阅读说明：本技术 探针的制造方法 (Method for manufacturing probe ) 是由 韦嘉茹 陈子扬 于 2019-12-16 设计创作，主要内容包括：本发明提供了一种探针的制造方法,包含：于板材形成凹陷部,以使板材具有相连的第一子板材、第二子板材以及第三子板材,第一子板材具有第一厚度,第二子板材具有第二厚度,第三子板才具有第三厚度。其中,凹陷部对应于第一子板材与第三子板材,或者凹陷部对应于第二子板材。然后,将板材固定于一机台之上,并利用雷射切割板材,以形成多个探针,其中,第一子板材形成探针的针尾,第二子板材形成探针的针身,第三子板材形成探针的针尖。探针的制造方法能有效率地从板材雷射切割出多个探针,以使生产成本降低。(The invention provides a method for manufacturing a probe, which comprises the following steps: forming a concave part on the plate so that the plate is provided with a first sub-plate, a second sub-plate and a third sub-plate which are connected, wherein the first sub-plate is provided with a first thickness, the second sub-plate is provided with a second thickness, and the third sub-plate is provided with a third thickness. The concave part corresponds to the first sub-plate and the third sub-plate, or the concave part corresponds to the second sub-plate. Then, the plate is fixed on a machine table, and the plate is cut by laser to form a plurality of probes, wherein the first sub-plate forms the tail of the probe, the second sub-plate forms the body of the probe, and the third sub-plate forms the tip of the probe. The method for manufacturing the probe can efficiently laser cut a plurality of probes from a plate material, so as to reduce the production cost.)

1. A method for manufacturing a probe, comprising:

forming at least one recess in a plate material, so that the plate material has a first sub-plate material, a second sub-plate material and a third sub-plate material connected to each other along a first direction, the first sub-plate material has a first thickness along a second direction, the second direction is perpendicular to the first direction, the second sub-plate material corresponds to the recess, the second sub-plate material has a second thickness along the second direction, the first thickness is greater than the second thickness, the second sub-plate material is located between the first sub-plate material and the third sub-plate material, the third sub-plate material has a third thickness along the second direction, and the third thickness is greater than the second thickness;

fixing the plate;

cutting the sheet material using a laser; and

forming a plurality of probes, wherein each probe comprises a needle tail formed by the first sub-plate, a needle body formed by the second sub-plate and a needle tip formed by the third sub-plate, the width of the needle body along a third direction is greater than the width of the needle tip along the third direction and the width of the needle tail along the third direction, and the third direction is perpendicular to the first direction and the second direction.

2. The method of claim 1, wherein forming the depression in the sheet material comprises:

covering a photoresist material on the plate;

wet etching the sheet material to remove a portion of the sheet material to form the recess in the sheet material; and

and removing the photoresist material.

3. The method of claim 1, wherein forming the depression in the sheet material comprises:

removing a portion of the sheet material with a mechanical cut to form the depression in the sheet material.

4. The method of manufacturing a probe according to claim 3, wherein the mechanical cutting is a milling cutter cutting.

5. The method of claim 1, wherein forming the depression in the sheet material comprises:

and sandblasting one surface of the plate to form the concave part on the plate.

6. The method of claim 5, wherein the width of the needle tail in the third direction is the same as the width of the needle tip in the third direction.

7. The method of manufacturing a probe according to claim 5, wherein the width of the needle tail in the third direction is different from the width of the needle tip in the third direction.

8. The method of claim 1, wherein cutting the plate using a laser comprises:

cutting the second sub-sheet of the sheet material in an arc using a laser.

9. The method of claim 1, wherein the sheet comprises a composite sheet formed of a core, an inner coating, and a protective layer.

10. The method of manufacturing a probe according to claim 1, wherein the depression is formed on both sides of the second sub-plate.

11. A method for manufacturing a probe, comprising:

forming a plurality of concave parts on a plate, so that the plate is provided with a first sub-plate, a second sub-plate and a third sub-plate which are connected along a first direction, the first sub-plate is provided with a first thickness along a second direction, the second direction is perpendicular to the first direction, the first sub-plate and the third sub-plate respectively correspond to the concave parts, the second sub-plate is provided with a second thickness along the second direction, the second thickness is larger than the first thickness, the second sub-plate is positioned between the first sub-plate and the third sub-plate, the third sub-plate is provided with a third thickness along the second direction, and the third thickness is smaller than the second thickness;

fixing the plate;

cutting the sheet material using a laser; and

forming a plurality of probes, wherein each probe comprises a needle tail formed by the first sub-plate, a needle body formed by the second sub-plate and a needle point formed by the third sub-plate.

12. The method of claim 11, wherein cutting the sheet material using a laser comprises cutting the second sub-sheet material of the sheet material using a laser in an arc.

13. The method of claim 11, wherein a width of the needle body in a third direction is equal to a width of the needle tip in the third direction and a width of the needle tail in the third direction, and the third direction is perpendicular to the first direction and the second direction.

14. The method of claim 11, wherein a width of the needle body along a third direction is smaller than a width of the needle tip and a width of the needle tail along the third direction, and the third direction is perpendicular to the first direction and the second direction.

15. The method of claim 11, wherein forming each of the recesses in the sheet of material comprises:

covering a photoresist material on the plate;

wet etching the plate material to remove a part of the plate material so as to form the plate material into the concave parts; and

and removing the photoresist material.

16. The method of claim 11, wherein forming each of the recesses in the sheet of material comprises:

and removing a part of the sheet material by mechanical cutting to form the sheet material into the concave parts.

17. The method of manufacturing a probe according to claim 16, wherein the mechanical cutting is a milling cutter cutting.

18. The method of claim 11, wherein forming each of the recesses in the sheet of material comprises:

and sandblasting one surface of the plate to form the concave parts on the plate.

19. The method of claim 11, wherein the sheet comprises a composite sheet formed of a core, an inner coating, and a protective layer.

20. The method of manufacturing a probe according to claim 11, wherein the concave portions are formed on both sides of the first sub-plate and both sides of the second sub-plate, respectively.

Technical Field

The invention relates to a method for manufacturing a probe.

Background

The probe card has the main function of directly contacting the probe with the bonding pad or bump on the object to be tested (such as the wafer, chip or die which is not packaged), and matching with the peripheral testing machine and software control to achieve the purpose of measurement, and further screening out the defective products. Usually, a test machine sends a test signal to an object to be tested through a probe card, and the object to be tested returns a test result signal to the test machine through the probe card for analysis.

Generally, a probe card has a probe head for holding a certain number of probes. During the test, the object to be tested is fixed on the test machine, and the probes simultaneously contact the object to be tested.

Disclosure of Invention

An object of the present invention is to provide a method for manufacturing a probe, which can efficiently laser-cut a plurality of probes from a plate material to reduce the production cost.

According to an embodiment of the present invention, a method for manufacturing a probe includes the steps of:

firstly, forming at least one sunken part on a plate, so that the plate is provided with a first sub-plate, a second sub-plate and a third sub-plate which are connected along a first direction, wherein the first sub-plate is provided with a first thickness along a second direction, the second direction is vertical to the first direction, the second sub-plate corresponds to the sunken part, the second sub-plate is provided with a second thickness along the second direction, the first thickness is greater than the second thickness, the second sub-plate is positioned between the first sub-plate and the third sub-plate, the third sub-plate is provided with a third thickness along the second direction, and the third thickness is greater than the second thickness;

fixing the plate;

cutting the plate material by using a laser; and

and forming a plurality of probes, wherein each probe comprises a needle tail formed by the first sub-plate, a needle body formed by the second sub-plate and a needle tip formed by the third sub-plate, the width of the needle body along the third direction is greater than the width of the needle tip along the third direction and the width of the needle tail along the third direction, and the third direction is perpendicular to the first direction and the second direction.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes:

covering a photoresist material on the plate;

wet etching the plate to remove a part of the plate so as to form a concave part on the plate; and

the photoresist material is removed.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes:

a portion of the sheet material is removed by mechanical cutting to form a depression in the sheet material.

In one or more embodiments of the present invention, the mechanical cutting is milling cutting.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes:

and (3) sand blasting is carried out on the surface of the plate, so that the plate is formed into a concave part.

In one or more embodiments of the present invention, the width of the needle tail along the third direction is the same as the width of the needle tip along the third direction.

In one or more embodiments of the present invention, the width of the needle tail along the third direction is different from the width of the needle tip along the third direction.

In one or more embodiments of the present invention, the step of cutting the plate using the laser includes:

cutting the second sub-sheet of the sheet in an arc using a laser.

In one or more embodiments of the present invention, the plate includes a composite plate formed by a core material, an inner coating layer and a protective layer.

In one or more embodiments of the present invention, the concave portions are formed on two sides of the second sub-plate.

According to another embodiment of the present invention, a method for manufacturing a probe includes the steps of:

firstly, forming a plurality of concave parts on a plate so that the plate is provided with a first sub-plate, a second sub-plate and a third sub-plate which are connected along a first direction, wherein the first sub-plate is provided with a first thickness along a second direction, the second direction is vertical to the first direction, the first sub-plate and the third sub-plate respectively correspond to the concave parts, the second sub-plate is provided with a second thickness along the second direction, the second thickness is greater than the first thickness, the second sub-plate is positioned between the first sub-plate and the third sub-plate, the third sub-plate is provided with a third thickness along the second direction, and the third thickness is less than the second thickness;

fixing the plate;

cutting the plate material by using a laser; and

and forming a plurality of probes, wherein each probe comprises a needle tail formed by the first sub-plate, a needle body formed by the second sub-plate and a needle point formed by the third sub-plate.

In one or more embodiments of the present invention, the step of cutting the plate using the laser includes:

cutting the second sub-sheet of the sheet in an arc using a laser.

In one or more embodiments of the present invention, the width of the needle body along the third direction is equal to the width of the needle tip along the third direction and the width of the needle tail along the third direction, and the third direction is perpendicular to the first direction and the second direction.

In one or more embodiments of the present invention, the width of the needle body along the third direction is smaller than the width of the needle tip along the third direction and the width of the needle tail along the third direction, and the third direction is perpendicular to the first direction and the second direction.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes:

covering a photoresist material on the plate;

wet etching the plate to remove a part of the plate so as to form each concave part on the plate; and

the photoresist material is removed.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes:

a portion of the sheet material is removed by mechanical cutting to form the depressions in the sheet material.

In one or more embodiments of the present invention, the mechanical cutting is milling cutting.

In one or more embodiments of the present invention, the step of forming the concave portion on the plate includes: and (3) sand blasting is carried out on the surface of the plate material, so that the plate material is formed into each concave part.

In one or more embodiments of the present invention, the plate includes a composite plate formed by a core material, an inner coating layer and a protective layer.

In one or more embodiments of the present invention, the recessed portions are respectively formed on two sides of the first sub-plate and two sides of the second sub-plate.

Compared with the prior art, the invention has the following advantages:

the user carries out laser cutting aiming at parts with different thicknesses on the plate, and can cut out a finished product from the plate by laser in a simple and convenient laser cutting mode to be used as the probe, and the user can more effectively cut out a plurality of finished products from the plate by laser by repeating the steps, so that the production of the probe becomes more efficient, and the cost is lower.

Drawings

The drawings are only for purposes of illustrating and explaining the present invention and are not to be construed as limiting the scope of the present invention. Wherein:

FIG. 1 is a flow chart showing a method for manufacturing a probe according to an embodiment of the invention.

Fig. 2 is a top view of the plate of fig. 1.

Fig. 3 is a perspective view illustrating the plate of fig. 1.

FIG. 4 is a perspective view showing a plurality of finished products laser-cut from the sheet of FIG. 3.

FIG. 5 is a top view of a plate according to another embodiment of the present invention.

Fig. 6 is a perspective view illustrating the plate of fig. 5.

FIG. 7 is a perspective view illustrating a plurality of finished products laser-cut from the sheet of FIG. 6.

Fig. 8 is a schematic perspective view illustrating a plate according to still another embodiment of the invention.

FIG. 9 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 8.

FIG. 10 is a flowchart illustrating a method of fabricating a probe according to an embodiment of the invention.

Fig. 11 is a top view showing the plate material of fig. 10.

Fig. 12 is a perspective view illustrating the plate of fig. 11.

FIG. 13 is a perspective view illustrating a plurality of finished products laser-cut from the sheet of FIG. 12.

FIG. 14 is a top view of a plate according to another embodiment of the present invention.

Fig. 15 is a perspective view illustrating the plate material of fig. 14.

FIG. 16 is a perspective view illustrating a plurality of finished products laser-cut from the sheet of FIG. 15.

Fig. 17 is a schematic perspective view illustrating a plate according to still another embodiment of the invention.

FIG. 18 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 17.

Fig. 19 is a schematic perspective view illustrating a plate according to another embodiment of the present invention.

FIG. 20 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 19.

Fig. 21 is a perspective view illustrating a plate according to yet another embodiment of the present invention.

FIG. 22 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 21.

Fig. 23 is a perspective view illustrating a plate according to still another embodiment of the present invention.

FIG. 24 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 23.

Fig. 25 is a schematic perspective view illustrating a plate according to still another embodiment of the present invention.

FIG. 26 is a perspective view showing a plurality of finished products laser cut from the sheet of FIG. 25.

The reference numbers illustrate:

210. 610, 710, 810, 910, 960, sheet material;

211. 611, 711, 811, 911, 961, a first sub-sheet material;

212. 612, 712, 812, 912, 962, a second sub-sheet;

213. 613, 713, 813, 913, 963, a third sub-sheet material;

250. 650, 750, 850, 950, 990, finished product;

251. 651, a stop structure;

252. 652, a needle body;

714. 814, 914, 964, a laser cutting path;

922. 972, core materials;

924. 974, inner coating layer;

926. 976, a protective layer;

d1, first direction;

d2, second direction;

d3, third direction;

p, a concave part;

r1, R1', first path;

r2, R2', second path;

r3, R3', third path;

r4, R4', fourth path;

r5, R5', fifth path;

TK1, first thickness;

TK2, second thickness;

TK3, third thickness;

SL1, a first specific length;

SL2, a second specific length;

s100, S500, and the method;

s110, S120, S130, S140, S150, S160, S510, S520, S530, S540 and steps.

Detailed Description

In the following description, for purposes of explanation, numerous implementation details are set forth in order to provide a thorough understanding of the various embodiments of the present invention. It should be understood, however, that these implementation details are not to be interpreted as limiting the invention. That is, in some embodiments of the invention, such implementation details are not necessary. In addition, some conventional structures and elements are shown in simplified schematic form in the drawings. And features of different embodiments may be applied interactively if possible to implement.

Referring to fig. 1, a flow chart of a method S100 for manufacturing a probe according to an embodiment of the invention is shown. As shown in fig. 1, the method S100 of the present embodiment includes the following steps (it should be understood that the steps mentioned in the present embodiment, except for the specific sequence, can be performed simultaneously or partially simultaneously, with the sequence being adjusted according to actual needs):

(1) a recess P is formed in the plate 210 (step S110). Please refer to fig. 2 to 3. Fig. 2 is a top view of the plate 210 of fig. 1. Fig. 3 is a perspective view illustrating the plate 210 of fig. 1. Specifically, as shown in fig. 2 to 3, the plate 210 forming the depression P has a first sub-plate 211 and a second sub-plate 212 connected along a first direction D1, the first sub-plate 211 has a first thickness TK1 along a second direction D2, the second direction D2 is perpendicular to the first direction D1, the second sub-plate 212 corresponds to the depression P and has a second thickness TK2 along a second direction D2, and the first thickness TK1 is greater than the second thickness TK 2. In other words, the first sub-sheet 211 of the sheet 210 is thicker than the second sub-sheet 212.

(2) The plate 210 is fixed on a machine (not shown) (step S120).

(3) The sheet 210 is laser cut, for example, a first sub-sheet 211 of the sheet 210 is laser cut along a first path R1 (step S130). In the present embodiment, as shown in fig. 2 to 3, the first path R1 is parallel to the first direction D1, and the first path R1 ends at the connection point of the first sub-plate 211 and the second sub-plate 212.

(4) The first specific length SL1 is laser cut between the first sub-sheet 211 and the second sub-sheet 212 along the second path R2 (step S140). In the present embodiment, as shown in fig. 2 to 3, the second path R2 is parallel to the third direction D3, and the third direction D3 is perpendicular to the first direction D1 and the second direction D2. Specifically, the second path R2 connects the first path R1. That is, the laser cut along the second path R2 may be substantially continuous with the laser cut of the first path R1.

(5) The second sub-sheet 212 of the sheet 210 is laser cut along the third path R3 (step S150). In the present embodiment, as shown in fig. 2 to 3, the third path R3 is parallel to the first direction D1 and is offset from the first path R1 by the first specific length SL 1. Specifically, the third path R3 connects to the second path R2. That is, the laser cutting along the third path R3 may be substantially continuous with the laser cutting along the second path R2, i.e., the laser cutting for the sheet material 210 may be performed continuously along the first path R1, the second path R2 and the third path R3.

In this embodiment, for the plate material 210 with different thicknesses, i.e., the first thickness TK1 and the second thickness TK2, the user can use the connected laser cutting paths, i.e., the corresponding first path R1, the second path R2 and the third path R3, to conveniently perform the laser cutting on the plate material 210.

Furthermore, as shown in fig. 2-3, the user can laser cut the sheet material 210 along the first path R1 ', the second path R2 ' and the third path R3 ' in the manner described above. It should be noted that the second path R2 and the second path R2 'are in opposite directions, and the length of the laser cut along the second path R2' may also be the first specific length SL1, but the invention is not limited thereto.

In practical applications, the step of forming the concave portion P on the plate 210 can adopt, but is not limited to, the following three non-laser cutting processing methods:

(1.1) first, a photoresist (not shown) is coated on the plate 210 at a position corresponding to the first sub-plate 211, and then the plate 210 is wet-etched. Due to the blocking of the photoresist, the portion of the first sub-plate 211 is not corroded by the etching solution. In contrast, the portion not covered by the photoresist, i.e. the portion corresponding to the second sub-plate 212, is etched by the etching solution, so that the plate 210 forms the recess P corresponding to the second sub-plate 212. Subsequently, the photoresist is removed.

(1.2) removing the portion of the plate material 210 corresponding to the position of the second sub-plate material 212 by mechanical cutting, so that the plate material 210 forms the concave portion P corresponding to the position of the second sub-plate material 212. Specifically, the mechanical cutting may be milling cutting, but the invention is not limited thereto.

(1.3) performing sand blasting on the surface of the plate material 210 corresponding to the second sub-plate material 212 to form a recessed portion P in the plate material 210 at a position corresponding to the second sub-plate material 212.

In summary, the processing method of non-laser cutting processes the plate 210 in the second direction D2, so that the plate 210 first presents the first sub-plate 211 and the second sub-plate 212 with different thicknesses, that is, the processing method of non-laser cutting processes the plate 210 in the second direction D2 of the probe to form the appearance requirement of the probe in the second direction D2 (i.e., to form the concave portion P), and the laser cutting processes the plate 210 in the first direction D1 and the third direction D3 to achieve the appearance requirement of the probe in the first direction D1 and the third direction D3, so that the invention can define and manufacture the three-dimensional product 250 from the plate 210, and the product 250 can be used as the probe and mounted on the probe head. Therefore, by combining the processing method of non-laser cutting and the laser cutting process, the probes can be easily manufactured, and the processing error rate between the probes can be reduced by applying the laser cutting.

In addition, fig. 4 is a schematic perspective view illustrating a plurality of finished products 250 laser-cut from the sheet 210 of fig. 3. In the present embodiment, the user can laser cut the finished product 250 from the plate 210 by the above simple and convenient laser cutting method, and repeat the above steps, as shown in fig. 4, so that the user can laser cut a plurality of finished products 250 from the plate 210 more efficiently.

In practical applications, as described above, the finished product 250 can be used as a probe and mounted on a probe head, wherein a portion of the finished product 250, which is originally composed of the first sub-plate 211, such as a pin tail of the probe, can be engaged with the probe head as the stop structure 251, and a portion of the finished product 250, which is originally composed of the second sub-plate 212, can be used as a pin body 252 of the probe.

Please refer to fig. 5 to 6. Fig. 5 is a top view illustrating a plate 210 according to another embodiment of the invention. Fig. 5 is a schematic perspective view illustrating the plate 210 of fig. 5. In the present embodiment, as shown in fig. 5 to 6, the plate material 210 further includes a third sub-plate material 213, the second sub-plate material 212 is located between the first sub-plate material 211 and the third sub-plate material 213, the third sub-plate material 213 has a third thickness TK3 along the second direction D2, and the third thickness TK3 is greater than the second thickness TK 2. In other words, the third sub-sheet 213 of the sheet 210 is thicker than the second sub-sheet 212.

In this embodiment, the method S100 further includes the following steps (it should be understood that the steps mentioned in this embodiment, except for the specific sequence, can be performed simultaneously or partially simultaneously, with the sequence being adjusted according to the actual requirement):

(6) a second specific length SL2 is laser cut between the second sub-sheet 212 and the third sub-sheet 213 along a fourth path R4 (step S160). In the present embodiment, as shown in fig. 5 to 6, the fourth path R4 is parallel to the third direction D3, and the fourth path R4 connects with the third path R3. That is, the laser cutting along the fourth path R4 may be substantially continuous with the laser cutting of the third path R3.

(7) The third sub-sheet 213 of the sheet 210 is laser cut along the fifth path R5 (step S170). In the present embodiment, as shown in fig. 5 to 6, the fifth path R5 is parallel to the first direction D1, and the fifth path R5 connects the fourth path R4. That is, the laser cutting along the fifth path R5 can be substantially continuous with the laser cutting of the fourth path R4.

Further, as shown in fig. 5-6, the user can laser cut the sheet material 210 along the fourth path R4 'and the fifth path R5' in the manner described above. It should be noted that the fourth path R4 and the fourth path R4 'are in opposite directions, and the length of the laser cut along the fourth path R4' may also be a second specific length SL2, but the invention is not limited thereto.

Referring to fig. 7, a perspective view of a plurality of finished products 250 laser-cut from the sheet 210 of fig. 6 is shown. In the present embodiment, the user can laser cut the finished product 250 from the plate 210 by the above simple and convenient laser cutting method, and repeat the above steps, as shown in fig. 7, so that the user can laser cut a plurality of finished products 250 from the plate 210 more efficiently. Similarly, the final product 250 may be used as a probe and mounted to a probe head (not shown). It should be noted that, in practical applications, the first sub-plate 211, the second sub-plate 212 and the third sub-plate 213 of the plate 210 at least have a common plane perpendicular to the second direction D2, so that a cross section of the plate 210 perpendicular to the third direction D3 can form a "concave" shape, and the finished product 250 in this embodiment also has a "concave" shape side surface.

Furthermore, according to the actual requirement of the finished product 250, the second specific length SL2 may be the same as the first specific length SL1, so that the portion of the finished product 250 formed by the first sub-board 211, such as the tail of the probe, has the same width in the third direction D3 as the portion of the finished product 250 formed by the third sub-board 213, such as the tip of the probe. On the other hand, according to the actual requirement of the finished product 250, the second specific length SL2 may be different from the first specific length SL1, so that the part of the finished product 250 formed by the first sub-plate 211, for example, the tail of the probe, and the part of the finished product 250 formed by the third sub-plate 213, for example, the tip of the probe, have different widths in the third direction D3.

Please refer to fig. 8 to 9. Fig. 8 is a schematic perspective view illustrating a plate 210 according to yet another embodiment of the invention. Fig. 9 is a perspective view illustrating a plurality of finished products 250 laser-cut from the sheet 210 of fig. 8. In the present embodiment, as shown in fig. 8 to 9, the second sub-plate 212, the first sub-plate 211 and the third sub-plate 213 of the plate 210 do not have a common plane perpendicular to the second direction D2, so that the cross section of the plate 210 perpendicular to the third direction D3 can form an "H" shape, and the finished product 250 in the present embodiment also has a side surface of the "H" shape. Further, by the above-mentioned laser cutting paths R1, R2, R3, R4, R5, R1 ', R2', R3 ', R4', R5 ', the central portion of the finished product 250, for example, the needle body of the probe, has a wide width in the third direction D3, that is, the distance between the third paths R3, R3' is greater than the distance between the first paths R1, R1 ', and is greater than the distance between the fifth paths R5, R5', and thus, the finished product 250 has a cross-like shape as viewed from the second direction D2.

Further, in the present embodiment, as shown in fig. 8 to 9, the distance between the third paths R3 and R3' is greater than the second thickness TK2, so that when the two ends of the product 250 are pressed against each other, the central portion of the product is biased to bend around the third direction D3 or the second direction D2. In this way, when the plurality of finished products 250 are used as probes and mounted on the probe head, and the two ends of the plurality of probes are pressed simultaneously, the plurality of probes are bent around the third direction D3, so as to avoid the probes from being released from each other due to the bending.

Referring to fig. 10, a flow chart of a method S500 for manufacturing a probe according to an embodiment of the invention is shown. As shown in fig. 10, the method S500 of the probe manufacturing method of the present embodiment includes the following steps (it should be understood that the steps mentioned in the present embodiment, except for the specific sequence, can be performed simultaneously or partially simultaneously, with the sequence being adjusted according to actual needs):

(1) a recess P is formed in the plate 610 (step S510). Please refer to fig. 11 to 12. Fig. 11 is a top view showing the plate material 610 of fig. 10. Fig. 12 is a schematic perspective view illustrating the plate 610 of fig. 11. Specifically, as shown in fig. 11 to 12, the plate 610 has a first sub-plate 611 and a second sub-plate 612 connected along a first direction D1, the first sub-plate 611 has a first thickness TK1 along a second direction D2, the second direction D2 is perpendicular to the first direction D1, the second sub-plate 612 has a second thickness TK2 along a second direction D2, and the first thickness TK1 is different from the second thickness TK 2. For example, in the present embodiment, the first sub-plate 611 of the plate 210 is thicker than the second sub-plate 612, and the second sub-plate 612 corresponds to the recess P.

(2) The plate 610 is fixed on a machine (not shown) (step S520).

(3) The sheet material 610 is laser cut, for example, a first sub-sheet material 611 of the sheet material 610 is laser cut along a first path R1 (step S530). In the present embodiment, as shown in fig. 11 to 12, the first path R1 is parallel to the first direction D1.

(4) The second sub-sheet 612 of the sheet 610 is laser cut along the second path R2 (step S540). In the present embodiment, as shown in fig. 11 to 12, the second path R2 is an arc. Specifically, the second path R2 connects the first path R1. That is, the laser cut along the second path R2 may be substantially continuous with the laser cut of the first path R1.

In this embodiment, for the plate material 610 with different thicknesses, i.e., the first thickness TK1 and the second thickness TK2, a user can use the connected laser cutting paths, i.e., the first path R1 and the second path R2, to laser cut the plate material 610 in a simple and convenient manner.

In practical applications, the step of forming the concave portion P on the plate 610 can adopt, but is not limited to, the following three processing methods without laser cutting:

(1.1) first, a photoresist is coated on the plate 610 at a position corresponding to the first sub-plate 611, and then the plate 610 is wet-etched. The first sub plate 611 is not wet-etched due to the blocking of the photoresist. In contrast, the portion not covered by the photoresist, i.e., the portion corresponding to the second sub-plate 612, is removed by wet etching, so that the plate 610 forms the recess P corresponding to the second sub-plate 612. Subsequently, the photoresist is removed.

(1.2) removing the portion of the plate material 610 corresponding to the position of the second sub-plate material 612 by mechanical cutting, so that the plate material 610 forms the depression P corresponding to the position of the second sub-plate material 612. Specifically, the mechanical cutting may be milling cutting, but the invention is not limited thereto.

(1.3) performing sand blasting on the surface of the plate material 610 corresponding to the second sub-plate material 612 to form the recessed portions P in the plate material 610 at positions corresponding to the second sub-plate material 612.

In addition, fig. 13 is a schematic perspective view illustrating a plurality of finished products 650 laser-cut from the sheet 610 of fig. 12. In the present embodiment, the user can laser cut the finished product 650 from the plate 610 by the above simple and convenient laser cutting method, and repeat the above steps, as shown in fig. 13, so that the user can laser cut a plurality of finished products 650 from the plate 610 more efficiently.

In practical applications, the finished product 650 can be used as a probe and mounted on a probe head (not shown), wherein a portion of the finished product 650, which is originally composed of the first sub-plate 611, such as a pin tail of the probe, can be used as the stop structure 651 to be engaged with the probe head, and a portion of the finished product 650, which is originally composed of the second sub-plate 612, can be used as a pin body 652 of the probe.

Please refer to fig. 14-15. Fig. 14 is a top view illustrating a plate 610 according to another embodiment of the invention. Fig. 15 is a perspective view illustrating the plate 610 of fig. 14. In the present embodiment, as shown in fig. 14 to 15, the plate 610 further includes a third sub-plate 613, the second sub-plate 612 is located between the first sub-plate 611 and the third sub-plate 613, the third sub-plate 613 has a third thickness TK3 along the second direction D2, and the third thickness TK3 is different from the second thickness TK 2. For example, in the present embodiment, the second thickness TK2 is thinner than the first thickness TK1 and the third thickness TK 3.

In this embodiment, the method S500 further includes the following steps (it should be understood that the steps mentioned in this embodiment, except for the specific sequence, can be performed simultaneously or partially simultaneously, with the sequence being adjusted according to the actual requirement):

(5) the third sub-sheet 613 of the sheet 610 is laser cut along the third path R3 (step S550). In the present embodiment, as shown in fig. 14 to 15, the third path R3 is parallel to the first direction D1 and is offset from the first path R1. Specifically, the third path R3 connects to the second path R2. That is, the laser cutting along the third path R3 can be substantially continuous with the laser cutting along the second path R2, i.e., the laser cutting for the sheet material 610 can be performed continuously along the first path R1, the second path R2 and the third path R3.

In this way, in the present embodiment, for the plate material 610 with different thicknesses, i.e., the first thickness TK1, the second thickness TK2 and the third thickness TK3, a user can use the connected laser cutting paths, i.e., the corresponding first path R1, the second path R2 and the third path R3, to laser cut the plate material 610 in a simple and convenient manner.

Referring to fig. 16, a plurality of finished products 650 laser-cut from the sheet 610 of fig. 15 are shown in a perspective view. In the present embodiment, the user can laser cut the finished product 650 from the plate 610 by the above-mentioned simple and convenient laser cutting method, and repeat the above steps, as shown in fig. 16, the user can laser cut a plurality of finished products 650 from the plate 610 more efficiently.

In the present embodiment, as shown in fig. 15 to 16, the second sub plate member 612, the first sub plate member 611 and the third sub plate member 613 of the plate member 610 do not have a common plane perpendicular to the second direction D2, and the second thickness TK2 is thinner than the first thickness TK1 and the third thickness TK3, so that the plate member 610 may have an "H" shape in a cross-section parallel to the first direction D1 and the second direction D2, and the product 650 in the present embodiment also has an "H" shaped side surface.

Please refer to fig. 17-18. Fig. 17 is a schematic perspective view illustrating a plate 610 according to still another embodiment of the invention. Fig. 18 is a perspective view illustrating a plurality of finished products 650 laser-cut from the sheet 610 of fig. 17. In the present embodiment, as shown in fig. 17 to 18, the second sub plate material 612, the first sub plate material 611 and the third sub plate material 613 of the plate material 610 do not have a common plane perpendicular to the second direction D2, and the second thickness TK2 is thicker than the first thickness TK1 and the third thickness TK3, that is, the first sub plate material 611 and the third sub plate material 613 respectively correspond to the recessed portions P, so that the plate material 610 can form a cross-section parallel to the first direction D1 and the second direction D2 into a cross shape, and the finished product 650 in the present embodiment also has a side surface of a cross shape. In this way, the portion of the finished product 250 formed by the second sub-plate 612 can be used as the stopping structure 651 to be engaged with the probe head, such as the needle tail of the probe formed by the first sub-plate 611, the needle body of the probe formed by the second sub-plate 612, and the needle tip of the probe formed by the third sub-plate 613. The curved direction of the probe can be effectively preset by the laser arc cutting of the second sub-plate 612, so as to avoid the mutual contact and collision.

Referring to fig. 19 and 20, a plate 710 is formed with recessed portions at a first sub-plate 711 and a third sub-plate 713, the recessed portions are respectively located at two sides of the first sub-plate 711 and the third sub-plate 713, and the middle second sub-plate 712 has a thicker thickness in a second direction D2 and is cut along a laser cutting path 714 to form a finished product 750, so that the first sub-plate 711 is used to form a tail of the probe, the second sub-plate 712 is used to form a body of the probe, and the third sub-plate 713 is used to form a tip of the probe, and the probe can be bent in a predetermined direction, for example, the bending direction is determined by the difference between the thickness and the width of the body, so as to effectively preset the bending direction of the probe, and avoid mutual contact and collision.

Referring to fig. 21 and 22, a plate 810 is formed with a single-sided recess at a first sub-plate 811 and a third sub-plate 813, and a middle second sub-plate 812 is relatively thick in a second direction D2, and is cut along a laser cutting path 814 to form a finished product 850, so that the first sub-plate 811 is used to form a needle tail of the probe, the second sub-plate 812 is used to form a needle body of the probe, and the third sub-plate 813 is used to form a needle tip of the probe, and the probe can be bent in a predetermined direction, for example, the bending direction is determined by the difference between the thickness and the width of the needle body, so as to effectively preset the bending direction of the probe, and avoid the mutual contact and collision.

In addition, referring to fig. 23 and fig. 24, a plate 910 is formed with recesses on two sides on a second sub-plate 912, and a first sub-plate 911 and a third sub-plate 913 have a greater thickness in a second direction D2 than a middle second sub-plate 812, and are cut by a laser cutting path 914 to form a finished product 950, so that the first sub-plate 911 is used to form a tail of a probe, the second sub-plate 912 is used to form a body of the probe, and the third sub-plate 913 is used to form a tip of the probe, and the probe can be bent in a predetermined direction, for example, around a third direction D3, to effectively preset the bending direction of the probe, thereby avoiding the contact and collision.

The plate 910 is a composite plate, such as a core 922, an inner cladding 924 formed on the outer side of the core 922, and a protection layer 926 formed on the surface of the inner cladding 924.

In some embodiments, the core 922 may be formed of a material selected from nickel, tungsten, cobalt, palladium, or alloys thereof, such as nickel manganese, nickel cobalt, nickel palladium, or nickel tungsten.

In some embodiments, core 922 may also be formed of a non-conductive material, such as a silicon core.

In some embodiments, the inner cladding 924 may be formed from a conductive material selected from copper, silver, gold, or alloys thereof.

In some embodiments, the protection layer 926 may be formed of a conductive metal selected from rhodium, gold, platinum, palladium, or an alloy thereof, and may also be a palladium-cobalt alloy, without departing from the scope of the present invention.

Referring further to fig. 25 and 26, a plate 960 is formed with two side recesses in the first and third sub-plates 961 and 963, respectively, and the second sub-plate 962 is thicker than the first and third sub-plates 961 and 963 in the second direction D2, and is cut by the laser cutting path 964 to form a finished product 990, so that the first sub-plate 961 is used to form the tail of the probe, the second sub-plate 962 is used to form the body of the probe, and the third sub-plate 963 is used to form the tip of the probe, and the probe can be bent in a predetermined direction, for example, bent around the second direction D2, so as to effectively preset the bending direction of the probe, and avoid the mutual contact and collision.

The plate 960 is a composite plate, such as a core 972, an inner cladding 974 formed on the outer side of the core 972, and a protection layer 976 formed on the surface of the inner cladding 974.

In some embodiments, core 972 may be formed from a material selected from nickel, tungsten, cobalt, palladium, or alloys thereof, such as nickel manganese, nickel cobalt, nickel palladium, or nickel tungsten.

In some embodiments, core 972 may also be formed from a non-conductive material, such as a silicon core.

In some embodiments, the inner cladding 974 may be formed of a conductive material selected from copper, silver, gold, or alloys thereof.

In some embodiments, the protection layer 976 may be formed of a conductive metal selected from rhodium, gold, platinum, palladium, or an alloy thereof, and may also be a palladium-cobalt alloy, without departing from the scope of the present invention.

In summary, the technical solutions disclosed in the above embodiments of the present invention have at least the following advantages:

(1) the user carries out laser cutting aiming at parts with different thicknesses on the plate, and can cut out a finished product from the plate by laser in a simple and convenient laser cutting mode to be used as the probe, and the user can more effectively cut out a plurality of finished products from the plate by laser by repeating the steps, so that the production of the probe becomes more efficient, and the cost is lower.

(2) By combining the processing method of non-laser cutting and the laser cutting process, probes with different thicknesses can be easily manufactured, and the application of laser cutting can further reduce the processing error rate between the probes.

(3) The distance between the plates is cut by laser along the third path is larger than the second thickness of the plates, so that the finished product has a cross shape. When the ends of the finished product are pressed against each other, the central portion of the finished product is biased to bend in a predetermined direction. In this way, when the plurality of finished products are used as probes and installed on the probe head, and the two ends of the plurality of probes are pressed relatively at the same time, the plurality of probes are bent around the predetermined direction, so as to avoid the situation that the probes are knocked off due to the bending under pressure.

The above description is only an exemplary embodiment of the present invention, and is not intended to limit the scope of the present invention. Any equivalent changes and modifications that can be made by one skilled in the art without departing from the spirit and principles of the invention should fall within the protection scope of the invention.