acquires the spectroscopic information, based on the image captured by the two-dimensional imaging device.

2. A spectroscopic characteristic measurement method comprising:

a step of obtaining light emitted from a linear region of an object or reflected light from the linear region as spectroscopic information using an imaging spectroscopic device;

a step of capturing an image of a two-dimensional region of the object including the linear region by using a two-dimensional imaging device; and

and determining a range in which the spectroscopic information is acquired by the imaging spectroscopic device, based on the image captured by the two-dimensional imaging device.

3. A method of controlling a furnace, comprising the steps of: the method for measuring spectral characteristics according to claim 2, wherein the combustion state of the furnace is measured by measuring the spectral information of the furnace, and the combustion state of the furnace is controlled based on the measured combustion state of the furnace.

Technical Field

The present invention relates to a spectroscopic characteristic measurement apparatus, a spectroscopic characteristic measurement method, and a furnace control method.

Background

As a means for quantifying the color characteristics of an object, a method of spectral measurement using an element such as a prism, a diffraction grating, or a variable filter is known. Further, imaging spectroscopy, which finely performs such spectroscopy on a subdivided region of an object, and even multispectral imaging methods have been developed based on various principles, and have recently come into market. Specifically, there are known a method in which a variable filter capable of continuously changing the transmission characteristics is embedded in an imaging system (see patent document 1) and a method in which filter membranes having different transmission characteristics are embedded in pixels of a surface sensor camera and a plurality of spectroscopic images are equivalently acquired at the same time (see non-patent document 1).

However, the method described in patent document 1 has the following problems: since the data acquisition timings differ for the respective wavelengths, the spectral characteristics of an object that is not temporally constant, such as a moving body, cannot be measured. Further, the method described in non-patent document 1 has a problem that the resolution of an image decreases when the number of observation wavelengths increases, and it is difficult to obtain a detailed spectral distribution over a wide range of an object.

In contrast, an imaging spectrometer has been proposed in which a diffraction grating and an area sensor camera are combined (see non-patent document 2). By using the imaging spectrometer described in non-patent document 2, detailed spectroscopic characteristics of a linear region of an object can be acquired. The imaging spectrometer described in non-patent document 2 can measure the resolution of measurement in a field of view in one direction, that is, the resolution and the wavelength resolution in the measurement wavelength range, with high resolution of 1000 or more, and is used for detailed inspection of the density and color of printed matter disclosed in patent document 2, and in recent years, for analysis of vegetation distribution in forests and nursery lands, and the like.

Patent document 1: japanese patent laid-open No. 2008-139062

Patent document 2: japanese patent laid-open publication No. 2000-356552

Non-patent document 1: ARGO, "spectral filter mounted hyperspectral camera", online, retrieval 1 month 15 days in 30 years, website < URL: https: html >/www.argocorp.com/cam/specific/IMEC/IMEC _ snapshot

Non-patent document 2: daitron, "imaging spectrometer," online, "30 years, 1 month, 15 days search, website < URL: http: // www.daitron.co.jp/products/category/? c ═ zoom & pk ═ 1942& sw ═ 1 >.

Disclosure of Invention

However, since the measurement field of view of the imaging spectrometer described in non-patent document 2 is 1 line (one-dimensional), it is difficult to match the position of an object with the measurement field of view when measuring the object in a large manufacturing apparatus, a manufacturing state, or the like from a distance. Specifically, when the object moves in a direction orthogonal to a one-dimensional linear direction which is a measurement field of view of the imaging spectrometer, the object immediately deviates from the measurement field of view, and measurement cannot be performed. In this way, when the object is separated from the measurement field of view of the imaging spectrometer, the measurement field of view of the imaging spectrometer and the position of the object need to be readjusted each time. In order to solve such a problem, it is conceivable to accurately position the object and the measurement device, but in actual use, the positional relationship between the measurement device and the object changes due to movement of the object, change in the fixed state of the measurement device, or the like, and it is difficult to stably measure the spectral characteristics of the object.

The present invention has been made in view of the above-described problems, and an object thereof is to provide a spectral characteristic measurement device and a spectral characteristic measurement method that can accurately correspond a position of an object to a measurement field of view and stably measure a spectral characteristic of the object even when a positional relationship with the object changes. Another object of the present invention is to provide a method for controlling a furnace, which can stably control the furnace to a desired state.

The spectral characteristic measurement device of the present invention is characterized by comprising: an imaging spectroscopic device that acquires light emitted from a linear region of an object or reflected light from the linear region as spectroscopic information; a two-dimensional imaging device that images a two-dimensional region of the object including the linear region; and an arithmetic device for deciding a range in which the imaging spectroscopic device acquires the spectroscopic information, based on an image captured by the two-dimensional imaging device.

The spectral characteristic measurement method of the present invention is characterized by including the steps of: a step of acquiring light emitted from a linear region of an object or reflected light from the linear region as spectroscopic information using an imaging spectroscopic device; a step of capturing an image of a 2-dimensional region of the object including the linear region by using a two-dimensional imaging device; and determining a range in which the spectroscopic information is acquired by the imaging spectroscopic device based on the image captured by the two-dimensional imaging device.

The method for controlling a furnace according to the present invention is characterized by comprising the steps of: measuring the spectroscopic information of the furnace by using the spectroscopic characteristic measurement method of the present invention to measure the combustion state of the furnace, and controlling the combustion state of the furnace based on the measured combustion state of the furnace.

According to the spectral characteristic measurement device and the spectral characteristic measurement method of the present invention, even when the positional relationship with the object changes, the position of the object and the measurement field of view can be accurately associated, and the spectral characteristic of the object can be stably measured. Further, according to the method for controlling a furnace of the present invention, the furnace can be stably controlled to a desired state.

Drawings

Fig. 1 is a schematic diagram showing a configuration of a spectroscopic characteristic measurement apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic diagram showing a relationship between the width of the measurement field of view of the imaging spectrometer and the width of the imaging field of view of the two-dimensional imaging device in the measurement field direction of the imaging spectrometer.

Fig. 3 is a diagram showing the intensity of the captured image of the two-dimensional imaging device and the spectral spectrum measured by the imaging spectrometer.

Fig. 4 is a diagram showing a captured image by the two-dimensional imaging device and spectral intensities measured by the imaging spectrometer.

Fig. 5 is a diagram showing a captured image by the two-dimensional imaging device and spectral intensities measured by the imaging spectrometer.

Detailed Description

Hereinafter, a configuration of a spectroscopic characteristic measurement apparatus according to an embodiment of the present invention will be described with reference to the drawings.

Fig. 1 is a schematic diagram showing a configuration of a spectroscopic characteristic measurement apparatus according to an embodiment of the present invention. Fig. 2 is a schematic diagram showing a relationship between the width of the measurement field of view of the imaging spectrometer 4 shown in fig. 1 and the width of the imaging field of view of the two-dimensional imaging device 6 in the measurement field of view direction of the imaging spectrometer 4. As shown in fig. 1, a spectroscopic characteristic measurement apparatus 1 according to an embodiment of the present invention is an apparatus for measuring spectroscopic characteristics (spectroscopic spectral intensity) of an object a such as a furnace or a laser welding portion, and is provided on a fixed plate 2 in this example. The spectroscopic characteristic measurement apparatus 1 includes an imaging lens 3, an imaging spectroscopic apparatus 4, an imaging lens 5, a two-dimensional imaging apparatus 6, and an arithmetic apparatus 7.

The imaging spectroscopic device 4 separates light emitted from a linear region (one-dimensional region) of the object a or reflected light from the linear region via the imaging lens 3 to obtain spectroscopic characteristics, and outputs the obtained spectroscopic characteristics to the display device 8.

The two-dimensional imaging device 6 is arranged to include the measurement field of view of the imaging spectrometer 4 in association with the distance to the object a. The two-dimensional imaging device 6 captures an image of a 2-dimensional region of the object a including the linear region where the imaging spectroscopic device 4 has acquired spectroscopic characteristics, via the imaging lens 5, and outputs the captured image to the display device 8. As shown in fig. 2, the width W2 of the imaging field of view of the two-dimensional imaging device 6 is preferably increased relative to the width W1 of the measurement field of view of the imaging spectrometer 4. This makes it possible to confirm the measurement field of view of the imaging spectrometer 4 completely from the captured image of the two-dimensional imaging device 6.

In this case, the imaging spectrometer 4 and the two-dimensional imaging device 6 are preferably arranged such that the measurement field of view direction of the imaging spectrometer 4 and the imaging direction of the two-dimensional imaging device 6 are parallel to the installation surface of the imaging spectrometer 4 and the two-dimensional imaging device 6, and the optical axis centers of the imaging spectrometer 4 and the two-dimensional imaging device 6 are preferably arranged to have the same height from the installation surface.

However, the optical axes of the imaging spectrometer 4 and the two-dimensional imaging device 6 are preferably as close as possible, and more preferably substantially the same. When the optical axes of the image forming spectrometer 4 and the two-dimensional imaging device 6 are displaced, it is difficult to obtain a correspondence relationship between a measurement field of view of the image forming spectrometer 4 and an imaging field of view of the two-dimensional imaging device 6, which will be described later. However, the correspondence between the measurement field of view of the imaging spectrometer 4 and the imaging field of view of the two-dimensional imaging device 6, which will be described later, may be corrected by the arithmetic device 7, which will be described later.

The arithmetic device 7 determines the range of the object a for which the imaging spectroscopic device 4 acquires two-dimensional information based on the captured image of the two-dimensional imaging device 6. The user may determine the range of the object a for acquiring the two-dimensional information based on the image output to the display device 8.

When the spectral characteristic of the object a is measured using the spectral characteristic measuring apparatus 1 having such a configuration, first, the measurement field of view of the imaging spectrometer 4 is associated with the captured image including the object a captured by the two-dimensional imaging device 6. Specifically, the user places a point light source having a known wavelength at the same position as the distance to the object a at one end of the measurement field of view of the image forming spectrometer 4, and marks the point light source by the two-dimensional imaging device 6. Next, the fixed plate 2 is moved so that the point light source reaches the other end of the measurement field of view of the imaging spectrometer 4, and the image of the point light source is marked by the two-dimensional imaging device 6. In this way, the positions of the images of the point light sources captured by the two-dimensional imaging device 6 when the images of the point light sources are located at the both ends of the measurement field of view of the imaging spectrometer 4 are marked. Accordingly, the width W1 of the measurement field of view of the imaging spectrometer 4 is determined, and the correspondence between the measurement field of view of the imaging spectrometer 4 and the imaging field of view of the two-dimensional imaging device 6 is clarified, so that even when the positional relationship between the spectroscopic characteristic measurement device 1 and the object a changes, the position of the object a can be accurately correlated with the measurement field of view, and the spectroscopic characteristic of the object a can be stably measured.

The point light source may be disposed at one end of the measurement field of the image splitter 4, marked by the two-dimensional image pickup device 6, and then moved to the other end of the measurement field of the image splitter 4 to correspond the measurement field of the image splitter 4 to the image pickup field of the two-dimensional image pickup device 6. Further, a plurality of point light sources may be prepared and arranged at both ends of the measurement field of view of the image forming spectrometer 4 to perform the above-described correspondence. The linear region of the object a is set within the measurement field of view of the imaging spectrometer 4, but may be the same width as the width W1 of the measurement field of view.

Next, the spectral characteristics of the object a are measured using the imaging spectrometer 4. The range of the measurement spectroscopic characteristics is determined by the arithmetic device 7 based on the captured image of the object a by the two-dimensional imaging device 6 and the width W1 of the measurement field of view of the imaging spectrometer 4. The present invention can be applied even when the object a itself emits light or when the object a reflects light from another light source. The spectral characteristics can be measured at substantially any point in the linear region, but may be measured over the entire linear region. That is, the one-dimensional spectral characteristics can be obtained by measuring the other end of the linear region at predetermined intervals for a predetermined time in order from the one end of the linear region. Further, a plurality of linear regions may be set as the two-dimensional spectral characteristics. The spectral characteristics can be measured at any wavelength. The wavelength may be 1 or more.

When the spectral characteristics are measured, the image captured by the two-dimensional imaging device 6 is periodically checked, and when the image position of the object a deviates from the straight line connecting the 2 points of the mark performed when the visual field is associated, the position of the fixed plate 2 is corrected so that the image of the object a is positioned on the straight line. Note that the spectral characteristics may be measured by combining the imaging spectrometer 4 and the two-dimensional imaging device 6 into the same optical system and changing the spectral characteristics, for example, by dividing a single optical axis by a half mirror or the like. In this case, the optical axes completely coincide with each other, and hence the correspondence between the two visual fields becomes more accurate.

Whether or not the position of the image of the object a deviates from the line connecting the 2 points marked when the field of view is associated can be determined by, for example, whether or not the spectral characteristic measured by the imaging spectrometer 4 is equal to or less than a predetermined threshold value. Specifically, the spectral intensity is equal to or lower than a predetermined threshold value. The correction of the position of the image of the object a may be performed by other means than the correction of the position of the fixed plate 2.

As described above, in the spectroscopic characteristic measurement apparatus 1 according to the embodiment of the present invention, in the measurement of spectroscopic characteristics using the imaging spectrometer 4, the two-dimensional imaging device 6 having the two-dimensional imaging field including the one-dimensional measurement field of the imaging spectrometer 4 is arranged in parallel and measured at the same time, and therefore, it is possible to detect the deviation of the measurement field of the object a as an image and correct the measurement field.

Accordingly, even when the positional relationship between the object a and the direction substantially perpendicular to the optical axis of the imaging spectrometer 4 changes, the position of the object a can be accurately associated with the measurement field of view, and the spectroscopic characteristics of the object a can be stably measured. Further, since the distance between the object a and the imaging spectrometer 4 is grasped and measured in advance, the spectroscopic characteristics of the object a can be measured stably regardless of the length of the distance to the object a. In this regard, it is particularly effective when the distance between the object a and the spectroscopic characteristic measurement device 1 is substantially 15m or more. Therefore, when the object a is a dangerous object such as a furnace, the spectral characteristics can be measured stably without being brought close to the object a, which is particularly preferable. The upper limit of the distance from the object a depends on the performance of the imaging spectrometer 4, the two-dimensional imaging device 6, and the imaging lenses 3 and 5 used in the spectroscopic characteristic measurement device 1. Therefore, it is actually 50m or less. In addition, since the object to be measured and the interfering object can be easily distinguished, the reliability of the measurement result can be improved.